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2022
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Invention
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Reduction or elimination of pattern placement error in metrology measurements.
Metrology methods... |
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Invention
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3d microscope including insertable components to provide multiple imaging and measurement capabil... |
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Invention
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Device-like metrology targets.
Metrology targets, production processes and optical systems are p... |
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Invention
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Method for measuring and correcting misregistration between layers in a semiconductor device, and... |
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2021
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Invention
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Machine learning in metrology measurements.
Metrology methods and targets are provided, that exp... |
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Invention
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Inspection of reticles using machine learning.
Disclosed are methods and apparatus for inspectin... |
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Invention
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Cross layer common-unique analysis for nuisance filtering.
Common events between layers on a sem... |
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Invention
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Single cell grey scatterometry overlay targets and their measurement using varying illumination p... |
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Invention
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Topographic phase control for overlay measurement.
Metrology tools and methods are provided, whi... |
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Invention
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Accuracy improvements in optical metrology.
Methods, metrology modules and target designs are pr... |
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Invention
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Measurement of overlay error using device inspection system.
A method and system for measuring o... |
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Invention
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Method of measuring misregistration of semiconductor devices. A method of measuring misregistrati... |
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Invention
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Reduction or elimination of pattern placement error in metrology measurements. Metrology methods ... |
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2020
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Invention
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Transmission small-angle x-ray scattering metrology system. Methods and systems for characterizin... |
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Invention
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Expediting spectral measurement in semiconductor device fabrication. A device and method for expe... |
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Invention
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Simultaneous multi-directional laser wafer inspection. Disclosed is apparatus for inspecting a sa... |
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Invention
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Process monitoring of deep structures with x-ray scatterometry. Methods and systems for estimatin... |
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Invention
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Correlating sem and optical images for wafer noise nuisance identification. Disclosed are apparat... |
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Invention
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System, method and non-transitory computer readable medium for tuning sensitivities of, and deter... |
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Invention
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Measuring thin films on grating and bandgap on grating. Methods and systems disclosed herein can ... |
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Invention
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Systems and methods for optimizing focus for imaging-based overlay metrology. Methods and systems... |
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Invention
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Repeater defect detection. Defects from a hot scan can be saved, such as on persistent storage, r... |
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Invention
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Phase filter for enhanced defect detection in multilayer structure. Disclosed are methods and app... |
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2019
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Invention
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File selection for test image to design alignment. Methods and systems for selecting one or more ... |
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Invention
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Data-driven misregistration parameter configuration and measurement system and method. A data-dri... |
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Invention
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Fab management with dynamic sampling plans, optimized wafer measurement paths and optimized wafer... |
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Invention
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Die screening using inline defect information. Embodiments herein include methods, systems, and a... |
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Invention
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Misregistration measurements using combined optical and electron beam technology. A misregistrati... |
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Invention
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Measurement library optimization in semiconductor metrology. Methods and systems for optimizing a... |
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Invention
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Dynamic amelioration of misregistration measurement. A dynamic misregistration measurement amelio... |
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Invention
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Moiré target and method for using the same in measuring misregistration of semiconductor devices.... |
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Invention
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Vacuum hold-down apparatus for flattening bowed semiconductor wafers. A vacuum hold-down apparatu... |
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Invention
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Vacuum hold-down apparatus for flattening bowed semiconductor wafers. Vacuum hold-down apparatus ... |
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Invention
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Methods and systems for co-located metrology. Methods and systems for performing co-located measu... |
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2018
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G/S
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Computer hardware; computer hardware and software for testing, inspecting, characterizing, and pr... |
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Invention
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Creating and tuning a classifier to capture more defects of interest during inspection. Defects o... |
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Invention
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Overlay measurement using multiple wavelengths. A method of determining overlay (“OVL”) in a patt... |
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Invention
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Arbitrary wavefront compensator for deep ultraviolet (duv) optical imaging system. Disclosed is a... |
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Invention
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Photocathode emitter system that generates multiple electron beams. The system includes a photoca... |
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2017
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Invention
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Process control metrology. Methods and systems for estimating values of process parameters based ... |
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2014
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Invention
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Reflective pupil relay system. Methods and systems for relaying an optical image using a cascade ... |
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1997
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G/S
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Instruments for testing and inspecting physical and electrical properties of semiconductors; comp... |
