Method for operating a group 1 of pressure sensors which are arranged in such a manner that they can measure the pressure in a common measurement volume 2, wherein the group of pressure sensors comprises at least a first pressure sensor 1′ with a first pressure measurement range and a second pressure sensor 1″ with a second pressure measurement range, wherein the first and second pressure measurement ranges overlap in an overlap pressure measurement range, wherein the first and second pressure sensors are each based on an indirect pressure measurement principle and are configured to output a measurement signal calibrated to a reference gas, and wherein the method comprises the steps of: a) providing calibration data specific to the type of gas for the first measurement signal and for the second measurement signal, which calibration data describe a dependence of the first and second measurement signals on the effective pressure and on a list of types of gas, respectively; b) recording a first and a second measured value of the first and second measurement signals, respectively; c) determining a resultant type of gas which best matches the combination of the recorded first measured value and the recorded second measured value, taking into account the first and second calibration data. In one variant, a resultant pressure which is independent of the type of gas is additionally determined. The invention is also directed to an apparatus for earring out the method and to a computer program product.
A method for operating a group of pressure sensors is provided. First and second pressure sensors respectively have first and second pressure measurement ranges, and are arranged to measure the pressure in a common measurement volume, and have measurement ranges that overlap in a range. The method comprises: aa) reading out first and second measurement signals respectively from the first and second pressure sensors substantially simultaneously while the pressure in the common measurement volume is in the overlapping range; bb) stipulating the first measurement signal which has been read out as the adjustment point for the second pressure sensor; cc) determining at least one calibration parameter, in particular a gas-dependent calibration parameter, for the second pressure sensor as a function of the first measurement signal, as a function of the adjustment point for the second pressure sensor, as stipulated in bb), and as a function of the second measurement signal.
G01L 21/34 - Indicateurs de vide en faisant usage des effets d'ionisation en utilisant des tubes électriques à décharge à cathodes froides
G01L 21/32 - Indicateurs de vide en faisant usage des effets d'ionisation en utilisant des tubes électriques à décharge à cathodes thermioniques
G01L 27/00 - Test ou étalonnage des appareils pour la mesure de la pression des fluides
G01L 9/00 - Mesure de la pression permanente, ou quasi permanente d’un fluide ou d’un matériau solide fluent par des éléments électriques ou magnétiques sensibles à la pression; Transmission ou indication par des moyens électriques ou magnétiques du déplacement des éléments mécaniques sensibles à la pression, utilisés pour mesurer la pression permanente ou quasi permanente d’un fluide ou d’un matériau solide fluent
3.
METHOD FOR DETERMINING A PRESSURE IN A PRESSURE MEASUREMENT CELL AND A MEASUREMENT CELL ASSEMBLY
The invention relates to a method and to a measurement cell assembly for determining a pressure in a pressure cell (2) are given, wherein the method consists in that a measurement signal (x) is determined, which is at least proportional to a measured pressure in the pressure cell (2), and in that the measurement signal (x) is filtered by means of a first filter unit (10) having a low-pass characteristic in order to produce an output signal (y), wherein the low-pass characteristics of the first filter unit (10) is defined by means of a first damping factor (α1). The method is characterized in that an input difference (x_diff), which results from a difference between the output signal (y) and the measurement signal (x), is filtered by means of a second filter unit (20) having a low-pass characteristic to determine an output difference, wherein the low-pass characteristic of the second filter unit (20) is defined by means of a second damping factor (α2), and in that the first damping factor (α1) of the first filter unit (10) is determined on the basis of the output difference of the second filter unit (20).
G01L 9/00 - Mesure de la pression permanente, ou quasi permanente d’un fluide ou d’un matériau solide fluent par des éléments électriques ou magnétiques sensibles à la pression; Transmission ou indication par des moyens électriques ou magnétiques du déplacement des éléments mécaniques sensibles à la pression, utilisés pour mesurer la pression permanente ou quasi permanente d’un fluide ou d’un matériau solide fluent
Vacuum-tight electrical feedthrough 10, comprising
an electrically insulating insulator element 2 having a through-opening 23, having a first boundary surface 21 adjacent to the through-opening, and having a second boundary surface 22 also adjacent to the through-opening and opposite to the first boundary surface, and
an electrically conductive conductor element 1 which extends through the through-opening 23 and which is connected to the insulator element 2 in a vacuum-tight manner along a circumferential line of the conductor element 1,
Vacuum-tight electrical feedthrough 10, comprising
an electrically insulating insulator element 2 having a through-opening 23, having a first boundary surface 21 adjacent to the through-opening, and having a second boundary surface 22 also adjacent to the through-opening and opposite to the first boundary surface, and
an electrically conductive conductor element 1 which extends through the through-opening 23 and which is connected to the insulator element 2 in a vacuum-tight manner along a circumferential line of the conductor element 1,
wherein the insulator element 2 is transmissive to electromagnetic radiation 25 in an optical wavelength range, and
Vacuum-tight electrical feedthrough 10, comprising
an electrically insulating insulator element 2 having a through-opening 23, having a first boundary surface 21 adjacent to the through-opening, and having a second boundary surface 22 also adjacent to the through-opening and opposite to the first boundary surface, and
an electrically conductive conductor element 1 which extends through the through-opening 23 and which is connected to the insulator element 2 in a vacuum-tight manner along a circumferential line of the conductor element 1,
wherein the insulator element 2 is transmissive to electromagnetic radiation 25 in an optical wavelength range, and
wherein the first boundary surface 21 and/or the second 22 boundary surface is formed as a curved surface, in particular as a convex or concave surface.
Vacuum-tight electrical feedthrough 10, comprising
an electrically insulating insulator element 2 having a through-opening 23, having a first boundary surface 21 adjacent to the through-opening, and having a second boundary surface 22 also adjacent to the through-opening and opposite to the first boundary surface, and
an electrically conductive conductor element 1 which extends through the through-opening 23 and which is connected to the insulator element 2 in a vacuum-tight manner along a circumferential line of the conductor element 1,
wherein the insulator element 2 is transmissive to electromagnetic radiation 25 in an optical wavelength range, and
wherein the first boundary surface 21 and/or the second 22 boundary surface is formed as a curved surface, in particular as a convex or concave surface.
The invention further relates to a vacuum pressure sensor having the vacuum-tight electrical feedthrough and a method for measuring a radiation intensity of electromagnetic radiation.
The invention relates to a method 100 for determining a pressure in a vacuum system, wherein the method comprises the steps of:
a) generating 101 a plasma in a sample chamber which is fluid-dynamically connected to the vacuum system and which is in electrical contact with a first electrode and a second electrode;
b) measuring 102 a current intensity of an electrical current flowing through the plasma between the first electrode and the second electrode;
c) measuring 103 a first radiation intensity of electromagnetic radiation of a first wavelength range which is emitted from the plasma, wherein the first wavelength range contains at least a first emission line of a first plasma species of a first chemical element;
d) measuring 104 a second radiation intensity of electromagnetic radiation of a second wavelength range which is emitted from the plasma, wherein the second wavelength range contains a second emission line of the first plasma species of the first chemical element or of a second plasma species of the first chemical element, and wherein the second emission line is outside the first wavelength range; and
e) determining 105 the pressure in the vacuum system as a function of the measured current intensity, the measured first radiation intensity, and the measured second radiation intensity. Further, the invention relates to a vacuum pressure sensor.
The invention relates to an ionization vacuum measuring cell (10) comprising an evacuable housing (12) with a measurement connection for a vacuum to be measured at an end portion; a measurement chamber (14) in the housing (12), said measurement chamber being fluidically connected to the measurement connection, wherein the measurement chamber (14) is designed as a replaceable component; and a first and a second electrode (16, 18) in the measurement chamber (14), said electrodes being substantially coaxial to an axis and being arranged at a distance from each other. The measuring cell further comprises an electrically insulating and vacuum-tight feedthrough (20) for an electric supply to the second electrode (18) and a magnetization assembly which is designed to generate a magnetic field in the ionization chamber. According to the invention, the measurement chamber (14), in particular at least one of the electrodes (16, 18), comprises a magnetic material.
G01L 21/30 - Indicateurs de vide en faisant usage des effets d'ionisation
G01L 21/34 - Indicateurs de vide en faisant usage des effets d'ionisation en utilisant des tubes électriques à décharge à cathodes froides
G01N 27/60 - Recherche ou analyse des matériaux par l'emploi de moyens électriques, électrochimiques ou magnétiques en recherchant les variables électrostatiques
G01N 27/62 - Recherche ou analyse des matériaux par l'emploi de moyens électriques, électrochimiques ou magnétiques en recherchant les décharges électriques, p.ex. l'émission cathodique
G01N 27/66 - Utilisation de l'onde ou de la radiation des particules pour ioniser un gaz, p.ex. dans une chambre d'ionisation et mesure de l'intensité ou de la tension électriques
G01N 27/68 - Utilisation de la décharge électrique pour ioniser un gaz
G01N 27/70 - Utilisation de la décharge électrique pour ioniser un gaz et mesure de l'intensité ou de la tension électriques
H01J 41/06 - Tubes à décharge et moyens structurellement associés pour la mesure de la pression de gaz avec ionisation au moyen de cathodes froides
7.
Method for processing a measurement signal from a pressure measurement cell, and a measurement cell arrangement
Method for determining a pressure in a pressure cell, the method consisting in determining a measuring signal (x) that is at least proportional to a measured pressure in the pressure cell, generating an output signal (y) from the measuring signal (x) using a filter unit (10) comprising a transfer function by at least reducing, preferably eliminating, a noise signal contained in the measuring signal determining a change over time of the measuring signal (x), and setting the transfer function as a function of the change over time of the measuring signal (x). A measuring cell arrangement is also specified.
G01D 3/036 - Dispositions pour la mesure prévues pour les objets particuliers indiqués dans les sous-groupes du présent groupe pour atténuer les influences indésirables, p.ex. température, pression sur les dispositions de mesure elles-mêmes
G01L 19/08 - Moyens pour l'indication ou l'enregistrement, p.ex. pour l'indication à distance
Arrangement with capacitive pressure-measuring cell has a diaphragm for measuring vacuum pressure and a printed circuit board acting as a temperature sensor and another electronic component designed as a microchip that contains a digital signal processor with a temperature-to-digital converter and a capacitance-to-digital converter using a time measuring method. The converters determine temperature and capacitance of the cell in comparison to a reference resistor for temperature arranged on the printed circuit board and reference capacitor for capacitance for the pressure to be measured dependent on deformation of the diaphragm. A temperature-corrected pressure signal derived from the two measured signals uses correlation, the measured signals having been determined in advance from a calibration process, and the temperature-corrected pressure signal is provided as a pressure signal at the signal output for further processing. In this manner there is quick pressure measurement with high measuring accuracy.
G01L 9/00 - Mesure de la pression permanente, ou quasi permanente d’un fluide ou d’un matériau solide fluent par des éléments électriques ou magnétiques sensibles à la pression; Transmission ou indication par des moyens électriques ou magnétiques du déplacement des éléments mécaniques sensibles à la pression, utilisés pour mesurer la pression permanente ou quasi permanente d’un fluide ou d’un matériau solide fluent
G01L 9/12 - Mesure de la pression permanente, ou quasi permanente d’un fluide ou d’un matériau solide fluent par des éléments électriques ou magnétiques sensibles à la pression; Transmission ou indication par des moyens électriques ou magnétiques du déplacement des éléments mécaniques sensibles à la pression, utilisés pour mesurer la pression permanente ou quasi permanente d’un fluide ou d’un matériau solide fluent en faisant usage des variations de la capacité
G01L 13/02 - Dispositifs ou appareils pour la mesure des différences entre plusieurs valeurs de la pression des fluides en utilisant des organes ou des pistons élastiquement déformables comme éléments sensibles
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