ASML Holding N.V.

Netherlands


 
Total IP 539
Total IP incl. subs 7,635 (+ 7,357 for subs)
Total IP Rank # 2,378
IP Activity Score 3.3/5.0    362
IP Activity Rank # 1,985
IP AS incl. subs 4/5.0    4,907
Stock Symbol
ISIN NL0010273215
Market Cap. 378.4B  (EUR)
Industry Semiconductor Equipment & Materials
Sector Technology

Patents

Trademarks

289 0
3 0
247 0
0
 
Last Patent 2024 - Metrology systems, measurement o...
First Patent 1981 - Method and apparatus for optical...

Subsidiaries

11 subsidiaries with IP (7208 patents, 149 trademarks)

3 subsidiaries without IP

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Latest Inventions, Goods, Services

2023 Invention Apparatus and method for determining a condition associated with a pellicle. An apparatus for de...
Invention Mode control of photonic crystal fiber based broadband radiation sources. A mode control system ...
2022 Invention Improved broadband radiation generation in photonic crystal or highly non-linear fibres. Radiatio...
Invention Metrology systems with phased arrays for contaminant detection and microscopy. A metrology system...
Invention Lithographic apparatus, locking device, and method. A lithographic apparatus includes an illumina...
Invention Metrology systems, measurement of wear systems and methods thereof. A method includes irradiatin...
Invention Digital holographic microscope and associated metrology method. A method of correcting a hologra...
Invention Operating a metrology system, lithographic apparatus, and methods thereof. A method includes det...
Invention Methods and apparatuses for spatially filtering optical pulses. An optical filter apparatus incl...
Invention Systems and methods for measuring intensity in a lithographic alignment apparatus. A metrology s...
2021 Invention Multi-channel light source for projection optics heating. Systems, apparatuses, and methods are ...
Invention Intensity order difference based metrology system, lithographic apparatus, and methods thereof. ...
Invention Lithographic apparatus, metrology systems, and methods thereof. A method includes irradiating a ...
Invention Metrology system and coherence adjusters. A metrology system (400) includes a multi-source radia...
Invention Vacuum sheet bond fixturing and flexible burl applications for substrate tables. Systems, appara...
Invention Multiple objectives metrology system, lithographic apparatus, and methods thereof. A metrology o...
Invention Polarization selection metrology system, lithographic apparatus, and methods thereof. An inspect...
Invention Metrology tool with position control of projection system. A metrology tool that includes a subs...
Invention Pod handling systems and methods for a lithographic device. Systems, apparatuses, and methods ar...
Invention Radiation source arrangement and metrology device. A radiation source arrangement including: a r...
Invention Lithographic apparatus, metrology system, and intensity imbalance measurement for error correctio...
Invention Double-scanning opto-mechanical configurations to improve throughput of particle inspection syste...
Invention Lithographic apparatus and methods for multi-exposure of a substrate. A lithographic system and ...
Invention Spectrometric metrology systems based on multimode interference and lithographic apparatus. A me...
Invention Self-referencing integrated alignment sensor. Systems, apparatuses, and methods are provided for...
Invention Monolithic particle inspection device. Systems, apparatuses, and methods are provided for detect...
Invention Lithographic apparatus, metrology systems, and methods thereof. A system includes an illuminatio...
Invention Sub micron particle detection on burl tops by applying a variable voltage to an oxidized wafer. ...
Invention Lithographic apparatus, metrology systems, illumination switches and methods thereof. A system i...
Invention Lithographic pre-alignment imaging sensor with build-in coaxial illumination. A patterning devic...
Invention Lithographic apparatus, multi-wavelength phase-modulated scanning metrology system and method. A...
Invention Generating an alignment signal based on local alignment mark distortions. A method for generatin...
Invention Contaminant identification metrology system, lithographic apparatus, and methods thereof. An ins...
Invention Contaminant analyzing metrology system, lithographic apparatus, and methods thereof. An inspecti...
Invention Systems and methods for forming structures on a surface. Systems and methods for forming structu...
Invention Optical apparatus and lithographic apparatus using the optical apparatus. An optical apparatus a...
Invention End-of-life monitoring of dynamic gas lock membranes and pupil facet mirrors anddetection of memb...
Invention Reticle gripper damper and isolation system for lithographic apparatuses. Embodiments herein des...
Invention Apparatus for and method of sensing alignment marks. An apparatus for and method of sensing multi...
Invention Improved alignment of scatterometer based particle inspection system. A pattering device inspect...
Invention Method for region of interest processing for reticle particle detection. An inspection system in...
Invention Optical designs of miniaturized overlay measurement system. A compact sensor apparatus having an...
Invention Lithographic apparatus and method for drift compensation. A system, method, a lithographic appar...
2020 Invention Lithographic system provided with a deflection apparatus for changing a trajectory of particulate...
Invention Contaminant detection metrology system, lithographic apparatus, and methods thereof. A system (40...
Invention Lithographic apparatus, metrology systems, illumination sources and methods thereof. A system in...
Invention Wafer clamp hard burl production and refurbishment. Systems, apparatuses, and methods are provid...
Invention Systems and methods for manufacturing a double-sided electrostatic clamp. Systems, apparatuses, ...
Invention Metrology method and associated metrology and lithographic apparatuses. A metrology method relat...
Invention Invariable magnification multilevel optical device with telecentric converter. A pre-alignment sy...