09 - Appareils et instruments scientifiques et électriques
Produits et services
CCD and EMCCD cameras and sensor chips for use in CCD and EMCCD cameras to reduce etaloning and to provide higher quantum efficiency (QE) across a wavelength range of 200 to 1100 nm
9.
Pump having an automated gas removal and fluid recovery system and method using a gas removal reservoir having an internal partition
A precision pump system is described that includes a motor driver for accurately and repeatedly delivering process fluid, and uses a pumping fluid with minimal process fluid loss to a fabrication process. A method for automatically evacuating gas from the process fluid to be dispensed as part of a recirculation process is also described.
F04B 49/22 - Commande des "machines", pompes ou installations de pompage ou mesures de sécurité les concernant non prévues dans les groupes ou présentant un intérêt autre que celui visé par ces groupes par clapets
F04B 43/107 - Pompes ayant un entraînement par fluide le fluide étant déplacé directement par un piston
F04B 43/073 - Pompes ayant un entraînement par fluide le fluide d'entraînement étant commandé par au moins un clapet
F04B 43/067 - Pompes ayant un entraînement par fluide le fluide étant déplacé directement par un piston
F04B 43/06 - Pompes ayant un entraînement par fluide
F04B 43/04 - Pompes ayant un entraînement électrique
F04B 35/00 - Pompes à piston spécialement adaptées aux fluides compressibles et caractérisées par les moyens d'entraînement de leurs organes de travail ou par leur combinaison avec les machines motrices ou moteurs qui les entraînent ou bien par leurs adaptations
F04B 17/03 - Pompes caractérisées par leur combinaison avec des machines motrices ou moteurs particuliers qui les entraînent ou par leur adaptation à ceux-ci entraînées par des moteurs électriques
F04B 13/00 - Pompes spécialement modifiées pour débiter des quantités fixes ou prédéterminées
F04B 43/113 - Pompes ayant un entraînement par fluide le fluide d'entraînement étant commandé par au moins un clapet
10.
Calibration-less micro-fabricated vacuum gauge devices and method for measuring pressure
A manner to determine pressure (e.g. inside a vacuum package, such as a MEMS die), without prior calibration, is provided using a model and a set of one or more gauges (e.g. Pirani, thermistor, thermocouple gauges) with distinct geometries. In order to calculate pressure from the electrical measurements performed on the gauges, there are several intermediate steps and an analytical model describes each of these steps. Besides the electrical measurements, other inputs are required, such as material properties and certain dimensions, which may not be known accurately. Several different gauge geometries are proposed which can be combined in order to determine the vacuum (pressure) level without knowing the values of these inputs beforehand.
G01L 21/12 - Mesure des modifications de la résistance électrique des organes de mesure, p.ex. des filaments; Indicateurs de vide du type Pirani
G01L 21/14 - Indicateurs de vide en mesurant les variations de la conductivité calorifique du milieu dont on doit mesurer la pression en utilisant des thermocouples
The present invention relates to a modular crimp contact system and method. The modular crimp contact system comprises a crimping member secured to a conductor by having one end of the crimping member crimped about the exterior of the conductor. A locking ring disposed about the body of the crimping member locks the crimping member in a receiving end of a connection member. The connection member may have a pin or a socket on a connection end opposite the receiving end the connection member.
H01R 4/20 - Connexions conductrices de l'électricité entre plusieurs organes conducteurs en contact direct, c. à d. se touchant l'un l'autre; Moyens pour réaliser ou maintenir de tels contacts; Connexions conductrices de l'électricité ayant plusieurs emplacements espacés de connexion pour les conducteurs et utilisant des organes de contact pénétrant dans l'isolation effectuées uniquement par torsion, enroulage, pliage, sertissage ou autre déformation permanente par sertissage en utilisant un manchon de sertissage
H01R 4/18 - Connexions conductrices de l'électricité entre plusieurs organes conducteurs en contact direct, c. à d. se touchant l'un l'autre; Moyens pour réaliser ou maintenir de tels contacts; Connexions conductrices de l'électricité ayant plusieurs emplacements espacés de connexion pour les conducteurs et utilisant des organes de contact pénétrant dans l'isolation effectuées uniquement par torsion, enroulage, pliage, sertissage ou autre déformation permanente par sertissage
09 - Appareils et instruments scientifiques et électriques
Produits et services
Computer programs for data warehousing, chart production, visualization, spatial data, mapping, cartography, geographic information systems (GIS) and hydrography; Computer software for application and database integration; Computer software for creating searchable databases of information and data; Computer software for data warehousing, chart production, visualization, spatial data, mapping, cartography, geographic information systems (GIS) and hydrography; Database management software for geographic information systems (GIS) and hydrography; Downloadable geographic information system (GIS) software; Downloadable software for data warehousing, chart production, visualization, spatial data, mapping, cartography, geographic information systems (GIS) and hydrography; Electronic database in the field of geographic information systems (GIS) and hydrography recorded on computer media
09 - Appareils et instruments scientifiques et électriques
Produits et services
software for use with scientific cameras for previewing, capturing, saving, processing, analyzing, correcting and enhancing images; software for controlling the operation of scientific cameras
23.
Pump having an automated gas removal and fluid recovery system and method using a gas removal reservoir having an internal partition
A precision pump system having a motor driver for accurately and repeatedly delivering process fluid, (e.g., photo chemicals) using a pumping fluid with minimal process fluid loss to a fabrication process and whereby the motor driver can be easily and quickly replaced without interrupting the fluid flow path. This is accomplished with the use of a gas removal reservoir having at least one vertical partition therein and at least one free end near a top side of the gas removal reservoir where both the input and output to the gas removal reservoir are located on a bottom surface and a pumping fluid reservoir that are associated with the pump, either integrated with the pump or closely adjacent. In addition, this precision pump system can be remotely monitored, viewed and controlled over the Internet. In addition, trapped process fluid within a downstream filtering block can be recirculated to the gas removal reservoir when trapped gas in the filter is removed. Furthermore, a nitrogen gas source is connected to the gas removal reservoir via a valve in case a need to insert a gas is required. Alternative system embodiments are shown for recirculating process fluid back to the gas removal reservoir and/or the source line. Another alternative system has the pumping chamber coupled to the gas removal reservoir input.
A precision pump system having a motor driver for accurately and repeatedly delivering process fluid, (e.g., photo chemicals) using a pumping fluid with minimal process fluid loss to a fabrication process and whereby the motor driver can be easily and quickly replaced without interrupting the fluid flow path. This is accomplished with the use of a process fluid reservoir and a pumping fluid reservoir that are associated with the pump, either integrated with the pump or closely adjacent. In addition, this precision pump system can be remotely monitored, viewed and controlled over the Internet. In addition, trapped process fluid within a downstream filtering block can be recirculated to the process fluid reservoir when trapped gas in the filter is removed. Furthermore, a nitrogen gas source is connected to the process fluid reservoir via a valve in case a need to insert a gas is required.
F04B 43/067 - Pompes ayant un entraînement par fluide le fluide étant déplacé directement par un piston
F04B 43/073 - Pompes ayant un entraînement par fluide le fluide d'entraînement étant commandé par au moins un clapet
F04B 43/107 - Pompes ayant un entraînement par fluide le fluide étant déplacé directement par un piston
F04B 43/113 - Pompes ayant un entraînement par fluide le fluide d'entraînement étant commandé par au moins un clapet
F04B 49/22 - Commande des "machines", pompes ou installations de pompage ou mesures de sécurité les concernant non prévues dans les groupes ou présentant un intérêt autre que celui visé par ces groupes par clapets
F04B 17/03 - Pompes caractérisées par leur combinaison avec des machines motrices ou moteurs particuliers qui les entraînent ou par leur adaptation à ceux-ci entraînées par des moteurs électriques
F04B 43/04 - Pompes ayant un entraînement électrique
F04B 35/00 - Pompes à piston spécialement adaptées aux fluides compressibles et caractérisées par les moyens d'entraînement de leurs organes de travail ou par leur combinaison avec les machines motrices ou moteurs qui les entraînent ou bien par leurs adaptations
A precision pump system having a motor driver for accurately and repeatedly delivering process fluid, (e.g., photo chemicals) using a pumping fluid with minimal process fluid loss to a fabrication process and whereby the motor driver can be easily and quickly replaced without interrupting the fluid flow path. This is accomplished with the use of a process fluid reservoir and a pumping fluid reservoir that are associated with the pump, either integrated with the pump or closely adjacent. In addition, this precision pump system can be remotely monitored, viewed and controlled over the Internet. In addition, trapped process fluid within a downstream filtering block can be recirculated to the process fluid reservoir when trapped gas in the filter is removed. Furthermore, a nitrogen gas source is connected to the process fluid reservoir via a valve in case a need to insert a gas is required.
F04B 49/22 - Commande des "machines", pompes ou installations de pompage ou mesures de sécurité les concernant non prévues dans les groupes ou présentant un intérêt autre que celui visé par ces groupes par clapets
F04B 43/04 - Pompes ayant un entraînement électrique
F04B 17/03 - Pompes caractérisées par leur combinaison avec des machines motrices ou moteurs particuliers qui les entraînent ou par leur adaptation à ceux-ci entraînées par des moteurs électriques
F04B 35/00 - Pompes à piston spécialement adaptées aux fluides compressibles et caractérisées par les moyens d'entraînement de leurs organes de travail ou par leur combinaison avec les machines motrices ou moteurs qui les entraînent ou bien par leurs adaptations
A precision pump system having a motor driver for accurately and repeatedly delivering process fluid, (e.g., photo chemicals) using a pumping fluid with minimal process fluid loss to a fabrication process and whereby the motor driver can be easily and quickly replaced without interrupting the fluid flow path. This is accomplished with the use of a process fluid reservoir and a pumping fluid reservoir that are associated with the pump, either integrated with the pump or closely adjacent. In addition, this precision pump system can be remotely monitored, viewed and controlled over the Internet. In addition, trapped process fluid within a downstream filtering block can be recirculated to the process fluid reservoir when trapped gas in the filter is removed. Furthermore, a nitrogen gas source is connected to the process fluid reservoir via a valve in case a need to insert a gas is required.
G06F 19/00 - Équipement ou méthodes de traitement de données ou de calcul numérique, spécialement adaptés à des applications spécifiques (spécialement adaptés à des fonctions spécifiques G06F 17/00;systèmes ou méthodes de traitement de données spécialement adaptés à des fins administratives, commerciales, financières, de gestion, de surveillance ou de prévision G06Q;informatique médicale G16H)
F04B 49/22 - Commande des "machines", pompes ou installations de pompage ou mesures de sécurité les concernant non prévues dans les groupes ou présentant un intérêt autre que celui visé par ces groupes par clapets
F04B 17/03 - Pompes caractérisées par leur combinaison avec des machines motrices ou moteurs particuliers qui les entraînent ou par leur adaptation à ceux-ci entraînées par des moteurs électriques
F04B 43/04 - Pompes ayant un entraînement électrique
F04B 43/107 - Pompes ayant un entraînement par fluide le fluide étant déplacé directement par un piston
F04B 43/067 - Pompes ayant un entraînement par fluide le fluide étant déplacé directement par un piston
F04B 43/073 - Pompes ayant un entraînement par fluide le fluide d'entraînement étant commandé par au moins un clapet
F04B 35/00 - Pompes à piston spécialement adaptées aux fluides compressibles et caractérisées par les moyens d'entraînement de leurs organes de travail ou par leur combinaison avec les machines motrices ou moteurs qui les entraînent ou bien par leurs adaptations
Embodiments include methods that may be used to optically obtain the precise three-dimensional location of multiple objects from one or more two dimensional images. An optical point spread function having a transverse shape which varies with axial distance may be implemented to obtain depth information. The transverse variation in the PSF with depth may be produced using a cylindrical lens. The objects may be imaged by a focal plane array detector. One or more 2D images may be used to find the 3D location of the objects using sparse signal reconstruction methods.
A method of making a tiled array of semiconductor dies includes aligning and flattening. One end of each semiconductor die has attached thereto a respective printed circuit board. The aligning aligns the semiconductor dies into the tiled array in such a way that the semiconductor dies rest on a vacuum plate and the one end of each die extends beyond an edge of the vacuum plate. The flattening flattens the semiconductor dies against the vacuum plate with a vacuum after the semiconductor dies are aligned.
H01L 21/00 - Procédés ou appareils spécialement adaptés à la fabrication ou au traitement de dispositifs à semi-conducteurs ou de dispositifs à l'état solide, ou bien de leurs parties constitutives
H01L 31/0232 - Dispositifs à semi-conducteurs sensibles aux rayons infrarouges, à la lumière, au rayonnement électromagnétique d'ondes plus courtes, ou au rayonnement corpusculaire, et spécialement adaptés, soit comme convertisseurs de l'énergie dudit rayonnement e; Procédés ou appareils spécialement adaptés à la fabrication ou au traitement de ces dispositifs ou de leurs parties constitutives; Leurs détails - Détails Éléments ou dispositions optiques associés au dispositif
H01L 31/18 - Procédés ou appareils spécialement adaptés à la fabrication ou au traitement de ces dispositifs ou de leurs parties constitutives
H01L 23/00 - DISPOSITIFS À SEMI-CONDUCTEURS NON COUVERTS PAR LA CLASSE - Détails de dispositifs à semi-conducteurs ou d'autres dispositifs à l'état solide
An apparatus and method are disclosed for producing spectrographic images free of SI, SII, and SIII field aberrations. The apparatus includes a focusing element placed at a distance from a dispersing element equal to the radius of curvature of the focusing element. The apparatus further includes at least one correcting plate for adding or subtracting aberrations.
An apparatus and method are disclosed for producing spectrographic images free of SI, SII, and SIII field aberrations. The apparatus includes a focusing element placed at a distance from a dispersing element equal to the radius of curvature of the focusing element. The apparatus further includes at least one correcting plate for adding or subtracting abberations.
A pump for one or more different process fluids is provided including a pumping chamber having a process fluid inlet and outlet coupled to a process fluid valve on each pumping chamber for selectively preventing and allowing flow of process fluid through the pumping chamber. An actuation mechanism for pumping actuating fluid to actuating fluid chambers is provided that is in communication with the actuating fluid chambers to permit flow into each actuating fluid chamber of incompressible actuating fluid. A diaphragm separates each pumping chamber from an associated actuating fluid chamber for separating process fluid from actuating fluid. The actuation mechanism is removable by a quick disconnect that provides for disconnection of the activation mechanism without affecting process fluid. Operation of the actuation mechanism to displace actuating fluid causes actuating fluid to flow only into each actuating fluid chamber having an opened process fluid valve, resulting in pumping.
09 - Appareils et instruments scientifiques et électriques
Produits et services
Device for providing fully automated wavelength calibration for spectroscopy applications consisting of two multiple line light emission sources and software for calibrating a spectrograph by analyzing and calibrating the light from the light emission sources received by the spectrograph
A backside-illuminated image sensor is disclosed having improved quantum efficiency (QE) in the near infrared wavelengths (NIR: 750-1100 nm) with minimal optical interference fringes produced by multiple reflected rays within the photosensitive Si region of the sensor, which may be a charge-coupled device, a complementary metal oxide sensor or an electron-multiplication sensor. The invention comprises a fringe suppression layer applied to the backside surface of the photosensitive Si region of a detector (Si substrate) whereby the fringe suppression layer functions in concert with the Si substrate to reduce the occurrence of interference fringes in the NIR while maintaining a high QE over a broad range of wavelengths (300-1100 nm). The combination of a fringe suppression layer applied to a Si substrate provides a new class of back illuminated solid state detectors for imaging.
Disclosed is a method for calibrating optical spectrographs, and in particular optical spectrographs having focal plane array detectors. The method comprises the steps of detecting a spectrum of a known source, referencing a table of known spectral wavelengths and relative intensities, and deriving a spectrograph model based on the spectrograph's physical properties to approximate the observed spectrum, wherein non-linear optimization techniques refine the theoretical model parameters, thereby minimizing the residual difference between observed and calculated spectral intensities in an iterative process producing a set of physical model parameters that best describe the modeling spectrograph for calibration of subsequent spectral acquisitions.
A system for measuring current in an H-Bridge motor drive circuit and using that current to determine the output of a device powered by the motor. A particular embodiment is disclosed for a motor-driven fluid pump. Motor current is measured at predetermined pump pressures and flow rates to create calibration tables relating motor current to pump pressure. Once calibrated, the system determines pump pressure based on motor current by referring to the calibration tables. In an embodiment, the pump is driven to achieve a predetermined fluid dispense profile. The system monitors pump pressure by measuring motor current and determines if the dispense profile is being achieved and sets alarms if predetermined thresholds are not maintained. The system also detects pump wear based on the current measurements and issues warnings to the user in such conditions.
A MEMS device is manufactured by first forming a self-aligned monolayer (SAM) on a carrier wafer. Next, a first polymer layer is formed on the self-aligned monolayer. The first polymer layer is patterned form a microchannel cover, which is then bonded to a patterned second polymer layer on a device wafer to form microchannels. The carrier wafer is then released from the first polymer layer.
A pump for one or more different process fluids is provided including a pumping chamber having a process fluid inlet and outlet coupled to a process fluid valve on each pumping chamber for selectively preventing and allowing flow of process fluid through the pumping chamber. An actuation mechanism for pumping actuating fluid to actuating fluid chambers is provided that is in communication with the actuating fluid chambers to permit flow into each actuating fluid chamber of incompressible actuating fluid. A diaphragm separates each pumping chamber from an associated actuating fluid chamber for separating process fluid from actuating fluid. The actuation mechanism is removable by a quick disconnect that provides for disconnection of the activation mechanism without affecting process fluid. Operation of the actuation mechanism to displace actuating fluid causes actuating fluid to flow only into each actuating fluid chamber having an opened process fluid valve, resulting in pumping.
09 - Appareils et instruments scientifiques et électriques
Produits et services
A technological feature of a scientific camera that allows the camera to read out pixel values in terms of electrons measured, thereby enabling the user to calculate actual photon flux, sold as an integral component of a scientific camera
09 - Appareils et instruments scientifiques et électriques
Produits et services
a technological feature of a scientific camera that identifies pixels that are likely to contain spurious event data and then makes corrections, if desired, sold as an integral component of a scientific camera
A structural film, typically of silicon, in MEMS or NEMS devices is fabricated by depositing the film in the presence of a gas other than nitrogen, and preferably argon as the carrier gas.
A pump for use in handling one or more different process fluids includes a plurality of pumping chambers having a process fluid inlet and a process fluid outlet, process fluid outlet coupled to a process fluid valve on each pumping chamber for selectively preventing and allowing the flow of process fluid through the pumping chamber, an actuation mechanism for pumping actuating fluid to a plurality of actuating fluid chambers in fluid communication with the actuating fluid chambers to permit flow into each actuating fluid chamber of actuating fluid, and at least one diaphragm separating each pumping chamber from an associated actuating fluid chamber, for separating process fluid from actuating fluid. Operation of the actuation mechanism displaces actuating fluid and causes actuating fluid to flow only into each of the actuating fluid chambers having an opened process fluid valve, resulting in pumping.
A method is disclosed for making a MEMS device wherein anhydrous HF exposed silicon nitride is used as a temporary adhesion layer allowing the transfer of a layer from a Carrier Wafer to a Device Wafer.
H01L 21/46 - Traitement de corps semi-conducteurs en utilisant des procédés ou des appareils non couverts par les groupes
H01L 21/31 - Traitement des corps semi-conducteurs en utilisant des procédés ou des appareils non couverts par les groupes pour former des couches isolantes en surface, p.ex. pour masquer ou en utilisant des techniques photolithographiques; Post-traitement de ces couches; Emploi de matériaux spécifiés pour ces couches
A method of making a MEMS device is disclosed wherein anhydrous HF exposed silicon nitride is used as a temporary adhesion layer to permit the transfer of a layer from a carrier substrate to a receiving substrate.
H01L 21/00 - Procédés ou appareils spécialement adaptés à la fabrication ou au traitement de dispositifs à semi-conducteurs ou de dispositifs à l'état solide, ou bien de leurs parties constitutives
51.
Method for removing residues formed during the manufacture of MEMS devices
A method of removing residues from an integrated device, in particular residues resulting from processing in HF vapor, is disclosed wherein the fabricated device is exposed to dry water vapor for a period of time sufficient to dissolve the residues in the dry water vapor.
H01L 21/461 - Traitement de corps semi-conducteurs en utilisant des procédés ou des appareils non couverts par les groupes pour changer les caractéristiques physiques ou la forme de leur surface, p.ex. gravure, polissage, découpage
H01L 21/302 - Traitement des corps semi-conducteurs en utilisant des procédés ou des appareils non couverts par les groupes pour changer leurs caractéristiques physiques de surface ou leur forme, p.ex. gravure, polissage, découpage
A wafer level package for a MEMS device is made by bonding a MEMS wafer and a lid wafer together to form a hermetically sealed cavity. One or more vias filled with conductive or semiconductive material is etched one of the wafers to form one or more rods extending through the wafer. The rods provide electrical connection to components within the hermetically sealed cavity.
09 - Appareils et instruments scientifiques et électriques
Produits et services
LuCam Computer software for controlling cameras and saving those images to disk; Solutions Custom Imaging, namely, made-to-order hardware and software designs for the field of imaging; Scientific Imaging Computer Software used to control camera parameters, as well as archiving, measurement, annotation and image optimization for scientific applications
A method of etching a sacrificial oxide layer covering an etch-stop silicon nitride underlayer, involves exposing the sacrificial oxide to anhydrous HF at a temperature of less than about 100° C. and/or at vacuum level lower than 40 Torr; and subsequently performing an in-situ vacuum evaporation of etch by-products at a temperature of more than about 100° C. and at vacuum level lower than the 40 Torr without exposure to ambient air.
H01L 21/302 - Traitement des corps semi-conducteurs en utilisant des procédés ou des appareils non couverts par les groupes pour changer leurs caractéristiques physiques de surface ou leur forme, p.ex. gravure, polissage, découpage
09 - Appareils et instruments scientifiques et électriques
42 - Services scientifiques, technologiques et industriels, recherche et conception
Produits et services
Scientific apparatus, systems, instruments and instrumentation; digital cameras, spectrographs, monochromators; microscopes and parts and fittings therefor; apparatus for optical imaging or spectroscopy; computer software; computer programmes; computer software for image processing and analysis; computer software for use by biomedical researchers, university and industrial researchers, and by quality control personnel for performing applications related to three-dimensional reconstruction, video microscopy, image enhancement, morphometric analysis, densitometry and on-line image analysis of images that are capable of being digitized, including human, animal, or plant cells or tissue; computer software for camera testing; instruction manuals in electronic form. Recovery of computer data; computer hardware and software consultancy; computer programming; computer software design; duplication of computer software; computer software rental; installation of computer software, computer and software equipment and systems integration; computer software maintenance and repair; updating of computer software and computer programmes; information, consultancy and advice relating to the foregoing.
56.
Self-referencing instrument and method thereof for measuring electromagnetic properties
In a self-referencing instrument for measuring electromagnetic radiation, a mounting member to which a sample can be coupled moves the sample such that, in a first position, the electromagnetic radiation impinges on the sample, and, in a second position, the electromagnetic radiation does not impinge on the sample. A detection unit receives the electromagnetic radiation from the sample and generates a sample signal when the sample is in the first position, and the detection unit receives the electromagnetic radiation from the source and generates a reference signal when the sample is in the second position. A processor coupled to the detection unit processes the reference signal and the sample signal. This results in a continuous, accurate reference measurement, and permits the instrument to efficiently compensate for error, while offering accurate measurements.
In the manufacture of a MEMS device having a semiconductor-on-insulator substrate with a first portion closed by a lid to provide a hermetically sealed region and an second portion external to said hermetically sealed region, a method of providing electrical connections to said hermetically sealed region comprising forming at least one continuous deep trench in said semiconductor and extending down to said insulator, said at least one deep trench surrounding and isolating at least one block of semiconductor within said substrate, and said at least one block of semiconductor extending form within said first region to said second region; depositing an insulating layer in said trenches and over the surface of said substrate; depositing a metal ring around said first region; sealing said lid to said metal ring; and attaching a contact to said at least one block of semiconductor in said second region to provide one or more electrical connections through said at least one block of semiconductor to one or more components of said MEMS device within said hermetically sealed ring.
H01L 21/00 - Procédés ou appareils spécialement adaptés à la fabrication ou au traitement de dispositifs à semi-conducteurs ou de dispositifs à l'état solide, ou bien de leurs parties constitutives
59.
Method and apparatus for multi-mode spectral imaging
A method and apparatus is disclosed for multi-mode spectral imaging. In one embodiment, the present invention comprises the steps of illuminating an object with a modified illumination profile, producing a reflected, transmitted or fluorescence image of the illuminated object, scanning the object, and re-imaging the reflected, transmitted or fluorescence light after modifying the light's optical state. The present invention preferably works in conjunction with other imaging systems to provide both high-spectral resolution images with lower temporal resolution and multiple image acquisition with high temporal resolution.
A method is disclosed for making a wafer-level package for a plurality of MEMS devices. The method involves preparing a MEMS wafer and a lid wafer, each having respective bonding structures. The lid and MEMS wafers are then bonded together through the bonding structures. The wafers are substantially free of alkali metals and/or chlorine. IN a preferred embodiment, each wafer has a seed layer, a structural underlayer and an anti-oxidation layer. A solder layer, normally formed on the lid wafer, bonds the two wafers together.
H01L 21/00 - Procédés ou appareils spécialement adaptés à la fabrication ou au traitement de dispositifs à semi-conducteurs ou de dispositifs à l'état solide, ou bien de leurs parties constitutives
61.
Method of making high-voltage bipolar/CMOS/DMOS (BCD) devices
A process for making an integrated circuit is described wherein sequence of mask steps is applied to a substrate or epitaxial layer of p-type material. The sequence consists of sixteen specific mask steps that permit a variety of bipolar/CMOS/DMOS devices to be fabricated. The mask steps include (1) forming at least one N-well in the p-type material, (2) forming an active region, forming a p-type field region, (4) forming a gate oxide, (5) carrying out a p-type implantation, (6) forming polysilicon gate regions, (7) forming a p-base region, (8) forming a N-extended region, (9) forming a p-top region, 10) carrying out an N+ implant, (11) carrying out a P+ implant, (12) forming contacts, (13) depositing a metal layer, (14) forming vias, (15) depositing a metal layer therethrough, and (16) forming a passivation layer. Up to any three of mask steps (4), (7), (8), and (9) may be omitted depending on the type of integrated circuit.
H01L 21/00 - Procédés ou appareils spécialement adaptés à la fabrication ou au traitement de dispositifs à semi-conducteurs ou de dispositifs à l'état solide, ou bien de leurs parties constitutives
H01L 21/84 - Fabrication ou traitement de dispositifs consistant en une pluralité de composants à l'état solide ou de circuits intégrés formés dans ou sur un substrat commun avec une division ultérieure du substrat en plusieurs dispositifs individuels pour produire des dispositifs, p.ex. des circuits intégrés, consistant chacun en une pluralité de composants le substrat étant autre chose qu'un corps semi-conducteur, p.ex. étant un corps isolant
H01L 21/8238 - Transistors à effet de champ complémentaires, p.ex. CMOS
09 - Appareils et instruments scientifiques et électriques
Produits et services
computer software for providing solutions enabling the manipulation of data to provide useful outputs in the Geographic Information Systems (GIS) and Spatial Information Markets (SIM) areas; computer software for generating and manipulating geographic and spatial maps for use in the marine; hydrographic; and land use, management and planning areas
