2024
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G/S
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Downloadable and prerecorded computer software for use in process control and yield management fo... |
2023
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Invention
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System and method for determining post bonding overlay.
A wafer shape metrology system includes ... |
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G/S
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Downloadable computer (simulation) software for identifying stochastic defects in semiconductor w... |
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Invention
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Back-illuminated sensor and a method of manufacturing a sensor using a silicon on insulator wafer... |
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Invention
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System and method for mitigating overlay distortion patterns caused by a wafer bonding tool.
A s... |
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Invention
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Massive overlay metrology sampling with multiple measurement columns.
A multi-column metrology t... |
|
Invention
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System and method for acquiring alignment measurements of structures of a bonded sample. Systems ... |
|
Invention
|
Confocal chromatic metrology for euv source condition monitoring. A light source includes a rotat... |
|
Invention
|
Auto-focus sensor implementation for multi-column microscopes. An array of localized auto-focus s... |
|
Invention
|
Noise diagnostics for an electron beam inspection system with swathing. Parameters from an inspec... |
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Invention
|
Multi-pitch grid overlay target for scanning overlay metrology. An overlay metrology system with ... |
|
Invention
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Multi-pitch grid overlay target for scanning overlay metrology.
An overlay metrology system with... |
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Invention
|
Lithography mask repair by simulation of photoresist thickness evolution. A system for mask desig... |
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Invention
|
Deep learning model-based alignment for semiconductor applications. Methods and systems for deep ... |
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Invention
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Lithography mask repair by simulation of photoresist thickness evolution.
A system for mask desi... |
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Invention
|
Methods and systems for systematic error compensation across a fleet of metrology systems based o... |
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Invention
|
Photoluminescence for semiconductor yield related applications. Methods and systems for determini... |
|
Invention
|
Photoluminescence for semiconductor yield related applications.
Methods and systems for determin... |
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Invention
|
Metrology sampling plans for only out of specification detection. Methods and systems for determi... |
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Invention
|
3d profilometry with a linnik interferometer. Systems and methods for generating volumetric data ... |
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Invention
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Scatterometry overlay metrology with orthogonal fine-pitch segmentation. An overlay metrology tar... |
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Invention
|
Metrology sampling plans for only out of specification detection.
Methods and systems for determ... |
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Invention
|
Detecting defects on specimens. Methods and systems for detecting defects on a specimen are provi... |
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Invention
|
Miniature electron optical column with a large field of view. A miniature electron optical column... |
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Invention
|
Method and system for cleaning optical elements in euv optical systems. A system and method for c... |
|
Invention
|
System and method for reducing sample noise using selective markers. An inspection is disclosed. ... |
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Invention
|
Image modeling-assisted contour extraction. A wafer metrology tool, such as a scanning electron m... |
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Invention
|
Metrology target for one-dimensional measurement of periodic misregistration.
A metrology target... |
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Invention
|
System and method for reducing sample noise using selective markers.
An inspection is disclosed.... |
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Invention
|
Methods and systems for model-less, scatterometry based measurements of semiconductor structures.... |
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Invention
|
Micro-lens array for metal-channel photomultiplier tube. The effective quantum efficiency of a me... |
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Invention
|
Deep learning model-based alignment for semiconductor applications.
Methods and systems for deep... |
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Invention
|
Reference image grouping in overlay metrology. An overlay metrology system may include a controll... |
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Invention
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System and method for determining target feature focus in image-based overlay metrology. A metrol... |
2022
|
Invention
|
Detecting defects on specimens.
Methods and systems for detecting defects on a specimen are prov... |
|
Invention
|
High-resolution evaluation of optical metrology targets for process control.
A metrology system ... |
|
Invention
|
System and method for acquiring alignment measurements of structures of a bonded sample.
Systems... |
|
Invention
|
Confocal chromatic metrology for euv source condition monitoring.
A light source includes a rota... |
|
Invention
|
Method and system for cleaning optical elements in euv optical systems.
A system and method for ... |
|
Invention
|
Auto-focus sensor implementation for multi-column microscopes.
An array of localized auto-focus ... |
|
Invention
|
Noise diagnostics for an electron beam inspection system with swathing.
Parameters from an inspe... |
|
Invention
|
Methods and systems for x-ray scatterometry measurements employing a machine learning based elect... |
|
Invention
|
Scatterometry overlay metrology with orthogonal fine-pitch segmentation.
An overlay metrology ta... |
|
Invention
|
3d profilometry with a linnik interferometer.
Systems and methods for generating volumetric data... |
|
G/S
|
Server hardware and computer hardware that utilizes various model-based and model-less machine le... |
|
G/S
|
Computer servers [computer hardware]; Computer hardware for network access servers; Computer hard... |
|
Invention
|
Miniature electron optical column with a large field of view.
A miniature electron optical colum... |
|
Invention
|
Image modeling-assisted contour extraction.
A wafer metrology tool, such as a scanning electron ... |
|
Invention
|
Method and system of image-forming multi-electron beams.
A multi-electron beam system that forms... |
|
Invention
|
Unsupervised or self-supervised deep learning for semiconductor-based applications.
Methods and ... |
2021
|
G/S
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Apparatus and instruments for recording, transmitting, reproducing or processing sound, images or... |
|
G/S
|
Downloadable computer software platform for remote customer assistance, training, and communicati... |
|
G/S
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Downloadable computer software platform for software startup, documentation, and customer engagem... |
|
G/S
|
Scientific, research, navigation, surveying, photographic, cinematographic, audiovisual, optical,... |
2020
|
G/S
|
Instruments for testing, inspecting, and characterizing
physical properties of reticles and phot... |
|
G/S
|
Data analytics computer hardware and prerecorded and
downloadable computer software for correcti... |
|
G/S
|
Downloadable and prerecorded computer software for use in
process control and yield management f... |
|
G/S
|
Scientific, electrical and measuring apparatus and
instruments for determining and analyzing phy... |
|
G/S
|
Computer hardware and downloadable and prerecorded computer
software for use in process control ... |
|
G/S
|
Computer hardware and downloadable and prerecorded computer
software all for testing, inspecting... |
|
G/S
|
Data analytics computer hardware and prerecorded and downloadable computer software for correctin... |
|
G/S
|
Downloadable computer simulation software used for
monitoring, controlling, accelerating and imp... |
|
G/S
|
Computer hardware, namely, computer server blade units to be
used in integrated circuits manufac... |
|
G/S
|
Scientific, electrical and measuring apparatus and instruments for determining and analyzing phys... |
2019
|
G/S
|
Computer hardware and downloadable and prerecorded computer software for use in process control a... |
|
G/S
|
Computer hardware and downloadable and prerecorded computer software all for testing, inspecting,... |
|
G/S
|
Downloadable computer simulation software used for monitoring, controlling, accelerating and impr... |
|
G/S
|
Computer hardware, namely, computer server blade units to be used in integrated circuits manufact... |
|
Invention
|
Systems and methods for metrology with layer-specific illumination spectra. A metrology system ma... |
|
G/S
|
Inspection system comprised of a laser, recorded computer
software, and computer hardware for te... |
|
G/S
|
Computer hardware; computer hardware and software for testing, inspecting, characterizing, and pr... |
|
G/S
|
Inspection system comprised of a laser, recorded computer software, and computer hardware for tes... |
2018
|
G/S
|
Computer hardware; computer hardware and software for
testing, inspecting, characterizing, and p... |
|
G/S
|
Computer hardware and software used for testing, inspecting, characterizing, and predicting physi... |
|
G/S
|
Instruments for testing, inspecting, and characterizing physical properties of semiconductors and... |
|
G/S
|
instruments for testing, inspecting, and characterizing physical properties of reticles; computer... |
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G/S
|
Instruments for testing, inspecting, and characterizing physical properties of semiconductor wafe... |
|
G/S
|
Consulting services in the field of product inspection and testing for the semiconductor, integra... |
|
G/S
|
computer hardware and software used for testing, inspecting, characterizing, and predicting physi... |
|
G/S
|
instruments for testing, inspecting, and characterizing physical properties of semiconductor wafe... |
|
G/S
|
metrology system comprised of computer software and computer hardware for testing and characteriz... |
2017
|
G/S
|
Computer hardware; semiconductor and wafer defect inspection systems comprised of computer softwa... |
2016
|
G/S
|
photomask blank inspection tool in the nature of testing equipment comprised of computer hardware... |
2015
|
G/S
|
Computer hardware; semiconductor and wafer defect inspection systems; computer software for use i... |
|
G/S
|
Scientific instrumentation for mechanical property testing, namely, nanoindentation testing of th... |
|
G/S
|
Computer hardware for testing and inspecting physical and electrical properties of semiconductors... |
2014
|
G/S
|
Nanomechanical laboratory testing instruments, namely, nanoindentation testing instruments having... |
2013
|
G/S
|
Scientific instrumentation for measuring mechanical properties |