|
2023
|
G/S
|
Semiconductor wafer processing equipment and semiconductor
wafer processing equipment components... |
|
|
G/S
|
Software algorithm that utilizes CAD segmentation to enhance defect detection |
|
2022
|
G/S
|
Semiconductor wafer processing equipment, namely, hardware to control and modify polishing pad su... |
|
|
G/S
|
Semiconductor wafer processing equipment component, namely,
source coil for plasma etching system. |
|
|
G/S
|
Densified, seam-free silicon nitride dielectric gapfill film
used in semiconductor manufacturing. |
|
|
G/S
|
Dielectric films and coatings for use in semiconductor
manufacturing. |
|
|
G/S
|
Recorded software and smart algorithms used in the
semiconductor manufacturing industry to reduc... |
|
|
G/S
|
Optical devices, namely, metasurface optical devices Manufacturing services of metasurface optica... |
|
|
G/S
|
Recorded computer software and algorithms used in controlling ion implanter dose delivery in semi... |
|
|
G/S
|
Computer simulation software for use in semiconductor wafer processing equipment operator training |
|
|
G/S
|
Recorded software for use in semiconductor manufacturing, namely, SQL server configurations for m... |
|
|
G/S
|
Wafer processing equipment, namely a system for metal
physical vapor deposition (PVD) processes. |
|
|
G/S
|
Recorded computer programs for use in cancer diagnosis; recorded computer applications using arti... |
|
|
Invention
|
Carbon hard masks for patterning applications and methods related thereto.
Embodiments herein pr... |
|
|
Invention
|
Chamber injector.
Embodiments described herein generally relate to apparatus for fabricating sem... |
|
|
Invention
|
Monolithic modular high-frequency plasma source.
Embodiments disclosed herein include a monolith... |
|
|
Invention
|
Temperature control of chemical mechanical polishing.
A chemical mechanical polishing apparatus ... |
|
|
Invention
|
Method for manufacturing optical device structures.
Embodiments described herein provide for met... |
|
|
Invention
|
Asymmetric injection for better wafer uniformity.
A gas injector for processing a substrate incl... |
|
|
Invention
|
Process fluid path switching in recipe operations.
A method includes identifying time values for... |
|
|
Invention
|
Oxygen free deposition of platinum group metal films.
Methods of depositing platinum group metal... |
|
|
Invention
|
Horizontal gaa nano-wire and nano-slab transistors.
Horizontal gate-all-around devices and metho... |
|
|
Invention
|
Servo-control system.
Disclosed herein are embodiments of a servo-control system comprising at l... |
|
|
Invention
|
Methods and assemblies for gas flow ratio control.
A master controller determines a first flow s... |
|
|
Invention
|
Conductive oxide overhang structures for oled devices.
Sub-pixel circuits and methods of forming... |
|
|
Invention
|
Substrate support pedestal.
The systems and methods discussed herein are associated with substra... |
|
|
Invention
|
Apparatus and method for inspecting lamps.
Examples disclosed herein relate to a method and appa... |
|
|
Invention
|
Lamp filament having a pitch gradient and method of making.
Examples disclosed herein relate to ... |
|
|
Invention
|
Variable loop control feature.
A method includes identifying a recipe for depositing layers on a... |
|
|
G/S
|
Semiconductor wafer processing equipment and semiconductor wafer processing equipment components,... |
|
|
Invention
|
Homoleptic lanthanide deposition precursors.
Described are lanthanide-containing metal coordinat... |
|
|
G/S
|
Densified, seam-free dielectric gapfill film used in
semiconductor manufacturing. |
|
|
G/S
|
Metal oxide dielectric coatings for use in semiconductor
manufacturing. |
|
|
G/S
|
Semiconductor wafer processing equipment component, namely, source coil for plasma etching system |
|
|
G/S
|
Dielectric films and coatings for use in semiconductor manufacturing |
|
|
G/S
|
Semiconductor manufacturing machines |
|
|
G/S
|
Assays and reagents for use in genetic research Custom design and development of chemical reagent... |
|
|
G/S
|
Densified, seam-free silicon nitride dielectric gapfill film used in semiconductor manufacturing |
|
|
G/S
|
Assays and reagents for use in genetic research. Custom design and development of chemical reagen... |
|
|
G/S
|
Downloadable and recorded computer software for use in life science instrument operations and lif... |
|
|
G/S
|
Downloadable and recorded computer software for use in life science visualization. Software-as-a-... |
|
|
G/S
|
Semiconductor wafer processing equipment and components,
namely, rapid thermal processing chamber. |
|
|
G/S
|
Recorded software and smart algorithms used in the semiconductor manufacturing industry to reduce... |
|
|
G/S
|
Downloadable and recorded computer software for use in life
science visualization. Software-as-a... |
|
|
G/S
|
Rapid thermal processing chamber for annealing steps
implemented in semiconductor manufacturing. |
|
|
G/S
|
Downloadable and recorded computer software for use in life
science instrument operations and li... |
|
|
Invention
|
Methods of formation of a sige/si superlattice.
A method and apparatus for forming a super-latti... |
|
|
Invention
|
Methods of formation of a sige/si superlattice. A method and apparatus for forming a super-lattic... |
|
|
Invention
|
Integratead wet clean for bevel treatments.
Exemplary integrated cluster tools may include a fac... |
|
|
Invention
|
Methods of forming semiconductor structures. Methods for forming a semiconductor structure and se... |
|
|
Invention
|
Face-up wafer edge polishing apparatus. Exemplary substrate edge polishing apparatuses may includ... |
|
|
Invention
|
Improved showerhead pumping geometry for precursor containment. Gas injector with a vacuum channe... |
|
|
Invention
|
Reduced strain si/sige heteroepitaxy stacks for 3d dram. Three-dimensional dynamic random-access ... |
|
|
Invention
|
Reduced strain si/sige heteroepitaxy stacks for 3d dram.
Three-dimensional dynamic random-access... |
|
|
G/S
|
Wafer processing equipment, namely a system for metal physical vapor deposition (PVD) processes |
|
|
Invention
|
Dual xy variable aperture in an ion implantation system. An aperture diaphragm capable of varying... |
|
|
G/S
|
Machines and machine tools for use in chemical, physical,
and mechanical processes and productio... |
|
|
Invention
|
Analyzing a buried layer of a sample. Analyzing a buried layer on a sample includes milling a spo... |
|
|
Invention
|
Selective removal of transition metal nitride materials. Exemplary etching methods may include fl... |
|
|
Invention
|
Integrated methods for graphene formation. A method of forming graphene layers is disclosed. The ... |
|
|
Invention
|
Integrated methods for graphene formation.
A method of forming graphene layers is disclosed. The... |
|
|
Invention
|
Reactive cleaning of substrate support. Methods of cleaning a substrate support comprise: introdu... |
|
|
Invention
|
Sensor assembly and methods of vapor monitoring in process chambers. One or more embodiments desc... |
|
|
G/S
|
Software-controlled systems used in the semiconductor
manufacturing industry, namely, recorded s... |
|
|
G/S
|
Semiconductor manufacturing equipment, namely, darkfield
wafer inspection system aimed at detect... |
|
|
G/S
|
Semiconductor wafer processing equipment, namely, a radical
treatment system. |
|
|
Invention
|
Interlocked stepped retaining ring. Embodiments of the disclosure generally relate to a retaining... |
|
|
Invention
|
Uniformity control for plasma processing. A system and method including a processing device. The ... |
|
2021
|
Invention
|
Method and apparatus for controlled ion implantation.
A method of operating a beamline ion impla... |
|
|
Invention
|
Linear actuated 3 way spool valve with constant total flow.
A three-way valve is disclosed. The ... |
|
|
Invention
|
Reactive cleaning of substrate support.
Methods of cleaning a substrate support comprise: introd... |
|
|
Invention
|
Methods, apparatus, and systems for maintaining film modulus within a predetermined modulus range... |
|
|
Invention
|
Interlocked stepped retaining ring.
Embodiments of the disclosure generally relate to a retainin... |
|
|
Invention
|
Dual xy variable aperture in an ion implantation system.
An aperture diaphragm capable of varyin... |
|
|
Invention
|
Face-up wafer edge polishing apparatus.
Exemplary substrate edge polishing apparatuses may inclu... |
|
|
Invention
|
Metal oxide directional removal.
Exemplary etching methods may include modifying an exposed surf... |
|
|
Invention
|
Methods of forming semiconductor structures.
Methods for forming a semiconductor structure and s... |
|
|
Invention
|
Methods, mediums, and systems for identifying tunable domains for ion beam shape matching.
Techn... |
|
|
Invention
|
Post-chemical mechanical polishing brush cleaning box.
Embodiments provided herein include a sys... |
|
|
Invention
|
Methods and apparatus for processing a substrate.
Methods and apparatus for processing a substra... |
|
|
Invention
|
Virtual manufacturing using virtual build and analysis tools.
A virtual build of an assembly may... |
|
|
Invention
|
Symmetric semiconductor processing chamber.
In one example, a flow module. The flow module has a... |
|
2020
|
Invention
|
Surface profiling and texturing of chamber components.
Methods and apparatus for surface profili... |
