The invention relates to an interferometric measurement device and to an interferometric method for determining the surface topography of a measurement object (1). The essence of the invention is that the light intensities Iq(zi) of at least one other detector element q of the multi-element detector (6) are also used besides the light intensities Ip(zi) of this detector element to determine the value zp associated with a detector element p (6b) of the measurement device.
A method for interferometric vibration measurement at a plurality of measurement points using a measuring laser beam, including A. generating the measuring laser beam having a wavelength in the infrared wavelength range and a pilot laser beam having a wavelength in the visible wavelength range; B. deflecting the measuring laser beam and the pilot, laser beam by a common optical deflection unit, and controlling the deflection unit such that the pilot laser beam is incident on the measurement point; and C. carrying out a vibration measurement using the measuring laser beam. An angular deviation between the pilot laser beam and the measuring laser beam is determined and, in a correction step B 1, between method step B and C, the deflection unit is actuated in order to compensate for the angular deviation between the pilot laser beam and the measuring laser beam.
G01H 9/00 - Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
G01P 3/36 - Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light
3.
METHOD FOR DETERMINING THE PATH OF A MEASUREMENT BEAM OF AN INTERFEROMETRIC MEASURING DEVICE, AND MEASURING DEVICE FOR INTERFEROMETRIC MEASUREMENT OF AN OBJECT UNDER MEASUREMENT
A method for determining the path of a measurement beam of an interferometric measuring device including the method steps: A. recording a plurality of spatially resolved images of the object under measurement; B. creating a three-dimensional model of the object under measurement; C. providing a measurement-head model; D. creating an association between coordinates in the three-dimensional model of the object under measurement and coordinates in the measurement-head model; E. determining the measurement beam path. A measuring device for interferometric measurement of an object under measurement is also provided.
G01H 9/00 - Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
G01B 11/16 - Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
G01B 11/25 - Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. moiré fringes, on the object
G01S 17/58 - Velocity or trajectory determination systems; Sense-of-movement determination systems
G01S 17/87 - Combinations of systems using electromagnetic waves other than radio waves
G01S 17/894 - 3D imaging with simultaneous measurement of time-of-flight at a 2D array of receiver pixels, e.g. time-of-flight cameras or flash lidar
4.
Alignment method for a beam-directing unit of an interferometric measuring device, and measuring device for carrying out an interferometric measurement by means of laser radiation
An alignment method for a beam-directing unit of an interferometric measuring device for directing a laser beam of a laser beam source towards a plurality of measurement points of an object under measurement, wherein a three-dimensional model of a measurement surface of an object under measurement is created by a plurality of spatially resolved images. A measuring device for carrying out an interferometric measurement by laser radiation is also provided, having a controller which is designed to align a beam-directing unit of the measurement device.
G01B 9/02055 - Reduction or prevention of errors; Testing; Calibration
G01S 17/894 - 3D imaging with simultaneous measurement of time-of-flight at a 2D array of receiver pixels, e.g. time-of-flight cameras or flash lidar
G01B 11/24 - Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
G01B 11/25 - Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. moiré fringes, on the object
G01H 9/00 - Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
5.
METHOD FOR DETERMINING THE PATH OF A MEASUREMENT BEAM OF AN INTERFEROMETRIC MEASURING DEVICE, AND MEASURING DEVICE FOR INTERFEROMETRIC MEASUREMENT OF AN OBJECT UNDER MEASUREMENT
A method for determining the path of a measurement beam of an interferometric measuring device, includes A. recording a plurality of spatially resolved images of the object under measurement; B. creating a three-dimensional model of the object under measurement; C. providing a beam-position image-recording unit and recording at least one spatially resolved beam-position-determining image; D. determining the spatial position and orientation of the beam-position image-recording unit relative to the object under measurement; E. providing a spatial relation between the spatial path of the measurement beam of the interferometric measuring device and the position and orientation of the beam-position image-recording unit; F. determining the spatial path of the measurement beam of the interferometric measuring device relative to the object under measurement. A measuring device for interferometric measurement of an object under measurement is also provided.
G01H 9/00 - Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
G01B 11/25 - Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. moiré fringes, on the object
G01S 17/58 - Velocity or trajectory determination systems; Sense-of-movement determination systems
G01S 17/894 - 3D imaging with simultaneous measurement of time-of-flight at a 2D array of receiver pixels, e.g. time-of-flight cameras or flash lidar
6.
Device and method for an interferometric measuring of an object
A device for the interferometric measuring of an object, including a source to generate a source beam, a beam splitting device to split the source beam into a measuring beam and a reference beam, an optic interference device and a first detector, which cooperate such that the measuring beam reflected by the object at least partially is at least partially interfered as the receiver beam and the reference beam on a detector area of the first detector. The beam splitting device splits the source beam into a measuring beam, a first partial reference beam, and at least one second partial reference beam. There is at least one second detector embodied such that the first receiver beam is interfered with the first partial reference beam on a detection area of the first detector and the second partial receiver beam with a second partial reference beam on a detection area of the second detector, each with the formation of an optic interference. An assessment unit assesses the measuring signals of the detectors according to the principle of the reception diversity.
A device for the interferometric measuring of an object, including a radiation source for generating an output beam, at least one beam splitter, as well as at least one detector, with the beam splitter being arranged in the radiation path of the output beam such that the output beam is split into at least one measuring beam and one reference beam, and the device is embodied to interfere the reference beam on the detector with an interference beam to form an optic interference. The device has an open optic resonator, which is arranged in the radiation path of the device such that the measuring beam enters the open optic resonator and the interference beam emitted from the open optic resonator is interfered with a reference beam on the detector to form an optic interference. The invention further relates to a method for the interferometric measuring of an object.
G01B 11/14 - Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
G01B 11/06 - Measuring arrangements characterised by the use of optical techniques for measuring length, width, or thickness for measuring thickness
G01P 3/36 - Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light
G01Q 20/02 - Monitoring the movement or position of the probe by optical means
8.
Optical interferometer and vibrometer comprising such an optical interferometer
An optical interferometer including an output-beam beam input for coupling-in an output beam, and a beam splitter device for splitting the output beam into at least one first sub-beam and one second sub-beam, the interferometer being embodied as a heterodyne interferometer by virtue of at least one optical frequency shifter being arranged in the beam path of the interferometer and the interferometer including one or more optical waveguide elements, by which optical waveguides are formed, at least between the output-beam beam input, beam splitter device and frequency shifter. The frequency shifter is arranged in the beam path of the first or second sub-beam.
A device for the optical non-contact vibration measurement of an vibrating object, including a laser Doppler vibrometer that has a laser as the light source for a laser beam, a first beam splitter assembly for splitting the laser beam into a measuring beam and a reference beam, a means for shifting the frequency of the reference beam or of the measuring beam in a defined manner, a second beam splitter assembly by which the measuring beam back-scattered by the oscillating object is merged with the reference beam and superimposed on the same, and a detector for receiving the superimposed measuring and reference beam and for generating a measurement signal. The laser is provided with a polarization filter arranged inside the optical resonator of the laser and the laser is frequency stabilized by regulating to a beat signal of the laser.
A device for the interferometric measuring of an object, including a source to generate a source beam, a beam splitting device to split the source beam into a measuring beam and a reference beam, an optic interference device and a first detector, which cooperate such that the measuring beam reflected by the object at least partially is at least partially interfered as the receiver beam and the reference beam on a detector area of the first detector. The beam splitting device splits the source beam into a measuring beam, a first partial reference beam, and at least one second partial reference beam. There is at least one second detector embodied such that the first receiver beam is interfered with the first partial reference beam on a detection area of the first detector and the second partial receiver beam with a second partial reference beam on a detection area of the second detector, each with the formation of an optic interference. An assessment unit assesses the measuring signals of the detectors according to the principle of the reception diversity.
A device for the interferometric measuring of an object, including a light source to generate an emitted beam, a beam splitting device for splitting the emitted beam into a measuring beam and at least first and second reference beams, an optic interference device, and first and second detectors, with the interference device and the first detector being embodied cooperating such that the measuring beam, at least partially reflected by the object, and the first reference beam are interfered on at least one detector area of the first detector. The interference device and the second detector are embodied cooperating such that the measuring beam, at least partially scattered by the object, and the second reference beam are interfered on at least one detector area of the second detector. A method is also provided for the interferometric measuring of an object.
G01B 11/14 - Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
G01H 9/00 - Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
12.
Device and method for interferometric vibration measurement of an object
A device for interferometric vibration measurement, having a radiation source for generating an original beam, a first beam splitter for dividing it into measuring and reference beams, a detector and a focusing device. The measuring beam at least partly reflected by the object and the reference beam are superimposed on a detection area of the detector, and the focusing device in the beam path of the measuring beam between the image unit and object focuses it onto a measuring point. Here, a measuring beam having a wavelength greater than 1100 nm is generated and the device has an image unit for two-dimensional imaging of the object surrounding the measuring point. The measuring beam focus lies in the focal plane of the image unit and, by use of the focusing device, the focal point of the measuring beam and the focal plane of the imaging unit are displaceable simultaneously.
A vibrometer and a method for optically measuring oscillations at an object, including a radiation source for creating a source beam, a beam splitter to split the source beam into a measuring beam and a reference beam, an optic interference device for interfering the reference beam with a measuring beam, at least partially reflected by the object, and a detector, with the interference device and the detector being embodied cooperating such that a measuring beam, at least partially deflected by the object, and the reference beam interfere on the detector. The vibrometer is embodied as a heterodyne vibrometer, having an optic frequency shift unit, which is arranged in the optical path of the vibrometer, to form a carrier frequency by creating a frequency difference between the measuring beam and the reference beam. The beam splitter and the frequency shift unit are embodied as an acousto-optic modulator in an optic construction element to deflect the source beam, with the acousto-optic modulator being embodied such that the source beam entering the acousto-optic modulator can be split into at least two diffraction beams: a first diffraction beam of diffraction order of 1 and a second diffraction beam of diffraction order of −1, and the acousto-optic modulator is arranged in the optical path of the vibrometer such that one of the two diffraction beams represents the measurement beam and the other diffraction beam represents the reference beam.
A method and a device for non-contact vibration measurement of an object. Method steps include: Moving at least one laser interferometer, which emits at least one measuring beam to at least one measuring point on the object, detecting the measuring beam reflected by the object, determining the vibration data from the emitted and reflected measuring beam, allocating the vibration data to the measuring point, as well as evaluating the vibration data and displaying the vibration data of the measuring point, with at least one comparison of a position of the laser interferometer being performed using at least one position of a known freely predetermined point on the object and a transformation rule being prepared to determine the position of the laser interferometer in reference to the object for arbitrary measuring positions based on the comparison. The device for measuring vibrations is also disclosed.
d) controlling a device for changing the optic path length which controls the device for changing the optic path length such that the optic path length of the working beam and the reference beam are approximately adjusted to each other.
An apparatus for optical measurement of an object, especially for measuring movement, is provided, which includes an interferometer for measuring movements along the measurement beam of the interferometer, as well as a confocal auto-focus microscope. The interferometer is coupled in the beam path of the confocal auto-focus microscope, such that the measurement beam of the interferometer is simultaneously the focusing beam of the microscope. Here, it is guaranteed that the interferometric movement measurement is always performed at the focal point of the microscope that is used. This enables automatic correction of the Guoy effect for objectives with high numerical aperture. In addition, for the use of a scanning confocal auto-focus microscope, data sets of test objects can also be measured, which comprise their vibrational behavior, height profile, and optionally also their in-plane movement behavior.
G01D 5/32 - Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using optical means, i.e. using infrared, visible or ultraviolet light with attenuation or whole or partial obturation of beams of light
G01B 11/02 - Measuring arrangements characterised by the use of optical techniques for measuring length, width, or thickness
patents
