2007
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Invention
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Apparatus with mobile body, exposure apparatus, exposure method and device manufacturing method. ... |
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Invention
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Encoder. An interval of incident places of –1st diffraction light, 0-th light, and +1st diffracti... |
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Invention
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Optical scanning module and encoder. Illumination light (IL) is reflected on the reflection surfa... |
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Invention
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Position measuring device and position measuring method, mobile body driving system and mobile bo... |
2006
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Invention
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Encoder. Light passed through first and second index scales (20, 22) is split by a beam splitter ... |
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Invention
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Tilt sensor and encoder. An optical unit (26) is provided with a first diffraction grating (127a)... |
2005
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Invention
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Photoelectric encoder. A photoelectric encoder comprising a lighting light source (11), a moving ... |
2004
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Invention
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Exposure system and method for manufacturing device. An exposure system is provided which can mai... |
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Invention
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Mask exchanging method and exposure apparatus. When a reticle stage capable of moving while holdi... |
2003
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Invention
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Method for supporting substrate, substrate supporting apparatus and exposure apparatus. A substra... |
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Invention
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Exposure system and device manufacturing method. An exposure system capable of stably maintaining... |
2002
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Invention
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Mask replacement method and exposure device. A mask replacement method, comprising the steps of c... |
1998
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Invention
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Projection type display apparatus. Disclosed is a single plate projection type display apparatus ... |
1997
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Invention
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Camera having centralized electrical connection area. A camera including a body unit and a top co... |