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2023
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Invention
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Mode control of photonic crystal fiber based broadband radiation sources.
A mode control system ... |
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2022
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Invention
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Improved broadband radiation generation in photonic crystal or highly non-linear fibres. Radiatio... |
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Invention
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Substrate holder for use in a lithographic apparatus.
A substrate holder, for a lithographic app... |
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Invention
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Metrology systems with phased arrays for contaminant detection and microscopy. A metrology system... |
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Invention
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Lithographic apparatus, locking device, and method. A lithographic apparatus includes an illumina... |
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Invention
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Systems, methods, and devices for thermal conditioning of reticles in lithographic apparatuses. E... |
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Invention
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Metrology systems, temporal and spatial coherence scrambler and methods thereof. A system include... |
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Invention
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Modular wafer table and methods of manufacturing thereof. The present disclosure is directed to a... |
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Invention
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Metrology systems, measurement of wear systems and methods thereof. A method includes irradiating... |
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Invention
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Lithographic apparatus, temperature sensor, and fiber bragg grating sensor. A lithographic appara... |
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Invention
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Tool for modifying a support surface. Devices and methods are disclosed for modifying substrate s... |
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Invention
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Digital holographic microscope and associated metrology method. Disclosed is a method of correcti... |
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2021
|
Invention
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Lithographic apparatus and methods for multi-exposure of a substrate.
A lithographic system and ... |
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Invention
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Spectrometric metrology systems based on multimode interference and lithographic apparatus.
A me... |
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Invention
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Self-referencing integrated alignment sensor.
Systems, apparatuses, and methods are provided for... |
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Invention
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Monolithic particle inspection device.
Systems, apparatuses, and methods are provided for detect... |
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Invention
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Lithographic apparatus, metrology systems, illumination switches and methods thereof.
A system i... |
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Invention
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Lithographic pre-alignment imaging sensor with build-in coaxial illumination.
A patterning devic... |
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Invention
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Lithographic apparatus, multi-wavelength phase-modulated scanning metrology system and method.
A... |
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Invention
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Generating an alignment signal based on local alignment mark distortions.
A method for generatin... |
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Invention
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Contaminant identification metrology system, lithographic apparatus, and methods thereof.
An ins... |
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Invention
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Contaminant analyzing metrology system, lithographic apparatus, and methods thereof.
An inspecti... |
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Invention
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Optical apparatus and lithographic apparatus using the optical apparatus.
An optical apparatus a... |
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Invention
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End-of-life monitoring of dynamic gas lock membranes and pupil facet mirrors anddetection of memb... |
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Invention
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Reticle gripper damper and isolation system for lithographic apparatuses.
Embodiments herein des... |
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Invention
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Apparatus for and method of sensing alignment marks.
An apparatus for and method of sensing mult... |
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Invention
|
Improved alignment of scatterometer based particle inspection system.
A pattering device inspect... |
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Invention
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Method for region of interest processing for reticle particle detection.
An inspection system in... |
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Invention
|
Optical designs of miniaturized overlay measurement system.
A compact sensor apparatus having an... |
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Invention
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Lithographic apparatus and method for drift compensation.
A system, method, a lithographic appar... |
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2020
|
Invention
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Lithographic system provided with a deflection apparatus for changing a trajectory of particulate... |
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|
Invention
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Contaminant detection metrology system, lithographic apparatus, and methods thereof.
A system (4... |
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|
Invention
|
Lithographic apparatus, metrology systems, illumination sources and methods thereof.
A system in... |
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Invention
|
Wafer clamp hard burl production and refurbishment.
Systems, apparatuses, and methods are provid... |
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|
Invention
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Systems and methods for manufacturing a double-sided electrostatic clamp.
Systems, apparatuses, ... |
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Invention
|
Metrology method and associated metrology and lithographic apparatuses.
A metrology method relat... |
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Invention
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Overlay measurement system using lock-in amplifier technique.
A detection system (200) includes ... |
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Invention
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Optimization using a non-uniform illumination intensity profile.
A method for source mask optimi... |
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Invention
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Optical component and clamp used in lithographic apparatus.
An optical element and a lithographi... |
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Invention
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Systems for cleaning a portion of a lithography apparatus.
A cleaning tool configured to be inse... |
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Invention
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Variable diffraction grating. A calibration system includes a plate, a fixed alignment mark, and ... |
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Invention
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Lithographic apparatus and electrostatic clamp designs.
Embodiments herein describe methods, dev... |
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Invention
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Apparatus for and method of sensing alignment marks.
An apparatus for and method of sensing alig... |
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Invention
|
Metrology systems, coherence scrambler illumination sources and methods thereof.
A system includ... |
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Invention
|
Metrology mark structure and method of determining metrology mark structure.
A structure of a se... |
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Invention
|
Lithographic apparatus, metrology system, and illumination systems with structured illumination. ... |
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Invention
|
A method for filtering an image and associated metrology apparatus.
Disclosed is a method for a ... |
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Invention
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Phase modulators in alignment to decrease mark size.
An alignment apparatus includes an illumina... |
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Invention
|
Alignment sensor based on wavelength-scanning.
An alignment method includes directing an illumin... |
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Invention
|
Lithographic patterning device multichannel position and level gauge. A patterning device alignme... |
