Device (10) for determining a density of radicals (5) of a radical type in a measuring space (4), wherein the device comprises : a catalyst material (1) which can be brought into contact with the measuring space at least in the region of a first surface (15) of the catalyst material, wherein the catalyst material is suitable for triggering an exothermic recombination reaction of radicals of the radical type when radicals of the radical type come into contact with the first surface, a temperature actuator (2) in thermal contact with the first surface, and a temperature sensor (3) in thermal contact with the first surface, wherein the device is designed to control the temperature actuator by means of a control signal in such a way that the measured value detected by the temperature sensor is kept at a setpoint value, and wherein the control signal can be evaluated in order to determine the density of radicals of the radical type in the measuring space. The invention is further directed to a method for determining a density of radicals (5) of one radical type in a measuring space.
A vacuum feedthrough (10) which is constructed in radial layers comprises the following elements (from inwards to outwards): - a lens element (11), - a first ring (12) made of glass, - a first hollow cylinder (13) made of a first dielectric material, - a first electrically conductive layer (18), - a second hollow cylinder (14) made of glass, - a third hollow cylinder (15) made of ceramic, - a second ring made of glass (16), and - a frame (17) made of metal. On the basis of the vacuum feedthrough, the invention additionally relates to an electrode assembly, to a device for generating a DBD plasma discharge, to a measuring device for characterizing a pressure and/or a gas composition, and to a method for operating the measuring device.
G01N 21/67 - Systèmes dans lesquels le matériau analysé est excité de façon à ce qu'il émette de la lumière ou qu'il produise un changement de la longueur d'onde de la lumière incidente excité électriquement, p.ex. par électroluminescence en utilisant des arcs électriques ou des décharges électriques
G01L 21/34 - Indicateurs de vide en faisant usage des effets d'ionisation en utilisant des tubes électriques à décharge à cathodes froides
H01J 37/32 - Tubes à décharge en atmosphère gazeuse
The present invention relates to a device for plasma generation in a wide pressure range. The device comprises a first plasma source (1) in a first discharge chamber (2) in order to generate a first plasma in a low-pressure range, a second plasma source (3) in a second discharge chamber (4) in order to generate a second plasma in a high-pressure range, a first coupling element (5) for coupling the device to a system, in order to guide gas out of the system, and a second coupling element (6) for coupling the device to an optical sensor (12). The first discharge chamber (2) has a first optical connection with at least one optical lens (7, 8) to the second coupling element (6) and the second discharge chamber (4) has a second optical connection with at least one optical lens (8) to the second coupling element (6). This invention further relates to a system for optical gas analysis or gas detection and corresponding methods for plasma generation and for operating the system.
H01J 37/32 - Tubes à décharge en atmosphère gazeuse
G01N 21/3504 - Couleur; Propriétés spectrales, c. à d. comparaison de l'effet du matériau sur la lumière pour plusieurs longueurs d'ondes ou plusieurs bandes de longueurs d'ondes différentes en recherchant l'effet relatif du matériau pour les longueurs d'ondes caractéristiques d'éléments ou de molécules spécifiques, p.ex. spectrométrie d'absorption atomique en utilisant la lumière infrarouge pour l'analyse des gaz, p.ex. analyse de mélanges de gaz
G01N 21/67 - Systèmes dans lesquels le matériau analysé est excité de façon à ce qu'il émette de la lumière ou qu'il produise un changement de la longueur d'onde de la lumière incidente excité électriquement, p.ex. par électroluminescence en utilisant des arcs électriques ou des décharges électriques
H05H 1/00 - Production du plasma; Mise en œuvre du plasma
Method (100) for operating a group of pressure sensors, wherein the group comprises at least a first pressure sensor with a first pressure measurement range and a second pressure sensor with a second pressure measurement range, wherein the first and second pressure sensors are arranged in such a manner that they can measure the pressure in a common measurement volume, wherein the first and second pressure measurement ranges overlap in an overlap pressure measurement range, and wherein the method comprises the steps of: aa) reading out (101) a first measurement signal from the first pressure sensor and a second measurement signal from the second pressure sensor substantially at the same time while the pressure in the common measurement volume is in the overlap pressure measurement range; bb) stipulating (102) the first measurement signal which has been read out as the adjustment point for the second pressure sensor; cc) determining (103) at least one calibration parameter, in particular a gas-dependent calibration parameter, for the second pressure sensor as a function of the first measurement signal, as a function of the adjustment point for the second pressure sensor, as stipulated in step bb), and as a function of the second measurement signal. The invention also relates to a method for operating a vacuum process plant, to an apparatus for carrying out the method and to a computer program product.
G01L 9/00 - Mesure de la pression permanente, ou quasi permanente d’un fluide ou d’un matériau solide fluent par des éléments électriques ou magnétiques sensibles à la pression; Transmission ou indication par des moyens électriques ou magnétiques du déplacement des éléments mécaniques sensibles à la pression, utilisés pour mesurer la pression permanente ou quasi permanente d’un fluide ou d’un matériau solide fluent
G01L 21/12 - Mesure des modifications de la résistance électrique des organes de mesure, p.ex. des filaments; Indicateurs de vide du type Pirani
G01L 21/34 - Indicateurs de vide en faisant usage des effets d'ionisation en utilisant des tubes électriques à décharge à cathodes froides
G01L 27/00 - Test ou étalonnage des appareils pour la mesure de la pression des fluides
G01L 15/00 - Dispositifs ou appareils pour la mesure simultanée de plusieurs valeurs de la pression des fluides
Method for operating a group 1 of pressure sensors which are arranged in such a manner that they can measure the pressure in a common measurement volume 2, wherein the group of pressure sensors comprises at least a first pressure sensor 1' with a first pressure measurement range and a second pressure sensor 1'' with a second pressure measurement range, wherein the first and second pressure measurement ranges overlap in an overlap pressure measurement range, wherein the first and second pressure sensors are each based on an indirect pressure measurement principle and are configured to output a measurement signal calibrated to a reference gas, and wherein the method comprises the steps of: a) providing calibration data specific to the type of gas for the first measurement signal and for the second measurement signal, which calibration data describe a dependence of the first and second measurement signals on the effective pressure and on a list of types of gas, respectively; b) recording a first and a second measured value of the first and second measurement signals, respectively; c) determining a resultant type of gas which best matches the combination of the recorded first measured value and the recorded second measured value, taking into account the first and second calibration data. In one variant, a resultant pressure which is independent of the type of gas is additionally determined. The invention is also directed to an apparatus for carrying out the method and to a computer program product.
G01L 9/12 - Mesure de la pression permanente, ou quasi permanente d’un fluide ou d’un matériau solide fluent par des éléments électriques ou magnétiques sensibles à la pression; Transmission ou indication par des moyens électriques ou magnétiques du déplacement des éléments mécaniques sensibles à la pression, utilisés pour mesurer la pression permanente ou quasi permanente d’un fluide ou d’un matériau solide fluent en faisant usage des variations de la capacité
The invention relates to a method (100) for detecting pressure in a vacuum system, said method having the following steps: a) generating (101) a plasma in a sample chamber which is fluid-dynamically connected to the vacuum system and electrically contacts a first electrode and a second electrode; b) measuring (102) the strength of an electric current flowing between the first electrode and the second electrode through the plasma; c) measuring (103) a first radiation intensity of an electromagnetic radiation of a first wavelength range being emitted from the plasma, said first wavelength range containing at least one first emission line of a first plasma species of a first chemical element; d) measuring (104) a second radiation intensity of an electromagnetic radiation of a second wavelength range being emitted from the plasma, said second wavelength range containing a second emission line of the first plasma species of the first chemical element or of a second plasma species of the first chemical element, wherein the second emission line lies outside of the first wavelength range; and e) detecting (105) the pressure in the vacuum system as a function of the measured current strength, the measured first radiation intensity, and the measured second radiation intensity. The invention additionally relates to a vacuum pressure sensor.
The invention relates to a vacuum-tight electrical feedthrough (10) comprising: - an electrically insulating insulator element (2) having a through-opening (23), a first boundary face (21) adjacent to the through-opening, and a second boundary face (22) likewise adjacent to the through-opening and opposite the first boundary face, and - an electrically conductive conductor element (1), which extends through the through-opening (23) and is connected to the insulator element (2) in a vacuum-tight manner along a circumferential line of the conductor element (1), wherein the insulator element (2) is transparent to electromagnetic radiation (25) within an optical wavelength range, and wherein the first boundary face (21) and/or the second boundary face (22) is designed as a curved face, in particular a convex or concave face. The invention also relates to a vacuum pressure sensor having the vacuum-tight electrical feedthrough and to a method for measuring the intensity of electromagnetic radiation.
The invention relates to a capacitive vacuum measuring cell having a first housing body (1) with a membrane (2) which is arranged at a distance therefrom so as to form a seal in the edge region (3) in such a way that a reference vacuum space (9) is formed in between, wherein opposite surfaces (7, 8) of the first housing body and of the membrane (2) comprise at least one electrode (G, G1, G2,... Gn; M1, M2,... Mn). A second housing body (4) is provided so as to form a seal with respect to the membrane (2) in the edge region and forms, with said membrane, a measuring vacuum space (10) in which connection means (5) for connection to a process space are present. In this case, the electrode (G, G1, G2,... Gn; M1, M2,... Mn) comprises, on the housing surface (7) and/or the membrane surface (8), at least two housing electrodes (G1, G2,... Gn) which are electrically insulated with respect to one another and/or membrane electrodes (M1, M2,... Mn) which are arranged in such a manner that they form at least two measuring capacitances (C1, C2,... Cn) with at least one opposite electrode (G, M), as a result of which it is possible to capacitively detect the deflection of the membrane at a plurality of points. The housing electrode (G) or the housing electrodes (G1, G2,... Gn) and/or the membrane electrode (M) or the membrane electrodes (M1, M2,... Mn) can be operatively connected to a signal processing unit in this case.
G01L 9/00 - Mesure de la pression permanente, ou quasi permanente d’un fluide ou d’un matériau solide fluent par des éléments électriques ou magnétiques sensibles à la pression; Transmission ou indication par des moyens électriques ou magnétiques du déplacement des éléments mécaniques sensibles à la pression, utilisés pour mesurer la pression permanente ou quasi permanente d’un fluide ou d’un matériau solide fluent
The invention relates to an ionization vacuum measuring cell (10) comprising an evacuable housing (12) with a measurement connection for a vacuum to be measured at an end portion; a measurement chamber (14) in the housing (12), said measurement chamber being fluidically connected to the measurement connection, wherein the measurement chamber (14) is designed as a replaceable component; and a first and a second electrode (16, 18) in the measurement chamber (14), said electrodes being substantially coaxial to an axis and being arranged at a distance from each other. The measuring cell further comprises an electrically insulating and vacuum-tight feedthrough (20) for an electric supply to the second electrode (18) and a magnetization assembly which is designed to generate a magnetic field in the ionization chamber. According to the invention, the measurement chamber (14), in particular at least one of the electrodes (16, 18), comprises a magnetic material.
The invention relates to a method for adjusting a pressure in a pressure cell, the method consisting in determining a measurement signal (x), which is at least proportional to a measured pressure in the pressure cell, generating an output signal (y) from the measurement signal (x) with the aid of a filter unit (10) having a transfer function by at least reducing, preferably eliminating, a noise signal contained in the measurement signal (x), adjusting the pressure in the pressure cell at least in proportion to the output signal (y), determining a change of the measurement signal (x) over time, and adjusting the transfer function depending on said change of the measurement signal (x) over time. The invention further relates to a measurement cell arrangement.
G01D 1/16 - Dispositions pour la mesure donnant des résultats autres que la valeur instantanée d'une variable, d'application générale donnant une valeur qui est une fonction de plusieurs valeurs, p.ex. produit ou rapport
G01D 3/032 - Dispositions pour la mesure prévues pour les objets particuliers indiqués dans les sous-groupes du présent groupe pour atténuer les influences indésirables, p.ex. température, pression par élimination des signaux indésirables
G01L 19/08 - Moyens pour l'indication ou l'enregistrement, p.ex. pour l'indication à distance
12.
METHOD FOR PROCESSING A MEASUREMENT SIGNAL FROM A PRESSURE MEASUREMENT CELL, AND A MEASUREMENT CELL ARRANGEMENT
The invention relates to a method for determining a pressure in a pressure cell, the method consisting in determining a measurement signal (x), which is at least proportional to a measured pressure in the pressure cell, generating an output signal (y) from the measurement signal (x) with the aid of a filter unit (10) having a transfer function by at least reducing, preferably eliminating, a noise signal contained in the measurement signal (x), determining a change of the measurement signal (x) over time, and adjusting the transfer function depending on said change of the measurement signal (x) over time. The invention further relates to a measurement cell arrangement.
G01D 1/16 - Dispositions pour la mesure donnant des résultats autres que la valeur instantanée d'une variable, d'application générale donnant une valeur qui est une fonction de plusieurs valeurs, p.ex. produit ou rapport
G01D 3/032 - Dispositions pour la mesure prévues pour les objets particuliers indiqués dans les sous-groupes du présent groupe pour atténuer les influences indésirables, p.ex. température, pression par élimination des signaux indésirables
G01L 19/08 - Moyens pour l'indication ou l'enregistrement, p.ex. pour l'indication à distance
brevets
