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2014
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Invention
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Drawing device and drawing method. Provided are a drawing device and drawing method which, when d... |
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Invention
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Discharge lamp. The purpose of the present invention is to form an electrode having high weld str... |
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Invention
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Excimer lamp and method for producing same. Provided is an excimer lamp that prevents damage to a... |
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Invention
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Illumination device. This illumination device comprises: a plurality of light sources which gener... |
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Invention
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Discharge lamp, method for producing discharge lamp, and electrode for discharge lamp. The object... |
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P/S
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Discharge tubes, electric, other than for lighting |
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Invention
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Discharge lamp. This discharge lamp is provided with a discharge tube, and a pair of electrodes d... |
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Invention
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Exposure device. The present invention is a method for accurately detecting a pattern formation p... |
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Invention
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Discharge lamp. Provided is a discharge lamp in which the occurrence of cracks is suppressed in t... |
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Invention
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Light source device, and exposure device provided with light source device. In this light source ... |
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2013
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Invention
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Discharge lamp. This discharge lamp comprises a discharge tube and a pair of electrodes arranged ... |
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Invention
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Method for manufacturing discharge lamp electrode. A method for manufacturing a discharge lamp el... |
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Invention
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Dust removal device and dust removal method for exposure device. Provided is a dust removal devic... |
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Invention
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Illumination monitoring apparatus and exposure apparatus provided with same. This illumination mo... |
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Invention
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Negative electrode for discharge lamp and method for manufacturing same. Provided is a negative e... |
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Invention
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Discharge lamp and method for producing discharge lamp. Provided are: a discharge lamp such that ... |
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Invention
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Maskless exposure device. An exposure device provided with: a light modulation element array in w... |
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Invention
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Light source device. This light source device is provided with: a plurality of concave surface mi... |
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Invention
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Lighting device provided with discharge lamp. This discharge lamp is provided with: a plurality o... |
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2012
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Invention
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Catadioptric projection optical system and projection exposure device equipped with same. A magni... |
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Invention
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Excimer lamp. In the present invention, an excimer lamp is provided with a light emitting tube (2... |
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Invention
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Excimer lamp. This excimer lamp is provided with a light emitting tube having an outer tube and a... |
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Invention
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Discharge lamp lighting device and lighting method. In this discharge lamp lighting method, witho... |
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Invention
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Led light source apparatus and exposure apparatus. This light source apparatus is applicable to a... |
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Invention
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Exposure light adjustment device. An exposure device is provided with: a light source; a light mo... |
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Invention
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Short arc high-pressure discharge lamp. Provided is a short arc high-pressure discharge lamp in w... |
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Invention
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Exposure device. This exposure device is provided with a light modulation element array in which ... |
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Invention
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Carbon fiber bulk. In this method for producing carbon fiber bulk, carbon fibers are aligned in t... |
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Invention
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Discharge lamp. An exposure apparatus of the present invention is provided with: a discharge lamp... |
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Invention
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Alignment device and exposure device provided with same. [Problem] To provide an alignment means ... |
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Invention
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Excimer lamp. Provided is an excimer lamp that is not only capable of effectively using irradiate... |
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2011
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Invention
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Discharge lamp. Disclosed is a discharge lamp which is provided with: a pair of electrodes that a... |
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Invention
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Exposure device. An exposure device can exposes a circuit pattern while information data is suita... |
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Invention
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Exposure device. [Problem] To provide an exposure device that can expose a circuit pattern while ... |
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Invention
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Photolithography system.
A photolithography system is equipped with a light modulator that compr... |
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Invention
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Discharge lamp. In the present invention, a discharge lamp is provided with a discharge tube fill... |
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Invention
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Projection optical system and projection exposure device. This projection optical system is equip... |
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Invention
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Projection aligner. A projection aligner comprises a projection optical system for radiating a lu... |
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Invention
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Projection aligner. [Problem] To provide a projection aligner equipped with a light-blocking mean... |
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Invention
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Transfer device. The present invention relates to a transfer device that can feed a work in a sta... |
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2010
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P/S
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Exposure machines for manufacturing semiconductor devices; exposure machines for manufacturing el... |
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Invention
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Excimer lamp. An excimer lamp has a single tubular discharge chamber configured to enclose a disc... |
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Invention
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Pneumatic levitation-type substrate conveying device. A pneumatic levitation-type substrate conve... |
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P/S
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Discharge tubes, electric, other than for lighting; exposure meters [light meter]; drying apparat... |
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P/S
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Exposure machines for manufacturing semiconductor devices, exposure machines for manufacturing el... |
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2009
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Invention
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Excimer lamp. An excimer lamp (10) is provided with a single tube-like discharge container (11) i... |
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2008
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Invention
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Lighting method of microwave excitation discharge lamp. To prevent the continuation of the abnorm... |
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Invention
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Discharge lamp.
The object of this invention is to prevent surface discharge even when a high vo... |
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Invention
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Discharge lamp. In a dielectric-barrier discharge lamp or a capacitive coupling high-frequency di... |
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P/S
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Lamps used in machines for manufacturing printed circuit boards |
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P/S
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Machines for manufacturing printed circuit boards |
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Invention
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Exposure device with mechanism for forming alignment marks and exposure process conducted by the ... |
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Invention
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Discharge lamp. It is an object to make a discharge lamp compact and radiate light isotropically.... |
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Invention
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Exposure device. The present invention presents an exposure device, which includes an optical sou... |
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2007
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Invention
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Compact projection exposure device and associated exposure process performed by the device for ex... |
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P/S
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Exposure machine for manufacturing semiconductor devices. |
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P/S
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Exposure device to form patterns on the photo-resistant coated surface of a substrate by using ul... |
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2006
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P/S
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Lamps |
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2005
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P/S
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Devices for manufacturing semiconductors and semiconductor topographies, as far as contained in c... |
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2004
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P/S
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Semiconductor manufacturing apparatus, namely exposure machines.
Lamps. |
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2003
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P/S
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LASER LIGHT PROJECTORS |
