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2023
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Invention
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Apparatus and method for determining a condition associated with a pellicle.
An apparatus for de... |
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Invention
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Mode control of photonic crystal fiber based broadband radiation sources.
A mode control system ... |
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2022
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Invention
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Improved broadband radiation generation in photonic crystal or highly non-linear fibres. Radiatio... |
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Invention
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Metrology systems with phased arrays for contaminant detection and microscopy. A metrology system... |
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Invention
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Lithographic apparatus, locking device, and method. A lithographic apparatus includes an illumina... |
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Invention
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Systems, methods, and devices for thermal conditioning of reticles in lithographic apparatuses. E... |
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Invention
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Systems and methods for measuring intensity in a lithographic alignment apparatus.
A metrology s... |
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2021
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Invention
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Multi-channel light source for projection optics heating.
Systems, apparatuses, and methods are ... |
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Invention
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Intensity order difference based metrology system, lithographic apparatus, and methods thereof.
... |
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Invention
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Lithographic apparatus, metrology systems, and methods thereof.
A method includes irradiating a ... |
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Invention
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Metrology system and coherence adjusters.
A metrology system (400) includes a multi-source radia... |
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Invention
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Vacuum sheet bond fixturing and flexible burl applications for substrate tables.
Systems, appara... |
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Invention
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Multiple objectives metrology system, lithographic apparatus, and methods thereof.
A metrology o... |
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Invention
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Polarization selection metrology system, lithographic apparatus, and methods thereof.
An inspect... |
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Invention
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Metrology tool with position control of projection system.
A metrology tool that includes a subs... |
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Invention
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Pod handling systems and methods for a lithographic device.
Systems, apparatuses, and methods ar... |
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Invention
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Radiation source arrangement and metrology device.
A radiation source arrangement including: a r... |
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Invention
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Lithographic apparatus, metrology system, and intensity imbalance measurement for error correctio... |
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Invention
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Double-scanning opto-mechanical configurations to improve throughput of particle inspection syste... |
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Invention
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Lithographic apparatus and methods for multi-exposure of a substrate.
A lithographic system and ... |
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Invention
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Spectrometric metrology systems based on multimode interference and lithographic apparatus.
A me... |
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Invention
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Self-referencing integrated alignment sensor.
Systems, apparatuses, and methods are provided for... |
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Invention
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Monolithic particle inspection device.
Systems, apparatuses, and methods are provided for detect... |
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Invention
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Lithographic apparatus, metrology systems, and methods thereof.
A system includes an illuminatio... |
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Invention
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Sub micron particle detection on burl tops by applying a variable voltage to an oxidized wafer.
... |
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Invention
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Lithographic apparatus, metrology systems, illumination switches and methods thereof.
A system i... |
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Invention
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Lithographic pre-alignment imaging sensor with build-in coaxial illumination.
A patterning devic... |
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Invention
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Lithographic apparatus, multi-wavelength phase-modulated scanning metrology system and method.
A... |
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Invention
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Generating an alignment signal based on local alignment mark distortions.
A method for generatin... |
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Invention
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Contaminant identification metrology system, lithographic apparatus, and methods thereof.
An ins... |
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Invention
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Contaminant analyzing metrology system, lithographic apparatus, and methods thereof.
An inspecti... |
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Invention
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Systems and methods for forming structures on a surface.
Systems and methods for forming structu... |
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Invention
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Optical apparatus and lithographic apparatus using the optical apparatus.
An optical apparatus a... |
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Invention
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End-of-life monitoring of dynamic gas lock membranes and pupil facet mirrors anddetection of memb... |
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Invention
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Reticle gripper damper and isolation system for lithographic apparatuses.
Embodiments herein des... |
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Invention
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Apparatus for and method of sensing alignment marks. An apparatus for and method of sensing multi... |
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Invention
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Improved alignment of scatterometer based particle inspection system.
A pattering device inspect... |
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Invention
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Method for region of interest processing for reticle particle detection.
An inspection system in... |
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Invention
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Optical designs of miniaturized overlay measurement system.
A compact sensor apparatus having an... |
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Invention
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Lithographic apparatus and method for drift compensation.
A system, method, a lithographic appar... |
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2020
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Invention
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Lithographic system provided with a deflection apparatus for changing a trajectory of particulate... |
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Invention
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Contaminant detection metrology system, lithographic apparatus, and methods thereof. A system (40... |
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Invention
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Lithographic apparatus, metrology systems, illumination sources and methods thereof.
A system in... |
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Invention
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Wafer clamp hard burl production and refurbishment.
Systems, apparatuses, and methods are provid... |
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Invention
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Systems and methods for manufacturing a double-sided electrostatic clamp.
Systems, apparatuses, ... |
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Invention
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Metrology method and associated metrology and lithographic apparatuses.
A metrology method relat... |
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Invention
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Overlay measurement system using lock-in amplifier technique.
A detection system (200) includes ... |
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Invention
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Optical component and clamp used in lithographic apparatus. An optical element and a lithographic... |
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Invention
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Lithographic apparatus and electrostatic clamp designs.
Embodiments herein describe methods, dev... |
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Invention
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Invariable magnification multilevel optical device with telecentric converter. A pre-alignment sy... |
