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2024
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P/S
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Semiconductor manufacturing machines; Semiconductor wafer processing machines; Semiconductor wafe... |
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P/S
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Machines for the production of semiconductors. |
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2023
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Invention
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Methods for thermal treatment of substrates.
In the thermal treatment of substrates, a susceptor... |
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Invention
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Method for using shield plate in a cvd reactor.
A CVD reactor includes a gas inlet member having... |
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Invention
|
Device and method for treating a substrate. The invention relates to a device for thermally treat... |
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P/S
|
Chemical vapour deposition (CVD) reactors; drive mechanisms
and apparatus for use in the coating... |
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Invention
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Cvd apparatus and method of cleaning a process chamber of a cvd apparatus. The invention relates ... |
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Invention
|
Method for emissivity-corrected pyrometry. E,nR,nE,nR,nERE,nR,nR,n) oscillating over time t diffe... |
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Invention
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Method for emissivity-corrected pyrometry. E,nR,nERCE,nR,niE,nR,niiii)) is determined that is use... |
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2022
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Invention
|
Method and device for depositing a layer containing a group five element in a process chamber, an... |
|
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Invention
|
Cvd reactor with a supporting ring, and supporting ring for a substrate. The invention relates to... |
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Invention
|
Evaporation source for a cvd reactor. The invention relates to an assembly for providing a proces... |
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Invention
|
Method and device for forming bundles of nanofilaments.
A device can be used as an electrode for... |
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Invention
|
Gas-inlet element for a cvd reactor. The invention relates to a gas-inlet element (2) for a CVD r... |
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Invention
|
Cvd reactor comprising a process chamber floor rising in a feeder zone.
A CVD reactor comprising... |
|
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Invention
|
Cvd reactor having a process chamber floor rising in a feeder zone. The invention relates to a CV... |
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2021
|
Invention
|
Heating apparatus for a cvd reactor. The invention relates to a device for heating a susceptor (1... |
|
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Invention
|
Method for manufacturing an electrode for a lithium-ion battery, and electrode manufactured accor... |
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Invention
|
Method for emissivity-corrected pyrometry.
A substrate is coated with a multilayer structure whi... |
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Invention
|
Method for emissivity-corrected pyrometry. ccss) of the temperature of the broad side of the subs... |
|
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Invention
|
Gas inlet element of a cvd reactor with two infeed points.
In a device and a method for depositi... |
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Invention
|
Gas inlet element of a cvd reactor with two infeed points. The invention relates to a device and ... |
|
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Invention
|
Cvd reactor with temperature-controllable gas inlet region.
A CVD reactor includes a reactor hou... |
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Invention
|
Cvd reactor with temperature-controllable gas inlet region. The invention relates to a CVD reacto... |
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Invention
|
Method for identifying substrates which are faulty or have been incorrectly inserted into a cvd r... |
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Invention
|
Transport ring for a cvd reactor. The invention relates to a transport ring for transporting a su... |
|
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Invention
|
Device and method for evaporating an organic powder.
In a method for evaporating a non-gaseous s... |
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Invention
|
Cvd process and cvd reactor with exchangeable bodies that exchange heat with the substrate. The i... |
|
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Invention
|
Method for ascertaining the end of a cleaning process for a process chamber of a mocvd reactor.
... |
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Invention
|
Method for ascertaining the end of a cleaning process for a process chamber of a mocvd reactor. T... |
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Invention
|
Susceptor for a cvd reactor. The invention relates to a CVD reactor comprising a susceptor (2) th... |
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|
Invention
|
Cvd reactor and method for controlling the surface temperature of the substrates.
In a CVD react... |
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|
Invention
|
Cvd reactor having doubled flow zone plate. The invention relates to an apparatus wherein a gas i... |
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Invention
|
Cvd reactor and method for controlling the surface temperature of the substrates. The invention r... |
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2020
|
Invention
|
Gas inlet device for a cvd reactor.
A gas distribution device has a plurality of gas inlet regio... |
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|
Invention
|
Wall-cooled gas-inlet element for a cvd reactor.
A gas inlet element for a CVD reactor includes ... |
|
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Invention
|
Use of a cvd reactor for depositing two-dimensional layers.
A two-dimensional layer is deposited... |
|
|
Invention
|
Method for depositing a two-dimensional coating and cvd reactor.
A coating is deposited on a sub... |
|
|
Invention
|
Method and apparatus for depositing organic layers.
An apparatus for depositing organic layers o... |
|
|
Invention
|
Gas-inlet element for a cvd reactor.
A gas outlet surface of a gas inlet element for a CVD react... |
|
|
Invention
|
Method for depositing a semiconductor layer system, which contains gallium and indium.
In a meth... |
|
|
Invention
|
Method for recording a state of a cvd reactor under production conditions.
During a process invo... |
|
|
Invention
|
Susceptor arrangement of a cvd reactor.
A susceptor arrangement for use in a CVD reactor include... |
|
|
Invention
|
Cvd reactor having means for locally influencing the susceptor temperature.
In the thermal treat... |
|
2019
|
Invention
|
Susceptor of a cvd reactor.
A susceptor for a CVD reactor includes a bearing surface for support... |
|
|
Invention
|
Method for producing a component part of a cvd reactor.
A component made of a quartz blank is us... |
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|
Invention
|
Shield plate for a cvd reactor. A CVD reactor includes a gas inlet member having a circular outli... |
|
|
Invention
|
Device and method for controlling the ceiling temperature of a cvd reactor. A CVD reactor may inc... |
|
|
Invention
|
Arrangement for measuring the surface temperature of a susceptor in a cvd reactor.
A cover plate... |
|
|
Invention
|
Cover plate for covering the susceptor side facing the process chamber of a device for depositing... |
|
|
Invention
|
Cvd reactor with carrying ring for substrate handling, and use of a carrying ring on a cvd reacto... |
|
|
Invention
|
Nucleation layer deposition method. −3. |
|
2018
|
P/S
|
Mechanical tools and equipment for manufacturing
semiconductors and semiconductor components, in... |
|
2017
|
P/S
|
Machines for the production of semiconductors; motors and engines, except for land vehicles; driv... |
|
|
P/S
|
Machines for the production of semiconductors; motors and
engines, drive units, parts of machine... |
|
|
Invention
|
Electrode for a lithium-ion battery and device and method for producing said electrode.
A device... |
|
|
P/S
|
Machines for the production of semiconductors; Motors and engines, drive units, parts of machines... |
|
|
P/S
|
Machines for the manufacture of semiconductors; machines for gas phase deposition; machines for t... |
|
|
P/S
|
Machines for the manufacture of semiconductors; machines for
gas phase deposition; machines for ... |
|
2016
|
P/S
|
Machines for the manufacture of semiconductors; machines for gasphase deposition; Machines for th... |
|
2015
|
P/S
|
Machines for the manufacture of semiconductors; separating
machines; separating machines, namely... |
|
|
P/S
|
Machines for the production of semiconductors; Separating machines; Separating machines, Namely m... |
|
2012
|
P/S
|
Machines and installations for chemical and/or plasma
enhanced vapour deposition of polymers ont... |
|
|
P/S
|
Machines and installations for chemical and/or plasma-enhanced vapour deposition of polymers onto... |
|
2004
|
P/S
|
Machines for manufacturing semiconductors and parts for
such machines. |
|
|
P/S
|
Machines for manufacturing semiconductors and parts for such machines |
|
|
P/S
|
Machines for manufacturing semiconductors and parts for such machines. |
|
|
P/S
|
Devices and equipment for semiconductor manufacturing, in particular CVD reactors for manufacturi... |
|
2003
|
P/S
|
CONTROL SYSTEM SOFTWARE FOR USE IN OPERATING CHEMICAL VAPOR DEPOSITION REACTORS THAT MANUFACTURE ... |
|
|
P/S
|
Control system software for use in operating chemical vapor
deposition reactors that manufacture... |
|
|
P/S
|
Control software for operating CVD reactors for the manufacture of semiconductors and superconduc... |
|
2002
|
P/S
|
Chemical vapour deposition (CVD) reactors; drive mechanisms and apparatus for use in the coating ... |
|
|
P/S
|
Machine tools and equipment for semiconductor manufacturing, in particular CVD reactors. Computer... |
|
2001
|
P/S
|
machines used to control chemical vapor |
|
1999
|
P/S
|
Mechanical tools and equipment for manufacturing semiconductors and semiconductor component parts... |
|
1993
|
P/S
|
machines used to control chemical vapor deposition of solid state layers and coatings |
|
|
P/S
|
laboratory apparatus used to control vapor deposition of solid state layers and coatings |
