2024
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P/S
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Semiconductor manufacturing machines and their component
parts and fittings; flat panel display ... |
2023
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Invention
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Substrate processing apparatus.
A heat treatment unit U2 includes a heat plate 20 configured to ... |
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Invention
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Film deposition apparatus for fine pattern forming.
In a mask pattern forming method, a resist f... |
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Invention
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Substrate processing method and substrate processing apparatus.
A substrate processing method in... |
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P/S
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Semiconductor manufacturing machines and their component parts and fittings; flat panel display m... |
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Invention
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Substrate processing method.
A substrate processing apparatus includes: a mixer configured to mi... |
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Invention
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Solution treatment apparatus and cleaning method.
A cleaning method of cleaning a solution treat... |
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Invention
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Plasma monitoring system, plasma monitoring method, and monitoring device.
A plasma monitoring s... |
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Invention
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Plasma processing apparatus and rf system.
A plasma processing apparatus includes: a chamber; a ... |
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Invention
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Plasma processing apparatus, calculation method, and calculation program.
In a plasma processing... |
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Invention
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Substrate processing control method, substrate processing apparatus and storage medium.
A substr... |
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Invention
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Vacuum processing apparatus and oxidizing gas removal method.
A vacuum processing apparatus incl... |
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P/S
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Semiconductor manufacturing machines; component parts and fittings for semiconductor manufacturin... |
|
Invention
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Etching control device, etching control method, and etching control system.
An etching control d... |
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Invention
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Etching control system and etching control method.
An etching control system includes a predicti... |
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Invention
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Bonding apparatus and bonding method.
A bonding apparatus includes a first holder, a second hold... |
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Invention
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Substrate treatment apparatus and treatment solution supply method.
A substrate treatment appara... |
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Invention
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Liquid raw material supplying method and gas supply apparatus.
Provided is a method of supplying... |
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Invention
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Substrate processing method and substrate processing system. Provided is a technology for reducin... |
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Invention
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Information processing apparatus and parameter control method.
An information processing apparat... |
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Invention
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Substrate processing apparatus, substrate processing method, and storage medium thereof.
A subst... |
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Invention
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Film forming method and film forming system. Provided is a film forming method for forming a grap... |
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Invention
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Electrostatic chuck and substrate processing device. The present invention provides an electrosta... |
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Invention
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Plasma processing apparatus.
A plasma processing apparatus includes: a chamber providing a proce... |
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Invention
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Substrate processing apparatus and substrate processing method. This substrate processing apparat... |
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Invention
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Patterning a semiconductor workpiece. In certain embodiments, a method includes depositing a phot... |
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Invention
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Plasma processing device. Provided is a plasma processing device comprising: a processing vessel ... |
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Invention
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Substrate treatment system. Provided is a substrate treatment system comprising: a treatment devi... |
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Invention
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Surface modification to achieve selective isotropic etch. A surface of a substrate is modified, w... |
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Invention
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Wet etch process and methods to form air gaps between metal interconnects. Embodiments of improve... |
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Invention
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Wet etch process and method to provide uniform etching of material formed within features having ... |
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Invention
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Substrate bombardment with ions having targeted mass using pulsed bias phase control. A method of... |
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Invention
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Method of forming a moisture barrier on photosensitive organometallic oxides.
Various embodiment... |
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P/S
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Machines and instruments used for measuring and testing semiconductor manufacturing machines; com... |
|
P/S
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Machines and instruments used for measuring and testing
semiconductor manufacturing machines; co... |
2022
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P/S
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Downloadable computer software for controlling semiconductor manufacturing processes; downloadabl... |
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P/S
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Downloadable computer software for controlling semiconductor
manufacturing processes; downloadab... |
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P/S
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Semiconductor manufacturing machines and their component parts and fittings |
|
Invention
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Method and apparatus for in-situ dry development.
An embodiment etching tool includes an etch ch... |
|
P/S
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Semiconductor manufacturing machines and their component
parts and fittings. |
|
Invention
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High aspect ratio contact (harc) etch.
A method of processing a substrate that includes: flowing... |
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Invention
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Optical emission spectroscopy for advanced process characterization.
A method of characterizing ... |
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Invention
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Methods to prevent surface charge induced cd-dependent etching of material formed within features... |
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Invention
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High performance 3d compact transistor architecture.
Semiconductor devices and corresponding met... |
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Invention
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Surface modification to achieve selective isotropic etch.
A surface of a substrate is modified, ... |
|
Invention
|
Substrate bombardment with ions having targeted mass using pulsed bias phase control.
A method o... |
|
Invention
|
Method for processing a substrate.
A method of patterning a substrate includes forming a first l... |
|
Invention
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Patterning a semiconductor workpiece.
In certain embodiments, a method includes depositing a pho... |
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Invention
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Wet etch process and method to control fin height and channel area in a fin field effect transist... |
|
Invention
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Substrate processing system and condition monitoring method.
A substrate processing system is pr... |
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Invention
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Method for forming silicon-containing film and film forming apparatus.
A method for forming a si... |
|
Invention
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Method of forming silicon nitride film and film forming apparatus.
A method of forming a silicon... |
2021
|
Invention
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Substrate processing apparatus and substrate processing method.
A substrate processing apparatus... |
|
Invention
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Substrate processing method and substrate processing apparatus.
A processing method of a combine... |
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P/S
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Semiconductor manufacturing machines and their component parts and fittings; machines for mainten... |
|
P/S
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Semiconductor manufacturing machines and their component
parts and fittings; machines for mainte... |
2020
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P/S
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Semiconductor manufacturing machines and their structural parts; flat panel display manufacturing... |
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P/S
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Semiconductor manufacturing machines |