Goods & Services

Electro-optical instruments for use in inspection and measurement of industrial components; Lasers for measuring purposes; Vibration meters; Vibration sensors

Abstract

The invention relates to an interferometric measurement device and to an interferometric method for determining the surface topography of a measurement object (1). The essence of the invention is that the light intensities Iq(zi) of at least one other detector element q of the multi-element detector (6) are also used besides the light intensities Ip(zi) of this detector element to determine the value zp associated with a detector element p (6b) of the measurement device.

IPC Classes  ?

• G01B 11/30 - Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces

Abstract

A method for interferometric vibration measurement at a plurality of measurement points using a measuring laser beam, including A. generating the measuring laser beam having a wavelength in the infrared wavelength range and a pilot laser beam having a wavelength in the visible wavelength range; B. deflecting the measuring laser beam and the pilot, laser beam by a common optical deflection unit, and controlling the deflection unit such that the pilot laser beam is incident on the measurement point; and C. carrying out a vibration measurement using the measuring laser beam. An angular deviation between the pilot laser beam and the measuring laser beam is determined and, in a correction step B 1, between method step B and C, the deflection unit is actuated in order to compensate for the angular deviation between the pilot laser beam and the measuring laser beam.

IPC Classes  ?

• G01H 9/00 - Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
• G01P 3/36 - Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light

Abstract

A method for determining the path of a measurement beam of an interferometric measuring device including the method steps: A. recording a plurality of spatially resolved images of the object under measurement; B. creating a three-dimensional model of the object under measurement; C. providing a measurement-head model; D. creating an association between coordinates in the three-dimensional model of the object under measurement and coordinates in the measurement-head model; E. determining the measurement beam path. A measuring device for interferometric measurement of an object under measurement is also provided.

IPC Classes  ?

• G01H 9/00 - Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
• G01B 11/16 - Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
• G01B 11/25 - Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. moiré fringes, on the object
• G01S 17/58 - Velocity or trajectory determination systems; Sense-of-movement determination systems
• G01S 17/87 - Combinations of systems using electromagnetic waves other than radio waves
• G01S 17/894 - 3D imaging with simultaneous measurement of time-of-flight at a 2D array of receiver pixels, e.g. time-of-flight cameras or flash lidar

Abstract

An alignment method for a beam-directing unit of an interferometric measuring device for directing a laser beam of a laser beam source towards a plurality of measurement points of an object under measurement, wherein a three-dimensional model of a measurement surface of an object under measurement is created by a plurality of spatially resolved images. A measuring device for carrying out an interferometric measurement by laser radiation is also provided, having a controller which is designed to align a beam-directing unit of the measurement device.

IPC Classes  ?

• G01B 9/02055 - Reduction or prevention of errors; Testing; Calibration
• G01S 17/894 - 3D imaging with simultaneous measurement of time-of-flight at a 2D array of receiver pixels, e.g. time-of-flight cameras or flash lidar
• G01B 11/24 - Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
• G01B 11/25 - Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. moiré fringes, on the object
• G01H 9/00 - Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means

Abstract

A method for determining the path of a measurement beam of an interferometric measuring device, includes A. recording a plurality of spatially resolved images of the object under measurement; B. creating a three-dimensional model of the object under measurement; C. providing a beam-position image-recording unit and recording at least one spatially resolved beam-position-determining image; D. determining the spatial position and orientation of the beam-position image-recording unit relative to the object under measurement; E. providing a spatial relation between the spatial path of the measurement beam of the interferometric measuring device and the position and orientation of the beam-position image-recording unit; F. determining the spatial path of the measurement beam of the interferometric measuring device relative to the object under measurement. A measuring device for interferometric measurement of an object under measurement is also provided.

IPC Classes  ?

• G01H 9/00 - Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
• G01B 11/25 - Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. moiré fringes, on the object
• G01S 17/58 - Velocity or trajectory determination systems; Sense-of-movement determination systems
• G01S 17/894 - 3D imaging with simultaneous measurement of time-of-flight at a 2D array of receiver pixels, e.g. time-of-flight cameras or flash lidar

Abstract

The invention relates to an interferometric measurement device and to an interferometric method for determining the surface topography of a measurement object (1). The essence of the invention is that the light intensities Iqii) of at least one other detector element q of the multi-element detector (6) are also used besides the light intensities Ipii) of this detector element to determine the value zp associated with a detector element p (6b) of the measurement device.

IPC Classes  ?

• G01B 9/02 - Interferometers
• G06T 7/521 - Depth or shape recovery from the projection of structured light

Abstract

The invention relates to a method for interferometric vibration measurement at a plurality of measurement points by means of a measuring laser beam, comprising the method steps of: A. generating the measuring laser beam having a wavelength in the infrared wavelength range and a pilot laser beam having a wavelength in the visible wavelength range; B. deflecting the measuring laser beam and the pilot laser beam by means of a common optical deflection unit, and controlling the deflection unit such that the pilot laser beam is incident on the measurement point; and C. carrying out a vibration measurement by means of the measuring laser beam. The invention is characterized in that an angular deviation between the pilot laser beam and the measuring laser beam is determined and in that, in a correction step B1, between method step B and C, the deflection unit is actuated in order to compensate for the angular deviation between the pilot laser beam and the measuring laser beam.

IPC Classes  ?

• G01H 9/00 - Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means

Goods & Services

Optical measurement apparatus, namely laser vibrometers; measuring apparatus; measuring apparatus for non-contact vibration measurements; control and evaluation software for the aforesaid measuring apparatus.

Goods & Services

(1) Optical measurement apparatus, namely laser vibrometers; vibration meters; apparatus for non-contact measuring of vibrations consisting of a laser, an interferometer and one or more photo detectors; apparatus for non-contact measuring of vibrations, namely, vibration sensors

Goods & Services

measuring apparatus, namely, interferometric vibration measurement apparatus, namely, interferometric vibration meters; measuring apparatus for interferometric vibration measurement, specifically, vibrometers; vibration sensors; vibration meters

Goods & Services

Optical measurement apparatus, Namely laser vibrometers; Measuring apparatus; Measuring apparatus for non-contact vibration measurements; Control and evaluation software for the aforesaid measuring apparatus.

Abstract

The invention relates to a method for determining the path of a measurement beam of an interferometric measuring device, the method having the method steps: A. recording a plurality of spatially resolved images of the object under measurement; B. creating a three-dimensional model of the object under measurement; C. providing a beam-position image-recording unit and recording at least one spatially resolved beam-position-determining image; D. determining the spatial position and orientation of the beam-position image-recording unit relative to the object under measurement; E. providing a spatial relation between the spatial path of the measurement beam of the interferometric measuring device and the position and orientation of the beam-position image-recording unit; F. determining the spatial path of the measurement beam of the interferometric measuring device relative to the object under measurement. Furthermore, the invention relates to a measuring device for interferometric measurement of an object under measurement.

IPC Classes  ?

• G01B 11/16 - Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
• G01B 11/25 - Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. moiré fringes, on the object

Abstract

The invention relates to a method for determining the path of a measurement beam of an interferometric measuring device comprising the method steps: A. recording a plurality of spatially resolved images of the object under measurement; B. creating a three-dimensional model of the object under measurement; C. providing a measurement-head model; D. creating an association between coordinates in the three-dimensional model of the object under measurement and coordinates in the measurement-head model; E. determining the measurement beam path. The invention also relates to a measuring device for interferometric measurement of an object under measurement.

IPC Classes  ?

• G01B 11/16 - Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
• G01B 11/25 - Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. moiré fringes, on the object

Abstract

The invention relates to an alignment method for a beam-directing unit of an interferometric measuring device for directing a laser beam of a laser beam source towards a plurality of measurement points of a object under measurement, wherein a three-dimensional model of a measurement surface of an object under measurement is created by means of a plurality of spatially resolved images. The invention also relates to a measuring device for carrying out an interferometric measurement by means of laser radiation, having a control unit which is designed to align a beam-directing unit of the measurement device.

IPC Classes  ?

• G01B 11/25 - Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. moiré fringes, on the object
• G01B 11/16 - Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge

Goods & Services

Optical measuring apparatus for surface measurement.

Goods & Services

Optical measurement apparatus, namely laser vibrometers.

Goods & Services

Optical measuring apparatus for surface measurement.

Goods & Services

Optical measurement apparatus, namely, laser vibrometers

Goods & Services

Optical measuring apparatus for surface measurement

Goods & Services

Optical measuring apparatus for surface measurement

Goods & Services

Optical measurement apparatus, Namely laser vibrometers.

Goods & Services

Optical measurement apparatus, namely laser vibrometers.

Goods & Services

Optical measuring apparatus for surface measurement.

Goods & Services

Optical measuring apparatus for surface measurement.

Goods & Services

Optical measurement apparatus, namely, laser vibrometers

Goods & Services

Optical measurement apparatus, namely laser vibrometers.

Goods & Services

Optical measurement apparatus, namely, laser doppler vibrometers

Goods & Services

Optical measurement apparatus, Namely laser vibrometers.

Goods & Services

Optical measurement apparatus, Namely laser vibrometers.

Goods & Services

laser velocity detectors; software for operation of laser velocity detectors

Goods & Services

Laser velocity detectors; Software for operation of laser velocity detectors.

Abstract

A device for the interferometric measuring of an object, including a source to generate a source beam, a beam splitting device to split the source beam into a measuring beam and a reference beam, an optic interference device and a first detector, which cooperate such that the measuring beam reflected by the object at least partially is at least partially interfered as the receiver beam and the reference beam on a detector area of the first detector. The beam splitting device splits the source beam into a measuring beam, a first partial reference beam, and at least one second partial reference beam. There is at least one second detector embodied such that the first receiver beam is interfered with the first partial reference beam on a detection area of the first detector and the second partial receiver beam with a second partial reference beam on a detection area of the second detector, each with the formation of an optic interference. An assessment unit assesses the measuring signals of the detectors according to the principle of the reception diversity.

IPC Classes  ?

• G01P 3/36 - Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light
• G01H 9/00 - Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means

Goods & Services

Installation, repair, maintenance and cleaning of optical and electro-optical measuring systems in particular of laser based measuring systems and apparatus; consultancy and providing information relating to the aforementioned services, as far as included in this class. Calibration of optical and electro-optical measuring systems, in particular of laser based measuring systems and apparatus.

Goods & Services

Installation, repair, maintenance and cleaning of optical and electro-optical measuring systems in particular of laser based measuring systems and apparatus; consultancy and providing information relating to the aforementioned services, as far as included in this class Calibration of optical and electro-optical measuring systems, in particular of laser based measuring systems and apparatus

Abstract

A device for the interferometric measuring of an object, including a radiation source for generating an output beam, at least one beam splitter, as well as at least one detector, with the beam splitter being arranged in the radiation path of the output beam such that the output beam is split into at least one measuring beam and one reference beam, and the device is embodied to interfere the reference beam on the detector with an interference beam to form an optic interference. The device has an open optic resonator, which is arranged in the radiation path of the device such that the measuring beam enters the open optic resonator and the interference beam emitted from the open optic resonator is interfered with a reference beam on the detector to form an optic interference. The invention further relates to a method for the interferometric measuring of an object.

IPC Classes  ?

• G01B 9/02 - Interferometers
• G01B 11/14 - Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
• G01B 11/06 - Measuring arrangements characterised by the use of optical techniques for measuring length, width, or thickness for measuring thickness
• G01P 3/36 - Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light
• G01Q 20/02 - Monitoring the movement or position of the probe by optical means

Goods & Services

Installation, repair and maintenance of measuring systems; installation, maintenance and repair of computer hardware. Arranging and conducting seminars and workshops [training], particularly in the field of optical measuring systems. Planning, performing and evaluating measurements, particularly with optical measuring systems; rental of optical measuring systems; engineering services; physics [research]; consultancy in the field of optical measuring systems; installation, maintenance and repair of computer software; technical advice relating to computer software; calibration [measuring] of measuring systems.

Abstract

An optical interferometer including an output-beam beam input for coupling-in an output beam, and a beam splitter device for splitting the output beam into at least one first sub-beam and one second sub-beam, the interferometer being embodied as a heterodyne interferometer by virtue of at least one optical frequency shifter being arranged in the beam path of the interferometer and the interferometer including one or more optical waveguide elements, by which optical waveguides are formed, at least between the output-beam beam input, beam splitter device and frequency shifter. The frequency shifter is arranged in the beam path of the first or second sub-beam.

IPC Classes  ?

• G01B 9/02 - Interferometers
• G01H 9/00 - Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means

Goods & Services

Installation, repair and maintenance of measuring systems; installation, maintenance and repair of computer hardware Arranging and conducting seminars and workshops training, particularly in the field of optical measuring systems technological planning, performing and evaluating measurements, particularly with optical measuring systems; rental of optical measuring systems not for medical purposes; engineering services; physics research; technical consultancy in the field of optical measuring systems; installation, maintenance and repair of computer software; technical advice relating to computer software; calibration measuring of measuring systems

Abstract

A device for the optical non-contact vibration measurement of an vibrating object, including a laser Doppler vibrometer that has a laser as the light source for a laser beam, a first beam splitter assembly for splitting the laser beam into a measuring beam and a reference beam, a means for shifting the frequency of the reference beam or of the measuring beam in a defined manner, a second beam splitter assembly by which the measuring beam back-scattered by the oscillating object is merged with the reference beam and superimposed on the same, and a detector for receiving the superimposed measuring and reference beam and for generating a measurement signal. The laser is provided with a polarization filter arranged inside the optical resonator of the laser and the laser is frequency stabilized by regulating to a beat signal of the laser.

IPC Classes  ?

• G01H 9/00 - Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means

Abstract

A device for the interferometric measuring of an object, including a source to generate a source beam, a beam splitting device to split the source beam into a measuring beam and a reference beam, an optic interference device and a first detector, which cooperate such that the measuring beam reflected by the object at least partially is at least partially interfered as the receiver beam and the reference beam on a detector area of the first detector. The beam splitting device splits the source beam into a measuring beam, a first partial reference beam, and at least one second partial reference beam. There is at least one second detector embodied such that the first receiver beam is interfered with the first partial reference beam on a detection area of the first detector and the second partial receiver beam with a second partial reference beam on a detection area of the second detector, each with the formation of an optic interference. An assessment unit assesses the measuring signals of the detectors according to the principle of the reception diversity.

IPC Classes  ?

• G01P 3/36 - Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light
• G01H 9/00 - Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means

Abstract

A device for the interferometric measuring of an object, including a light source to generate an emitted beam, a beam splitting device for splitting the emitted beam into a measuring beam and at least first and second reference beams, an optic interference device, and first and second detectors, with the interference device and the first detector being embodied cooperating such that the measuring beam, at least partially reflected by the object, and the first reference beam are interfered on at least one detector area of the first detector. The interference device and the second detector are embodied cooperating such that the measuring beam, at least partially scattered by the object, and the second reference beam are interfered on at least one detector area of the second detector. A method is also provided for the interferometric measuring of an object.

IPC Classes  ?

• G01B 9/02 - Interferometers
• G01B 11/14 - Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
• G01H 9/00 - Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means

Abstract

The invention relates to a device for the optical non-contact oscillation measurement of an oscillating object, comprising a laser Doppler vibrometer that has a laser (1) as the light source for a laser beam, a first beam splitter assembly (S1) for splitting the laser beam into a measuring beam (2) and a reference beam (3), a means (4) for shifting the frequency of the reference beam (3) or of the measuring beam (2) in a defined manner, a second beam splitter assembly (S2, S3) by means of which the measuring beam (2) back-scattered by the oscillating object (6) is merged with the reference beam (3) and superimposed on the same, and a detector (5) for receiving the superimposed measuring and reference beam (7) and for generating a measurement signal, wherein the laser (1) is provided with a polarization filter arranged inside the optical resonator of the laser and the frequency of the dominating mode can be kept constant by a control to the beat signal.

IPC Classes  ?

• G01H 9/00 - Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means

Abstract

A device for interferometric vibration measurement, having a radiation source for generating an original beam, a first beam splitter for dividing it into measuring and reference beams, a detector and a focusing device. The measuring beam at least partly reflected by the object and the reference beam are superimposed on a detection area of the detector, and the focusing device in the beam path of the measuring beam between the image unit and object focuses it onto a measuring point. Here, a measuring beam having a wavelength greater than 1100 nm is generated and the device has an image unit for two-dimensional imaging of the object surrounding the measuring point. The measuring beam focus lies in the focal plane of the image unit and, by use of the focusing device, the focal point of the measuring beam and the focal plane of the imaging unit are displaceable simultaneously.

IPC Classes  ?

• G01B 9/02 - Interferometers
• G01C 3/08 - Use of electric radiation detectors
• G01P 3/36 - Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light
• G01H 9/00 - Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means

Goods & Services

Meters,In particular precision measuring apparatus; Optical apparatus and instruments, Electronic and optoelectronic devices and Instruments for surveying surfaces and surface structures; Computers and computer software, in particular for controlling the aforesaid goods, and for evaluating measurement data obtained therewith; Accessories for the aforesaid measuring apparatus, namely sample holders and displacement units; Interferometers; Digital cameras. Optical, electronic and optoelectronic apparatus and instruments for surveying surfaces and surface structures; Stand-up-aids. Providing training courses in the operation of measuring apparatus, in particular precision measuring apparatus; Providing training courses in the operation of optical, electronic and optoelectronic apparatus and instruments for surveying surfaces and surface structures; Providing training courses in the operation of computers and computer software, in particular for controlling the aforesaid goods, and for evaluating measurement data obtained therewith; Providing training courses in the operation of accessories for the aforesaid measuring apparatus, namely sample holders and displacement units; Providing training courses in the operation of interferometers; Providing training courses in the operation of digital cameras; Providing training courses in the operation of optical, electronic and optoelectronic apparatus and instruments for surveying surfaces and surface structures, the aforesaid apparatus and instruments for medical purposes. Technical consultancy,In particular with regard to surveying surfaces and surface structures; Physics research; Computer programming; Hardware and software consultancy.

Goods & Services

[ Measuring apparatus, namely, interferometric vibration measurement apparatus; measuring apparatus for interferometric vibration measurement, in particular vibrometers; ] computers and computer software, in particular for controlling the aforesaid goods, and for analyzing the measuring data obtained therewith [ Measuring apparatus for interferometric vibration measurement, in particular vibrometers, the aforementioned goods for medical purposes ] [ Technical consulting in the fields of engineering and physics; services of a physicist, namely, consulting in the field of physics; computer programming; computer hardware and software consultancy ]

Goods & Services

Meters; Measuring apparatus for interferometric vibration measuring, in particular vibrometers; Computers and computer software, in particular for controlling the aforesaid goods, and for evaluating measurement data obtained therewith. Measuring apparatus for interferometric vibration measuring, in particular vibrometers, the aforesaid goods for medical purposes. Technical consultancy; Physics research; Computer programming; Consulting services in the fields of computer hardware and software.

Goods & Services

Measuring apparatus; measuring apparatus for contactless vibration measurement; control and analysis software for the aforementioned measuring apparatus.

Goods & Services

Measuring apparatus for contactless vibration measurement; control and analysis software for the aforementioned measuring apparatus

Abstract

A vibrometer and a method for optically measuring oscillations at an object, including a radiation source for creating a source beam, a beam splitter to split the source beam into a measuring beam and a reference beam, an optic interference device for interfering the reference beam with a measuring beam, at least partially reflected by the object, and a detector, with the interference device and the detector being embodied cooperating such that a measuring beam, at least partially deflected by the object, and the reference beam interfere on the detector. The vibrometer is embodied as a heterodyne vibrometer, having an optic frequency shift unit, which is arranged in the optical path of the vibrometer, to form a carrier frequency by creating a frequency difference between the measuring beam and the reference beam. The beam splitter and the frequency shift unit are embodied as an acousto-optic modulator in an optic construction element to deflect the source beam, with the acousto-optic modulator being embodied such that the source beam entering the acousto-optic modulator can be split into at least two diffraction beams: a first diffraction beam of diffraction order of 1 and a second diffraction beam of diffraction order of −1, and the acousto-optic modulator is arranged in the optical path of the vibrometer such that one of the two diffraction beams represents the measurement beam and the other diffraction beam represents the reference beam.

IPC Classes  ?

• G01B 11/02 - Measuring arrangements characterised by the use of optical techniques for measuring length, width, or thickness

Abstract

A method and a device for non-contact vibration measurement of an object. Method steps include: Moving at least one laser interferometer, which emits at least one measuring beam to at least one measuring point on the object, detecting the measuring beam reflected by the object, determining the vibration data from the emitted and reflected measuring beam, allocating the vibration data to the measuring point, as well as evaluating the vibration data and displaying the vibration data of the measuring point, with at least one comparison of a position of the laser interferometer being performed using at least one position of a known freely predetermined point on the object and a transformation rule being prepared to determine the position of the laser interferometer in reference to the object for arbitrary measuring positions based on the comparison. The device for measuring vibrations is also disclosed.

IPC Classes  ?

• G01B 11/02 - Measuring arrangements characterised by the use of optical techniques for measuring length, width, or thickness

Abstract

d) controlling a device for changing the optic path length which controls the device for changing the optic path length such that the optic path length of the working beam and the reference beam are approximately adjusted to each other.

IPC Classes  ?

• G01B 9/02 - Interferometers

Goods & Services

Adhesives for industrial purposes, in particular conductive adhesives, high temperature adhesives, optical adhesives and silicones. Scientific, industrial, electric, electronic, optic and optoelectronic apparatus and instruments (included in this class), in particular lasers and parts thereof, laser apparatus, laser diagnostic apparatus, apparatus for the measurement of optical radiation, optoelectronic measuring and evaluation apparatus, optoelectronic apparatus and instruments for sensory analysis, optoelectronic analysis apparatus, optoelectronic apparatus and instruments for analysis, optic, optoelectronic and electronic test apparatus particularly for semiconductor technology, and vibrometers, in particular laser-vibrometers; components of the above listed goods (included in this class), in particular power measuring instruments and energy measuring instruments, modulators, rotators, cameras, detector arrays and IR visual apparatus (for laser diagnostic systems); radiometers, photometers, light measuring instruments, dosimeters, spectroradiometers, colour-measuring instruments, VIS and IR cameras, solar simulators, power supplies, monochromators, spectrographs, black body radiators and collimators (for the measurement of optical radiation); laser vibrometers, interferometers, laser velocimeters, IR cameras, temperature measuring instruments by fiber optics and sensors for measuring the field intensity of mirowaves by fiber optics (for sensory analysis); spectrometers, photometers and spectrophotometers (for analysis); photodetectors, IR detectors, detector array apparatus, stroboscopes, stricks of fibers and swan necks, ring lights by fiber optics, line lights and illuminating areas; beam waveguides, laser diode modules, transmitting-receiving components for beam waveguides, splicing apparatus for beam waveguides (included in this class), data link systems by beam waveguides; electronic control systems for lamps; electronic image-analyzing systems and components for image detecting equipment (included in this class); software, in particular for detecting of defects by noise analysis. Optoelectronic apparatus and instruments for medical purposes, included in this class. Cold light sources; illuminating systems and lamps, included in this class. Technical consulting related to services included in this class; physics (research); engineering; services of a software engineer.

Goods & Services

[ Adhesives for industrial purposes, namely, conductive adhesives, high temperature adhesives, optical adhesives and silicones ] Scientific, industrial, electric, electronic, optic and optoelectronic apparatus and instruments, namely, [ lasers not for medical uses and parts thereof, laser apparatus for marking, material processing, laser diagnostic apparatus, apparatus for the measurement of optical radiation, optoelectronic measuring and evaluation apparatus, optoelectronic apparatus and instruments for sensory analysis, namely, radiometers, radiation analyzers, systems for illumination, comprising LED-lighting and fiber-optic illumination, stroboscopes, photometers, optoelectronic analysis apparatus, namely, equipment for image processing, ] optoelectric apparatus and instruments for analysis, namely, white light interferometers, [ confocal scanning microscopes,optical microscopes, Bragg-cells, acousto-optical modulators, ] [ defect detectors, ] analyzers for flatness, roughness, thickness and waviness, [ electro-optical modulators, optoelectronic apparatus and instruments for analysis, namely, equipment for image processing, ] optoelectric apparatus and instruments for analysis, namely, white light interferometers, [ confocal scanning microscopes, optical microscopes, Bragg-cells, acousto-optical modulators, defect detectors, ] analyzers for flatness, roughness, thickness and waviness; [ optic, optoelectronic and electronic test apparatus, namely, test apparatus for hard disc drives, four-point-probes, ellipsometers, for semiconductor technology, capacitance-voltage and current-voltage measurement systems, comprising mercury probe stations, ] and laser vibrometers; parts for the above listed goods, namely, [ power measuring instruments and energy measuring instruments, ] modulators, rotators, [ cameras, detector arrays and IR visual apparatus for laser diagnostic systems, namely, infrared viewers, beam profilers; radiometers, photometers, light measuring instruments, dosimeters, spectroradiometers, color-measuring instruments, VIS and IR cameras, solar simulators, power supplies, monochromators, spectrographs, black body radiators and collimators for the measurement of optical radiation; ] laser vibrometers, interferometers, laser velocimeters, [ IR cameras, temperature measuring instruments by fiber optics and sensors for measuring the field intensity of microwaves by fiber optics; ] spectrometers, [ photometers and spectrophotometers; photodetectors, IR detectors, detector array apparatus, stroboscopes, stricks of fibers and swan necks, ring lights by fiber optics, line lights and illuminating areas; beam waveguides, laser diode modules, transmitting-receiving components for beam waveguides, splicing apparatus for beam waveguides, data link systems by beam waveguides comprising camera link video interfaces and firewire interfaces; electronic control systems for lamps comprising power supplies; electronic image-analyzing systems comprising components for image detecting equipment, namely, analog cameras, digital cameras, lenses, ] computer software for detecting defects by noise analysis, computer software for visualization of vibrations, mode shape, displacement and surface typography, computer software for industrial vision applications, and computer software for chemical analysis; computer software for detecting of defects by noise analysis [ Optoelectronic apparatus and instruments for medical purposes ] [ Cold light sources; illuminating systems, namely, fiber optic light assemblies, LED light assemblies and LED flashlights for illumination purposes, and lamps ] [ Technical consulting related to [ physics and physics research; ] engineering; computer software engineering, namely, computer software design ]

Abstract

An apparatus for optical measurement of an object, especially for measuring movement, is provided, which includes an interferometer for measuring movements along the measurement beam of the interferometer, as well as a confocal auto-focus microscope. The interferometer is coupled in the beam path of the confocal auto-focus microscope, such that the measurement beam of the interferometer is simultaneously the focusing beam of the microscope. Here, it is guaranteed that the interferometric movement measurement is always performed at the focal point of the microscope that is used. This enables automatic correction of the Guoy effect for objectives with high numerical aperture. In addition, for the use of a scanning confocal auto-focus microscope, data sets of test objects can also be measured, which comprise their vibrational behavior, height profile, and optionally also their in-plane movement behavior.

IPC Classes  ?

• G01D 5/32 - Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using optical means, i.e. using infrared, visible or ultraviolet light with attenuation or whole or partial obturation of beams of light
• G01B 11/02 - Measuring arrangements characterised by the use of optical techniques for measuring length, width, or thickness

Goods & Services

Adhesives for industrial purposes, in particular conductive adhesives, high temperature adhesives, optical adhesives and silicones. Scientific, industrial, electric, electronic, optic and optoelectronic apparatus and instruments (as far as included in class 9), in particular lasers and parts thereof, laser systems, laser diagnostic systems, systems for the measurement of optical radiation, optoelectronic measuring and evaluation systems, optoelectronic apparatus and instruments for sensory analysis, optoelectronic analysis systems, optoelectronic apparatus and instruments for analysis, optic, optoelectronic and electronic test apparatus particularly for semiconductor technology, and vibrometers, in particular laser-vibrometers; components of the above listed goods (as far as included in class 9), in particular power measuring instruments and energy measuring instruments, modulators, rotators, cameras, detector arrays and IR-visual apparatus (for laser diagnostic systems); radiometers, photometers, light measuring instruments, dosimeters, spectroradiometers, colour-measuring instruments, VIS- and IR-cameras, lamps and illuminating systems, solar simulators, power supplies, monochromators, spectrographs, black body radiators and collimators (for the measurement of optical radiation); laser-vibrometers, interferometers, laser-velocimeters, IR-cameras, temperature-measuring instruments by fiber optics and sensors for measuring the field intensity of mirowaves by fiber optics (for sensory analysis); spectrometers, photometers and spectrophotometers (for analysis); photodetectors, IR-detectors, detector array systems, cold light sources, stroboscopes, stricks of fibers and swan necks, ring lights by fiber optics, line lights and illuminating areas; beam waveguides, laser diode modules, transmitting-receiving-components for beam waveguides, splicing apparatus for beam waveguides, data link systems by beam waveguides; electronic control systems for lamps; electronic image-analyzing systems and components for image- detecting equipment; software, in particular for detecting of defects by noise analysis. Optoelectronic apparatus and instruments for medical purposes, as far as included in class 10. Illuminating systems and lamps, as far as included in class 11. Technical consulting, physics, engineering, information technology.

Goods & Services

[ adhesive for industrial purposes, in particular conductive adhesives, high temperature adhesives, optical adhesives and silicones ] [ scientific, industrial, electric, electronic, optic and optoelectronic apparatus and instruments, namely, lasers and parts thereof, ] laser diagnostic apparatus and instruments, [ instruments for the measurement of optical radiation, ] optoelectronic measuring and evaluation apparatus, optoelectronic apparatus and instruments for sensory analysis, optoelectronic apparatus and instruments for analysis, optic, optoelectronic and electronic test apparatus particularly for semiconductor technology, surface inspection instruments, [ confocal microscopes, ] and vibrometers; [ components for laser diagnostic systems, namely, power measuring instruments and energy measuring instruments, modulators, ] rotators, [ cameras, ] detector arrays and IR-visual apparatus; [ components for the measurement of optical radiation, namely, radiometers, photometers, light measuring instruments, dosimeters, spectroradiometers, colour-measuring instruments, VIS- and IR-cameras, lamps and illuminating apparatus and instruments, solar simulators, power supplies, momocbromators, spectrographs, black body radiators and collimators; ] components for sensory analysis, namely, laser-vibrometers, interferometers, laser-velocimeters, IR-cameras, temperature-measuring instruments by fiber optics [ and sensors for measuring the field intensity of microwaves by fiber optics; ] components for analysis systems, namely, spectrometers, photometers and spectrophotometers; photodetectors, IR-detectors, detector array systems, [ cold light sources, ] stroboscopes, [ stricks of fibers and swan necks, ] ring lights by fiber optics, [ line lights and illuminating areas; beam waveguides, laser diode modules, ] [ transmitting-receiving components for beam waveguides, splicing apparatus for beam waveguides, ] data link apparatus and instruments by beam waveguides; electronic control apparatus and instruments for lamps; electronic image-analyzing apparatus, instruments and components for image-detecting equipment; software optoelectronic apparatus and instrument for medical purposes fiber optic lightlines and ringlights, LED- and halogen light sources and stroboscopes technical consulting in the field of physics, engineering, and information technology

Goods & Services

Adhesives for industrial purposes, in particular conductive adhesives, high temperature adhesives, optical adhesives and silicones. Scientific, industrial, electric, electronic, optic and optoelectronic apparatus and instruments (as far as included in class 9), in particular lasers and parts thereof, laser systems, laser diagnostic systems, systems for the measurement of optical radiation, optoelectronic measuring and evaluation systems, optoelectronic apparatus and instruments for sensory analysis, optoelectronic analysis systems, optoelectronic apparatus and instruments for analysis, optic, optoelectronic and electronic test apparatus particularly for semiconductor technology, and vibrometers, in particular laser-vibrometers; components of the above listed goods (as far as included in class 9), in particular power measuring instruments and energy measuring instruments, modulators, rotators, cameras, detector arrays and IR-visual apparatus (for laser diagnostic systems); radiometers, photometers, light measuring instruments, dosimeters, spectroradiometers, colour-measuring instruments, VIS- and IR-cameras, lamps and illuminating systems, solar simulators, power supplies, monochromators, spectrographs, black body radiators and collimators (for the measurement of optical radiation); laser-vibrometers, interferometers, laser-velocimeters, IR-cameras, temperature-measuring instruments by fiber optics and sensors for measuring the field intensity of microwaves by fiber optics (for sensory analysis); spectrometers, photometers and spectrophotometers (for analysis); photodetectors, IR-detectors, detector array systems, cold light sources, stroboscopes, stricks of fibers and swan necks, ring lights by fiber optics, line lights and illuminating areas; beam waveguides, laser diode modules, transmitting-receiving-components for beam waveguides, splicing apparatus for beam waveguides, data link systems by beam waveguides; electronic control systems for lamps; electronic image-analyzing systems and components for image-detecting equipment; software, in particular for detecting of defects by noise analysis. Optoelectronic apparatus and instruments for medical purposes, as far as included in class 10. Illuminating systems and lamps, as far as included in class 11. Technical consulting, physics, engineering, information technology.

Goods & Services

Scientific Instruments-Namely, Lasers, Velocity Meters, Particle Analyzers and Interferometers