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2023
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Invention
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Polishing apparatus.
A polishing apparatus which can efficiently polish an entirety of a back su... |
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Invention
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Substrate cleaning device and method of cleaning substrate.
A substrate cleaning device includes... |
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Invention
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Substrate clamping apparatus.
A substrate clamping apparatus includes a substrate holding part w... |
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Invention
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Information processing apparatus, information processing system, information processing method, p... |
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Invention
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Substrate polishing apparatus and substrate polishing method.
To planarize a substrate having ir... |
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Invention
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Output signal processing circuit for eddy current sensor and output signal processing method for ... |
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Invention
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Pre-wet module, deaerated liquid circulation system, and pre-wet method.
A preprocess is efficie... |
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Invention
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Top ring and substrate processing device. Provided is a top ring with which it is possible to imp... |
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Invention
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Output signal processing device for eddy-current sensor.
A retainer holds reference data for ide... |
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Invention
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Exhaust gas treatment apparatus.
An exhaust-gas treatment apparatus capable of efficiently makin... |
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Invention
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Polishing apparatus.
A polishing apparatus 1 includes a control device 90. The control device 90... |
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Invention
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Method of detecting abnormality in measuring of film thickness of workpiece, optical film-thickne... |
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Invention
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Data processing system, data collection device, physical quantity measurement device, data proces... |
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Invention
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Substrate processing apparatus and protective layer forming method.
The present disclosure provi... |
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Invention
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Detection device. This detection device (1) comprises: a detection unit (2) attached to an appara... |
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Invention
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Threshold value setting device, abnormality determination device, threshold value setting method,... |
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Invention
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Polishing head system and polishing method.
A polishing-head system capable of precisely control... |
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Invention
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Hearth component, hearth component production method. This hearth component is provided with an i... |
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Invention
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Information processing apparatus and machine learning apparatus.
An information processing appar... |
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Invention
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Gas solution supply apparatus.
There is provided a gas solution supply apparatus capable of prev... |
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Invention
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Graph display method for polishing device, and computer program. The present invention enables da... |
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Invention
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Substrate processing apparatus and non-transitory computer readable medium.
A control device of ... |
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Invention
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Bearing apparatus and laser apparatus comprising bearing apparatus.
An object of the invention i... |
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Invention
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Polishing apparatus.
A polishing apparatus is disclosed, which is capable of heating and maintai... |
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Invention
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Information processing device, machine learning device, information processing method, and machin... |
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Invention
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Filler application device. The present invention relates to a filler application device that appl... |
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Invention
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Data processing system, physical quantity measuring device, data collection device, data processi... |
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Invention
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Information processing device, inference device, machine learning device, information processing ... |
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Invention
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Data processing system, data collection device, data management device, data processing method, d... |
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P/S
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Pump impellers |
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Invention
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Data processing device, physical quantity measurement device, data processing system, and data pr... |
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Invention
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Data processing device, physical quantity measuring device, data processing system, and data proc... |
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Invention
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Magnetic bearing apparatus.
A magnetic bearing apparatus capable of correcting inclination of a ... |
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Invention
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Processing system, pad transporting apparatus, liquid-receiving apparatus, and polishing apparatu... |
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Invention
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Surface property measuring system, surface property measuring method, polishing apparatus, and po... |
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Invention
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Elastic membrane |
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2022
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Invention
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Substrate state measurement device, plating device, and substrate state measurement method. To me... |
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Invention
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Substrate holder, plating device, and substrate positioning method. The present disclosure provid... |
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Invention
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Plating device and plating method. A plating device comprising: a plating tank configured so as t... |
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Invention
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Pre-wet module. The present invention achieves a small pre-wet module that is capable of performi... |
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Invention
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Plating method and plating apparatus. A plating method for performing a plating process on a subs... |
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Invention
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Am apparatus.
The present disclosure provides a structure for replenishing a powder material to ... |
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P/S
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Sensors [measurement apparatus], other than for medical use; measuring or testing machines and in... |
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P/S
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Vibration, temperature and current sensors, other than for medical use; measuring and testing mac... |
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P/S
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Sensors [measurement apparatus], other than for medical use;
measuring or testing machines and i... |
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Invention
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Polishing apparatus and polishing method.
The present invention relates to a polishing apparatus... |
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Invention
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Surface property measuring apparatus for polishing pad, surface property measuring method for pol... |
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2021
|
Invention
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Substrate cleaning apparatus and substrate cleaning method.
A substrate cleaning apparatus inclu... |
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Invention
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Cleaning apparatus for cleaning member, cleaning method for cleaning member, and substrate cleani... |
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Invention
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Ded nozzle for use with an am apparatus and adapter detachably attachable to a ded nozzle.
The p... |
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Invention
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Substrate processing apparatus and substrate processing method.
To suppress damage to a surface ... |
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P/S
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Chemicals for use in industry Metalworking machines and metalworking machine tools; Chemical proc... |
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P/S
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Chemicals for use in industry Removal of radiation rays, namely, radiation area decontamination s... |
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Invention
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Prewet module and prewet method.
Efficiency of a cleaning process and a degassing process for a ... |
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P/S
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Recorded computer programs for use in database management, use as a spread sheet, word processing... |
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P/S
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Computer programs; computer software; computer software,
recorded; electronic machines, apparatu... |
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P/S
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vibration sensors, not for medical use; temperature sensors, not for medical use; pressure sensor... |
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Invention
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Substrate holder, apparatus for plating, method of plating and storage medium.
One object of the... |
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2020
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P/S
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Electroplating machines; chemical-mechanical polishing (CMP) machines for use in the manufacture ... |
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P/S
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Electroplating machines; chemical-mechanical polishing (CMP)
machines for use in the manufacture... |
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P/S
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Computer programs; Computer software; Computer software, recorded; Electronic machines, apparatus... |
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P/S
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Semiconductor manufacturing machines; device for securing semiconductor wafers to machines when b... |
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P/S
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Construction machines and apparatus, namely, dredging machines; Loading-unloading machines; Chemi... |
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P/S
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Ozone water generators. |
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P/S
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Rotary pumps, suction pumps, gear pumps, screw pumps, regenerative pumps, controlled volute pumps... |
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P/S
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Repair or maintenance of integrated circuits manufacturing machines and systems; repair or mainte... |
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P/S
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Repair or maintenance of integrated circuits manufacturing
machines and systems; repair or maint... |
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P/S
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Electric pumps |
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2019
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P/S
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Repair or maintenance of integrated circuits manufacturing machines and systems; Repair or mainte... |
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2018
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P/S
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Chemical mechanical polishing machines used for
semiconductor wafers. |
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P/S
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Pumps [machines]; feed pumps; sump pumps; vacuum pumps
[machines]; high pressure pumps; electric... |
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P/S
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Pumps, namely, volute pumps, axial-flow pumps, mixed-flow pumps, vortex pumps, gear pumps, submer... |
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2017
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P/S
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Pumps [not for specified purposes]; feed pumps; drainage pumps; vacuum pumps [not for specified p... |
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P/S
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Dredging machines; conveyors and screw conveyors; chemical mechanical polishing systems for polis... |
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2016
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P/S
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Metalworking machines and tools; Construction machines and apparatus; Loading-unloading machines ... |
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P/S
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Metalworking machines and tools; construction machines and
apparatus; loading-unloading machines... |
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P/S
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pump impellers |
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2015
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P/S
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Pump impellers. |
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P/S
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pump impellers. |
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2013
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P/S
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Chemical-mechanical polishing machines used for semiconductor wafers |
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P/S
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Chemical-mechanical polishing machines used for
semiconductor wafers. |
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2006
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P/S
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Chemicals, namely, chemical agents, namely, synthetic organic polymer coagulants, adsorbents, nam... |
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P/S
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[ Chemicals for use in industry and science; plant growth regulating preparations; fertilizers; c... |
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P/S
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Chemicals; adhesives (not for stationery or household
purposes); plant growth regulating prepara... |
