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2023
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Invention
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Method of compensating for an effect of electrode distortion, assessment system.
Assessment syst... |
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Invention
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Apparatus for and method of reducing contamination from source material in an euv light source.
... |
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Invention
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Charged particle device and method.
The present disclosure provides a charged particle optical d... |
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Invention
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Charged particle optical device, objective lens assembly, detector, detector array, and methods. ... |
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Invention
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Target delivery system.
A target delivery system for an extreme ultraviolet (EUV) light source i... |
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Invention
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Hollow-core photonic crystal fiber based broadband radiation generator.
A broadband radiation so... |
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Invention
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A method for characterizing a manufacturing process of semiconductor devices.
A method of determ... |
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Invention
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Method for generating patterning device pattern at patch boundary.
A method for generating a mas... |
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Invention
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Guiding device and associated system.
An extreme ultraviolet radiation (EUV) source, including: ... |
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Invention
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Apparatus and method for determining a condition associated with a pellicle.
An apparatus for de... |
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Invention
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Adc calibration for microscopy. A method of calibrating analog-to-digital converters, ADCs, of a ... |
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Invention
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Scanning electron microscopy (sem) back-scattering electron (bse) focused target and method. A me... |
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Invention
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Electron-optical module. A charged particle-optical module (41) for directing charged particles a... |
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Invention
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Tunable optical system. Systems and methods for providing variable spot size and variable focus a... |
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Invention
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Systems for path compensation with a moving objective. Disclosed is a mirror set having a first m... |
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Invention
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Methods and system for determining aberrations of a projection system. Methods, and corresponding... |
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Invention
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Positioning system for an optical element of a metrology apparatus. A positioning system for an o... |
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Invention
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Parameterized inspection image simulation. An improved method, apparatus, and system for generati... |
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Invention
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Charged particle apparatus. The present invention provides a charged particle apparatus for proje... |
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Invention
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Pellicle and methods for forming pellicle for use in a lithographic apparatus. A pellicle for use... |
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Invention
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A patterning device voltage biasing system for use in euv lithography. A patterning device voltag... |
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Invention
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Method and apparatus for controlling a lithographic apparatus, and a lithographic apparatus. A co... |
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Invention
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System and method for image resolution characterization. Systems, apparatuses, and methods includ... |
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Invention
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System and method for image disturbance compensation. Systems, apparatuses, and methods include a... |
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Invention
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Method of forming a patterned layer of material, apparatus for forming a patterned layer of mater... |
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Invention
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Optical alignment system and method. An optical alignment system comprising an illumination syste... |
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Invention
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Readout design for charged particle counting detectors. A charged particle beam detector may incl... |
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Invention
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Method and apparatus for bonding substrates. A device for aligning and placing electrical compone... |
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Invention
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Mixed energy control in an euv lithography system. A system for and method of controlling extreme... |
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Invention
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Cooling device for cooling a position-sensitive component of a lithography system. A cooling devi... |
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Invention
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Illumination adjustment apparatuses and lithographic apparatuses. An illumination adjustment appa... |
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Invention
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Metrology method and associated metrology device. Disclosed is a dark-field metrology method. A f... |
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Invention
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Measuring contrast and critical dimension using an alignment sensor. A method can include directi... |
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Invention
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Euv radiation beam power reduction. A method of providing an additional EUV radiation exposure of... |
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Invention
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A multi-pass radiation device. A radiation device for generating broadband output radiation upon ... |
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Invention
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Holographic metrology apparatus and method. A method of determining a parameter of interest of a ... |
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P/S
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Machines for micro lithography and machines for use in the manufacture, fabrication and treatment... |
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P/S
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Machines for micro lithography and machines for use in the
fields of integrated circuits, semico... |
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P/S
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Registered software, namely, recorded software for the storage, processing and generation of data... |
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P/S
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Software, especially software for the storage, processing
and generation of data and graphics. |
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2022
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P/S
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Software, especially software for the storage, processing and generation of data and graphics. |
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P/S
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Micro-lithography apparatus and instruments for use in the electronics, micro-lithography, semi-c... |
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Invention
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Configuration of patterning process.
Methods for configuring a patterning process based on resul... |
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Invention
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A machine learning model using target pattern and reference layer pattern to determine optical pr... |
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Invention
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Method to predict metrology offset of a semiconductor manufacturing process.
A method for determ... |
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Invention
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A method of determining a measurement recipe and associated metrology methods and apparatuses.
A... |
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2021
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Invention
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Novel interface definition for lithographic apparatus.
A method for representing control paramet... |
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Invention
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Metrology method and system and lithographic system.
A method for measuring a parameter of inter... |
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Invention
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Methods and apparatus for acoustic metrology.
A metrology apparatus for determining one or more ... |
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Invention
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Metrology target simulation.
A method of simulating an electromagnetic response of a metrology t... |
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Invention
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Intensity order difference based metrology system, lithographic apparatus, and methods thereof.
... |
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Invention
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Feature based cell extraction for pattern regions.
Systems and methods of feature-based cell ext... |
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P/S
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Recorded software, in particular software for the storage, processing, and generation of data and... |
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Invention
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Semiconductor charged particle detector for microscopy.
A detector may be provided for a charged... |
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2020
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P/S
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Maintenance and repair services in connection with machines for use in microlithography and in th... |
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P/S
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Maintenance and repair services in connection with machines for use in the electronics, micro-lit... |
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Invention
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Methods of fitting measurement data to a model and modeling a performance parameter distribution ... |
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Invention
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Patterning device conditioning system and method.
A reticle conditioning system includes: a supp... |
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P/S
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Maintenance and repair services in connection with machines
for use in the electronics, micro-li... |
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2018
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P/S
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Computer hardware and software for the design and manufacture of semiconductor wafers and masks; ... |
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P/S
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Computer hardware and software for the design and
manufacture of semiconductor wafers and masks;... |
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2017
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P/S
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Semiconductor lithographic machines, namely, lithographic machines used to manufacture semiconduc... |
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P/S
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Computer hardware for improving lithography manufacturing
processes; computer software for impro... |
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P/S
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Computer hardware for improving lithography manufacturing processes; computer software for improv... |
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P/S
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Micro-lithography machines, namely, machines for manufacturing electronic components, integrated ... |
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2016
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P/S
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Micro-lithography equipment; machines for use in the manufacture by micro-lithography, especially... |
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2015
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P/S
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Exposure units being optical instruments and their parts, for use in lithographic machines, namel... |
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P/S
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Exposure units [optical instruments] and their parts, for
use in lithographic machines. |
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P/S
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Machine tool for mounting, demounting and remounting a
pellicle to a reticle in lithographic equ... |
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P/S
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Electronic inspection devices, data processors, computer hardware and software for defect inspect... |
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P/S
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[ Electronic inspection devices and ] computer software for inspection of semiconductor materials... |
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P/S
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Inspection tool using particle beam for inspection of semiconductor materials, devices and products |
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2014
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P/S
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Process control equipment for semiconductor wafer production, namely particle beam emitter in the... |
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P/S
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Optical measuring apparatus and instruments for measuring test wafers for the manufacture of elec... |
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P/S
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Optical measuring apparatus and instruments for measuring
test wafers for the manufacture of ele... |
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2013
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P/S
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Electronic imaging platforms in the field of inspection of semiconductor materials, namely, semic... |
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P/S
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Machinery maintenance and repair in the field of semiconductor industry; installation of semicond... |
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P/S
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Technology supervision and inspection in the field of quality control of semiconductor wafers and... |
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2012
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P/S
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testing and inspection in the field of quality control of semiconductor wafers and reticles |
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P/S
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Micro-lithography machines; machines for use in the
electronics, integrated circuit, semi-conduc... |
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2011
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P/S
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Machines for micro-lithography, namely, machines for manufacturing semiconductors; machines not i... |
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P/S
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Micro-lithography equipment; machines for use in industry in the field of electronics, integrated... |
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P/S
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Machines for micro-lithography; machines not included in
other classes, for use in the field of ... |
