KLA-Tencor Corporation

United States of America


 
Total IP 2,566
Total IP incl. subs 2,577 (+ 11 for subs)
Total IP Rank # 468
IP Activity Score 3.3/5.0    379
IP Activity Rank # 1,896
Dominant Nice Class Scientific and electric apparatu...

Patents

Trademarks

1,448 0
0 4
1,114 0
0
 
Last Patent 2023 - Reduction or elimination of patt...
First Patent 1995 - Method and apparatus for optical...
Last Trademark 2018 - KEEP LOOKING AHEAD
First Trademark 1997 - KLA TENCOR

Subsidiaries

5 subsidiaries with IP (11 patents, 0 trademarks)

17 subsidiaries without IP

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Industry (Nice Classification)

Latest Inventions, Goods, Services

2022 Invention Reduction or elimination of pattern placement error in metrology measurements. Metrology methods...
Invention 3d microscope including insertable components to provide multiple imaging and measurement capabil...
Invention Device-like metrology targets. Metrology targets, production processes and optical systems are pr...
Invention Method for measuring and correcting misregistration between layers in a semiconductor device, and...
2021 Invention Machine learning in metrology measurements. Metrology methods and targets are provided, that exp...
Invention Inspection of reticles using machine learning. Disclosed are methods and apparatus for inspectin...
Invention Cross layer common-unique analysis for nuisance filtering. Common events between layers on a semi...
Invention Process monitoring of deep structures with x-ray scatterometry. Methods and systems for estimatin...
Invention Single cell grey scatterometry overlay targets and their measurement using varying illumination p...
Invention Topographic phase control for overlay measurement. Metrology tools and methods are provided, whi...
Invention Accuracy improvements in optical metrology. Methods, metrology modules and target designs are pro...
Invention Measurement of overlay error using device inspection system. A method and system for measuring ov...
Invention Method of measuring misregistration of semiconductor devices. A method of measuring misregistrati...
Invention Reduction or elimination of pattern placement error in metrology measurements. Metrology methods ...
2020 Invention Transmission small-angle x-ray scattering metrology system. Methods and systems for characterizin...
Invention Expediting spectral measurement in semiconductor device fabrication. A device and method for expe...
Invention Simultaneous multi-directional laser wafer inspection. Disclosed is apparatus for inspecting a sa...
Invention Correlating sem and optical images for wafer noise nuisance identification. Disclosed are apparat...
Invention System, method and non-transitory computer readable medium for tuning sensitivities of, and deter...
Invention Measuring thin films on grating and bandgap on grating. Methods and systems disclosed herein can ...
Invention Repeater defect detection. Defects from a hot scan can be saved, such as on persistent storage, r...
Invention Phase filter for enhanced defect detection in multilayer structure. Disclosed are methods and app...
2019 Invention File selection for test image to design alignment. Methods and systems for selecting one or more ...
Invention Data-driven misregistration parameter configuration and measurement system and method. A data-dri...
Invention Fab management with dynamic sampling plans, optimized wafer measurement paths and optimized wafer...
Invention Die screening using inline defect information. Embodiments herein include methods, systems, and a...
Invention Misregistration measurements using combined optical and electron beam technology. A misregistrati...
Invention Measurement library optimization in semiconductor metrology. Methods and systems for optimizing a...
Invention Dynamic amelioration of misregistration measurement. A dynamic misregistration measurement amelio...
Invention Moiré target and method for using the same in measuring misregistration of semiconductor devices....
Invention Vacuum hold-down apparatus for flattening bowed semiconductor wafers. A vacuum hold-down apparatu...
Invention Vacuum hold-down apparatus for flattening bowed semiconductor wafers. Vacuum hold-down apparatus ...
2018 G/S Computer hardware; computer hardware and software for testing, inspecting, characterizing, and pr...
Invention Creating and tuning a classifier to capture more defects of interest during inspection. Defects o...
Invention Overlay measurement using multiple wavelengths. A method of determining overlay (“OVL”) in a patt...
Invention Arbitrary wavefront compensator for deep ultraviolet (duv) optical imaging system. Disclosed is a...
Invention Photocathode emitter system that generates multiple electron beams. The system includes a photoca...
Invention Optical profilometer with color outputs. A system includes a light source configured to selective...
2017 Invention Process control metrology. Methods and systems for estimating values of process parameters based ...
2014 Invention Reflective pupil relay system. Methods and systems for relaying an optical image using a cascade ...
1997 G/S Instruments for testing and inspecting physical and electrical properties of semiconductors; comp...