Carl Zeiss SMT GmbH

Allemagne

 
Quantité totale PI 2 333
Quantité totale incluant filiales 2 875 (+ 543 pour les filiales)
Rang # Quantité totale PI 476
Note d'activité PI 3,8/5.0    1 334
Rang # Activité PI 532
Parent Carl Zeiss AG
Classe Nice dominante Appareils et instruments scienti...

Brevets

Marques

1 411 11
0 1
897 11
2
 
Dernier brevet 2021 - Method for maintaining a project...
Premier brevet 1999 - Illumination system particularly...
Dernière marque 2020 - CIRGEN
Première marque 1997 - STARLITH

Filiales

3 subsidiaries with IP (543 patents, 0 trademarks)

1 subsidiaries without IP

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Industrie (Classification de Nice)

Derniers inventions, produits et services

2021 Invention Control system, optical system and method. A control system, for example for an optical system, ...
Invention Device and method for determining placements of pattern elements of a reflective photolithographi...
Invention Optical element having a coating for influencing heating radiation and optical arrangement. The ...
Invention Processing image data sets. A method includes obtaining an image data set that depicts semicondu...
Invention Beam splitter for achieving grazing incidence of light. The disclosure relates to an optical sys...
Invention Projection exposure system for semiconductor lithography having an optical arrangement. A projec...
Invention Method for in-situ dynamic protection of a surface and optical assembly. In situ dynamic protect...
Invention Protection device for lines in a projection printing installation for semiconductor lithography. ...
Invention Method and apparatus for repairing defects of a photolithographic mask for the euv range. The in...
Invention Method for in situ protection of an aluminum layer and optical arrangement for the vuv wavelength...
Invention Method for forming nanostructures on a surface and optical element. A method for forming in part...
Invention Method for replacing a mirror in a projection exposure apparatus, and position- and orientation d...
Invention Method for temperature control of a component. A method for temperature control of a component t...
Invention Illumination optical system for projection lithography. An illumination optical system for proje...
Invention Mirror for an illumination optical unit of a projection exposure apparatus comprising a spectral ...
Invention Method for producing an optical element. An optical element (11) has an optical surface (20) with...
Invention Pupil facet mirror, illumination optics and optical system for a projection lithography system. ...
Invention Method for interferometrically measuring a shape of a surface. A method for interferometrically m...
Invention Method for producing reflective optical elements for the euv wavelength range, and reflective opt...
Invention Module for a projection exposure apparatus for semiconductor lithography with a semi-active space...
Invention Optical element, euv lithography system, and method for forming nanoparticles. The invention rela...
Invention Method for operating a deformable mirror, and optical system having a deformable mirror. The inve...
Invention Drive device, optical system and lithography apparatus. DCDCDC) and an AC voltage corresponding t...
Invention Method for maintaining a projection exposure apparatus, service module and arrangement for semico...
Invention Drive device, optical system and lithography apparatus. A drive device (100) for driving an actua...
Invention Facet assembly for a facet mirror. A facet assembly (26) is a constituent part of a facet mirror ...
Invention Method for operating an euv lithography apparatus, and euv lithography apparatus. The invention r...
Invention Method and device for inspecting the surface of a mirror. The invention relates to a method and a...
Invention Assembly, in particular in a microlithographic projection exposure apparatus. mpinpin Lll) of the...
Invention Method and device for drying a component interior. What is disclosed is a method for drying a com...
Invention Method of recording an image using a particle microscope. A method, including: recording plural ...
Invention System and method for inspecting a mask for euv lithography. A pre-classification of potential ma...
Invention Method, actuating device, optical system and lithography system. The invention relates to a metho...
Invention Method of cross-section imaging of an inspection volumes in wafer. The present invention relates ...
Invention Method and apparatus for performing an aerial image simulation of a photolithographic mask. The p...
Invention Optical assembly, projection exposure system, and method for producing an optical assembly. The i...
Invention Method for measuring photomasks. The invention relates to a method for measuring a photomask for...
Invention Reference outgassing probe and reference outgassing system. The invention relates to a reference ...
Invention Particle test system, sampling tape, projection exposure apparatus and method for testing particl...
Invention Measuring device for interferometric shape measurement. The invention relates to a measuring devi...
Invention Optical assembly, projection exposure apparatus and method. The invention relates to an optical a...
Invention Projection exposure apparatus with a thermal manipulator. A microlithographic projection exposure...
Invention Method for operating an optical assembly for euv lithography, and optical assembly for euv lithog...
Invention Projection lens of a lithography system and method for monitoring a projection lens of a lithogra...
Invention Method for producing an optical system. A method for producing an optical system (102, 104), in p...
2020 Invention Projection exposure apparatus for semiconductor lithography. The invention relates to a projectio...
Invention Device for detecting a temperature, system for producing an optical element, and method for produ...
Invention Optical diffraction component for suppressing at least one target wavelength by destructive inter...
Invention Component of an optical system. The invention relates to a component of an optical system compris...
P/S Focused ion beam systems/instruments for scientific purposes; software for focused ion beam syste...
P/S Focused ion beam systems/instruments for scientific purposes; software for focused ion beam syst...
P/S Focused ion beam apparatus comprised of computer hardware and recorded computer software to perfo...
P/S Software platform for the visualization and analysis of semiconductor image data.
Invention Method and apparatus for performing an aerial image simulation of a photolithographic mask. The ...
P/S Apparatus and instruments for aerial photogrammetry of lithography photomasks in the field of se...
2019 P/S Apparatus and instruments for aerial photogrammetry of lithography photomasks in the field of sem...
2018 P/S Microscopes and parts thereof; x-ray microscopes and parts thereof; downloadable software used fo...
2015 P/S Mass spectrometers.
P/S Scientific apparatus, namely, mass spectrometers
2014 P/S Maintenance, repairing, installation and replacement of hardware for semiconductor equipment. Ma...
P/S Installation, maintenance and repair of semiconductor equipment for others; replacement of worn o...
P/S Server for linking instruments used in the semiconductor field and for analyzing and evaluating d...
P/S Computer server for linking instruments used in the semiconductor field and for analyzing and ev...
2012 P/S Microscopes and parts thereof.
2011 P/S Laser apparatus for correcting the precision in the position of photomask structures.
2010 P/S laser equipment used to move registration/reference marks on photomasks for use in fabrication of...
2009 P/S Optical inspection apparatus, namely, semiconductor mask inspection apparatus and parts thereof
P/S Mask inspection systems.
2008 P/S measuring instruments to measure positions of structures on photomasks; computer software for use...
2005 P/S Apparatus for repair of masks used for manufacturing semi-conductor structures and their parts (...
P/S mask repair tools used in the semiconductor industry
2002 P/S Optical apparatus and instruments, lenses for the semiconductor industry, apparatus and instrumen...
1998 P/S Optical apparatus and instruments; objectives. Lighting devices.
1997 P/S lens objectives for use with wafersteppers and illuminators