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2023
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Invention
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Polishing apparatus.
In a scheme in which a top ring is held to an end portion of a swing arm, t... |
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2022
|
Invention
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Polishing apparatus and polishing method.
A polishing apparatus and a polishing method capable o... |
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Invention
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Load adjustment system and load adjustment method. This load adjustment system comprises: a bevel... |
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Invention
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Hydrogen production method and hydrogen production device. 2122 (°C) of the solid carbon capture ... |
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Invention
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Substrate processing method and substrate processing device. The present invention pertains to a ... |
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Invention
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Substrate processing apparatus. The present invention relates to a substrate processing apparatus... |
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Invention
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Substrate processing device. The present invention relates to a substrate processing device that ... |
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Invention
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Substrate suction member, elastic seal assembly, top ring, and substrate processing device. The p... |
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Invention
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Fluid machine system, information processing device, and information processing method. This flui... |
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Invention
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Polishing device and polishing method. The present invention relates to a polishing device and a ... |
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Invention
|
Product removal apparatus, treatment system, and product removal method.
The present disclosure ... |
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Invention
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Machine learning device, pump performance prediction device, inference device, pump shape design ... |
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Invention
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Hand, transfer apparatus, and substrate processing apparatus.
A hand for holding the substrate i... |
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Invention
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Apparatus for plating and method of plating.
One object of the present disclosure is to improve ... |
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Invention
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Elastic membrane and method of manufacturing elastic membrane.
An elastic membrane having a phys... |
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Invention
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Integrally portable purge container and method for using same. The present invention provides a p... |
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Invention
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Substrate processing method and substrate processing device. The present invention relates to a s... |
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Invention
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Substrate processing method. The present invention relates to a substrate processing method for s... |
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Invention
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Substrate processing device and substrate processing method. The present invention relates to a s... |
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Invention
|
Polishing device. The present invention relates to a polishing device. The polishing device compr... |
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Invention
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Substrate processing method and substrate processing apparatus. The present invention relates to ... |
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Invention
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Information processing device, inference device, machine learning device, information processing ... |
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Invention
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Substrate cleaning device, substrate processing device, and maintenance method for substrate clea... |
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Invention
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Fixed bearing structure and motor pump. The present invention relates to a fixed bearing structur... |
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Invention
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Motor pump. The present invention relates to a motor pump. The motor pump (MP) comprises a first ... |
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Invention
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Motor pump. The present invention relates to a motor pump. The motor pump (MP) comprises a rotor ... |
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Invention
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Impeller and pump. The present invention pertains to an impeller and a pump. Impeller (2) compris... |
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G/S
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Sensors [measurement apparatus], other than for medical use; measuring or testing machines and in... |
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G/S
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Sensors [measurement apparatus], other than for medical use;
measuring or testing machines and i... |
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2021
|
Invention
|
Plating apparatus. The purpose of the present invention is to suppress the adhesion of a wafer to... |
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Invention
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Plating device, and plating device production method. The present invention facilitates maintenan... |
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Invention
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Plating device and substrate-cleaning method. The purpose of the present invention is to efficien... |
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Invention
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Plating device and substrate cleaning method. Provided is a technique for achieving both of the c... |
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Invention
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Plating device and contact cleaning method. Provided is a plating module comprising: a plating ve... |
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Invention
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Plating device. The present invention provides a technology that is capable of suppressing the de... |
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Invention
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Plating apparatus. The purpose of the present invention is to suppress variations in the supply o... |
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Invention
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Plating method and plating apparatus. One purpose of the present invention is to provide technolo... |
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Invention
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Plating method. The present invention provides a technique that is capable of preventing the degr... |
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Invention
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Pre-wet treatment method. Proposed is a pre-wet treatment method whereby a pre-wet treatment can ... |
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G/S
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Chemicals for use in industry Metalworking machines and metalworking machine tools; Chemical proc... |
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Invention
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Plating apparatus. The present invention provides a technology with which it is possible to achie... |
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Invention
|
Plating device and rinse treatment method. Provided is a technique capable of preventing a large ... |
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Invention
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Plating method and plating apparatus. One purpose of the present invention is to reduce the time ... |
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G/S
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Chemicals for use in industry Removal of radiation rays, namely, radiation area decontamination s... |
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Invention
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Retaining ring for substrate |
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|
Invention
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Elastic membrane for semiconductor wafer polishing apparatus |
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|
Invention
|
Plating apparatus and air bubble removing method.
Provided is a technique that allows a removal ... |
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Invention
|
Plating apparatus.
Provided is a technique that ensures suppressed invasion of particles generat... |
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G/S
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Recorded computer programs for use in database management, use as a spread sheet, word processing... |
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G/S
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Computer programs; computer software; computer software,
recorded; electronic machines, apparatu... |
|
|
Invention
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Polishing method, polishing apparatus, and computer-readable storage medium storing program.
Th... |
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Invention
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Plating apparatus and film thickness measuring method for substrate.
Provided is a technique tha... |
|
|
Invention
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Substrate processing apparatus and substrate processing method.
A substrate processing apparatus... |
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G/S
|
vibration sensors, not for medical use; temperature sensors, not for medical use; pressure sensor... |
|
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Invention
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Polishing head and polishing apparatus.
The present invention relates to a polishing head for pr... |
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2020
|
Invention
|
Apparatus for plating and method of controlling apparatus for plating.
An object is to reduce th... |
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G/S
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Electroplating machines; chemical-mechanical polishing (CMP) machines for use in the manufacture ... |
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G/S
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Electroplating machines; chemical-mechanical polishing (CMP)
machines for use in the manufacture... |
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G/S
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Computer programs; Computer software; Computer software, recorded; Electronic machines, apparatus... |
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G/S
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Semiconductor manufacturing machines; device for securing semiconductor wafers to machines when b... |
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G/S
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Construction machines and apparatus, namely, dredging machines; Loading-unloading machines; Chemi... |
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G/S
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Ozone water generators. |
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G/S
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Rotary pumps, suction pumps, gear pumps, screw pumps, regenerative pumps, controlled volute pumps... |
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G/S
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Repair or maintenance of integrated circuits manufacturing machines and systems; repair or mainte... |
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G/S
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Repair or maintenance of integrated circuits manufacturing
machines and systems; repair or maint... |
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G/S
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Electric pumps |
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2019
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G/S
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Repair or maintenance of integrated circuits manufacturing machines and systems; Repair or mainte... |
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2018
|
G/S
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Chemical mechanical polishing machines used for
semiconductor wafers. |
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G/S
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Pumps [machines]; feed pumps; sump pumps; vacuum pumps
[machines]; high pressure pumps; electric... |
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G/S
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Pumps, namely, volute pumps, axial-flow pumps, mixed-flow pumps, vortex pumps, gear pumps, submer... |
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2017
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G/S
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Pumps [not for specified purposes]; feed pumps; drainage pumps; vacuum pumps [not for specified p... |
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G/S
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Dredging machines; conveyors and screw conveyors; chemical mechanical polishing systems for polis... |
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2016
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G/S
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Metalworking machines and tools; Construction machines and apparatus; Loading-unloading machines ... |
|
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G/S
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Metalworking machines and tools; construction machines and
apparatus; loading-unloading machines... |
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G/S
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pump impellers |
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2015
|
G/S
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Pump impellers. |
|
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G/S
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pump impellers. |
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2013
|
G/S
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Chemical-mechanical polishing machines used for semiconductor wafers |
|
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G/S
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Chemical-mechanical polishing machines used for
semiconductor wafers. |
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2006
|
G/S
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Chemicals, namely, chemical agents, namely, synthetic organic polymer coagulants, adsorbents, nam... |
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G/S
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[ Chemicals for use in industry and science; plant growth regulating preparations; fertilizers; c... |
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G/S
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Chemicals; adhesives (not for stationery or household
purposes); plant growth regulating prepara... |
