|
2023
|
Invention
|
Exhaust gas abatement system.
The present invention provides an exhaust gas abatement system for... |
|
|
Invention
|
Exhaust gas abatement system and method thereof. The present invention provides an exhaust gas ab... |
|
|
Invention
|
Temperature sensor. A temperature sensing system (100) comprising a choke (150) formed from a mat... |
|
|
Invention
|
Motion converting device. A device for converting between motion in one direction and motion in a... |
|
|
Invention
|
Refrigerant testing. A refrigerant testing device and method for testing refrigerant diverted fro... |
|
2022
|
Invention
|
Ion trap and method for detecting ions in an ion trap. ΩRFRF RF of the RF storage signal is modif... |
|
|
Invention
|
Cryopump. A cryopump comprising: a vessel (10) comprising a radiation shield (12) having a fronta... |
|
|
Invention
|
Hydrogen recovery system and method. HYDROGEN RECOVERY SYSTEM AND METHOD Aspects of the present i... |
|
|
Invention
|
Liquid filter apparatus with thermal shield. A liquid filter apparatus for gas/solid separation i... |
|
|
P/S
|
Pumps; vacuum pumps; capture vacuum pumps; gas capture pump, gas entrapment pumps; ion pumps; get... |
|
|
Invention
|
Detecting contamination of a cryogenic refrigerant in a cryogenic refrigeration system. A sensor ... |
|
|
Invention
|
Mounting a flanged vacuum pump to a vacuum system. A flanged vacuum pump, a vacuum system and a m... |
|
|
Invention
|
In line water scrubber system for semiconductor processing. A semiconductor processing system inc... |
|
|
Invention
|
A mecanum wheel module. A compact mecanum wheel module is disclosed. The mecanum wheel module com... |
|
|
Invention
|
Method and ion trap for detecting ions. Method and ion trap for detecting ions, wherein the metho... |
|
|
Invention
|
Connecting and disconnecting a cooling loop from a refrigeration system. A control system for con... |
|
|
Invention
|
Electrochemical hydrogen pump. A multistage electrochemical hydrogen pump, comprising a first ele... |
|
2021
|
Invention
|
Monitoring the performance of a cryopump.
A method of monitoring the performance of a cryopump, ... |
|
|
Invention
|
Monitoring the performance of a cryopump. A method of monitoring the performance of a cryopump (5... |
|
|
Invention
|
Liquid filter apparatus with thermal shield.
A liquid filter apparatus for gas/solid separation ... |
|
|
Invention
|
Pneumatic drive cryocooler. A Gifford-McMahon cryogenic refrigerator comprises a reciprocating di... |
|
|
Invention
|
Cryopumps and inlet flow restrictors for cryopumps.
A flow restrictor for restricting a flow rat... |
|
|
Invention
|
Cryopumps and inlet flow restrictors for cryopumps. A flow restrictor for restricting a flow rate... |
|
|
Invention
|
Waste gas abatement technology for semiconductor processing. A semiconductor waste abatement syst... |
|
|
Invention
|
Mixed refrigerants with reduced gwp for use in ultra-low temperature refrigeration. A refrigerant... |
|
|
Invention
|
Cryopump.
A cryopump with a pump inlet; a two stage refrigerator; a first stage array arranged t... |
|
|
Invention
|
Cryopump. A cryopump comprising:a pump inlet, a two stage refrigerator; a first stage array therm... |
|
|
Invention
|
Cryopump. A cryopump with a pump inlet; a two stage refrigerator; a first stage array arranged th... |
|
|
Invention
|
Vacuum apparatus temperature sensor assembly.
A vacuum apparatus temperature sensor assembly for... |
|
|
Invention
|
Vacuum apparatus temperature sensor assembly. A vacuum apparatus temperature sensor assembly for ... |
|
|
Invention
|
Transport device and method of moving vacuum system components in a confined space.
A transport ... |
|
|
Invention
|
Transport device and method of moving vacuum system components in a confined space. A transport d... |
|
|
Invention
|
A conversion kit for a support frame, a support frame and an integrated vacuum system mounted in ... |
|
|
Invention
|
Mounting a flanged vacuum pump to a vacuum system.
A vacuum pump comprises an inlet flange for c... |
|
|
P/S
|
Vacuum pumps; capture vacuum pumps; gas capture pump, gas entrapment pumps; ion pumps; getter pum... |
|
|
Invention
|
Pump module.
Pump module for a vacuum apparatus with a flange which can be connected to a vacuum... |
|
|
Invention
|
Vacuum module and vacuum apparatus and method for regeneration of a volume getter vacuum pump.
M... |
|
|
Invention
|
Flange for a vacuum apparatus.
Flange for a vacuum apparatus comprises a housing to be connected... |
|
|
Invention
|
A pressure regulated semiconductor wafer cooling apparatus and method and a pressure regulating a... |
|
|
Invention
|
Housing for a vacuum pump.
Housing for a vacuum pump, in particular a NEG or IGP-NEG combination... |
|
|
Invention
|
A semiconductor wafer temperature control apparatus.
A temperature control apparatus for supplyi... |
|
|
Invention
|
Detecting component temperature in a system.
There is provided a method of detecting the tempera... |
|
2020
|
Invention
|
Cryopump.
A cryopump comprising: a vessel comprising a frontal open area, the frontal open area ... |
|
|
Invention
|
Reducing plasma formation in an ion pump.
An ion pump controller configured to alternate between... |
|
|
Invention
|
Noble gas recovery system.
A system comprising a pumping system configured to pump respective ex... |
|
|
Invention
|
Vacuum system with diagnostic circuitry and a method and computer program for monitoring the heal... |
|
|
Invention
|
Multiple vacuum chamber exhaust system and method of evacuating multiple chambers.
A vacuum exha... |
|
|
Invention
|
Pump mounting frame.
A pump mounting frame comprising a latching device for releasably mounting ... |
|
|
Invention
|
Semiconductor system with steam generator and reactor. A semiconductor processing system includes... |
|
|
Invention
|
Very low temperature refrigeration system with fast operation cycle.
Methods for shortening the ... |
|
|
Invention
|
Conversion kit for a support frame, a support frame and an integrated vacuum system mounted in a ... |
|
|
Invention
|
Clamp |
|
2019
|
P/S
|
Metal vacuum flange and metal vacuum flange fittings; metal clamps; small metal vacuum flange fit... |
|
|
P/S
|
Vacuum pumps; ion pumps; titanium sublimation pumps; getter pumps; vacuum pump controls. |
|
|
P/S
|
Vacuum pumps, ion pumps, titanium sublimation pumps, getter pumps, vacuum pump controls. |
|
|
P/S
|
VACUUM PUMPS; VACUUM PUMPS IN THE NATURE OF ION PUMPS AND TITANIUM SUBLIMATIONS PUMPS; GETTER PUM... |
|
2016
|
P/S
|
Vacuum pumps; Shaft bearings for vacuum pumps. Technical support services, namely, technical advi... |
|
|
P/S
|
Vacuum pumps; shaft bearings for vacuum pumps Technical support services, namely, technical advic... |
|
2012
|
P/S
|
Industrial oils, namely, mineral oils, silicone oils, synthetic oils and perfluoropolyether oils;... |
|
2009
|
P/S
|
Vacuum pumps, oil sealed vacuum pumps, oil sealed rotary vacuum pumps, oil sealed piston vacuum p... |
|
|
P/S
|
Metal vacuum flange and metal vacuum flange fittings; metal clamps; klein flange fittings; commer... |
|
|
P/S
|
Industrial oils, namely, mineral oils, silicone oils,
synthetic oils and perfluoropolyether oils... |
|
2006
|
P/S
|
Apparatus for refrigerating; refrigerators operating at liquid helium temperatures. |
|
|
P/S
|
Vacuum pumps; cryogenically cooled vacuum pumps; cryopumps. |
|
|
P/S
|
Cryopumps; vacuum pumps. Control electronics modules for cryopump systems; keypads/displays for c... |
|
|
P/S
|
Repair and installation services, except for taximeters; maintenance and repair of high-vacuum pu... |
|
2005
|
P/S
|
Compressors for cryogenic refrigerators; cryopump systems and parts thereof including compressors... |
|
2003
|
P/S
|
Apparatus for lighting, heating, steam generating, cooking, refrigerating, drying, ventilating, w... |
|
|
P/S
|
Semiconductor manufacturing machines and equipment; fab manufacturing equipment, namely equipment... |
|
2002
|
P/S
|
Scientific, measuring, signalling, computer, communication, monitoring, data analysis, control an... |
|
2001
|
P/S
|
Computer hardware, namely communication units for use in connection with the monitoring, communic... |
|
1999
|
P/S
|
Scientific, electric, electronic, measuring, checking, monitoring, communication and analysis app... |
|
1998
|
P/S
|
computer diagnostic services for manufacturing processes involving the interpretation and analysi... |
|
1995
|
P/S
|
pump vanes and pump stators made of metals, plastics or laminates |
|
1990
|
P/S
|
Cryopumps and controls therefor
Vacuum pumps
Control electronics modules for cryopump systems and... |
|
|
P/S
|
CRYOPUMPS AND CONTROLS THEREFOR CONTROL ELECTRONICS MODULES FOR CRYOPUMP SYSTEMS, AND KEYPAD/DISP... |
|
1988
|
P/S
|
Compressors for cryogenic refrigerators-cryopumps, primarily comprising compressors and cryopanel... |
|
1987
|
P/S
|
REFRIGERATION SYSTEMS FOR INDUSTRIAL USE |
|
|
P/S
|
Maintenance and repair of high-vacuum pumps, and consulting services in connection therewith; tra... |
|
1984
|
P/S
|
Compressors for cryogenic refrigerators; cryopump systems and parts therefor namely compressors, ... |
|
1968
|
P/S
|
CRYOGENICALLY COOLED VACUUM PUMPS, OFTEN REFERRED TO AS CRYOPUMPS |
|
1960
|
P/S
|
Refrigerators Operating at Liquid Helium Temperatures |
|
1948
|
P/S
|
VACUUM PUMPS |
|
|
P/S
|
CHEMICAL AND PHARMACEUTICAL APPARATUS INCLUDING DRYING CABINETS OR CLOSETS OF THE HEATED TYPE, DR... |
