An optical encoder is provided that can reduce the effects of unwanted diffracted light in a stable manner. The optical encoder 1 comprises a scale 2 and a detection head 3. The detection head 3 includes a light source 4 and light-receiving means 6 with a light-receiving surface 60. The light-receiving surface 60 has an element row 7 with multiple light-receiving elements 70 arranged along the measurement direction with the same period as that of the interference fringes. Here, an error included in detection signals generated from the interference fringes, with such error being caused by the fact that the number of light-receiving elements 70 is an odd number, will be referred to as a number-of-elements-induced error, and a predetermined allowable error will be referred to as an allowable error. The number of light-receiving elements 70 in the element row 7 is set to be a number where the number-of-elements-induced error is smaller than the allowable error. Such number-of-elements-induced error is caused when there is an odd total number of light-receiving elements 70 and such odd total number of light-receiving elements 70 are functional, or when there is an even total number of light-receiving elements 70 but one less than such even total number of light-receiving elements are functional.
G01D 5/347 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensible; Moyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminé; Transducteurs non spécialement adaptés à une variable particulière utilisant des moyens optiques, c. à d. utilisant de la lumière infrarouge, visible ou ultraviolette avec atténuation ou obturation complète ou partielle des rayons lumineux les rayons lumineux étant détectés par des cellules photo-électriques en utilisant le déplacement d'échelles de codage
A micrometer head displacement system includes a micrometer head and an imaging portion. The micrometer head includes a coarse scale and a fine scale. The system is configured to: acquire at least one image of the micrometer head from the imaging portion; determine a coarse measurement based at least in part on the at least one image wherein the coarse measurement corresponds to a coarse relative position between the coarse scale and a coarse fiducial line; determine a fine measurement based at least in part on the at least one image and based on calculating an interpolated position of the a fiducial line wherein the fine measurement corresponds to a fine relative position between the fine scale and the fine fiducial line; and determine a micrometer head displacement based at least in part on summing the coarse measurement with the fine measurement.
A measuring system includes a measuring probe with a contact portion that contacts a workpiece to be measured. The measuring probe operates with a first update rate during at least part of a moving mode, wherein the moving mode includes movement of the measuring probe such that the contact portion is moved away from the workpiece and/or is moved at a distance from the workpiece that is equal to or greater than a threshold distance. The measuring probe operates with a second update rate (i.e., which is faster than the first update rate) during at least part of a measuring mode, wherein the measuring mode includes movement of the measuring probe such that the contact portion is moved toward the workpiece for obtaining a measurement. In various implementations, the combined use of the first and second update rates effectively reduces power-on drift of the measuring probe.
A one dimensional measuring machine includes a scale having graduations, a mover that has a light source configured to emit light to the graduations of the scale and a light receiving element configured to receive the light having passed through the scale from the light source, and can move along the scale, a light amount information detector that detects information regarding a light amount of the light emitted to the scale from the light source while the mover moves along the scale, and a contamination detector that detects a degree of contamination of the scale, based the information regarding the light amount of the light detected by the light amount information detector.
An inductive type position encoder includes a scale, a detector portion and a signal processor. According to one aspect, field generating elements and sensing elements of the detector portion are provided on opposite sides of the scale such that at least part of the scale is between the field generating elements and the sensing elements (transmissive configuration). According to another aspect, the scale comprises a periodic scale pattern including signal modulating elements that are disposed along a scale direction, which is not parallel to a measuring axis direction of the encoder and is slanted at a scale angle relative to the measuring axis direction, such that there is a corresponding y-direction displacement for a given x-direction displacement of the encoder. These aspects of the disclosure make it possible to design a very compact inductive type position encoder, including one capable of indicating an absolute position along the scale.
G01D 5/20 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensible; Moyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminé; Transducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant la valeur d'un courant ou d'une tension en faisant varier l'inductance, p.ex. une armature mobile
G01B 7/00 - Dispositions pour la mesure caractérisées par l'utilisation de techniques électriques ou magnétiques
G01D 5/249 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensible; Moyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminé; Transducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques produisant des impulsions ou des trains d'impulsions utilisant des impulsions codées
7.
INDUCTIVE POSITION ENCODER UTILIZING TRANSMISSIVE CONFIGURATION
An inductive type position encoder includes a scale, a detector portion and a signal processor. According to one aspect, field generating elements and sensing elements of the detector portion are provided on opposite sides of the scale such that at least part of the scale is between the field generating elements and the sensing elements (transmissive configuration). According to another aspect, the scale comprises a periodic scale pattern including signal modulating elements that are disposed along a scale direction, which is not parallel to a measuring axis direction of the encoder and is slanted at a scale angle relative to the measuring axis direction, such that there is a corresponding y-direction displacement for a given x-direction displacement of the encoder. These aspects of the disclosure make it possible to design a very compact inductive type position encoder, including one capable of indicating an absolute position along the scale.
G01D 5/20 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensible; Moyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminé; Transducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant la valeur d'un courant ou d'une tension en faisant varier l'inductance, p.ex. une armature mobile
G01B 7/00 - Dispositions pour la mesure caractérisées par l'utilisation de techniques électriques ou magnétiques
G01D 5/249 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensible; Moyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminé; Transducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques produisant des impulsions ou des trains d'impulsions utilisant des impulsions codées
A dustproof seal structure includes a rotor assembly and a stator assembly rotatably supporting the rotor assembly. The stator assembly forms a horizontal thrust aerostatic bearing between a lower surface of the thrust plate and an upper surface of the stator assembly when compressed air is supplied between the lower surface of the thrust plate and the upper surface of the stator assembly. The thrust plate and the stator assembly form a sealing portion through which the compressed air flows. The sealing portion includes an inclined flow path whose height increases from an outer peripheral surface of the thrust plate toward the inside in a radial direction.
H02K 5/10 - Enveloppes ou enceintes caractérisées par leur configuration, leur forme ou leur construction avec des dispositions empêchant l'introduction de corps étrangers, p.ex. de l'eau ou des doigts
F16C 17/04 - Paliers à contact lisse pour mouvement de rotation exclusivement pour charges axiales uniquement
F16C 33/74 - Dispositifs d'étanchéité pour paliers à contact lisse
An automatic measuring device includes a micrometer including a spindle that moves forward and backward to be brought into contact with or away from a workpiece and a displacement detector unit that detects displacement of the spindle, and an automatic operation unit that automates the forward and backward movement of the spindle by power. The automatic operation unit performs a first forward-movement step of moving the spindle forward to bring the spindle into contact with the workpiece, and a contact determination step of determining the contact between the spindle and the workpiece in the first forward-movement step. In the contact determination step, the spindle is determined to be in contact with the workpiece when a change in a position of the spindle detected by the displacement detector unit in the first forward-movement step becomes equal to or less than a predetermined contact determination threshold.
G01B 21/04 - Dispositions pour la mesure ou leurs détails, où la technique de mesure n'est pas couverte par les autres groupes de la présente sous-classe, est non spécifiée ou est non significative pour mesurer la longueur, la largeur ou l'épaisseur en mesurant les coordonnées de points
A lighting configuration is provided for utilization with a metrology system. The metrology system includes a camera that provides images of a workpiece at different focus positions (e.g., through operation of a variable focal length lens). The lighting configuration includes a plurality of lighting portions which illuminate the workpiece for the imaging. The lighting portions are distributed in an arrangement (e.g., an annular arrangement) in which an imaging lens portion of each lighting portion directs light toward a central volume (e.g., for which illumination in the central volume may be relatively uniform in X, Y and Z axis directions). Each imaging lens portion may include at least two lenses in a telecentric arrangement. Each lighting portion may comprise an optical homogenizer. The camera acquires a stack of images of the workpiece, from which focus curve data may be determined which indicates 3 dimensional positions of surface points on the workpiece.
A grating part includes a first transparent substrate having an optical grating on a surface thereof, a second transparent substrate having an optical grating on a surface thereof, and a spacer positioned between the first transparent substrate and the second transparent substrate, the spacer bonding the first transparent substrate and the second transparent substrate.
There is provided an inside-diameter measuring unit capable of automating inside-diameter measurement and a control method for automatic inside-diameter measurement. An inside-diameter measuring part is supported by a support frame part via a floating joint part. The floating joint part includes a rotation-allowing mechanism part and a translation-allowing mechanism part. A measuring head part of the inside-diameter measuring part is inserted into a hole by a robot arm part. The inside-diameter measuring part adjusts its position and posture autonomously by the reaction force when a contact point pushes against the inner wall of the hole to align the axis of the inside-diameter measuring part with the axis of the hole. An electric inside-diameter measuring unit can automatically measure the inside diameter of a hole.
A measurement method of a surface shape and a surface shape measurement device uses an interferometer optical head that acquires an interference fringe image generated by a light path difference between the reference light and the measurement light, acquires N interference fringe images by scanning from a start point to an end point in the Z-axis direction, and measures the surface shape of the measurement target surface based on the interference fringe images. For a common position in the N interference fringe images, regarding an interference signal including values of N points that indicates a change in the interference light intensity along the Z-axis direction, a phase of an interference fringe produced by the light of a predetermined analysis wavelength is determined, and the relative position in the Z-axis direction of the measurement target surface within the range of the analysis wavelength is determined based on the phase.---
G01B 11/24 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des contours ou des courbes
G01B 11/06 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la longueur, la largeur ou l'épaisseur pour mesurer l'épaisseur
G06T 7/55 - Récupération de la profondeur ou de la forme à partir de plusieurs images
A radar metrology system is provided for use with a movement system (e.g., a robot arm) that moves an end tool, and includes mobile and stationary radar configurations. The mobile radar configuration includes mobile radar components that are coupled to the end tool or an end tool mounting configuration. The stationary radar configuration includes stationary radar components (e.g., that surround a volume in which the end tool is moved). As part of a calibration process, the mobile radar configuration is moved to a plurality of calibration positions, and received radar signals are utilized to determine distances between stationary radar components and one or more mobile radar components. The radar signals are either transmitted from stationary radar components and received by mobile radar components, or vice versa. The locations (e.g., coordinates) of the stationary radar components are determined based at least in part on the determined distances.
A radar metrology system is provided for use with a movement system (e.g., a robot arm) that moves an end tool, and includes mobile and stationary radar configurations. The mobile radar configuration includes mobile radar components that are coupled to the end tool or an end tool mounting configuration. The stationary radar configuration includes stationary radar components (e.g., which define a metrology frame volume that surrounds a movement volume in which the end tool is moved). Distances are determined between stationary radar components and mobile radar components based at least in part on radar signals, wherein the distances indicate (e.g., and may be utilized to determine) a position and orientation (e.g., of the mobile radar configuration and/or end tool). The radar signals are either transmitted from stationary radar components and received by mobile radar components, or transmitted from mobile radar components and received by stationary radar components.
G01S 13/87 - Combinaisons de plusieurs systèmes radar, p.ex. d'un radar primaire et d'un radar secondaire
G01S 13/72 - Systèmes radar de poursuite; Systèmes analogues pour la poursuite en deux dimensions, p.ex. combinaison de la poursuite en angle et de celle en distance, radar de poursuite pendant l'exploration
G01S 13/88 - Radar ou systèmes analogues, spécialement adaptés pour des applications spécifiques
21.
MEASUREMENT METHOD OF SURFACE SHAPE AND SURFACE SHAPE MEASUREMENT DEVICE
A measurement method of a surface shape includes combining N stacked images captured while scanning the measuring head. For a position in the N stacked images, from an integral curve including values of N points, which is obtained by integrating square values or absolute values of the interference signal including values at N points: a start-point-side noise part straight line that approximates a start-point-side noise part, which corresponds to a range where the slope is smaller than the slope in the vicinity of the measurement target surface at the start-point-side than the measurement target surface; an end-point-side noise part straight line that approximates an end-point-side noise part, which corresponds to a range where the slope is smaller than the slope in the vicinity of the measurement target surface at the end-point-side than the measurement target surface; and a surface proximity straight line that approximates surface proximity part.
G01B 11/24 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des contours ou des courbes
G01B 11/25 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des contours ou des courbes en projetant un motif, p.ex. des franges de moiré, sur l'objet
There is provided an inside-diameter measuring unit capable of automating inside-diameter measurement and a control method for automatic inside-diameter measurement. An inside-diameter measuring part is supported by a support frame part via a floating joint part. The floating joint part includes a rotation-allowing mechanism part and a translation-allowing mechanism part. A measuring head part of the inside-diameter measuring part is inserted into a hole by a robot arm part. The inside-diameter measuring part adjusts its position and posture autonomously by the reaction force when a contact point pushes against the inner wall of the hole to align the axis of the inside-diameter measuring part with the axis of the hole. An electric inside-diameter measuring unit can automatically measure the inside diameter of a hole.
There is provided an inside-diameter measuring unit capable of automating inside-diameter measurement and a control method for automatic inside-diameter measurement. An inside-diameter measuring part is supported by a support frame part via a floating joint part. The floating joint part includes a rotation-allowing mechanism part and a translation-allowing mechanism part. A measuring head part of the inside-diameter measuring part is inserted into a hole by a robot arm part. The inside-diameter measuring part adjusts its position and posture autonomously by the reaction force when a contact point pushes against the inner wall of the hole to align the axis of the inside-diameter measuring part with the axis of the hole. An electric inside-diameter measuring unit can automatically measure the inside diameter of a hole.
G01B 7/13 - Dispositions pour la mesure caractérisées par l'utilisation de techniques électriques ou magnétiques pour mesurer des diamètres des diamètres internes
G01B 7/016 - Têtes de contact de palpeurs pour de telles machines - Détails de structure des contacts
The present invention enables quick and accurate measurement of the surface shape of an object to be measured comprising a so-called rotating body or a substantially rotating body. This surface shape measurement device measures, by an optical cutting method, the three-dimensional shape of a measurement surface of an object to be measured comprising a rotating body or a substantially rotating body. The surface shape measurement device comprises: a rotation table that rotates an object to be measured which has been placed thereon in the circumferential direction; an encoder that sequentially outputs signals according to the rotation angle of the rotation table; an optical cutting sensor that irradiates the measurement surface with a band-shaped or line-shaped light, and that sequentially images, upon being triggered by the output of the signals from the encoder, an optical cutting line which is formed by the band-shaped or line-shaped light and moves on the measurement surface as the rotation table rotates, thereby obtaining a plurality of optical cutting line image data items; and an image processing unit that generates an image showing the surface shape of the measurement surface by sequentially arranging the optical cutting line image data items respectively according to the corresponding rotation angle.
G01B 11/25 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des contours ou des courbes en projetant un motif, p.ex. des franges de moiré, sur l'objet
A method for specifying a position through touch input in a screen displayed on a touch panel display. The position is specified by acquiring an initial contact position with the touch panel display, displaying a position displaying cursor in a position according to the initial contact position, displaying the position displaying cursor in the position according to the initial contact position during the period for which the contact position sensing continues until the distance from the initial contact position to the contact position reaches a predetermined distance and terminating the display of the position displaying cursor where the contact position sensing is terminated before the distance reaches the predetermined distance, and displaying the position displaying cursor in such a way that the position displaying cursor follows movement of the contact position after the distance reaches the predetermined distance.
G06F 3/04817 - Techniques d’interaction fondées sur les interfaces utilisateur graphiques [GUI] fondées sur des propriétés spécifiques de l’objet d’interaction affiché ou sur un environnement basé sur les métaphores, p.ex. interaction avec des éléments du bureau telles les fenêtres ou les icônes, ou avec l’aide d’un curseur changeant de comport utilisant des icônes
G06F 3/04842 - Sélection des objets affichés ou des éléments de texte affichés
G06F 3/04883 - Techniques d’interaction fondées sur les interfaces utilisateur graphiques [GUI] utilisant des caractéristiques spécifiques fournies par le périphérique d’entrée, p.ex. des fonctions commandées par la rotation d’une souris à deux capteurs, ou par la nature du périphérique d’entrée, p.ex. des gestes en fonction de la pression exer utilisant un écran tactile ou une tablette numérique, p.ex. entrée de commandes par des tracés gestuels pour l’entrée de données par calligraphie, p.ex. sous forme de gestes ou de texte
26.
MEASUREMENT PROGRAM SELECTION ASSISTING APPARATUS AND MEASUREMENT CONTROL APPARATUS
The present invention provides a measurement program selection assisting apparatus capable of visually confirming whether a selected measurement program is suitable for an object to be measured. One aspect of the present invention is a measurement program selection assisting apparatus comprising: a measurement program database storing a measurement program related to measurement of an object and superimposed display information corresponding to a three-dimensional shape of the object in association with each other; a display unit capable of displaying information defined in a virtual space superimposed on the real space; and a display control unit for acquiring the superimposed display information corresponding to a selected measurement program from the measurement program database and displaying the acquired superimposed display information in a mixed reality on the display unit
G06F 3/04815 - Interaction s’effectuant dans un environnement basé sur des métaphores ou des objets avec un affichage tridimensionnel, p.ex. modification du point de vue de l’utilisateur par rapport à l’environnement ou l’objet
G05B 19/4069 - Simulation du procédé d'usinage à l'écran
G06T 19/00 - Transformation de modèles ou d'images tridimensionnels [3D] pour infographie
G06T 7/73 - Détermination de la position ou de l'orientation des objets ou des caméras utilisant des procédés basés sur les caractéristiques
G06T 7/579 - Récupération de la profondeur ou de la forme à partir de plusieurs images à partir du mouvement
G06F 3/04817 - Techniques d’interaction fondées sur les interfaces utilisateur graphiques [GUI] fondées sur des propriétés spécifiques de l’objet d’interaction affiché ou sur un environnement basé sur les métaphores, p.ex. interaction avec des éléments du bureau telles les fenêtres ou les icônes, ou avec l’aide d’un curseur changeant de comport utilisant des icônes
G06F 30/20 - Optimisation, vérification ou simulation de l’objet conçu
G06V 20/20 - RECONNAISSANCE OU COMPRÉHENSION D’IMAGES OU DE VIDÉOS Éléments spécifiques à la scène dans les scènes de réalité augmentée
A metrology system is provided for use with a movement system that moves an end tool (e.g., a probe). The metrology system includes a sensor configuration, a light beam source configuration and a processing portion. The sensor configuration comprises a plurality of light beam sensors. The light beam source configuration directs light beams to the light beam sensors of the sensor configuration. One of the light beam source configuration or the sensor configuration is coupled to the end tool and/or an end tool mounting configuration of the movement system which moves the end tool. The light beams that are directed to the light beam sensors cause the light beam sensors to produce corresponding measurement signals. A processing portion processes the measurement signals from the light beam sensors which indicate the position and orientation of the end tool.
G01B 11/00 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques
G01B 11/14 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la distance ou la marge entre des objets ou des ouvertures espacés
28.
Modular configuration for coordinate measuring machine probe
A modular configuration for a scanning probe for a coordinate measuring machine include a stylus suspension module, a stylus position detection module, and a signal processing and control circuitry module. The stylus position detection module is configured to be assembled separately from the stylus suspension module before mounting to the stylus suspension module. The signal processing and control circuitry module is configured to be assembled separately from the stylus position detection module and the stylus suspension module before rigidly coupling to the stylus position detection module as part of assembling the scanning probe.
A scanning probe for a coordinate measurement machine includes a stylus suspension module, a stylus position detection module, a disruptor configuration, and a signal processing and control circuitry module. The stylus position detection module includes a sensor configuration, which comprises various coils, and a shield configuration that is located around the sensor configuration and comprises electrically conductive material for shielding the sensor configuration. The stylus position detection module is mounted to the stylus suspension module utilizing a module mounting configuration, which enables the relative position of the sensor configuration to be adjusted for alignment during the assembly of the scanning probe.
A manufacturing method of a conductor pattern includes, preparing a substrate provided with a conductor on one main surface thereof, forming an outline of the conductor pattern on the conductor with a short-pulse laser, and removing at least a part of the conductor other than the conductor pattern by etching.
B23K 26/0622 - Mise en forme du faisceau laser, p.ex. à l’aide de masques ou de foyers multiples par commande directe du faisceau laser par impulsions de mise en forme
B23K 26/364 - Gravure au laser pour faire une rainure ou une saignée, p.ex. pour tracer une rainure d'amorce de rupture
31.
Metrology system configured to measure apertures of workpieces
A metrology system includes front and back vision components portions. The front vision components portion includes a light source, camera, variable focal length (VFL) lens, and objective lens defining an optical axis. The back vision components portion may include a reflective surface and a polarization altering component. A workpiece with apertures is located between the front and back vision components portions. For each aperture of the workpiece, the system adjusts a relative position between the front vision components portion and the workpiece to align its optical axis with each aperture such that light from the light source passes through the aperture and is reflected by the reflective surface of the back vision components portion. The system uses the VFL lens and camera to acquire an image stack including images of the aperture, and analyzes the image stack to determine a measurement related to a workpiece feature of the aperture.
A non-contact probe includes an irradiating part that radiates a laser beam, an irradiating mirror that reflects the laser beam from the irradiating part toward a workpiece, a light-receiving mirror that reflects the reflected light from the workpiece, and a galvano motor capable of swinging both the irradiating mirror and the light-receiving mirror. The irradiating mirror is provided at one axial end of the motor shaft that extends on both ends of the galvano motor, and the light-receiving mirror is provided at the other axial end of the motor shaft.
A three-dimensional-measuring-apparatus inspection gauge includes a plurality of targets to be measured with which a tip of a probe of a three-dimensional measuring apparatus comes into contact; and a frame member that supports the plurality of targets. The plurality of targets are arranged in positions corresponding to each vertex of a triangular prism.
G01B 5/012 - Têtes de contact de palpeurs pour de telles machines
G01B 21/04 - Dispositions pour la mesure ou leurs détails, où la technique de mesure n'est pas couverte par les autres groupes de la présente sous-classe, est non spécifiée ou est non significative pour mesurer la longueur, la largeur ou l'épaisseur en mesurant les coordonnées de points
35.
METHOD OF ESTIMATING UNCERTAINTY OF COORDINATE MEASUREMENT
An uncertainty estimation method including: acquiring first variable values, which are a plurality of variable values included in a function indicating a relationship between a measurement dimension and a maximum permissible length measurement error when a predetermined measurement condition value of a coordinate measuring machine is a first value, and second variable values, which are the plurality of variable values occurring when the measurement condition value is a second value; calculating a maximum permissible length measurement error corresponding to a third value by calculating the variable values occurring when the measurement condition value is the third value on the basis of the plurality of first variable values and the plurality of second variable values; and estimating the measurement uncertainty of the coordinate measuring machine on the basis of the calculated maximum permissible length measurement error.
G01B 21/04 - Dispositions pour la mesure ou leurs détails, où la technique de mesure n'est pas couverte par les autres groupes de la présente sous-classe, est non spécifiée ou est non significative pour mesurer la longueur, la largeur ou l'épaisseur en mesurant les coordonnées de points
A method provides distance calibration data for a chromatic range sensor system with a chromatic range sensor optical pen configured to focus different wavelengths at different distances along a distance measurement axis. The chromatic range sensor optical pen is arranged in a relationship relative to a spherical calibration object that has a nominally spherical calibration surface. Relative movement of the chromatic range sensor optical pen in relation to the nominally spherical calibration surface is controlled so as to perform a spiral scan of a portion of the nominally spherical calibration surface. Distance indicating data is determined as corresponding to the distances between the chromatic range sensor optical pen and surface points on the nominally spherical calibration surface as the spiral scan is performed. Distance calibration data for the chromatic range sensor system is determined based on the distance indicating data.
This multiple-degree-of-freedom displacement measurement device is provided with: a rotary scale disposed around a first rotation axis, the rotary scale having a scale pattern formed by arranging a plurality of patterns around the circumferential direction; a detection head group including a plurality of detection heads disposed in an installation plane that extends around the first rotation axis and that faces the rotary scale, each of the detection heads reading a pattern from the scale pattern; and a computation unit. On the basis of detection values acquired by the plurality of detection heads, the computation unit calculates a relative rotation angle about the first rotation axis, and calculates, in addition to the relative rotation angle about the first rotation axis, an amount of relative movement in a direction along the first rotation axis, and/or an amount of relative movement in a direction along a second rotation axis orthogonal to the first rotation axis.
G01D 5/12 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensible; Moyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminé; Transducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques
G01D 5/20 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensible; Moyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminé; Transducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant la valeur d'un courant ou d'une tension en faisant varier l'inductance, p.ex. une armature mobile
An angle detector includes a rotary scale having a scale pattern in which a plurality of patterns are arrayed along a circumference direction of the rotary scale, and a plurality of detection heads, each of which detects the plurality of patterns from the scale pattern. The plurality of detection heads are shifted from each other in the circumference direction of the rotary scale and are shifted from each other in a radial direction of the rotary scale.
G01B 7/30 - Dispositions pour la mesure caractérisées par l'utilisation de techniques électriques ou magnétiques pour tester l'alignement des axes
G01B 11/26 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour tester l'alignement des axes
G01D 5/20 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensible; Moyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminé; Transducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant la valeur d'un courant ou d'une tension en faisant varier l'inductance, p.ex. une armature mobile
41.
Workpiece inspection and defect detection system utilizing color channels
A workpiece inspection and defect detection system includes a light source configuration, a lens configuration, and a camera configuration for imaging workpieces. The system acquires training and run mode workpiece images for acquiring corresponding sets of training and run mode workpiece image data. Each set of image data includes at least first and second color channel workpiece image data corresponding to first and second color channels (e.g., for which ratios between the first and second color channel workpiece image data may be determined as part of synthetic image data to improve the ability of the system to detect defects). The defect detection portion is trained based at least in part on the image data, and is utilized to perform analysis to determine defect images that include workpieces with defects (e.g., for which metrology operations may be performed for measuring dimensions of defects, etc.).
H04N 23/74 - Circuits de compensation de la variation de luminosité dans la scène en influençant la luminosité de la scène à l'aide de moyens d'éclairage
There is provided a measuring tool attachment cover that combines ease of holding and performance (for example, heat insulation). An attachment cover includes a front face layer 110, a rear face layer 120 and an intermediate layer 130. The front face layer 110 and the rear face layer 120 are compact layers with low porosity, and the intermediate layer 130 is a hollow structural layer with higher porosity than the front face layer 110 and the rear face layer 120. The hollow structural layer includes two or more layers with different porosity, and a layer of the two or more layers closer to the front face has higher porosity than a layer closer to the rear face. A direction from the rear face layer 120 to the front face layer 110 is a thickness direction, and a direction orthogonal to the thickness direction is a width direction. The hollow structural layer has elastic modulus distribution in the width direction, and an elastic modulus of a certain area is different from an elastic modulus of an area surrounding the certain area.
A measurement system includes a multi-axis robot, a measurement unit coupled to the multi-axis robot, and a data processing apparatus, wherein the measurement unit includes one or more imaging devices movable with respect to a reference position of the multi-axis robot, and a position specification device for specifying a position of one or more of the imaging devices with respect to the reference position, wherein the data processing apparatus includes an acquisition part for acquiring a plurality of pieces of captured image data generated by having one or more of the imaging devices capture images at two or more positions, and a measurement part for measuring a distance between the plurality of feature points in a workpiece on the basis of a position of the feature point of the workpiece included in the plurality of pieces of captured image data.
A metrology system including a heterodyne light source is provided. The heterodyne light source includes a first light source, an acousto-optic modulator and a source optical arrangement. The acousto-optic modulator receives at least one wavelength laser beam from the first light source and generates at least one corresponding frequency shifted laser beam (e.g., with orthogonal polarization). The source optical arrangement includes a receiving optical element portion and a birefringent optical element portion. The receiving optical element portion receives the wavelength laser beam(s) and the corresponding frequency shifted laser beam(s) and directs the beams along an optical path toward the birefringent optical element portion. The birefringent optical element portion combines the beams to output a combined beam (e.g., which may be utilized as part of a measurement process to determine at least one measurement distance to at least one surface point on a workpiece, etc.).
A digital holography metrology system is provided including a heterodyne light source, an interferometric optical arrangement and a sensor arrangement. The heterodyne light source provides combined laser beams of different corresponding frequencies and wavelengths (e.g., for which each combined beam may include a corresponding wavelength laser beam and a corresponding frequency shifted laser beam, which may be orthogonally polarized). The interferometric optical arrangement utilizes the combined beams for providing an output for imaging a workpiece, for which the output includes interference beams. The sensor arrangement includes dichroic components which separate the interference beams to be directed to respective time of flight sensors. The outputs from the time of flight sensors are utilized to determine measurements (e.g., the outputs of the time of flight sensors may be utilized to determine a measurement distance to a surface point on a workpiece, etc.).
The invention relates to the field of interferometry, in particular to Fizeau interferometers for improving a contrast of an interferogram. The Fizeau interferometer comprises a light source, a reference surface, a test surface positioned in on a support of the Fizeau interferometer and an imaging system. The Fizeau interferometer utilizes a polarizing reference surface to improve the contrast of the interferogram. The invention further relates to a method for using the Fizeau interferometer of the invention for improving contrast of an interferogram obtained by the Fizeau interferometer.
An optical device provided with an optical parts position adjusting and fixing device for adjusting and fixing the position of the optical parts moving in an optical axis direction, wherein the position adjusting and fixing device is provided with a long slotted hole extended in the optical axis direction formed on a side surface of the optical parts; a fixing means which is mounted on an object to be fixed of the optical parts and which is movable along the long slotted hole; a non-penetrating screw hole formed in the fixing means and which is divided by a slit; and a screw which is screwed into the screw hole and spreads the slit when screwed into the screw hole so as to press the outer surface of the fixing means against the inner surface of the long slotted hole.
An encoder includes scale and detection head. The detection head includes light source (transmitting unit) and light-receiving unit (receiving unit). The light-receiving unit includes light-receiving surface (receiving surface) and converts light received at the light-receiving surface 50 into differential detection signals with two phases and outputs the same. The light-receiving surface includes element array group including four element arrays provided in a parallel manner along an orthogonal direction, with each element array including a plurality of light-receiving elements (receiving elements). The plurality of element arrays in the element array group are disposed at positions where the sum of: (i) a distance in the orthogonal direction from a reference position to a positive phase signal element array; and (ii) a distance in the orthogonal direction from the reference position to the negative phase signal element array, is the same for all the phases of the at least two phases.
G01D 5/347 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensible; Moyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminé; Transducteurs non spécialement adaptés à une variable particulière utilisant des moyens optiques, c. à d. utilisant de la lumière infrarouge, visible ou ultraviolette avec atténuation ou obturation complète ou partielle des rayons lumineux les rayons lumineux étant détectés par des cellules photo-électriques en utilisant le déplacement d'échelles de codage
G01D 5/244 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensible; Moyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminé; Transducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques produisant des impulsions ou des trains d'impulsions
G01D 5/241 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensible; Moyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminé; Transducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant la valeur d'un courant ou d'une tension en faisant varier la capacité par mouvement relatif d'électrodes de condensateur
A roundness measuring machine includes: a turntable on which a workpiece is to be placed; a displacement detector detecting a displacement of a stylus; a column provided on a base shared with the turntable; a Z-axis slider supported by the column and movable in a Z-axis direction extending vertically; an X-axis slider supported by the Z-axis slider and movable in an X-axis direction intersecting the Z-axis direction; and an attitude adjusting mechanism provided to the X-axis slider and supporting the displacement detector such that an attitude of the displacement detector is adjustable. The attitude adjusting mechanism includes: a Y-axis slider supported by the X-axis slider and movable in a Y-axis direction intersecting the Z-axis and the X-axis directions; and a detector holder supported by the Y-axis slider and supporting the displacement detector such that the displacement detector is turnable around the X-axis direction.
A chromatic range sensor (CRS) system is configured to provide an in-focus image of a workpiece surface including a measurement spot usable as a guide light. The system includes an optical pen having a chromatically dispersive lens configuration providing axial chromatic dispersion, and a reflected light dividing configuration (e.g., a beamsplitter) arranged to receive and divide reflected light from the workpiece surface into a measurement portion and an imaging portion. The optical pen includes a narrowband spectral filter and a camera. The CRS system includes a processing portion configured to measure a distance from the optical pen to the workpiece surface, and to make an adjustment so that the distance corresponds to a focus distance at which the workpiece surface is in focus when imaged by the light that passes through the narrowband spectral filter.
G01B 11/02 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la longueur, la largeur ou l'épaisseur
G01B 11/06 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la longueur, la largeur ou l'épaisseur pour mesurer l'épaisseur
G01S 7/481 - Caractéristiques de structure, p.ex. agencements d'éléments optiques
52.
Inspection gauge for coordinate measuring apparatus and abnormality determination method
The inspection gauge is an inspection gauge for a coordinate measuring apparatus having a triangular pyramid shape, and includes a plurality of support members in which first ends are provided at positions corresponding to vertexes of the triangular pyramid and second ends are connected to each other in a region inside the triangular pyramid, and a plurality of spheres provided at positions corresponding to the vertexes of the triangular pyramid on the plurality of support members, and at least three support members of the plurality of support members have mutually different shapes.
G01B 5/008 - Dispositions pour la mesure caractérisées par l'utilisation de techniques mécaniques pour mesurer les coordonnées de points en utilisant des machines de mesure de coordonnées
G01B 5/00 - Dispositions pour la mesure caractérisées par l'utilisation de techniques mécaniques
53.
Sensing winding configuration for inductive position encoder
An inductive position encoder includes a scale, a detector and a signal processor. The scale includes a periodic pattern of signal modulating elements (SME) arranged along a measuring axis (MA) with a spatial wavelength W1. The detector comprises sensing elements and a field generating coil that generates a changing magnetic flux. The sensing elements comprise conductive loops that provide detector signals responsive to a local effect on the changing magnetic flux provided by adjacent SME's. Some or all of the conductive loops are configured according to an intra-loop shift relationship wherein equal “shifted proportions” of a loop are shifted in opposite directions by W1/4K. K is an odd integer. The intra-loop shift relationship can be used to suppress Kth spatial harmonic components in the detector signals, while also overcoming longstanding detrimental layout problems. It combines easily with “loop width” spatial filtering techniques that filter other spatial harmonic signal components.
G01D 5/20 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensible; Moyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminé; Transducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant la valeur d'un courant ou d'une tension en faisant varier l'inductance, p.ex. une armature mobile
An optical sensor includes a radiation part that irradiates an object to be measured with line shaped light; and an imaging part that receives line shaped light reflected by the object to be measured and captures an image of the object to be measured in a predetermined exposure time. The radiation part includes a light generation part that generates the line shaped light, and a light vibration part that irradiates the object to be measured with the line shaped light generated by the light generation part while vibrating the line shaped light in a length direction during the exposure time.
G01B 11/03 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la longueur, la largeur ou l'épaisseur en mesurant les coordonnées de points
An illumination device has a light source unit, a lens unit, and a filter unit An imaging device receives object light, generated by the illumination light, from the measurement object at a predetermined observation solid angle, and pixels of the imaging device can each identify the different light wavelength ranges. A processing device includes an arithmetic unit configured to obtain a normal vector at each point of the measurement object corresponding to each pixel from inclusion relation between the plurality of solid angle regions, constituting the object light, and the predetermined observation solid angle, and a shape reconstruction unit configured to reconstruct the shape of the measurement object.
An optical sensor includes a radiation part that irradiates an object to be measured with laser light, an imaging part that receives laser light reflected by the object to be measured and captures an image of the object to be measured, a first driving part that moves the radiation part in a radiation direction of laser light to the object to be measured, and a second driving part that moves the imaging part in a reflection direction of laser light from the object to be measured and an orthogonal direction to the reflection direction.
An illuminator includes: a light emitter including a light-emitting diode; a temperature sensor configured to detect a current temperature of the light emitter; and an illumination controller configured to adjust a drive voltage being supplied to the light emitter in accordance with the current temperature. The illumination controller includes a reference temperature storage in which a reference temperature is stored in advance and is configured to adjust the drive voltage by detecting the current temperature from the temperature sensor on a constant time cycle and comparing the current temperature with the reference temperature.
H05B 45/34 - Stabilisation de la tension; Maintien d'une tension constante
H05B 45/18 - Commande de l'intensité de la lumière à l'aide d'un retour de température
H05B 45/56 - Circuits pour faire fonctionner des diodes électroluminescentes [LED] sensibles à la vie des LED; Circuits de protection impliquant des mesures pour empêcher une température anormale des LED
There is provided a probe unit correction method for correcting linear expansion of a probe unit to obtain an accurate measurement value. First, a probe offset value is calculated as a model. Then, a probe unit correction method includes a temperature data acquisition step of acquiring a temperature difference between a temperature at a time of calibration and a temperature of a current measurement environment, a reference tip coordinate correction step of calculating, as a reference tip correction coordinate value, a correction value of a reference tip coordinate value to which linear expansion is added, and a probe offset correction step of calculating, as a probe offset correction value, a correction value of a probe offset value to which the linear expansion is added.
G01B 5/008 - Dispositions pour la mesure caractérisées par l'utilisation de techniques mécaniques pour mesurer les coordonnées de points en utilisant des machines de mesure de coordonnées
G01B 21/04 - Dispositions pour la mesure ou leurs détails, où la technique de mesure n'est pas couverte par les autres groupes de la présente sous-classe, est non spécifiée ou est non significative pour mesurer la longueur, la largeur ou l'épaisseur en mesurant les coordonnées de points
G01B 5/00 - Dispositions pour la mesure caractérisées par l'utilisation de techniques mécaniques
A microscope unit comprises: a main lens barrel of an imaging optical system, the main lens barrel being configured capable of being fitted with an imaging sensor and an objective lens; and an illumination lens barrel of an illumination optical system, the illumination lens barrel being connected to the main lens barrel and configured capable of being fitted with a light source, the illumination lens barrel having: a first lens barrel configured capable of being fitted with the light source; and an intermediate lens barrel connecting the main lens barrel and the first lens barrel, and a field stop of light irradiated from the light source being disposed more inwardly than an outer peripheral surface of the intermediate lens barrel is.
A microscope unit comprises: a main lens barrel of an imaging optical system; and an illumination lens barrel of an illumination optical system connected to the main lens barrel, the illumination optical system having: a collector lens that collects light that has been irradiated from a light source; a fly-eye lens allowing to be transmitted therethrough light from the collector lens; a first relay lens having lenses that relay light from the fly-eye lens; a field stop that stops down a range of light from the first relay lens; a second relay lens that relays to a beam splitter light from the first relay lens; and the beam splitter guiding at least a part of light incident thereon to the objective lens and allowing to be transmitted therethrough to a side of an imaging sensor at least a part of light incident thereon from the objective lens.
A position detection system includes: a plurality of distance detection apparatuses that generate distance data indicating distances to a plurality of positions on the object by detecting light reflected by the object in a predetermined three-dimensional space; an object identification part that identifies the object included in one or more pieces of distance data among a plurality of pieces of the distance data generated by the plurality of distance detection apparatuses; and a position identification part that identifies a position of the object in the three-dimensional space on the basis of (i) a position in the three-dimensional space of the distance detection apparatus that generated the distance data with which the object identification part identified the object and (ii) a position of the object in the distance data.
G06V 20/58 - Reconnaissance d’objets en mouvement ou d’obstacles, p.ex. véhicules ou piétons; Reconnaissance des objets de la circulation, p.ex. signalisation routière, feux de signalisation ou routes
B60W 60/00 - Systèmes d’aide à la conduite spécialement adaptés aux véhicules routiers autonomes
62.
SURFACE TEXTURE MEASURING MACHINE AND SURFACE TEXTURE JUDGMENT METHOD
A surface texture measuring machine includes: a parameter setting unit configured to set one or more parameters related to a surface texture of a workpiece; a measurement unit configured to calculate a measurement value corresponding to each of the parameters on the basis of displacement measurement data obtainable by scanning a surface of the workpiece or a master workpiece; a judgment value calculation unit configured to calculate a judgment value corresponding to each of the parameters with an assumption that the measurement value of the master workpiece is defined as a reference value and a value having a predetermined ratio relative to the reference value is defined as a tolerance; and a judgment unit configured to compare the measurement value of the workpiece and the judgment value for each of the parameters.
G01B 5/28 - Dispositions pour la mesure caractérisées par l'utilisation de techniques mécaniques pour mesurer la rugosité ou l'irrégularité des surfaces
63.
Workpiece holder for utilization in metrology system for measuring workpiece in different orientations
A workpiece holder is configured to hold a workpiece and is utilized in a metrology system which includes a sensing configuration for obtaining 3-dimensional surface data for the workpiece. The workpiece holder includes at least three reference features (e.g., spherical reference features extending from sides) that are configured to be sensed by the sensing configuration when the workpiece holder is in different orientations (e.g., as rotated 180 degrees between first and second orientations for presenting front and back sides of the workpiece towards the sensing configuration). A determination of 3-dimensional positions of the reference features for each orientation enables a combining (e.g., in a common coordinate system) of 3-dimensional surface data that is acquired for the workpiece in each orientation. Interchangeable workpiece holding portions may be provided that fit within the workpiece holder for holding workpieces with different characteristics (e.g., having different sizes and/or shapes).
An abnormality determination apparatus includes a data acquisition part that acquires position data indicating a plurality of positions to be measured of a standard gage used in a coordinate measuring apparatus, in association with apparatus identification information for identifying the coordinate measuring apparatus, a generation part that generates distance data indicating a distance to be measured that is a distance between the plurality of positions to be measured indicated by the position data, a storage that stores an appropriate range in which the distance data is determined to be appropriate, and a determination part that determines whether there is an abnormality in the coordinate measuring apparatus on the basis of whether or not the distance to be measured indicated by the distance data is included in the appropriate range, and outputs a determination result in association with the apparatus identification information.
There is provided a test indicator 100 capable of replacing a stylus 210 with another stylus 210 having a different length to increase a reaching range of the stylus 210, and of increasing a rotation angle of the stylus 210 to display an accurate measurement value in a wide measurement range.
There is provided a test indicator 100 capable of replacing a stylus 210 with another stylus 210 having a different length to increase a reaching range of the stylus 210, and of increasing a rotation angle of the stylus 210 to display an accurate measurement value in a wide measurement range.
A calculation unit 400 of the test indicator 100 includes a stylus-length storage unit 420 that sets and stores a length of the stylus 210, and a stylus-length correction calculation unit 400 that changes, according to the length of the stylus 210, a conversion ratio for converting a detection value by an encoder 340 into a measurement value to correct the measurement value. The calculation unit 400 further includes a rotation-angle calculation unit 410 that calculates a rotation angle αs[rad] of the stylus 210 based on the detection value by the encoder 340 and an arc-chord error correction calculation unit 400 that multiplies a sine value using the rotation angle αs calculated by the rotation-angle calculation unit 410 as an argument to correct the measurement value.
G01B 21/04 - Dispositions pour la mesure ou leurs détails, où la technique de mesure n'est pas couverte par les autres groupes de la présente sous-classe, est non spécifiée ou est non significative pour mesurer la longueur, la largeur ou l'épaisseur en mesurant les coordonnées de points
G01B 3/00 - Instruments de mesure caractérisés par l'utilisation de techniques mécaniques
G06F 3/0354 - Dispositifs de pointage déplacés ou positionnés par l'utilisateur; Leurs accessoires avec détection des mouvements relatifs en deux dimensions [2D] entre le dispositif de pointage ou une partie agissante dudit dispositif, et un plan ou une surface, p.ex. souris 2D, boules traçantes, crayons ou palets
A calibration method includes: measuring, with a CMM, a ball-to-ball distance of a plurality of edges of an inspection gauge installed in a first posture, a second posture and a third posture, and calculating a calibration value calibrating a ball-to-ball distance between two balls at respective ends of a plurality of edges of the inspection gauge by solving simultaneous equations including the ball-to-ball distance of the plurality of edges of the inspection gauge installed in the first posture, the ball-to-ball distance of the plurality of edges of the inspection gauge installed in the second posture, the ball-to-ball distance of the plurality of edges of the inspection gauge installed in the third posture, and a measurement error of the CMM at the measurement position.
G01B 21/04 - Dispositions pour la mesure ou leurs détails, où la technique de mesure n'est pas couverte par les autres groupes de la présente sous-classe, est non spécifiée ou est non significative pour mesurer la longueur, la largeur ou l'épaisseur en mesurant les coordonnées de points
G01B 5/008 - Dispositions pour la mesure caractérisées par l'utilisation de techniques mécaniques pour mesurer les coordonnées de points en utilisant des machines de mesure de coordonnées
There is provided a housing unit having an immersion detection function, as a housing of an electronic device requiring waterproofing.
A housing unit includes a casing liquid-tightly defining an internal housing space and housing an internal device in the housing space, and an immersion detector that detects whether liquid leak into the housing space of the casing. The casing includes a sealing means for waterproofing a joint, an entryway, or an opening. The immersion detector includes an electrolyte salt and a continuity detector that detects a change in conductivity when the liquid comes into contact with the electrolyte salt. The electrolyte salt is arranged inside the casing and further inside the casing than the sealing means.
G01M 3/16 - Examen de l'étanchéité des structures ou ouvrages vis-à-vis d'un fluide par utilisation d'un fluide ou en faisant le vide par détection de la présence du fluide à l'emplacement de la fuite en utilisant des moyens de détection électrique
G01B 21/22 - Dispositions pour la mesure ou leurs détails, où la technique de mesure n'est pas couverte par les autres groupes de la présente sous-classe, est non spécifiée ou est non significative pour tester l'alignement des axes
68.
Measurement control apparatus, measurement system and program
Facilitate the work of setting the part program used in the measuring device for each object to be measured. A measurement control apparatus of the present invention includes a code reader that reads a code containing at least a part program identification information, and a measurement information providing unit that, when the code is read by the code reader, sends a start command of a part program corresponding to the part program identification information recorded in the code to a measuring device, and causes the measuring device to execute processing according to the part program prepared in advance.
G06K 7/14 - Méthodes ou dispositions pour la lecture de supports d'enregistrement par radiation corpusculaire utilisant la lumière sans sélection des longueurs d'onde, p.ex. lecture de la lumière blanche réfléchie
G06F 3/0484 - Techniques d’interaction fondées sur les interfaces utilisateur graphiques [GUI] pour la commande de fonctions ou d’opérations spécifiques, p.ex. sélection ou transformation d’un objet, d’une image ou d’un élément de texte affiché, détermination d’une valeur de paramètre ou sélection d’une plage de valeurs
A preamplifier amplifies signals input to first and second input terminals. A first switching circuit receives first and second input signals and outputs those to the first and second input terminals. A switched capacitor circuit samples two signals amplified by the preamplifier. Differential signals sampled by the switched capacitor circuit are respectively input to third and fourth input terminals of an integration circuit, and the integration circuit outputs differential signals obtained by those input signals to first and second output terminals. A second switching circuit switches a connection relationship between the switched capacitor circuit and the integration circuit. Each time the cycle changes, the first and second switching circuits switch the connection relationships to cause the signals amplified by the preamplifier to be sampled by double correlation sampling.
A preamplifier amplifies signals input to first and second input terminals. A first switching circuit receives first and second input signals and respectively outputs those signals to the first and second input terminals. A switched capacitor circuit samples two signals amplified by the preamplifier. An integration circuit includes a fully differential operational amplifier outputting amplifying differential signals input between third and fourth input terminals between second and first output terminals, and first and second integration capacitors. A second switching circuit switches a connection relationship between the switched capacitor circuit, and the first and second integration capacitors. A third switching circuit switches a connection relationship between the first and second integration capacitors, and third and fourth output terminals. A cycle including sampling and signal integration is performed twice, and the first to third switching circuits switch the connection relationships each time the cycle changes.
G01D 5/20 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensible; Moyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminé; Transducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant la valeur d'un courant ou d'une tension en faisant varier l'inductance, p.ex. une armature mobile
H03K 17/51 - Commutation ou ouverture de porte électronique, c. à d. par d'autres moyens que la fermeture et l'ouverture de contacts caractérisée par l'utilisation de composants spécifiés
A coordinate measuring apparatus includes a measuring part that measures a workpiece, three or more access points that are provided at positions away from the measuring part and perform wireless communication with the measuring part using radio waves, a laser tracker that irradiates a reflection part provided in each access point with a laser beam and receives the laser beam reflected by the reflection part, and a control part that obtains a first coordinate of the each access point by the laser tracker receiving the laser beam reflected by the reflection part, obtains a second coordinate of the measuring part on the basis of the wireless communication between the access point and the measuring part, causes the measuring part to measure a third coordinate of the workpiece, and obtains a spatial coordinate of the workpiece on the basis of the first coordinate, the second coordinate, and the third coordinate.
A three-dimensional geometry measurement apparatus including: a relationship identification part that identifies a combination of a first imaging pixel and a projection pixel of a projection image; a determination part that determines, for the combination of the first imaging pixel and the projection pixel, whether or not the combination includes a defective pixel on the basis of a distance between (i) a second imaging pixel corresponding to the same projection coordinate as a projection coordinate corresponding to the first imaging pixel and (ii) a second imaging pixel corresponding to the projection coordinate of the projection pixel and located on an epipolar line of a second captured image corresponding to the projection coordinate; and a geometry measurement part that measures a geometry of an object to be measured using at least one of the first imaging pixel excluding the defective pixel or the second imaging pixel excluding the defective pixel.
A scale includes a base material, an intermediate layer of soft magnetic material formed on one surface of the base material and roughened on face thereof opposite to the base material, and a scale pattern of a conductor formed on the intermediate layer.
G01D 5/20 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensible; Moyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminé; Transducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant la valeur d'un courant ou d'une tension en faisant varier l'inductance, p.ex. une armature mobile
A measurement apparatus including a laser apparatus that outputs a frequency-modulated laser beam with a plurality of modes of a main lobe, branch that splits the frequency-modulated laser beam into a reference light, a measurement light, and a monitor light, beat signal generator that generates a beat signal by mixing the reference light and a reflected light that is reflected by radiating the measurement light onto an object to be measured, extraction circuitry that extracts a signal component including a plurality of self-beat signals based on the main lobe from the monitor light, identification circuitry that identifies a cavity frequency of the optical cavity on the basis of the signal component, and calculation circuitry that calculates a difference between propagation distances between the reference light and the measurement light on the basis of the cavity frequency and the beat signal.
G01S 17/34 - Systèmes déterminant les données relatives à la position d'une cible pour mesurer la distance uniquement utilisant la transmission d'ondes continues, soit modulées en amplitude, en fréquence ou en phase, soit non modulées utilisant la transmission d'ondes continues modulées en fréquence, tout en faisant un hétérodynage du signal reçu, ou d’un signal dérivé, avec un signal généré localement, associé au signal transmis simultanément
G01S 7/48 - DÉTERMINATION DE LA DIRECTION PAR RADIO; RADIO-NAVIGATION; DÉTERMINATION DE LA DISTANCE OU DE LA VITESSE EN UTILISANT DES ONDES RADIO; LOCALISATION OU DÉTECTION DE LA PRÉSENCE EN UTILISANT LA RÉFLEXION OU LA RERADIATION D'ONDES RADIO; DISPOSITIONS ANALOGUES UTILISANT D'AUTRES ONDES - Détails des systèmes correspondant aux groupes , , de systèmes selon le groupe
There is provided a displacement measuring apparatus capable of being used in a vacuum environment. The displacement measuring apparatus includes a scale and a detection head part disposed in such a manner as to be relatively displaceable to the scale and as to face the scale with a predetermined gap. The detection head part detects a displacement or position relative to the scale. The scale is disposed in a vacuum. The detection head part is housed in a housing holder separating an atmospheric environment side from a vacuum environment side. In a gap between the detection head part and the scale, the housing holder includes a relay means for passing a detection signal between the detection head part and the scale,
G01D 5/20 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensible; Moyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminé; Transducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant la valeur d'un courant ou d'une tension en faisant varier l'inductance, p.ex. une armature mobile
G01D 5/347 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensible; Moyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminé; Transducteurs non spécialement adaptés à une variable particulière utilisant des moyens optiques, c. à d. utilisant de la lumière infrarouge, visible ou ultraviolette avec atténuation ou obturation complète ou partielle des rayons lumineux les rayons lumineux étant détectés par des cellules photo-électriques en utilisant le déplacement d'échelles de codage
G01D 5/24 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensible; Moyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminé; Transducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant la valeur d'un courant ou d'une tension en faisant varier la capacité
An image detection device includes an image detection optical system including a liquid resonant lens; an image detector configured to detect an image corresponding to a detection phase of a drive signal through the image detection optical system; a range determination unit configured to determine a first half or a second half of a cycle of the drive signal as a designated allowable range of the detection phase based on whether a phase delay shown by a variation waveform of a focus position is positive or negative; a detection phase setting unit configured to set the detection phase in the designated allowable range; and a detection control unit configured to control an image-detection timing by the image detector to a timing offset from the detection phase by an angle corresponding to the phase delay.
The present invention relates to a position specifying method for specifying a position through touch input in a screen displayed on a touch panel display. The position is specified by the steps of acquiring an initial contact position that is a contact position at the start of sensing of a position where contact is made with the touch panel display, displaying a position displaying cursor in a position according to the initial contact position, displaying the position displaying cursor in the position according to the initial contact position during the period for which the contact position sensing continues until the distance from the initial contact position to the contact position reaches a predetermined distance and terminating the display of the position displaying cursor with no position specifying operation performed in a case where the contact position sensing is terminated before the distance from the initial contact position to the contact position reaches the predetermined distance, and displaying the position displaying cursor in such a way that the position displaying cursor follows movement of the contact position after the distance from the initial contact position to the contact position reaches the predetermined distance so that the relative positional relationship between the position displaying cursor and the contact position at the point of time when the distance from the initial contact position to the contact position reaches the predetermined distance is maintained during the period for which the contact position sensing continues and setting, when position-specifying-operation finalizing operation is sensed after the distance from the initial contact position to the contact position reaches the predetermined distance, the position where the position displaying cursor is displayed when the position-specifying-operation finalizing operation is sensed to be a specified position.
G06F 3/04817 - Techniques d’interaction fondées sur les interfaces utilisateur graphiques [GUI] fondées sur des propriétés spécifiques de l’objet d’interaction affiché ou sur un environnement basé sur les métaphores, p.ex. interaction avec des éléments du bureau telles les fenêtres ou les icônes, ou avec l’aide d’un curseur changeant de comport utilisant des icônes
G06F 3/04842 - Sélection des objets affichés ou des éléments de texte affichés
G06F 3/04883 - Techniques d’interaction fondées sur les interfaces utilisateur graphiques [GUI] utilisant des caractéristiques spécifiques fournies par le périphérique d’entrée, p.ex. des fonctions commandées par la rotation d’une souris à deux capteurs, ou par la nature du périphérique d’entrée, p.ex. des gestes en fonction de la pression exer utilisant un écran tactile ou une tablette numérique, p.ex. entrée de commandes par des tracés gestuels pour l’entrée de données par calligraphie, p.ex. sous forme de gestes ou de texte
81.
SENSING WINDING CONFIGURATION FOR INDUCTIVE POSITION ENCODER
An inductive position encoder includes a scale, detector, and signal processor. The scale includes a periodic pattern of signal modulating elements (SME) arranged along a measuring axis (MA) with spatial wavelength W1. The detector comprises sensing elements and a field generating coil that generates changing magnetic flux. The sensing elements comprise conductive loops that provide detector signals responsive to a local effect on the magnetic flux provided by adjacent SME's. The conductive loops have an average MA dimension that spatially filters a 3rd spatial harmonic signal component and are located along the MA according to an “inter-loop” shift relationship wherein first and second equal numbers of positive and negative polarity loops, are shifted in opposite directions by W1/4K (K=3, 5, 7, 9). Third and Kth spatial harmonic components are both reduced in the detector signals while using a novel “layout friendly” loop arrangement to solve longstanding detrimental layout problems.
G01D 5/20 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensible; Moyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminé; Transducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant la valeur d'un courant ou d'une tension en faisant varier l'inductance, p.ex. une armature mobile
82.
Inductive position sensor signal gain control for coordinate measuring machine probe
A scanning probe for a coordinate measuring machine with inductive position sensor signal gain control is provided. The scanning probe includes a stylus position detection portion with field generating and sensing coils, and for which corresponding output signals are indicative of a position of the probe tip of the stylus. Signal processing and control circuitry is configured to implement different operating regions, such as a central high gain operating region which corresponds to a central probe tip position range, as well as other lower gain operating regions, and for which transition operations may be performed for adjusting the gain. In various implementations, transition operations for adjusting a gain may include operations such as: adjusting power to a field generating coil configuration; adjusting a gain of a front end amplifier; altering characteristics of sensing coils; adjusting an input range of an analog to digital converter, etc.
G01B 7/012 - Têtes de contact de palpeurs pour de telles machines
G01D 5/20 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensible; Moyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminé; Transducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant la valeur d'un courant ou d'une tension en faisant varier l'inductance, p.ex. une armature mobile
83.
SENSING WINDING CONFIGURATION FOR INDUCTIVE POSITION ENCODER
An inductive type position encoder includes a scale, a detector portion and a signal processor. The scale includes a periodic pattern of signal modulating elements (SME) arranged along a measuring axis with a spatial wavelength W1. The SME in the pattern comprise similar conductive plates or loops. The detector portion comprises sensing elements and a field generating coil that generates a changing magnetic flux. The sensing elements may comprise conductive loop portions arranged along the measuring axis and configured to provide detector signals which respond to a local effect on the changing magnetic flux provided by adjacent SME's. In various implementations, SMEs having an average dimension DSME along the measuring axis direction that is at least 0.55*W1 and at most 0.8*W1 are combined with sensing elements having an average dimension along the measuring axis direction that is at least 0.285*W1 and at most 0.315*W1, which improves detector signal accuracy.
G01D 5/20 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensible; Moyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminé; Transducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant la valeur d'un courant ou d'une tension en faisant varier l'inductance, p.ex. une armature mobile
G01B 7/02 - Dispositions pour la mesure caractérisées par l'utilisation de techniques électriques ou magnétiques pour mesurer la longueur, la largeur ou l'épaisseur
G01B 3/00 - Instruments de mesure caractérisés par l'utilisation de techniques mécaniques
A chromatic range sensor (CRS) system is provided that determines a workpiece thickness and includes an optical pen, an illumination source, a wavelength detector and a processing portion. The optical pen includes an optics portion providing axial chromatic dispersion, the illumination source is configured to generate multi-wavelength light and the wavelength detector includes a plurality of pixels distributed along a measurement axis. In operation, the optical pen inputs a spectral profile from the illumination source and outputs corresponding radiation to first and second workpiece surfaces of a workpiece (e.g., which may be transparent) and outputs reflected radiation to the wavelength detector which provides output spectral profile data. The processing portion processes the output spectral profile data to determine a thickness of the workpiece. In various implementations, the processing to determine the thickness may not rely on determining a distance to the workpiece and/or may utilize transform processing, etc.
G01B 11/06 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la longueur, la largeur ou l'épaisseur pour mesurer l'épaisseur
A measurement system includes: measurement target information database that stores measurement point information, including measurement conditions and guidance information for each measurement point, associated with the type of the measurement target; a measuring instrument that performs measurements on the measurement target; an image capturing unit that captures an image of a subject; a display unit; a measurement target identification unit that identifies the type of the measurement target based on the image captured by the image capturing unit; a measurement target information obtaining unit for obtaining the measurement point information corresponding to the type of the measurement target identified by the measurement target identification unit from the measurement target information database; and a setting unit that displays the guidance information included in the measurement point information obtained by the measurement target information obtaining unit on the display unit and sets the measurement conditions on the measuring instrument.
G06K 9/00 - Méthodes ou dispositions pour la lecture ou la reconnaissance de caractères imprimés ou écrits ou pour la reconnaissance de formes, p.ex. d'empreintes digitales
G06F 16/22 - Indexation; Structures de données à cet effet; Structures de stockage
The photoelectric rotary encoder includes: a generally disk-shaped scale with a grating-like pattern formed with a predetermined period along a measurement direction, the measurement direction being a direction of rotation of a measurement target that rotates on a predetermined axis, the scale being plate-like and centered on an axis of rotation; and a head that detect, from the scale, the amount of displacement caused by the rotation of the measurement target. The head includes a light source, a diffraction unit with grating parts, and a light-receiving unit with light-receiving elements. The grating parts of the diffraction unit are formed as deformed grating parts that spread cut wide, from the center on the axis of rotation, along the grating-like pattern of the scale. The light-receiving elements are formed as linear grating parts.
G01D 5/34 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensible; Moyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminé; Transducteurs non spécialement adaptés à une variable particulière utilisant des moyens optiques, c. à d. utilisant de la lumière infrarouge, visible ou ultraviolette avec atténuation ou obturation complète ou partielle des rayons lumineux les rayons lumineux étant détectés par des cellules photo-électriques
G01D 5/347 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensible; Moyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminé; Transducteurs non spécialement adaptés à une variable particulière utilisant des moyens optiques, c. à d. utilisant de la lumière infrarouge, visible ou ultraviolette avec atténuation ou obturation complète ou partielle des rayons lumineux les rayons lumineux étant détectés par des cellules photo-électriques en utilisant le déplacement d'échelles de codage
88.
Surface reference detecting mechanism and hardness tester
An indenter reference that is brought into contact with an axial second side surface of a sample which is arranged further toward an axial first side than an indenter, the indenter reference serving as a position reference for the indenter; a holder that detachably holds the indenter reference and is coupled with the indenter reference; an indenter position detector that couples with the holder and detects a relative position of the indenter with respect to the indenter reference; a regulator that allows displacement between a first position that regulates movement of the indenter reference with respect to the holder and a second position where the indenter reference can be removed from the holder; and a biasing portion that biases the regulator to be kept at the first position.
G01N 3/42 - Recherche de la dureté ou de la dureté au rebondissement en effectuant des empreintes sous une charge permanente par des dispositifs de pénétration, p.ex. sphère, pyramide
89.
Displacement sensor and profile measurement apparatus
A displacement sensor includes a radiation part that irradiates a workpiece displaceable in a predetermined displacement direction with light, a light receiving part that receives a reflected light generated when the light radiated by the radiation part is reflected on the workpiece, and a fringe generation part that includes a generation means for generating fringes on a light receiving surface of the light receiving part when the light receiving part receives the reflected light from the workpiece. The fringe generation part and the light receiving part are arranged such that the fringe generation part and the light receiving part are parallel to the displacement direction, or parallel to a virtual image of the displacement direction.
A measurement apparatus includes a sensor that measures a workpiece, a multi-axis robot that moves the sensor in a three-dimensional space, a position determination part that determines i) a plurality of measurement positions that are positions along a normal direction at each of a plurality of positions to be measured on the workpiece and ii) a direction of the sensor at each of the plurality of measurement positions on the basis of at least either design data or captured image data indicating the geometry of the workpiece, a moving control part that sequentially moves the sensor to the plurality of measurement positions by controlling the robot, and a measurement control part that outputs measured data indicating a result that the sensor measured at each of the plurality of measurement positions in association with the plurality of positions to be measured.
G01B 21/16 - Dispositions pour la mesure ou leurs détails, où la technique de mesure n'est pas couverte par les autres groupes de la présente sous-classe, est non spécifiée ou est non significative pour mesurer la distance ou le jeu entre des objets espacés
G06T 7/579 - Récupération de la profondeur ou de la forme à partir de plusieurs images à partir du mouvement
To provide a fixing device improved in fixation of an annular member to a cylindrical member. The fixing device for fixing the annular member to the cylindrical member that includes a first fixing portion and a second fixing portion. The first fixing portion includes an annular portion and an adjustment portion. The annular portion covers an outer peripheral surface of the cylindrical member from outward in a radial direction. A circumferential length of the annular portion is adjustable with the adjustment portion. The second fixing portion is fixed to the first fixing portion and fixed to the annular member.
A form measuring instrument includes: a contact tip configured to contact with a workpiece; a movement mechanism configured to cause relative movement of the contact tip with respect to the workpiece; a movement controlling unit configured to control the movement mechanism; a contact sensor configured to detect a contact amount of the contact tip with the workpiece and output a detection signal corresponding to the contact amount; and an abnormality determining unit configured to determine an abnormality of sensitivity of the contact sensor based on a change in the detection signal outputted from the contact sensor during an operation of the movement mechanism in which the contact tip is pressed against the workpiece.
A metrology system is provided including a projected pattern for points-from-focus type processes. The metrology system includes an objective lens portion, a light source, a pattern projection portion and a camera. Different lenses (e.g., objective lenses) having different magnifications and cutoff frequencies may be utilized in the system. The pattern projection portion includes a pattern component with a pattern. At least a majority of the area of the pattern includes pattern portions that are not recurring at regular intervals across the pattern (e.g., as corresponding to a diverse spectrum of spatial frequencies that result in a relatively flat power spectrum over a desired range and with which different lenses with different cutoff frequencies may be utilized). The pattern is projected on a workpiece surface (e.g., for producing contrast) and an image stack is acquired, from which focus curve data is determined that indicates 3 dimensional positions of workpiece surface points.
G06T 7/521 - Récupération de la profondeur ou de la forme à partir de la projection de lumière structurée
H04N 5/232 - Dispositifs pour la commande des caméras de télévision, p.ex. commande à distance
G01B 11/25 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des contours ou des courbes en projetant un motif, p.ex. des franges de moiré, sur l'objet
There is provided a display panel module unit having a narrow frame suitable for a display unit of a small-sized measuring apparatus. A panel module unit includes a first panel part, a second panel part, and an intermediate cover housed in a housing part in order from a front side to a rear side. The housing part includes an annular side wall and at least one fixing means attached on an inner peripheral surface of the side wall, and the fixing means is a means for fixing a position of the intermediate cover in the housing part. The second panel part is housed between the first panel part and the intermediate cover, and a position of the second panel part is indirectly fixed by the intermediate cover. The second panel part is provided with a biasing means for biasing the first panel part from the rear side toward the front side.
An electromagnetic inductive encoder that can suppress the effect of changes in magnetic flux received by the receiver section and maintain the accuracy of measurement results is provided. The electromagnetic inductive encoder 1 includes a scale 2 and a head 3 that is provided to face the scale 2 and moves relative to the scale 2. The head 3 includes a transmitter section 4 and a receiver section 5 with a plurality of receiving coils 500. The receiver section 5 has a first receiver section 51 with at least one receiving coil 500, a second receiver section 52 that is provided apart from the first receiver section 51 and has at least one receiving coil 500 different from the first receiver section 51, and connection wiring 53 that connects the first receiver section 51 and second receiver section 52. The first receiver section 51 and the second receiver section 52 are arranged linearly symmetrically with the axis L1 of the Y-direction, which is orthogonal to the X-direction (measurement direction) in the plane 30 where the receiving coils 500 are arranged, and are arranged in the same number.
G01D 5/20 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensible; Moyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminé; Transducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant la valeur d'un courant ou d'une tension en faisant varier l'inductance, p.ex. une armature mobile
99.
Error determination apparatus, error determination method, and storage medium
An error determination apparatus for determining a measurement error that occurs when a workpiece is measured by a coordinate measuring machine, the error determination apparatus includes an information acquisition part that acquires a) motion error information indicating a result of measuring a motion error of the coordinate measuring machine and b) design information of the workpiece, a measurement position specification part that specifies a measurement position on the workpiece on the basis of the design information, an error determination part that determines a measurement error occurring in the measurement at the measurement position due to the motion error on the basis of the motion error information, and an output part that outputs the measurement error determined by the error determination part.
G01B 21/04 - Dispositions pour la mesure ou leurs détails, où la technique de mesure n'est pas couverte par les autres groupes de la présente sous-classe, est non spécifiée ou est non significative pour mesurer la longueur, la largeur ou l'épaisseur en mesurant les coordonnées de points
100.
System and method utilizing multi-point autofocus to align an optical axis of an optical assembly portion to be normal to a workpiece surface
A metrology system includes an optical assembly portion; an adjustment mechanism configured to change a distance and an angular orientation between the optical assembly portion and a workpiece surface; and a processor configured to control the adjustment mechanism to move the optical assembly portion to position a workpiece surface within a focal Z autofocus range; capture an image stack of the workpiece surface wherein each image of the image stack corresponds to a different autofocus height; determine an autofocus height for at least three locations of the workpiece surface; control the adjustment mechanism based on the autofocus heights to rotate the optical assembly portion relative to the workpiece surface to nominally align the optical axis of the optical assembly portion with a surface normal of the workpiece surface and adjust a distance between the optical assembly portion and the workpiece surface; and execute a defined operation on the workpiece surface.
