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2019
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Invention
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Methods and systems for inspection of wafers and reticles using designer intent data. Methods and... |
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2015
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Invention
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Systems and methods for inspection of a specimen. Systems and methods for inspection of a specime... |
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Invention
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Methods and systems for inspection of wafers and reticles using designer intent data.
Methods an... |
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2014
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Invention
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Methods and systems for utilizing design data in combination with inspection data. Various method... |
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Invention
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Methods and systems for measuring a characteristic of a substrate or preparing a substrate for an... |
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2013
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Invention
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Methods and systems for determining a critical dimension and overlay of a specimen.
Methods and ... |
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Invention
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Dc high-voltage super-radiant free-electron based euv source. An array of spatially separated bea... |
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2012
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Invention
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Methods and systems for determining a characteristic of a wafer. Methods and systems for determin... |
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Invention
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Methods and systems for determining a critical dimension and overlay of a specimen. Methods and s... |
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2011
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Invention
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Methods and systems for monitoring a parameter of a measurement device during polishing, damage t... |
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Invention
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Methods for improved monitor and control of lithography processes. Various computer-implemented m... |
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Invention
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Systems configured to generate output corresponding to defects on a specimen. Systems configured ... |
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Invention
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Methods for accurate identification of an edge of a care area for an array area formed on a wafer... |
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2010
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Invention
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Z-stage with dynamically driven stage mirror and chuck assembly. Substrate support apparatus and ... |
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Invention
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Methods and systems for inspection of a specimen using different inspection parameters. Methods a... |
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Invention
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Process condition sensing wafer and data analysis system. A measuring device incorporating a subs... |
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Invention
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Computer-implemented methods for detecting and/or sorting defects in a design pattern of a reticl... |
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Invention
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Site based quantification of substrate topography and its relation to lithography defocus and ove... |
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Invention
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Optical imaging system with catoptric objective; broadband objective with mirror; and refractive ... |
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Invention
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Defect review using image segmentation. One embodiment pertains to a method for reviewing a poten... |
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Invention
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Methods and systems for utilizing design data in combination with inspection data.
Various metho... |
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2008
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Invention
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Measurement systems configured to perform measurements of a specimen and illumination subsystems ... |
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Invention
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Enclosure for controlling the environment of optical crystals. An enclosure that maintains the en... |
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2007
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Invention
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Method for optimizing the configuration of a scatterometry measurement system. The present applic... |
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Invention
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Apparatus and method for e-beam dark imaging with perspective control. A method of imaging using ... |
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Invention
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Contamination pinning for auger analysis. Electron spectroscopy methods and apparatus are disclos... |
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Invention
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Sharpening metal carbide emitters. A method for sharpening a metal carbide emitter tip is disclos... |
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Invention
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Pulse stretcher. A pulse stretcher includes a plurality of substantially parallel slab-like optic... |
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Invention
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Computer-implemented methods, carrier media, and systems for creating a defect sample for use in ... |
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Invention
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Computer-implemented methods, carrier media, and systems for displaying an image of at least a po... |
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Invention
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Computer-implemented methods, carrier media, and systems for determining sizes of defects detecte... |
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Invention
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Bright-field/dark-field detector with integrated electron energy spectrometer. One embodiment rel... |
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Invention
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Model-based measurement of semiconductor device features with feed forward use of data for dimens... |
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Invention
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Systems and methods for acquiring information about a defect on a specimen. Systems and methods f... |
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Invention
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Computer-implemented methods, carrier media, and systems for creating a metrology target structur... |
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Invention
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Optical measurment systems and methods. An optical measurement system includes a rotating element... |
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Invention
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Lamp with shaped wall thickness, method of making same and optical apparatus. A lamp, a method of... |
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Invention
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Fourier filters, inspection systems, and systems for fabricating fourier filters. Fourier filters... |
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Invention
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Methods for forming device structures on a wafer. Methods for forming device structures on a wafe... |
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Invention
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Methods and systems for providing illumination of a specimen for inspection. Methods and systems ... |
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2006
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Invention
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Systems configured to perform a non-contact method for determining a property of a specimen. Syst... |
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Invention
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Image quality monitoring for substrate inspection. A method for monitoring the stability of an in... |
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Invention
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Environment friendly methods and systems for template cleaning and reclaiming in imprint lithogra... |
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2005
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Invention
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Systems and methods for inspecting specimens including specimens that have a substantially rough ... |
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2004
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Invention
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Reflective electron patterning device and method of using same. One embodiment disclosed relates ... |
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2003
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Invention
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Methods for correlating backside and frontside defects detected on a specimen and classification ... |
