2023
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Invention
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Charged particle device and method.
The present disclosure provides a charged particle optical d... |
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Invention
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Transport system having a magnetically levitated transportation stage.
A reticle transport syste... |
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Invention
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Data processing device and method, charged particle assessment system and method.
A data process... |
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Invention
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Charged particle optical device, objective lens assembly, detector, detector array, and methods. ... |
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Invention
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Target delivery system.
A target delivery system for an extreme ultraviolet (EUV) light source i... |
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Invention
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Assessment system, method of assessing.
Assessment systems and methods are disclosed. In one arr... |
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Invention
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Charged particle assessment system and method.
The embodiments of the present disclosure provide... |
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Invention
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Method for generating patterning device pattern at patch boundary.
A method for generating a mas... |
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Invention
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Guiding device and associated system.
An extreme ultraviolet radiation (EUV) source, including: ... |
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Invention
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Apparatus using multiple beams of charged particles.
Disclosed herein is an apparatus comprising... |
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Invention
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Systems and methods for thermally conditioning a wafer in a charged particle beam apparatus.
An ... |
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Invention
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A patterning device voltage biasing system for use in euv lithography. A patterning device voltag... |
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Invention
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Pellicle and methods for forming pellicle for use in a lithographic apparatus. A pellicle for use... |
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Invention
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Mixed energy control in an euv lithography system. A system for and method of controlling extreme... |
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Invention
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Dose control in an extreme ultraviolet light source. A dose controller is configured to: receive ... |
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Invention
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Illumination adjustment apparatuses and lithographic apparatuses. An illumination adjustment appa... |
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Invention
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Metrology method and associated metrology device. Disclosed is a dark-field metrology method. A f... |
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Invention
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Measuring contrast and critical dimension using an alignment sensor. A method can include directi... |
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Invention
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Method for monitoring proper functioning of one or more components of a lithography system. Discl... |
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Invention
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Euv radiation beam power reduction. A method of providing an additional EUV radiation exposure of... |
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Invention
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A multi-pass radiation device. A radiation device for generating broadband output radiation upon ... |
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Invention
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Holographic metrology apparatus and method. A method of determining a parameter of interest of a ... |
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Invention
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Metrology method and associated metrology device. Disclosed is a method of determining at least o... |
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Invention
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Method for configuring a field of view of an inspection apparatus. Disclosed is method for config... |
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Invention
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System and method for detecting particles with a detector during inspection. Systems, apparatuses... |
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Invention
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Modelling of multi-level etch processes. Disclosed are methods, systems, and computer software fo... |
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Invention
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Metrology system and method. A system includes an illumination system, a scanning system, an opti... |
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Invention
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Suppressing specular reflection of mask absorber and on- resolution field stitching. Described a ... |
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Invention
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Method to stabilize a wavelength of a tunable laser device, tunable laser device, and position me... |
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Invention
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A conditioning system, arrangement and method. Disclosed herein is a stand-alone conditioning sys... |
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G/S
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Machines for micro lithography and machines for use in the manufacture, fabrication and treatment... |
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G/S
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Machines for micro lithography and machines for use in the
fields of integrated circuits, semico... |
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G/S
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Registered software, namely, recorded software for the storage, processing and generation of data... |
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G/S
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Software, especially software for the storage, processing
and generation of data and graphics. |
2022
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G/S
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Software, especially software for the storage, processing and generation of data and graphics. |
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G/S
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Micro-lithography apparatus and instruments for use in the electronics, micro-lithography, semi-c... |
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Invention
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Data filter for scanning metrology.
A method of processing a data set including equispaced and/o... |
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Invention
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Method to predict metrology offset of a semiconductor manufacturing process.
A method for determ... |
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Invention
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A method and system for predicting aberrations in a projection system.
A method of predicting th... |
2021
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Invention
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Multi-channel light source for projection optics heating.
Systems, apparatuses, and methods are ... |
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Invention
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Method for determining a focus actuation profile for one or more actuators of a lithographic expo... |
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Invention
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Metrology methods and apparatuses.
Disclosed is a method of determining a performance parameter ... |
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Invention
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Metrology method and system and lithographic system.
A method for measuring a parameter of inter... |
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Invention
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Modular autoencoder model for manufacturing process parameter estimation.
A modular autoencoder ... |
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Invention
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A metrology apparatus and a metrology method.
A metrology apparatus for measuring a parameter of... |
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Invention
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Methods and apparatus for acoustic metrology.
A metrology apparatus for determining one or more ... |
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Invention
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An interferometer system, positioning system, a lithographic apparatus, a jitter determination me... |
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Invention
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Dual focus soluton for sem metrology tools.
There is provided a charged particle apparatus compr... |
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Invention
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Data-driven prediction and identification of failure modes based on wafer-level analysis and root... |
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Invention
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Operation methods of 2d pixelated detector for an apparatus with plural charged-particle beams an... |
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Invention
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Training machine learning models based on partial datasets for defect location identification.
A... |
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Invention
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Machine learning-based systems and methods for generating synthetic defect images for wafer inspe... |
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Invention
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Intensity order difference based metrology system, lithographic apparatus, and methods thereof.
... |
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G/S
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Recorded software, in particular software for the storage, processing, and generation of data and... |
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Invention
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Semiconductor charged particle detector for microscopy.
A detector may be provided for a charged... |
2020
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G/S
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Maintenance and repair services in connection with machines for use in microlithography and in th... |
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G/S
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Maintenance and repair services in connection with machines for use in the electronics, micro-lit... |
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Invention
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Patterning device conditioning system and method.
A reticle conditioning system includes: a supp... |
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G/S
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Maintenance and repair services in connection with machines
for use in the electronics, micro-li... |
2018
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G/S
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Computer hardware and software for the design and manufacture of semiconductor wafers and masks; ... |
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G/S
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Computer hardware and software for the design and
manufacture of semiconductor wafers and masks;... |
2017
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G/S
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Semiconductor lithographic machines, namely, lithographic machines used to manufacture semiconduc... |
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G/S
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Computer hardware for improving lithography manufacturing
processes; computer software for impro... |
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G/S
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Computer hardware for improving lithography manufacturing processes; computer software for improv... |
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G/S
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Micro-lithography machines, namely, machines for manufacturing electronic components, integrated ... |
2016
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G/S
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Micro-lithography equipment; machines for use in the manufacture by micro-lithography, especially... |
2015
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G/S
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Exposure units being optical instruments and their parts, for use in lithographic machines, namel... |
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G/S
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Exposure units [optical instruments] and their parts, for
use in lithographic machines. |
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G/S
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Machine tool for mounting, demounting and remounting a
pellicle to a reticle in lithographic equ... |
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G/S
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Electronic inspection devices, data processors, computer hardware and software for defect inspect... |
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G/S
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[ Electronic inspection devices and ] computer software for inspection of semiconductor materials... |
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G/S
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Inspection tool using particle beam for inspection of semiconductor materials, devices and products |
2014
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G/S
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Process control equipment for semiconductor wafer production, namely particle beam emitter in the... |
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G/S
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Optical measuring apparatus and instruments for measuring test wafers for the manufacture of elec... |
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G/S
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Optical measuring apparatus and instruments for measuring
test wafers for the manufacture of ele... |
2013
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G/S
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Electronic imaging platforms in the field of inspection of semiconductor materials, namely, semic... |
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G/S
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Machinery maintenance and repair in the field of semiconductor industry; installation of semicond... |
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G/S
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Technology supervision and inspection in the field of quality control of semiconductor wafers and... |
2012
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G/S
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testing and inspection in the field of quality control of semiconductor wafers and reticles |
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G/S
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Micro-lithography machines; machines for use in the
electronics, integrated circuit, semi-conduc... |
2011
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G/S
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Machines for micro-lithography, namely, machines for manufacturing semiconductors; machines not i... |
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G/S
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Micro-lithography equipment; machines for use in industry in the field of electronics, integrated... |
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G/S
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Machines for micro-lithography; machines not included in
other classes, for use in the field of ... |