KLA-Tencor Corporation

États‑Unis d’Amérique


 
Quantité totale PI 2 671
Quantité totale incluant filiales 2 687 (+ 16 pour les filiales)
Rang # Quantité totale PI 410
Note d'activité PI 3,8/5.0    1 558
Rang # Activité PI 437
Classe Nice dominante Appareils et instruments scienti...

Brevets

Marques

1 551 0
0 4
1 116 0
0
 
Dernier brevet 2021 - Single cell grey scatterometry o...
Premier brevet 1995 - Method and apparatus for optical...
Dernière marque 2018 - KEEP LOOKING AHEAD
Première marque 1997 - KLA TENCOR C A T

Filiales

5 subsidiaries with IP (16 patents, 0 trademarks)

17 subsidiaries without IP

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Industrie (Classification de Nice)

Derniers inventions, produits et services

2021 Invention Single cell grey scatterometry overlay targets and their measurement using varying illumination p...
Invention Topographic phase control for overlay measurement. Metrology tools and methods are provided, whi...
Invention Accuracy improvements in optical metrology. Methods, metrology modules and target designs are pr...
Invention Measurement of overlay error using device inspection system. A method and system for measuring o...
Invention Method of measuring misregistration of semiconductor devices. A method of measuring misregistrat...
Invention Reduction or elimination of pattern placement error in metrology measurements. Metrology methods...
2020 Invention 3d microscope including insertable components to provide multiple imaging and measurement capabil...
Invention Computer assisted weak pattern detection and quantification system. Methods and systems for prov...
Invention Expediting spectral measurement in semiconductor device fabrication. A device and method for exp...
Invention Simultaneous multi-directional laser wafer inspection. Disclosed is apparatus for inspecting a s...
Invention Process monitoring of deep structures with x-ray scatterometry. Methods and systems for estimatin...
Invention Correlating sem and optical images for wafer noise nuisance identification. Disclosed are apparat...
Invention System, method and non-transitory computer readable medium for tuning sensitivities of, and deter...
Invention Measuring thin films on grating and bandgap on grating. Methods and systems disclosed herein can...
Invention Systems and methods for optimizing focus for imaging-based overlay metrology. Methods and system...
Invention Repeater defect detection. Defects from a hot scan can be saved, such as on persistent storage, ...
Invention Method and system for optical three dimensional topography measurement. For three-dimensional to...
Invention Phase filter for enhanced defect detection in multilayer structure. Disclosed are methods and app...
2019 Invention File selection for test image to design alignment. Methods and systems for selecting one or more ...
Invention Encapsulated instrumented substrate apparatus for acquiring measurement parameters in high temper...
Invention Data-driven misregistration parameter configuration and measurement system and method. A data-dri...
Invention Data-driven misregistration parameter configuration and measurement system and method. A data-dr...
Invention Fab management with dynamic sampling plans, optimized wafer measurement paths and optimized wafer...
Invention Die screening using inline defect information. Embodiments herein include methods, systems, and a...
Invention Misregistration measurements using combined optical and electron beam technology. A misregistrati...
Invention Measurement library optimization in semiconductor metrology. Methods and systems for optimizing a...
Invention Dynamic amelioration of misregistration measurement. A dynamic misregistration measurement amelio...
Invention Dynamic amelioration of misregistration measurement. A dynamic misregistration measurement ameli...
Invention Boron-based capping layers for euv optics. Disclosed herein are optical elements and methods for...
Invention Method for measuring and correcting misregistration between layers in a semiconductor device, and...
Invention Method of measuring misregistration of semiconductor devices. A method of measuring misregistrati...
Invention Moiré target and method for using the same in measuring misregistration of semiconductor devices....
Invention Multi-sensor tiled camera with flexible electronics for wafer inspection. Sensor units can be dis...
Invention Vacuum hold-down apparatus for flattening bowed semiconductor wafers. Vacuum hold-down apparatus...
Invention Vacuum hold-down apparatus for flattening bowed semiconductor wafers. Vacuum hold-down apparatus ...
Invention Scatterometry modeling in the presence of undesired diffraction orders. A metrology system may r...
Invention Methods and systems for co-located metrology. Methods and systems for performing co-located measu...
Invention Semiconductor metrology based on hyperspectral imaging. Methods and systems for performing semico...
Invention Unsupervised defect segmentation. An inspection system may receive inspection datasets from a de...
2018 Invention Differential imaging for single-path optical wafer inspection. Methods and systems for enhanced d...
P/S Computer hardware; computer hardware and software for testing, inspecting, characterizing, and pr...
Invention Creating and tuning a classifier to capture more defects of interest during inspection. Defects o...
Invention Overlay measurement using multiple wavelengths. A method of determining overlay (“OVL”) in a patt...
Invention Arbitrary wavefront compensator for deep ultraviolet (duv) optical imaging system. Disclosed is a...
Invention Photocathode emitter system that generates multiple electron beams. The system includes a photoca...
2014 Invention Reflective pupil relay system. Methods and systems for relaying an optical image using a cascade ...
1997 P/S Instruments for testing and inspecting physical and electrical properties of semiconductors; comp...