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2024
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Invention
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Forming multiple aerial images in a single lithography exposure pass.
A set of the pulses of lig... |
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Invention
|
Dust management for a gas discharge chamber. A dust collector for a gas discharge chamber of a li... |
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Invention
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Processes for maintenance of modules of light sources in semiconductor photolithography. A comput... |
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2023
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Invention
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Cold start conditioning in a light source. A method for controlling a light source includes: oper... |
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Invention
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Laser maintenance apparatus and method. Disclosed is an apparatus and method in which one or more... |
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Invention
|
Conduit system, radiation source, lithographic apparatus, and methods thereof. A radiation source... |
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Invention
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Method of compensating wavelength error induced by repetition rate deviation.
A radiation system... |
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Invention
|
Reducing energy consumption of a gas discharge chamber blower. A control apparatus for a light so... |
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Invention
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Adjuster using torsionally stiff coupler and actuator system using same. Disclosed is an apparatu... |
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Invention
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Spectral feature control apparatus. A deep ultraviolet laser system includes a line narrowing mod... |
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Invention
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Apparatus for and method of control for multifocal imaging. Apparatus for and methods of rapidly ... |
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Invention
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Method for radiation spectrum aware souce mask optimization for lithography. Photolithography. Pe... |
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Invention
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Apparatus for and method of controlling cold start conditioning in a light source. A method of an... |
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Invention
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Apparatus for and method of aligning a laser system. Disclosed is an apparatus for and method of ... |
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Invention
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Passive dust trap, illumination system, and lithography system. A system includes first and secon... |
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Invention
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Apparatus for and method of vibration cancellation for laser wavelength and bandwidth stability. ... |
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Invention
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Optical pulse stretcher apparatus. An optical pulse stretcher apparatus includes: a hermetically-... |
|
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Invention
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Status monitoring and reporting for ultraviolet light sources. A computing device including a dis... |
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2022
|
Invention
|
Spectral feature control apparatus.
A spectral feature selection apparatus includes a dispersive... |
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Invention
|
Maintenance of modules for light sources in semiconductor photolithography. A light source includ... |
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Invention
|
Determination of a property of an exposure light beam. An apparatus includes: an estimation syste... |
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Invention
|
Metrology apparatus and method. A metrology apparatus includes: a probe apparatus configured to p... |
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Invention
|
Control voltage threshold selection to facilitate multifocal imaging. Disclosed is an apparatus a... |
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|
Invention
|
Forming multiple aerial images in a single lithography exposure pass. A set of the pulses of ligh... |
|
|
Invention
|
Spectral feature selection and pulse timing control of a pulsed light beam. A method includes dri... |
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Invention
|
Apparatus for and method of conditioning laser electrodes. Disclosed are apparatus for and method... |
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Invention
|
Electrode with engineered surface for improved energy performance. One or both of the confronting... |
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|
Invention
|
Prediction apparatus and method for optical source.
A prediction apparatus is in communication w... |
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Invention
|
Pulsed power systems with controlled reactor reset.
A pulsed power circuit including one or more... |
|
|
Invention
|
Gas control apparatus for gas discharge stage.
A gas control apparatus includes a control system... |
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|
Invention
|
System for actively controlling a cavity length of an optical assembly.
A system includes: an op... |
|
|
Invention
|
Electronic module for a magnetic switching network to produce a pulse of the pulsed output light ... |
|
|
Invention
|
Maintenance of modules for light sources used in semiconductor photolithography.
Systems for mai... |
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2021
|
Invention
|
Optimization of lithographic process based on bandwidth and speckle.
A method for improving a li... |
|
|
Invention
|
Pulsed power circuits using hybrid non-linear magnetic materials and inductors incorporating the ... |
|
|
Invention
|
Reducing energy consumption of a gas discharge chamber blower.
In some general aspects, an appar... |
|
|
Invention
|
Magnetic switch with impedance control for an optical system.
One or more properties of an elect... |
|
|
Invention
|
Apparatus for and method of optical component alignment.
Apparatus for and method of aligning op... |
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Invention
|
Apparatus for and method of modulating a wavelength of an excimer laser as a function of its repe... |
|
|
Invention
|
Optical component for deep ultraviolet light source.
An optical component includes: a calcium fl... |
|
|
Invention
|
Electromagnetic shield for a sealing mechanism of a laser chamber.
An apparatus for a light sour... |
|
|
Invention
|
Apparatus for and method of optical component alignment. Apparatus for and method of aligning opt... |
|
|
Invention
|
Predictive calibration scheduling apparatus and method.
A method is performed for scheduling a c... |
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Invention
|
Determination of measurement error in an etalon. Information relating to an etalon is accessed, t... |
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|
Invention
|
Systems and methods for controlling a center wavelength.
The present disclosure is directed to s... |
|
|
Invention
|
Conduit system, radiation source, lithographic apparatus, and methods thereof.
A pulsed-discharg... |
|
|
Invention
|
Predictive control of a pulsed light beam.
In some general aspects, a light beam control apparat... |
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|
Invention
|
Reducing fretting corrosion in a gas discharge chamber support device.
A light source apparatus ... |
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2020
|
Invention
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Dual pulsed power system with independent voltage and timing control and reduced power consumptio... |
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|
G/S
|
Lasers and wave meters, and components thereof, including light measuring instrumentation, not fo... |
|
2017
|
G/S
|
Scientific, nautical, optical, electro-optical, weighing, measuring, signaling, checking (supervi... |
|
2014
|
G/S
|
Laser-controlled optical assembly modules for use in
enhancing the performance of photolithograp... |
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G/S
|
Optical assemblies for use in controlling lasers for enhancing the performance of photolithograph... |
|
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G/S
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Computer software for use in enhancing the operational performance of laser-based photolithograph... |
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2011
|
G/S
|
Computer hardware and software for data mining, data
monitoring, data analysis, and control of t... |
|
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G/S
|
Computer hardware and software for data mining, data
monitoring, and data analysis of performanc... |
|
|
G/S
|
computer hardware and software for data mining, data monitoring, and data analysis of performance... |
|
|
G/S
|
computer hardware and software for data mining, data monitoring, data analysis, and control of th... |
|
|
G/S
|
Light source equipment for non-medical use (terms too vague
in the opinion of the International ... |
|
|
G/S
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Laser light sources for use in semiconductor manufacturing |
|
2007
|
G/S
|
Maintenance, repair, and servicing of light sources used in
industrial applications. |
|
|
G/S
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Computer and technical consultation services, namely
monitoring, testing, and diagnosis of light... |
|
|
G/S
|
maintenance, repair, and servicing of light sources used in industrial applications |
|
|
G/S
|
computer and technical consultation services, namely, monitoring, testing, and diagnosis of light... |
|
2006
|
G/S
|
Scientific, nautical, optical, electro-optical, weighing, measuring, regulating, signaling, check... |
|
|
G/S
|
Lasers and parts and fittings therefor including measuring instruments for waves and other light. |
|
2001
|
G/S
|
Information services in the field of industrial applications for excimer lasers, particulary semi... |
|
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G/S
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Providing information via information networks, namely, the internet and intranets, in the field ... |
|
1999
|
G/S
|
Lasers and wave meters, and components thereof, namely, light measuring instrumentation, not for ... |
|
1990
|
G/S
|
Excimer lasers.
Excimer lasers for industrial use. |
|
1989
|
G/S
|
EXCIMER LASERS FOR INDUSTRIAL USE |
