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2023
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Invention
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Bearing system, lithography system, and method for producing a bearing system.
A bearing system ... |
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Invention
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Process for deposition of an outer layer, reflective optical element for the euv wavelength range... |
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Invention
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Method, apparatus and computer program for processing a surface of an object.
Described are a me... |
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Invention
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Projection exposure apparatus for semiconductor lithography.
A projection exposure apparatus for... |
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Invention
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Imaging optical unit.
An imaging optical unit comprises a plurality of minors for imaging an obj... |
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Invention
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Imaging optical unit.
An imaging optical unit comprises a plurality of mirrors for imaging an ob... |
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Invention
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Optical apparatus, method for setting a target deformation, and lithography system.
An optical a... |
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Invention
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Projection exposure apparatus and method for designing a component of a projection exposure appar... |
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Invention
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Method and device for the post-treatment of a fluoride layer for an optical system for the vuv wa... |
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Invention
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Method and device for producing a fluoridic protective coating for a reflective optical element. ... |
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Invention
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Method and device for forming a fluoride or oxylfluoride layer for an optical element for the vuv... |
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Invention
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Method to obtain information to control a manufacturing process for a stacked semiconductor devic... |
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Invention
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Measuring device and measuring method for measuring a voltage dropping in an optical system, opti... |
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Invention
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Method and device for qualifying a mask of a lithography system.
A method for qualifying a mask ... |
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Invention
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Method for analyzing defects of a structured component.
An analysis of the defects of a structur... |
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Invention
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Device for measuring or processing objects, method for operation. The invention relates to a devi... |
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Invention
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Arrangement, method and computer program product for system-integrated calibration of a facet mir... |
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Invention
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Mirror, in particular for a microlithographic projection exposure apparatus, and method of proces... |
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Invention
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Method for operating a projection exposure system. In a method for operating a projection exposur... |
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Invention
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Mirror device, in particular for a microlithographic projection exposure system, and method for m... |
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Invention
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Optical assembly, optical system and projection exposure apparatus. The invention relates to an o... |
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Invention
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Bipod, optical system and projection exposure apparatus. A bipod (202, 202A, 202B, 204, 206) for ... |
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Invention
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Mirror device, projection objective and method for measuring the temperature of a mirror. The inv... |
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Invention
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Euv reflectometer and measuring method. The invention relates to an EUV reflectometer (EUVR) for ... |
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Invention
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Measuring method for euv reflectometry, and euv reflectometer. In a measuring method which uses a... |
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Invention
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Mirror device and method for measuring the temperature of a mirror. The invention relates to a mi... |
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Invention
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Apparatus for stress-reduced mounting of mems-based micromirrors. An apparatus (61) for stress-re... |
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Invention
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Facet mirror, illumination optical unit, arrangement of a facet mirror, projection exposure appar... |
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Invention
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Method, device, and computer program product for processing a body, in particular a mirror body o... |
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Invention
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Mesh integrity check.
The present application relates to a method for characterizing a shielding... |
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Invention
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Method to adjust an illumination beam path within an illumination optics and illumination optics ... |
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Invention
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Method and apparatus for qualifying a mask for use in lithography.
A method for qualifying a mas... |
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Invention
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Mirror device and method for operating a mirror device. The invention relates to a mirror device ... |
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Invention
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Method for processing a reference element for an interferometer. The invention relates to a metho... |
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Invention
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Computer implemented method for defect detection in an imaging dataset of a wafer, corresponding ... |
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Invention
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Computer implemented method for defect recognition in an imaging dataset of a wafer, correspondin... |
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Invention
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Optical element for a projection exposure system, optical system comprising same and projection e... |
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Invention
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Support device for one or more mems components.
The invention relates to a device (100) for supp... |
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Invention
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Microelectromechanical apparatus with heating element.
The invention relates to a microelectrome... |
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Invention
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Guiding of components of an optical device. The invention relates to a guide arrangement for guid... |
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Invention
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Heating assembly, optical system and method for heating an optical element. The invention relates... |
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Invention
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Holding device for an optical component having an optical surface with a polygonal border and hav... |
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Invention
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Assembly for annealing at least a portion of an optical element. The invention relates to an asse... |
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Invention
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Microelectromechanical device. The invention relates to a microelectromechanical device (110) com... |
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Invention
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Individual mirror of a pupil facet mirror and pupil facet mirror for an illumination optical unit... |
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Invention
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Assembly of an optical system. The invention relates to an assembly of an optical system, compris... |
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Invention
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Micromirror array having a number of individual mirror elements. The invention relates to a micro... |
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Invention
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Method for operating an optical component, and optical component. The invention relates to a meth... |
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Invention
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Cooling device for cooling a position-sensitive component of a lithography system. A cooling devi... |
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Invention
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Fiber strand for a sector heater, sector heater and projection device. The invention relates to a... |
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2022
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G/S
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Recorded data; web applications and server software;
utility, security and cryptographic softwar... |
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G/S
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Recorded data in the nature of downloadable data files featuring semiconductor industry solutions... |
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2020
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G/S
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Focused ion beam workstations, comprising of scanning ion and electron microscopes, computer soft... |
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G/S
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Focused ion beam systems/instruments for scientific
purposes; software for focused ion beam syst... |
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G/S
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Focused ion beam apparatus comprised of computer hardware and recorded computer software to perfo... |
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G/S
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Software platform for the visualization and analysis of
semiconductor image data. |
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G/S
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Apparatus and instruments for aerial photogrammetry of
lithography photomasks in the field of se... |
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2019
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G/S
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Apparatus and instruments for aerial photogrammetry of lithography photomasks in the field of sem... |
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2018
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G/S
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Microscopes and parts thereof; x-ray microscopes and parts thereof; downloadable software used fo... |
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2014
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G/S
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Maintenance, repairing, installation and replacement of
hardware for semiconductor equipment. Ma... |
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G/S
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Installation, maintenance and repair of semiconductor equipment for others; replacement of worn o... |
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G/S
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Server for linking instruments used in the semiconductor field and for analyzing and evaluating d... |
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G/S
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Computer server for linking instruments used in the
semiconductor field and for analyzing and ev... |
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2011
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G/S
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Laser apparatus for correcting the precision in the position
of photomask structures. |
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2009
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G/S
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Optical inspection apparatus, namely, semiconductor mask inspection apparatus and parts thereof |
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G/S
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Mask inspection systems. |
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2008
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G/S
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measuring instruments to measure positions of structures on photomasks; computer software for use... |
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2005
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G/S
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Apparatus for repair of masks used for manufacturing
semi-conductor structures and their parts (... |
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G/S
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mask repair tools used in the semiconductor industry |
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2002
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G/S
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Optical apparatus and instruments, lenses for the semiconductor industry, apparatus and instrumen... |
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1998
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G/S
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Optical apparatus and instruments; objectives. Lighting devices. |
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1997
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G/S
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lens objectives for use with wafersteppers and illuminators |
