2024
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P/S
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Semiconductor manufacturing machines; Semiconductor substrates manufacturing machines; Semiconduc... |
2023
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Invention
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Systems and methods for pulse width modulated dose control.
A substrate processing system for tr... |
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Invention
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Integrated wafer bow measurements.
In some examples, a wafer bow measurement system comprises a ... |
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Invention
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Capacitance measurement without disconnecting from high power circuit.
Methods and apparatus for... |
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Invention
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Systems and methods for homogenous intermixing of precursors in alloy atomic layer deposition.
A... |
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P/S
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Computer services, namely, providing on-line facilities for
real-time interaction with other com... |
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P/S
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Semiconductor manufacturing machines; semiconductor
substrates manufacturing machines; semicondu... |
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P/S
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Recorded computer software comprising a library of 3d models
and design tools for computer aided... |
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Invention
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Alternating etch and passivation process.
Tin oxide films are used as spacers and hardmasks in s... |
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Invention
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Doped or undoped silicon carbide deposition and remote hydrogen plasma exposure for gapfill.
A d... |
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Invention
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Determination of recipes for manufacturing semiconductor devices.
Methods, systems, and computer... |
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Invention
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Control of wafer bow in multiple stations.
A system for controlling of wafer bow in plasma proce... |
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Invention
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Carrier ring designs for controlling deposition on wafer bevel/edge.
Various carrier ring design... |
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Invention
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Protective coating for electrostatic chucks.
An ElectroStatic Chuck (ESC) including a chucking s... |
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Invention
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Non-elastomeric, non-polymeric, non-metallic membrane valves for semiconductor processing equipme... |
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Invention
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Real-time control of temperature in a plasma chamber.
Systems and methods for real-time control ... |
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Invention
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Precursors for deposition of molybdenum-containing films.
Molybdenum-containing films are deposi... |
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Invention
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Selective processing with etch residue-based inhibitors.
Selective deposition of a sacrificial m... |
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Invention
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Edge seal for lower electrode assembly.
An edge seal for sealing an outer surface of a lower ele... |
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Invention
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Replaceable and/or collapsible edge ring assemblies for plasma sheath tuning incorporating edge r... |
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Invention
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Process tool for dry removal of photoresist.
Dry development or dry removal of metal-containing ... |
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Invention
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Electrostatic chuck for use in semiconductor processing.
A semiconductor substrate processing ap... |
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Invention
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Spring-loaded seal cover band for protecting a substrate support. A spring-loaded seal band for p... |
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Invention
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Showerhead faceplates. Semiconductor processing tool showerhead designs suitable for multi-gas de... |
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Invention
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Backside layer for a semiconductor substrate. A composite nanocrystalline silicon layer can be fo... |
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Invention
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Method for etching features using hf gas. START PLACE STACK IN CHAMBER ON SUPPORT COOL SUPPORT FL... |
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Invention
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Doped silicon or boron layer formation. An amorphous silicon layer or amorphous boron layer can b... |
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Invention
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Shaped silicon outer upper electrode for plasma processing. An outer upper electrode for plasma p... |
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Invention
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Multi-sensor determination of a state of semiconductor equipment. Methods and apparatus for multi... |
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P/S
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Computer hardware and recorded software systems for the installation, operation, maintenance, and... |
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Invention
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Nitride thermal atomic layer etch. Provided are nitride atomic layer etch including in situ gener... |
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Invention
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Atomic layer deposition with in-situ sputtering. Examples are disclosed that relate to using in-s... |
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Invention
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A plasma processing system with a gas recycling system. A gas recycling system attachable to a se... |
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Invention
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High aspect ratio etch with a non-uniform metal or metalloid containing mask. A method for etchin... |
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Invention
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High aspect ratio etch with a re-deposited helmet mask. A method for etching features in a stack ... |
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Invention
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High aspect ratio etch with a liner. A method for etching features in a stack is provided. A patt... |
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Invention
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A temperature controlled shower head for a processing tool. An apparatus includes a shower head c... |
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Invention
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Modular vapor delivery system for semiconductor process tools. A modular vapor delivery system co... |
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Invention
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Gas cooling cover for an exhaust line of a substrate processing system. A gas cooling cover for a... |
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Invention
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Dual-channel monoblock gas manifold. This disclosure pertains to compact, mono-block manifolds fo... |
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Invention
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Bond protection for an electrostatic chuck in a plasma processing chamber. An electrostatic chuck... |
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Invention
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Multichannel heated gas delivery system. A gas conditioning assembly comprising a first block str... |
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Invention
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Selective sige etching using thermal f2 with additive. 2222. Use of the additive produces a more ... |
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Invention
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Reducing thermal bow shift. Provided are methods and structures for keeping the integrity of laye... |
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Invention
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Conductive backside layer for bow mitigation. Provided are methods for keeping a semiconductor wa... |
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Invention
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System and method to maintain constant clamping pressure during chamber rebooting and power failu... |
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Invention
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Electrodeposition systems. Examples are disclosed that relate to operating an electrodeposition s... |
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P/S
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Ceramic parts for machines; parts for machines for the
deposition of materials; ceramic tools fo... |
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P/S
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Recorded computer software comprising a library of 3d models and design tools for computer aided ... |
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P/S
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Computer services, namely, providing on-line facilities for real-time interaction with other comp... |
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P/S
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Consultation services in the field of software for designing and manufacturing semiconductors and... |
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P/S
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Ceramic tools for semiconductor manufacturing machines, semiconductor substrates manufacturing ma... |
2022
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P/S
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Components for pulsed laser deposition machines for use in the manufacture of semiconductors, nam... |
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P/S
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Apparatus (machines) for the production of semiconductors
and micro-electronic semi-conductor pr... |
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Invention
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Control of metallic contamination from metal-containing photoresist.
Various techniques for cont... |
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Invention
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Electrochemical assembly for forming semiconductor features.
Methods, apparatuses, and systems f... |
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P/S
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Components for semiconductor manufacturing machines, namely,
electrodes, calibrators, actuators,... |
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Invention
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Spatially and dimensionally non-uniform channelled plate for tailored hydrodynamics during electr... |
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Invention
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Processing parts using solid-state additive manufacturing.
Semiconductor-processing chamber comp... |
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Invention
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Systems and techniques for optical measurement of thin films.
Methods provided herein may includ... |
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Invention
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Molybdenum deposition in features.
Provided are deposition processes including deposition of a t... |
2021
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P/S
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Components of equipment for the manufacture, processing, and
fabrication of semiconductors, name... |
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Invention
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Machine-learning in multi-step semiconductor fabrication processes.
Methods and systems for usin... |
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Invention
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Adaptive model training for process control of semiconductor manufacturing equipment.
Various em... |
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P/S
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Components for semiconductor manufacturing machines, namely, electrodes, pedestals in the nature ... |
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P/S
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Replacement components for semiconductor manufacturing
machines; replacement components for semi... |
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P/S
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Components of equipment for the manufacture, processing, and fabrication of semiconductors, namel... |
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P/S
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Measurement apparatus and instruments for use in
semiconductor manufacturing, semiconductor subs... |
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P/S
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Replacement components for semiconductor manufacturing machines; Replacement components for semic... |
2020
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P/S
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Measurement apparatus and instruments for use in semiconductor manufacturing, semiconductor subst... |