Abstract

The invention relates to an interferometric measurement device and to an interferometric method for determining the surface topography of a measurement object (1). The essence of the invention is that the light intensities Iqii) of at least one other detector element q of the multi-element detector (6) are also used besides the light intensities Ipii) of this detector element to determine the value zp associated with a detector element p (6b) of the measurement device.

IPC Classes  ?

• G01B 9/02 - Interferometers
• G06T 7/521 - Depth or shape recovery from the projection of structured light

Abstract

The invention relates to a method for interferometric vibration measurement at a plurality of measurement points by means of a measuring laser beam, comprising the method steps of: A. generating the measuring laser beam having a wavelength in the infrared wavelength range and a pilot laser beam having a wavelength in the visible wavelength range; B. deflecting the measuring laser beam and the pilot laser beam by means of a common optical deflection unit, and controlling the deflection unit such that the pilot laser beam is incident on the measurement point; and C. carrying out a vibration measurement by means of the measuring laser beam. The invention is characterized in that an angular deviation between the pilot laser beam and the measuring laser beam is determined and in that, in a correction step B1, between method step B and C, the deflection unit is actuated in order to compensate for the angular deviation between the pilot laser beam and the measuring laser beam.

IPC Classes  ?

• G01H 9/00 - Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means

Abstract

The invention relates to a method for determining the path of a measurement beam of an interferometric measuring device, the method having the method steps: A. recording a plurality of spatially resolved images of the object under measurement; B. creating a three-dimensional model of the object under measurement; C. providing a beam-position image-recording unit and recording at least one spatially resolved beam-position-determining image; D. determining the spatial position and orientation of the beam-position image-recording unit relative to the object under measurement; E. providing a spatial relation between the spatial path of the measurement beam of the interferometric measuring device and the position and orientation of the beam-position image-recording unit; F. determining the spatial path of the measurement beam of the interferometric measuring device relative to the object under measurement. Furthermore, the invention relates to a measuring device for interferometric measurement of an object under measurement.

IPC Classes  ?

• G01B 11/16 - Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
• G01B 11/25 - Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. moiré fringes, on the object

Abstract

The invention relates to a method for determining the path of a measurement beam of an interferometric measuring device comprising the method steps: A. recording a plurality of spatially resolved images of the object under measurement; B. creating a three-dimensional model of the object under measurement; C. providing a measurement-head model; D. creating an association between coordinates in the three-dimensional model of the object under measurement and coordinates in the measurement-head model; E. determining the measurement beam path. The invention also relates to a measuring device for interferometric measurement of an object under measurement.

IPC Classes  ?

• G01B 11/16 - Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
• G01B 11/25 - Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. moiré fringes, on the object

Abstract

The invention relates to an alignment method for a beam-directing unit of an interferometric measuring device for directing a laser beam of a laser beam source towards a plurality of measurement points of a object under measurement, wherein a three-dimensional model of a measurement surface of an object under measurement is created by means of a plurality of spatially resolved images. The invention also relates to a measuring device for carrying out an interferometric measurement by means of laser radiation, having a control unit which is designed to align a beam-directing unit of the measurement device.

IPC Classes  ?

• G01B 11/25 - Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. moiré fringes, on the object
• G01B 11/16 - Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge

Abstract

The invention relates to a device for the optical non-contact oscillation measurement of an oscillating object, comprising a laser Doppler vibrometer that has a laser (1) as the light source for a laser beam, a first beam splitter assembly (S1) for splitting the laser beam into a measuring beam (2) and a reference beam (3), a means (4) for shifting the frequency of the reference beam (3) or of the measuring beam (2) in a defined manner, a second beam splitter assembly (S2, S3) by means of which the measuring beam (2) back-scattered by the oscillating object (6) is merged with the reference beam (3) and superimposed on the same, and a detector (5) for receiving the superimposed measuring and reference beam (7) and for generating a measurement signal, wherein the laser (1) is provided with a polarization filter arranged inside the optical resonator of the laser and the frequency of the dominating mode can be kept constant by a control to the beat signal.

IPC Classes  ?

• G01H 9/00 - Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means