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2023
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G/S
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Machines for micro lithography and machines for use in the fields of integrated circuits, semicon... |
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G/S
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Machines for micro lithography and machines for use in the
fields of integrated circuits, semico... |
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G/S
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Registered software, especially software for the storage, processing and generation of data and g... |
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G/S
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Software, especially software for the storage, processing
and generation of data and graphics. |
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Invention
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Methods and apparatuses for adjusting beam condition of charged particles.
Apparatus and methods... |
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Invention
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Methods of determining corrections for a patterning process, device manufacturing method, control... |
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Invention
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Assembly comprising a cryostat and layer of superconducting coils and motor system provided with ... |
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Invention
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Method for controlling a manufacturing process and associated apparatuses.
Disclosed is a method... |
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Invention
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Charged particle source module.
The disclosed embodiments relate to a charged particle source mo... |
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Invention
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Emitter for emitting charged particles.
An emitter is configured to emit charged particles. The ... |
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2022
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Invention
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Wavefront optimization for tuning scanner based on performance matching.
A method for determinin... |
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Invention
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Hollow-core photonic crystal fiber based broadband radiation generator.
A broadband radiation so... |
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Invention
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Apparatus for supplying liquid target material to a radiation source. The present invention relat... |
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Invention
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Generating augmented data to train machine learning models to preserve physical trends. Machine l... |
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Invention
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Pellicles and membranes for use in a lithographic apparatus. A method for forming a pellicle for ... |
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Invention
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Apparatus and method for a lithographic apparatus. There is provided an apparatus for adjusting t... |
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Invention
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Obtaining a parameter characterizing a fabrication process. A measurement process is performed fo... |
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Invention
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Systems and structures for venting and flow conditioning operations in inspection systems. System... |
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Invention
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Charged-particle beam apparatus for voltage-contrast inspection and methods thereof. Systems and ... |
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Invention
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A valve system, liquid target material supply apparatus, fuel emitter, radiation source, lithogra... |
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Invention
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Determining an etch effect based on an etch bias direction. An etch bias direction is determined ... |
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Invention
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Platform for charged particle apparatus and components within a charged particle apparatus. Discl... |
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Invention
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Simulation model stability determination method. A grid dependency check for a simulation model i... |
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Invention
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An optical device, illumination system, projection system, euv radiation source, lithographic app... |
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Invention
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Utility stage for photolithographic apparatus and method. Disclosed is an apparatus for and metho... |
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Invention
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Valves with reduced particle generation and increased cycle life. Systems with valves that increa... |
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Invention
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Method and system of reducing chamber vibration. Systems, apparatuses, and methods for reducing v... |
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Invention
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Systems and methods for defect detection and defect location identification in a charged particle... |
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Invention
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Latent space synchronization of machine learning models for in device metrology inference. Autoen... |
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Invention
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Aligning a distorted image. Disclosed herein is a non-transitory computer readable medium that ha... |
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Invention
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Method and system of image analysis and critical dimension matching for charged-particle inspecti... |
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Invention
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Charged particle assessment system and method. The present invention provides a charged particle ... |
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Invention
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Multiple charged-particle beam apparatus and methods of operating the same. |
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Invention
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Hollow-core photonic crystal fiber based broadband radiation generator. Disclosed is a broadband ... |
|
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Invention
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A liquid target material supplying apparatus, fuel emitter, radiation source, lithographic appara... |
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G/S
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Software, especially software for the storage, processing and generation of data and graphics. |
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G/S
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Apparatus and instruments for use in the electronics, micro-lithography, semi-conductor, integrat... |
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2021
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G/S
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Recorded software, in particular software for the storage, processing, and generation of data and... |
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Invention
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Apparatus for and method of accelerating droplets in a droplet generator for an euv source.
Appa... |
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Invention
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Method of wafer alignment using at resolution metrology on product features.
A method of determi... |
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Invention
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Alignment method and associated alignment and lithographic apparatuses.
A method of, and associa... |
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Invention
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Determining metrics for a portion of a pattern on a substrate.
Systems and methods for determini... |
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Invention
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Hybrid droplet generator for extreme ultraviolet light sources in lithographic radiation systems.... |
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Invention
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Enhanced architecture for high-performance detection device.
A detector includes a set of sensin... |
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Invention
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Optical element and pellicle membrane for a lithographic apparatus.
An optical element for a lit... |
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Invention
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Contamination shield for mechanically insulating device.
An apparatus includes: a mechanically i... |
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Invention
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Image enhancement based on charge accumulation reduction in charged-particle beam inspection.
An... |
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Invention
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Interface plate, inspection system and method of installing an inspection system.
An interface p... |
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Invention
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Method for calibration of an optical measurement system and optical measurement system.
The inve... |
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Invention
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Configuration of an imputer model.
Apparatus and methods of configuring an imputer model for imp... |
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Invention
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Actuator unit for positioning an optical element.
Disclosed is an actuator unit for positioning ... |
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Invention
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Method of determining a sampling scheme, associated apparatus and computer program.
Disclosed is... |
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Invention
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Seed laser system for radiation source.
Systems, apparatuses, and methods are provided for dual-... |
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Invention
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Differential measurement system.
A system for measuring the difference between a property of a f... |
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2020
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G/S
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Maintenance and repair services in connection with machines for use in microlithography and in th... |
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G/S
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Maintenance and repair services in connection with machines for use in the electronics, micro-lit... |
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G/S
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Maintenance and repair services in connection with machines
for use in the electronics, micro-li... |
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2019
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Invention
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Pulsed charged-particle beam system.
Apparatuses and methods for charged-particle detection may ... |
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Invention
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Systems and methods for real time stereo imaging using multiple electron beams.
Embodiments cons... |
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2018
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G/S
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Computer hardware and software for the design and manufacture of semiconductor wafers and masks; ... |
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G/S
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Computer hardware and software for the design and
manufacture of semiconductor wafers and masks;... |
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2017
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G/S
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Semiconductor lithographic machines, namely, lithographic machines used to manufacture semiconduc... |
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G/S
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Computer hardware for improving lithography manufacturing
processes; computer software for impro... |
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G/S
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Computer hardware for improving lithography manufacturing processes; computer software for improv... |
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G/S
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Micro-lithography machines, namely, machines for manufacturing electronic components, integrated ... |
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2016
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G/S
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Micro-lithography equipment; machines for use in the manufacture by micro-lithography, especially... |
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G/S
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Software for image analysis for identification of defects in semiconductor wafers and reticles |
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G/S
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Quality control for semiconductor manufacturers of semiconductor manufacturing using particle bea... |
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G/S
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Maintenance of semiconductor inspection tools |
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2015
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G/S
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Exposure units being optical instruments and their parts, for use in lithographic machines, namel... |
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G/S
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Exposure units [optical instruments] and their parts, for
use in lithographic machines. |
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G/S
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Machine tool for mounting, demounting and remounting a
pellicle to a reticle in lithographic equ... |
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G/S
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Electronic inspection devices, data processors, computer hardware and software for defect inspect... |
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G/S
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[ Electronic inspection devices and ] computer software for inspection of semiconductor materials... |
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G/S
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Inspection tool using particle beam for inspection of semiconductor materials, devices and products |
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2014
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G/S
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Process control equipment for semiconductor wafer production, namely particle beam emitter in the... |
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G/S
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Optical measuring apparatus and instruments for measuring test wafers for the manufacture of elec... |
|
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G/S
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Optical measuring apparatus and instruments for measuring
test wafers for the manufacture of ele... |
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2013
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G/S
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Electronic imaging platforms in the field of inspection of semiconductor materials, namely, semic... |
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G/S
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Technology supervision and inspection in the field of quality control of semiconductor wafers and... |
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G/S
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Machinery maintenance and repair in the field of semiconductor industry; installation of semicond... |
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2012
|
G/S
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Machines for micro-lithography; machines not included in
other classes for use in the field of e... |
|
|
G/S
|
Micro-lithography equipment; machines for use in industry in the field of electronics, integrated... |
|
|
G/S
|
Machines for micro-lithography; machines for use in the
field of electronics, integrated circuit... |
|
|
G/S
|
testing and inspection in the field of quality control of semiconductor wafers and reticles |
|
|
G/S
|
Micro-lithography machines; machines for use in the
electronics, integrated circuit, semi-conduc... |
