Lam Research Corporation

États‑Unis d’Amérique


 
Quantité totale PI 4 741
Quantité totale incluant filiales 5 492 (+ 823 pour les filiales)
Rang # Quantité totale PI 219
Note d'activité PI 4,1/5.0    3 160
Rang # Activité PI 194
Activité incl filiales 3,9/5.0    3 295
Symbole boursier
ISIN US5128071082
Capitalisation 59,900M  (USD)
Industrie Semiconductor Equipment & Materials
Secteur Technology
Classe Nice dominante Machines et machines-outils

Brevets

Marques

2 733 94
0 0
1 846 65
3
 
Dernier brevet 2024 - Integrated wafer bow measurements
Premier brevet 1980 - Auto-zero system for pressure tr...
Dernière marque 2024 - GALILEO
Première marque 1991 - CONCEPT ONE

Filiales

4 subsidiaries with IP (787 patents, 36 trademarks)

33 subsidiaries without IP

 S'inscrire grtuitement pour accéder à la liste des filiales

Industrie (Classification de Nice)

Derniers inventions, produits et services

2024 P/S Semiconductor manufacturing machines; Semiconductor substrates manufacturing machines; Semiconduc...
2023 Invention Systems and methods for pulse width modulated dose control. A substrate processing system for tr...
Invention Integrated wafer bow measurements. In some examples, a wafer bow measurement system comprises a ...
Invention Capacitance measurement without disconnecting from high power circuit. Methods and apparatus for...
Invention Systems and methods for homogenous intermixing of precursors in alloy atomic layer deposition. A...
P/S Computer services, namely, providing on-line facilities for real-time interaction with other com...
P/S Semiconductor manufacturing machines; semiconductor substrates manufacturing machines; semicondu...
P/S Recorded computer software comprising a library of 3d models and design tools for computer aided...
Invention Alternating etch and passivation process. Tin oxide films are used as spacers and hardmasks in s...
Invention Doped or undoped silicon carbide deposition and remote hydrogen plasma exposure for gapfill. A d...
Invention Determination of recipes for manufacturing semiconductor devices. Methods, systems, and computer...
Invention Control of wafer bow in multiple stations. A system for controlling of wafer bow in plasma proce...
Invention Carrier ring designs for controlling deposition on wafer bevel/edge. Various carrier ring design...
Invention Protective coating for electrostatic chucks. An ElectroStatic Chuck (ESC) including a chucking s...
Invention Non-elastomeric, non-polymeric, non-metallic membrane valves for semiconductor processing equipme...
Invention Real-time control of temperature in a plasma chamber. Systems and methods for real-time control ...
Invention Precursors for deposition of molybdenum-containing films. Molybdenum-containing films are deposi...
Invention Selective processing with etch residue-based inhibitors. Selective deposition of a sacrificial m...
Invention Edge seal for lower electrode assembly. An edge seal for sealing an outer surface of a lower ele...
Invention Replaceable and/or collapsible edge ring assemblies for plasma sheath tuning incorporating edge r...
Invention Process tool for dry removal of photoresist. Dry development or dry removal of metal-containing ...
Invention Electrostatic chuck for use in semiconductor processing. A semiconductor substrate processing ap...
Invention Spring-loaded seal cover band for protecting a substrate support. A spring-loaded seal band for p...
Invention Showerhead faceplates. Semiconductor processing tool showerhead designs suitable for multi-gas de...
Invention Backside layer for a semiconductor substrate. A composite nanocrystalline silicon layer can be fo...
Invention Method for etching features using hf gas. START PLACE STACK IN CHAMBER ON SUPPORT COOL SUPPORT FL...
Invention Doped silicon or boron layer formation. An amorphous silicon layer or amorphous boron layer can b...
Invention Shaped silicon outer upper electrode for plasma processing. An outer upper electrode for plasma p...
Invention Multi-sensor determination of a state of semiconductor equipment. Methods and apparatus for multi...
P/S Computer hardware and recorded software systems for the installation, operation, maintenance, and...
Invention Nitride thermal atomic layer etch. Provided are nitride atomic layer etch including in situ gener...
Invention Atomic layer deposition with in-situ sputtering. Examples are disclosed that relate to using in-s...
Invention A plasma processing system with a gas recycling system. A gas recycling system attachable to a se...
Invention High aspect ratio etch with a non-uniform metal or metalloid containing mask. A method for etchin...
Invention High aspect ratio etch with a re-deposited helmet mask. A method for etching features in a stack ...
Invention High aspect ratio etch with a liner. A method for etching features in a stack is provided. A patt...
Invention A temperature controlled shower head for a processing tool. An apparatus includes a shower head c...
Invention Modular vapor delivery system for semiconductor process tools. A modular vapor delivery system co...
Invention Gas cooling cover for an exhaust line of a substrate processing system. A gas cooling cover for a...
Invention Dual-channel monoblock gas manifold. This disclosure pertains to compact, mono-block manifolds fo...
Invention Bond protection for an electrostatic chuck in a plasma processing chamber. An electrostatic chuck...
Invention Multichannel heated gas delivery system. A gas conditioning assembly comprising a first block str...
Invention Selective sige etching using thermal f2 with additive. 2222. Use of the additive produces a more ...
Invention Reducing thermal bow shift. Provided are methods and structures for keeping the integrity of laye...
Invention Conductive backside layer for bow mitigation. Provided are methods for keeping a semiconductor wa...
Invention System and method to maintain constant clamping pressure during chamber rebooting and power failu...
Invention Electrodeposition systems. Examples are disclosed that relate to operating an electrodeposition s...
P/S Ceramic parts for machines; parts for machines for the deposition of materials; ceramic tools fo...
P/S Recorded computer software comprising a library of 3d models and design tools for computer aided ...
P/S Computer services, namely, providing on-line facilities for real-time interaction with other comp...
P/S Consultation services in the field of software for designing and manufacturing semiconductors and...
P/S Ceramic tools for semiconductor manufacturing machines, semiconductor substrates manufacturing ma...
2022 P/S Components for pulsed laser deposition machines for use in the manufacture of semiconductors, nam...
P/S Apparatus (machines) for the production of semiconductors and micro-electronic semi-conductor pr...
Invention Control of metallic contamination from metal-containing photoresist. Various techniques for cont...
Invention Electrochemical assembly for forming semiconductor features. Methods, apparatuses, and systems f...
P/S Components for semiconductor manufacturing machines, namely, electrodes, calibrators, actuators,...
Invention Spatially and dimensionally non-uniform channelled plate for tailored hydrodynamics during electr...
Invention Processing parts using solid-state additive manufacturing. Semiconductor-processing chamber comp...
Invention Systems and techniques for optical measurement of thin films. Methods provided herein may includ...
Invention Molybdenum deposition in features. Provided are deposition processes including deposition of a t...
2021 P/S Components of equipment for the manufacture, processing, and fabrication of semiconductors, name...
Invention Machine-learning in multi-step semiconductor fabrication processes. Methods and systems for usin...
Invention Adaptive model training for process control of semiconductor manufacturing equipment. Various em...
P/S Components for semiconductor manufacturing machines, namely, electrodes, pedestals in the nature ...
P/S Replacement components for semiconductor manufacturing machines; replacement components for semi...
P/S Components of equipment for the manufacture, processing, and fabrication of semiconductors, namel...
P/S Measurement apparatus and instruments for use in semiconductor manufacturing, semiconductor subs...
P/S Replacement components for semiconductor manufacturing machines; Replacement components for semic...
2020 P/S Measurement apparatus and instruments for use in semiconductor manufacturing, semiconductor subst...