The invention relates to a method for joining a first part (10) to a second part (20) made of silicon, wherein the second part (20) has a receiving opening (21), a stop opening (31) separated from the receiving opening (21) by a frangible portion (32) of the second part, and a notch (33) formed in the frangible portion (32) of the second part (20), the method comprising a step of: - inserting the first part (10) into the receiving opening (21) of the second part (20) in order to join the second part (20) to the first part (10), wherein the insertion of the first part (10) into the opening (21) of the second part (20) generates mechanical stress on the frangible portion (32) of the second part (20), causing a fracture (36) to occur in the frangible portion (32) from the notch (33), the fracture (36) extending through the frangible portion (32) from the receiving opening (21) to the stop opening (31).
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS) (France)
UNIVERSITE DE FRANCHE-COMTE (France)
Inventeur(s)
Sworowski, Marc
Vuillemin, Cédric
Ameur, Haythem
Bourbon, Gilles
Le Moal, Patrice
Abrégé
The invention relates to a method for controlling a microelectromechanical system by means of an electrical control signal alternating between a maximum voltage value (Vmax) and a minimum voltage value (Vmin), wherein, during the transition from the maximum voltage value (Vmax) to the minimum voltage value (Vmin), the value of the voltage of the electrical control signal monotonously decreases from the maximum voltage value (Vmax) to the minimum voltage value (Vmin), which signal comprising, in sequential order: - a first slope between the maximum voltage value (Vmax) and a first voltage threshold value (Vend), - a second slope, having a lower absolute value than the first slope, between the first voltage threshold value (Vend) and a second voltage threshold value (Vstart), and - a third slope, having a higher absolute value than the second slope, between the second voltage threshold value (Vstart) and the minimum voltage value (Vmin).
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS) (France)
UNIVERSITE DE FRANCHE-COMTE (France)
Inventeur(s)
Côte, Thierry
Minotti, Patrice
Bourbon, Gilles
Le Moal, Patrice
Abrégé
The invention relates to a microelectromechanical system (10), comprising a drive module (200) comprising: - a stationary drive part (210), - a movable drive part (220), and - a suspension (230), the movable drive part (220) being capable of being moved with respect to the stationary drive part (210) in a first direction (A) when exposed to an electrostatic force which causes an elastic deformation of the suspension (230), and the movable drive part (220) being capable of being moved with respect to the stationary drive part (210) in a second direction (B), opposite to the first direction (A), when exposed to an elastic return force generated by the suspension (230), the actuator (11) further comprising an abutment (240) which limits the movement of the first movable part (220) in the second direction (B) so that the elastic force generated by the suspension (230) is not cancelled out.
G04C 3/12 - Horloges ou montres électromécaniques indépendantes d'autres garde-temps et dans lesquelles le mouvement est entretenu par des moyens électriques dans lesquelles le mouvement est régulé par un oscillateur mécanique autre qu'un pendule ou un balancier, p.ex. par un diapason entraîné par des moyens magnétostrictifs
B81B 3/00 - Dispositifs comportant des éléments flexibles ou déformables, p.ex. comportant des membranes ou des lamelles élastiques
4.
ELECTROMECHANICAL MICROSYSTEM FOR MOVING A MECHANICAL PART IN TWO OPPOSITE DIRECTIONS
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS) (France)
UNIVERSITE DE FRANCHE-COMTE (France)
Inventeur(s)
Côte, Thierry
Minotti, Patrice
Bourbon, Gilles
Le, Moal Patrice
Abrégé
The invention relates to an electromechanical microsystem, comprising a stand and an actuator, the actuator comprising a drive module comprising: - a fixed drive portion (210) fixedly mounted to the stand and comprising a stationary comb (211) with fingers (213); - a movable drive portion (220) mounted so as to move relative to the stand and comprising a movable comb (221) with fingers (223); - a locking mechanism movable between an initial unlocked configuration and a final locked configuration; and wherein the movable comb (221) is arranged opposite the fixed comb (211) so that, when the locking mechanism is in the initial unlocked configuration, the fingers (223) of the movable comb (221) are not engaged between the fingers (213) of the fixed comb (211) and, when the locking mechanism is in the final locked configuration, the fingers (223) of the movable comb (221) are engaged between the fingers (213) of the fixed comb (211) and the locking mechanism (500) prevents the fingers (223) of the movable comb (221) being disengaged from between the fingers (213) of the fixed comb (211).
The present invention relates to a MEMS deformation sensor for measuring a relative movement between two regions of a structure, the sensor comprising: - a first portion (2) and a second portion (3) that are movable with respect to one another along a direction of measurement (X); - a thrust element (4) mounted fixed with respect to the first portion; - a first electrode (A) and a second electrode (B) that are capable of being raised to different electrical potentials, each mounted fixed with respect to the second portion; - a connecting portion (I) forming an electrical link between the first electrode and the second electrode, the thrust element applying a load to the connecting portion when the first portion moves with respect to the second portion along the direction of measurement beyond a predetermined distance, the electrical link being broken under the effect of the load.
G01B 7/16 - Dispositions pour la mesure caractérisées par l'utilisation de techniques électriques ou magnétiques pour mesurer les déformations dans un solide, p.ex. au moyen d'une jauge de contrainte à résistance
6.
STRAIN SENSOR WITH MEASUREMENT DISCRIMINATION ACCORDING TO THE DEFORMATION DIRECTION
ETAT FRANÇAIS REPRESENTE PAR LE DELEGUE GENERAL POUR L'ARMEMENT (France)
SILMACH (France)
Inventeur(s)
Cote, Thierry
Sadoulet, Vianney
Minotti, Patrice
Xalter, Vincent
Girardin, Pascal
Abrégé
A passive strain sensor (C2) includes a system for detecting a variation in the distance between two points or regions of a structure, and a carrier (1) having first and second portions (1a, 1b) configured for attachment to said points or regions. Said system comprises a measuring assembly (13) carried by the first portion (1a) and actuatable only in one measurement direction to measure and store a measurement associated with at least one strain in a measurement direction, and an actuating device (12) comprising an intermediate assembly (15) with an actuating member (15c) of the measuring assembly (13), and an actuating assembly (14) having a push portion (14c) opposite the intermediate assembly (15) and configured such that the actuating member (15c) is moved relative to the measuring assembly (13) only when the second portion (1b) moves in the measurement direction.
G01B 5/14 - Dispositions pour la mesure caractérisées par l'utilisation de techniques mécaniques pour mesurer une distance ou une marge entre des objets ou des ouvertures espacés
G01B 5/30 - Dispositions pour la mesure caractérisées par l'utilisation de techniques mécaniques pour mesurer la déformation dans un solide, p.ex. indicateur de déformation mécanique
7.
METHOD FOR COUNTING EVENTS OCCURRING DURING A PERIOD T AND ASSOCIATED MECHANICAL EVENT COUNTERS
ETAT FRANCAIS REPRESENTE PAR LE DELEGUE GENERAL POUR L'ARMEMENT (France)
SILMACH (France)
Inventeur(s)
Louvigné, Pierre-François
Minotti, Patrice
Sadoulet, Vianney
Girardin, Pascal
Haye, Charles
Abrégé
The invention relates to a method for counting events occurring during a period T carried out by a mechanical counter comprising two toothed wheels with the same pitch, the occurrence of an event causing the rotation of each wheel by an angle corresponding to the pitch of the teeth thereof, said method comprising: a first step of counting or calculating, for each wheel at the end of T, the difference in the number of teeth between the initial and final position thereof, said step being at least partially carried out either by optical means, requiring the presence on each wheel of at least one marker, or by means for measuring the angular displacement of each wheel and associated calculation means; and a second step of calculating the number of occurred events N in accordance with the difference between the values counted or measured and in accordance with the number of teeth of the wheels.
G01D 5/04 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensible; Moyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminé; Transducteurs non spécialement adaptés à une variable particulière utilisant des moyens mécaniques utilisant des engrenages
G01B 5/30 - Dispositions pour la mesure caractérisées par l'utilisation de techniques mécaniques pour mesurer la déformation dans un solide, p.ex. indicateur de déformation mécanique
G01D 5/245 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensible; Moyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminé; Transducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques produisant des impulsions ou des trains d'impulsions utilisant un nombre variable d'impulsions dans un train
G01P 15/03 - Mesure de l'accélération; Mesure de la décélération; Mesure des chocs, c. à d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie en utilisant des moyens non électriques
8.
AMPLIFIED PASSIVE AND REVERSIBLE MICRO-SENSOR OF DEFORMATIONS
ÉTAT FRANÇAIS représenté par LE DÉLÉGUÉ GÉNÉRAL POUR, L'ARMEMENT (France)
SILMACH (France)
Inventeur(s)
Louvigné, Pierre-François
Minotti, Patrice
Vescovo, Paul
Sadoulet, Vianney
Abrégé
The invention relates to a micro-sensor comprising: a substrate comprising a first portion and a second portion; a third portion and fourth portion provided between said portions and connected to the first portion and the second portion respectively by an elastic member; detection and counting means comprising: a counting gear, a third beam capable of meshing with the gear, means for amplifying the value of a relative movement between said portions and comprising: a first beam attached at one end thereof to the third portion and at the other end thereof to a plate, a second beam attached at one end thereof to the fourth portion and at the other end thereof to said plate, the third beam being attached on one side to the plate and comprising a tooth capable of meshing with said gear.
G01D 1/04 - Dispositions pour la mesure donnant des résultats autres que la valeur instantanée d'une variable, d'application générale donnant des valeurs intégrées
G01D 5/04 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensible; Moyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminé; Transducteurs non spécialement adaptés à une variable particulière utilisant des moyens mécaniques utilisant des engrenages
G01B 5/30 - Dispositions pour la mesure caractérisées par l'utilisation de techniques mécaniques pour mesurer la déformation dans un solide, p.ex. indicateur de déformation mécanique
G06M 1/04 - Caractéristiques d'ordre général pour entraîner l'étage du rang le plus bas
G08G 1/065 - Systèmes de commande du trafic pour véhicules routiers par comptage des véhicules dans une section de la route ou dans un parc de stationnement, c. à d. en comparant le nombre des arrivants et celui des partants
G06M 3/00 - Compteurs avec possibilités supplémentaires
9.
PASSIVE INDEXING OF A MOVABLE ELEMENT HAVING TEETH
The invention relates to a device including: a movable element (1) comprising teeth (11; 11i, i, 11i+1, 11i+2,11i+3, 11i+4); a driving element (2) for engaging with the teeth (11; 11i, 11i+1, 11i+2,11i+3, 11i+4) of the movable element (1) so as to set the movable element (1) in motion in a direction of movement; an actuator element (3) capable of generating an alternating movement so as to move the driving element (2) according to at least two phases, i.e. a driving phase, during which the driving element (2) is engaged with a tooth (11; 11i, 11i+1, 11i+2,11i+3, 11i+4) of the movable element (1), and a return phase without driving, during which the driving element (2) is shifted with respect to the movable element (1); and a first indexing element (4), which includes a first indexing finger (41) to be positioned between two teeth (11; 11i, 11i+1, 11i+2,11i+3, 11i+4) of the movable element (1), and which is connected to the actuator element (3) in order to move the driving element (2) and the first indexing finger (41) simultaneously.
G01M 1/04 - Adaptation des ensembles de support destinés à recevoir l'objet à tester
G04C 3/00 - Horloges ou montres électromécaniques indépendantes d'autres garde-temps et dans lesquelles le mouvement est entretenu par des moyens électriques
H02N 1/00 - Générateurs ou moteurs électrostatiques utilisant un porteur mobile de charge électrostatique qui est solide
F16H 31/00 - Autres transmissions avec organes à roue libre ou d'autres organes d'entraînement intermittent
ÉTAT FRANÇAIS REPRÉSENTÉ PAR LE DÉLÉGUÉ GÉNÉRAL POUR L'ARMEMENT (France)
SILMACH (France)
Inventeur(s)
Louvigné, Pierre-François
Minottl, Patrice
Vescovo, Paul
Walter, Vincent
Abrégé
The present invention relates to the field of microsensors, and specifically to a passive, reversible deformation sensor, particularly a sensor for detecting deformation cycles in a direction OX of a structure, specifically during cycles of temperature or mechanical stresses to which said structure is subjected, said sensor comprising a means (4, 5, 6) for detecting and, preferably, counting cycles of variations in the distance between two points or areas of a structure, said means comprising a substrate having first and second portions (41, 44) capable of being attached to said two points or areas of the structure, respectively, the detection means being combined with each of said first and second portions of the substrate, characterized in that the detection means comprises means (541, 542, 543, 551, 552, 553, 561, 562, 563) for distinguishing between at least two different thresholds of cycles of variations in distance.
G01B 3/30 - Barres, blocs, ou bandes où la distance entre deux faces est fixe, mais peut être réglée à l'avance, p.ex. calibres de longueur, calibres d'épaisseur
G01B 7/16 - Dispositions pour la mesure caractérisées par l'utilisation de techniques électriques ou magnétiques pour mesurer les déformations dans un solide, p.ex. au moyen d'une jauge de contrainte à résistance
11.
METHOD AND DEVICE FOR MOVING AN ELEMENT TO BE DRIVEN USING AN ACTUATING ELEMENT FORMED BY ETCHING IN A SEMICONDUCTOR MATERIAL
The invention concerns a device comprising an element to be driven (10) and a driving element (250) designed to be urged into engagement with the element to be driven (10) and an actuating element (202) adapted to generate a reciprocating movement to move the driving element (250), the driving element (250) and the actuating element (202) being formed by etching in a semiconductor material block. The invention is characterized in that it is arranged such that: during a first alternation (a) of the movement generated by the actuating element (202), the driving element (250) is urged into engagement with the element to be driven (10) to pull the element to be driven (10), during a second alternation (b) in the opposite direction generated by the actuating element (202), the driving element (250) slides on the element to be driven (10), such that the element to be driven (10) is displaced in a step-by-step movement by the driving element (250).
The invention concerns an element to be driven (10), a driving element (250) designed to be urged into engagement with the element to be driven (10) and an actuating element (200) adapted to move the driving element (250) so that it drives the element to be driven (10) in step-by-step displacement, the driving element (250) and the actuating element (200) being formed by etching in a semiconductor material wafer (21). The invention is characterized in that it comprises elastic prestressing means (212) for maintaining the driving element (250) in contact with the element to be driven (10).
The invention relates to a drive device (10) formed by etching a wafer (11). Said drive device (10) comprises a drive element (250) that can sequentially mesh with a driven element (100, 104, 106) and comprises an actuating element (20, 40, 60) that can displace the drive element (250) according to a hysteresis movement whereby driving the driven element (100, 104, 106). The invention is characterized in the drive element (250, 270, 290) is placed on an outer edge of the wafer (11) whereby enabling an interfacing of the drive element with a driven element placed opposite therefrom. The invention also relates to a clockwork mechanism comprising a drive device of the aforementioned type and an input gear that can be rotationally driven by the drive device.
G04C 3/12 - Horloges ou montres électromécaniques indépendantes d'autres garde-temps et dans lesquelles le mouvement est entretenu par des moyens électriques dans lesquelles le mouvement est régulé par un oscillateur mécanique autre qu'un pendule ou un balancier, p.ex. par un diapason entraîné par des moyens magnétostrictifs