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2023
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Invention
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Substrate transport apparatus.
A substrate transport apparatus including, a torsional motion dri... |
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Invention
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Substrate processing apparatus.
A substrate processing apparatus including a frame, a first SCAR... |
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Invention
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Method and apparatus for brushless electrical machine control.
A variable reluctance motor load ... |
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G/S
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Online non-downloadable software for controlling, analyzing, and monitoring automated laboratory ... |
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Invention
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Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism.... |
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Invention
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Sealed robot drive.
A transport apparatus including a housing, a drive mounted to the housing, a... |
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Invention
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Method and apparatus for health assessment of a transport apparatus.
Method for health assessmen... |
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Invention
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Compact direct drive spindle.
A sealed actuator including stacked motor modules. Each motor modu... |
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Invention
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On the fly automatic wafer centering method and apparatus.
Substrate processing apparatus includ... |
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Invention
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Automatic wafer centering method and apparatus.
A substrate transport apparatus including a tran... |
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Invention
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Substrate processing apparatus.
A substrate processing apparatus including a frame, a SCARA arm ... |
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Invention
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Automated teach apparatus for robotic systems and method therefor.
An automatic teaching system ... |
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Invention
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Process apparatus with on-the-fly substrate centering.
A substrate processing apparatus includin... |
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Invention
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Substrate transport.
A substrate transport system includes a carrier having a housing forming an... |
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Invention
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Intelligent condition monitoring and fault diagnostic system for preventative maintenance.
A sys... |
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Invention
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Dual arm robot.
A substrate processing apparatus including a frame, a first arm coupled to the f... |
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Invention
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Load port module.
Substrate loading device including a frame adapted to connect the substrate lo... |
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Invention
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Load lock fast pump vent.
A semiconductor processing tool is disclosed, the tool having a frame ... |
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Invention
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Substrate transport apparatus. A transfer apparatus including a frame, multiple arms connected to... |
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Invention
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Substrate transport apparatus. A substrate transport apparatus including, a torsional motion driv... |
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Invention
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Substrate processing apparatus.
A substrate transport apparatus having a drive section and at le... |
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2022
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Invention
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Transport apparatus with linear bearing and method therefor.
A vacuum substrate transport appara... |
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Invention
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Substrate processing apparatus.
A substrate processing apparatus includes a frame and a transpor... |
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Invention
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Substrate processing apparatus. A linear electrical machine including a frame with a level refere... |
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Invention
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Substrate processing apparatus.
A linear electrical machine including a frame with a level refer... |
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Invention
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Load port module.
A substrate loading device including a frame adapted to connect to a substrate... |
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Invention
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Substrate processing apparatus. A linear electrical machine comprising a frame with a level refer... |
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Invention
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Compact direct drive spindle. A sealed actuator including stacked motor modules. Each motor modul... |
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Invention
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Tool auto-teach method and apparatus. A substrate transport apparatus auto-teach system for auto-... |
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Invention
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Sealed switched reluctance motor.
A motor including a sealed rotor with at least one salient rot... |
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Invention
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Substrate transport apparatus.
A substrate transport apparatus having a frame, a drive section a... |
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Invention
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Position feedback for sealed environments. A transport apparatus comprising a housing, a variable... |
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Invention
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Method and apparatus for health assessment of a transport apparatus. pkBase) for each of the dyna... |
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Invention
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Method and apparatus for substrate alignment. A semiconductor wafer transport apparatus having a ... |
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Invention
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Substrate transport apparatus.
A transport apparatus including a frame, a drive section connecte... |
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Invention
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Substrate transport apparatus.
A transport apparatus including a drive section connected to a fr... |
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Invention
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Substrate processing apparatus. A substrate processing apparatus including a frame, a first SCARA... |
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Invention
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Method and apparatus for substrate transport apparatus position compensation.
A substrate transp... |
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Invention
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Substrate transport apparatus.
A substrate transport apparatus comprising a frame, a drive secti... |
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2021
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Invention
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Substrate processing apparatus. A substrate processing apparatus including a frame, a SCARA arm m... |
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Invention
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Method and apparatus for brushless electrical machine control. A variable reluctance motor load m... |
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Invention
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Robot embedded vision apparatus. A substrate transport apparatus includes a transport chamber, a ... |
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Invention
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Substrate transport. A substrate transport system includes a carrier having a housing forming an ... |
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Invention
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Compact direct drive spindle.
A substrate transport apparatus including a frame, at least one ar... |
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Invention
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Automatic wafer centering method and apparatus. A substrate transport apparatus including a trans... |
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Invention
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Tray engine and methods for transferring trays to and from tools and in sorters.
A tray engine i... |
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Invention
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Automated teach apparatus for robotic systems and method therefor. An automatic teaching system f... |
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Invention
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Load port module. Substrate loading device including a frame adapted to connect the substrate loa... |
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Invention
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Substrate transport apparatus with independent accessory feedthrough.
A substrate transport appa... |
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G/S
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Reticle stockers. |
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G/S
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Reticle stockers being machines for manufacturing
semiconductors. |
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Invention
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On the fly automatic wafer centering method and apparatus. Substrate processing apparatus includi... |
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G/S
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Machines for contamination control in semiconductor device
manufacturing; machines for cleaning ... |
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G/S
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Devices and machines for cleaning wafer carriers; Devices and machines for cleaning reticle carri... |
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2020
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G/S
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Reticle stockers |
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G/S
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Machines for contamination control in semiconductor device manufacturing; machines for cleaning w... |
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2019
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G/S
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Semiconductor device manufacturing machines; semiconductor wafer processing equipment for use in ... |
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G/S
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Semiconductor device manufacturing machines; semiconductor
wafer processing equipment; semicondu... |
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G/S
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Semiconductor device manufacturing machines; semiconductor wafer processing equipment; semiconduc... |
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2015
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G/S
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Industrial robot used for transport in the process of
manufacturing integrated circuits and elec... |
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2012
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G/S
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Ionization gauge tubes; vacuum valves. Semiconductor manufacturing machines, semiconductor wafer ... |
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2011
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G/S
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Computer software for operating semiconductor wafer handling systems, semiconductor manufacturing... |
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G/S
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Semiconductor manufacturing machines; semiconductor wafer handling systems in the nature of indus... |
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2008
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G/S
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Computer hardware for use in the field of manufacturing automation, except for coolers for graphi... |
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2006
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G/S
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Load port module for use in the field of manufacturing automation (computer and electronics hardw... |
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G/S
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Computer software for use in the field of manufacturing automation, except for computer software ... |
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G/S
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Robotic manipulator, being automatic handling machines or robots, for use in the field of manufac... |
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G/S
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A modular environmental module for use in the field of manufacturing automation, namely, semicond... |
