|
2020
|
Invention
|
Soft x-ray static electricity removal apparatus. Provided is a soft X-ray static electricity remo... |
|
2018
|
Invention
|
Device for measuring clogging of filter in air-conditioning equipment, and air-conditioning equip... |
|
2015
|
Invention
|
High-temperature filter.
To provide a high-temperature filter having a seal to maintain filterin... |
|
|
Invention
|
High-temperature filter. The present invention provides a high-temperature filter that does not l... |
|
2012
|
Invention
|
Nozzle unit for n2 gas purge device. Provided is a nozzle unit capable of sufficiently purging N2... |
|
2011
|
Invention
|
Breathing filter unit for n2 gas purge, and purge device for n2 gas purging semiconductor wafer h... |
|
2007
|
Invention
|
Soft x-ray shielding sheet used in soft x-ray electrostatic removal device and its manufacturing ... |
|
|
Invention
|
Apparatus for charging dry air or nitrogen gas into a container for storing semiconductor wafers ... |
|
|
Invention
|
Device for charging dry air or nitrogen gas into semiconductor wafer storage container and wafer ... |
|
2005
|
Invention
|
Remover of static charges on surfaces of substrates of semiconductors and liquid crystals in the ... |
|
|
Invention
|
Apparatus for eliminating static electricity on semiconductor substrate and liquid crystal substr... |
|
|
Invention
|
Bag-type air filter device and filter medium and filter medium frame for the device.
An air filt... |
|
|
Invention
|
Bag-type air filter device, and filtration material and filtration material frame for the device.... |
|
2004
|
Invention
|
Air-purifying device for a front-opening unified pod. b. Thus the air in the front-opening unifie... |
|
2003
|
Invention
|
Air-purifying device.
An air-purifying device whose space for installation has an elongated shap... |
|
|
Invention
|
Air-purifying device. An air-purifying device whose installation place has an elongate shape, air... |
|
|
Invention
|
Air-curtain forming apparatus for wafer hermetic container in semiconductor-fabrication equipment... |
|
|
Invention
|
Semiconductor producing device using mini-environment system. In a semiconductor producing device... |
|
2002
|
Invention
|
Local cleaning device. The surface of a wafer or a liquid crystal substrate or a specific portion... |
|
|
Invention
|
Semiconductor manufacturing apparatus of minienvironment system.
A semiconductor manufacturing d... |
|
|
Invention
|
Semiconductor manufacturing apparatus of minienvironment system. A semiconductor manufacturing ap... |
|
|
Invention
|
Multiᇁstage centrifugal fan. A multiᇁstage centrifugal fan capable of providing a high static pre... |
|
2000
|
Invention
|
Filter medium for air filter and process for producing the same. The present invention has as its... |
|
1998
|
Invention
|
Filter medium for air filter and process for producing the same. An air filter for collecting sus... |
|
1996
|
Invention
|
Air cleaning filter. An air cleaning filter having a carrier made of activated carbon fibers in t... |
|
1994
|
Invention
|
Air-cleaning filter. An air-cleaning filter made by supporting at least one member selected from ... |
