2011
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Invention
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Improved micromechanical resonator. The object of the invention is to provide an improved structu... |
2010
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Invention
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Bulk acoustic wave resonator and method of manufacturing thereof. The invention concerns a novel ... |
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Invention
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Method and device for energy harvesting. A device (100) harvests energy from vibration and/or str... |
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Invention
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Method for the precise measuring operation of a micromechanical rotation rate sensor. f). |
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Invention
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Method for the precise measuring operation of a micromechanical rotation rate sensor. The inventi... |
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Invention
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Micro-mechanical sensor of angular velocity. The invention presents a micro-mechanical resonator,... |
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Invention
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Vibrating micro-mechanical sensor of angular velocity. The invention relates to measuring devices... |
2009
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Invention
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A micromechanical resonator. The invention relates to design of micromechanical resonators and, m... |
2008
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Invention
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Vibrating micromechanical sensor of angular velocity. The invention relates to measuring devices ... |
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Invention
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Method and device for measuring the progress of a moving person. The invention relates to measuri... |
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Invention
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A method for measuring angular velocity and a vibrating micromechanical sensor of angular velocit... |
2007
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Invention
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Encapsulation module method for production and use thereof. The invention relates to a method for... |
2006
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Invention
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Method for manufacturing a microelectromechanical component, and a microelectromechanical compone... |
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Invention
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A method for the micromechanical measurement of acceleration and a micromechanical acceleration s... |
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Invention
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Method of manufacturing a capacitive acceleration sensor, and a capacitive acceleration sensor. T... |
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Invention
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Method for manufacturing a micromechanical motion sensor, and a micromechanical motion sensor. Th... |
2005
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Invention
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Oscillating micro-mechanical sensor of angular velocity. The invention relates to measuring devic... |
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Invention
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Oscillating micro-mechanical sensor of angular velocity. The present invention relates to measuri... |
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Invention
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A capacitive sensor and a method for manufacturing the capacitive sensor. The present invention r... |
2004
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Invention
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Capacitive acceleration sensor arrangement. The present invention relates to measuring devices us... |
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Invention
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Capacitive acceleration sensor. The invention relates to measuring devices used for the measuring... |
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Invention
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Capacitive acceleration sensor. The invention relates to measuring devices used in the measuring ... |
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Invention
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Capacitive accelaration sensor. The invention relates to measuring devices used in the measuremen... |
2003
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Invention
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Method of manufacturing of a monolithic silicon acceleration sensor. A method of manufacturing a ... |
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Invention
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Monolithic silicon acceleration sensor. A monolithic silicon acceleration sensor capable of detec... |
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Invention
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Method for reducing the temperature dependence of a capacitive sensor and a capacitive sensor con... |
2002
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Invention
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Method for manufacturing a silicon sensor and a silicon sensor. The invention relates to a method... |