|
2023
|
G/S
|
Ceramic parts for machines; parts for machines for the deposition of materials; Ceramic tools for... |
|
|
G/S
|
Semiconductor manufacturing machines; semiconductor
substrates manufacturing machines; semicondu... |
|
|
Invention
|
Systems and methods for pulse width modulated dose control.
A substrate processing system for tr... |
|
2022
|
Invention
|
Removing metal contamination from surfaces of a processing chamber.
A method for cleaning surfac... |
|
|
G/S
|
Semiconductor manufacturing machines; Semiconductor substrates manufacturing machines; Semiconduc... |
|
|
G/S
|
Components for pulsed laser deposition machines for use in the manufacture of semiconductors, nam... |
|
|
Invention
|
Method for plasma etching a layer based on a iii-n material. An object of the invention concerns ... |
|
|
Invention
|
Apparatuses and techniques for cleaning a multi-station semiconductor processing chamber. Systems... |
|
|
Invention
|
Edge rings for improved edge uniformity in semiconductor processing operations. Improved edge rin... |
|
|
Invention
|
Showerhead faceplate configurations. A showerhead for processing a substrate comprises a backplat... |
|
|
Invention
|
System for monitoring performance of electrostatic chucks in substrate processing systems. A syst... |
|
|
Invention
|
Nesting atmospheric robot arms for high throughput. Nesting wafer handling robot arms are provide... |
|
|
Invention
|
Modification of metal-containing surfaces in high aspect ratio plasma etching. Methods and appara... |
|
|
Invention
|
Silicon etch with organochloride. 4xyzz (where x>0 and z > 0), and combinations thereof, a carbon... |
|
|
Invention
|
Compact in-situ gas separator for substrate processing systems. A gas separator includes a first ... |
|
|
Invention
|
Substrate processing tool with rapid and selective control of partial pressure of water vapor and... |
|
|
Invention
|
Method and apparatus for automated regulation of a frequency-modulated multilevel outphasing powe... |
|
|
Invention
|
Pin lift hard stop. A hard stop for a substrate processing system includes: a first portion inclu... |
|
|
Invention
|
Degas system using inert purge gas at controlled pressure for a liquid delivery system of a subst... |
|
|
Invention
|
Thermal imaging for analysis of device fabrication tools. Multi-pixel sensors such as camera sens... |
|
|
Invention
|
Atomic layer deposition seam reduction. Methods and apparatuses for depositing material into feat... |
|
|
Invention
|
Showerhead with hole sizes for radical species delivery. A showerhead comprises a first set of ho... |
|
|
Invention
|
Modulating thermal conductivity to control cooling of showerhead. A cooling plate for a showerhea... |
|
|
Invention
|
Valve for semiconductor equipment. A valve comprising a valve body including an inlet, an outlet ... |
|
|
Invention
|
System and method for carbon plug formation. One example provides a fabrication tool comprising a... |
|
|
Invention
|
Microchannel assembly cooled power circuits for power boxes of substrate processing systems. A co... |
|
|
Invention
|
Phased array antennas and methods for controlling uniformity in processing a substrate. A system ... |
|
|
Invention
|
Method and apparatus for gas and deposition precursor delivery heater. A gas delivery apparatus h... |
|
|
Invention
|
Coated part for capacitively coupled chamber. An apparatus for processing a substrate is provided... |
|
|
Invention
|
Showerheads with high solidity plenums.
Multiple single plenum and dual plenum showerhead design... |
|
|
Invention
|
Frontside and backside pressure monitoring for substrate movement prevention.
A pressure control... |
|
|
G/S
|
Apparatus (machines) for the production of semiconductors
and micro-electronic semi-conductor pr... |
|
|
G/S
|
Apparatus for the production of semiconductors and micro-electronic semi-conductor products; appa... |
|
|
G/S
|
Computer hardware and recorded software systems for the installation, operation, maintenance, and... |
|
|
G/S
|
Components for semiconductor manufacturing machines, namely,
electrodes, calibrators, actuators,... |
|
2021
|
G/S
|
Components of equipment for the manufacture, processing, and
fabrication of semiconductors, name... |
|
|
G/S
|
Components for semiconductor manufacturing machines, namely, electrodes, pedestals in the nature ... |
|
|
G/S
|
Replacement components for semiconductor manufacturing
machines; replacement components for semi... |
|
|
G/S
|
Measuring apparatus for measuring semiconductor wafer mass
and mass changes occurring in the sem... |
|
|
G/S
|
Components of equipment for the manufacture, processing, and fabrication of semiconductors, namel... |
|
|
G/S
|
Measurement apparatus and instruments for use in
semiconductor manufacturing, semiconductor subs... |
|
|
Invention
|
Controlled degradation of a stimuli-responsive polymer film.
Removing a stimuli responsive polym... |
|
|
Invention
|
Automated feedforward and feedback sequence for patterning cd control.
A method for performing a... |
|
|
Invention
|
Bioassay substrate having fiducial domains and methods of manufacture thereof.
Embodiments of th... |
|
|
Invention
|
Enhanced closed loop gas based heat exchange.
A temperature control system comprises an enclosur... |
|
|
Invention
|
Divertless gas-dosing.
Various embodiments include systems and apparatuses for divertless dosing... |
|
|
Invention
|
Showerhead designs for controlling deposition on wafer bevel/edge.
A substrate processing system... |
|
|
Invention
|
Loss prevention during atomic layer deposition.
Methods of depositing silicon oxide on carbon-ba... |
|
|
Invention
|
Lipseal edge exclusion engineering to maintain material integrity at wafer edge.
Sequential elec... |
|
|
Invention
|
Grouping features of showerheads in substrate processing systems.
A method includes selecting fi... |
|
|
Invention
|
Methods and systems for controlling radiofrequency pulse-initiation power spike for plasma sheath... |
|
|
Invention
|
Slide and pivot assemblies for process module bias assemblies of substrate processing systems.
A... |
|
|
Invention
|
Leveling compound control.
An apparatus and method of adjusting a plating solution are described... |
|
|
Invention
|
Structure and method to achieve positive tone dry develop by a hermetic overlayer.
The present d... |
|
|
Invention
|
Cooled edge ring with integrated seals.
A substrate support for a substrate processing chamber i... |
|
|
Invention
|
Plasma processing chamber with multilayer protective surface.
Plasma processing chamber is provi... |
|
|
Invention
|
Showerhead purge collar.
Methods, systems, and computer programs are directed to the design of a... |
|
|
Invention
|
Showerhead thermal management using gas cooling.
A temperature-controlled showerhead assembly in... |
|
|
Invention
|
Stabilization of carbon deposition precursors like c2h2.
The present disclosure relates to compo... |
|
|
Invention
|
High aspect ratio dielectric etch with chlorine.
Various embodiments herein relate to methods an... |
|
|
Invention
|
Protection of channel layer in three-terminal vertical memory structure.
Channel material is con... |
|
|
Invention
|
Control of wafer bow during integrated circuit processing.
A method of controlling wafer bow in ... |
|
|
G/S
|
Components for semiconductor manufacturing machines, namely, electrodes, chucks, pedestals, o-rin... |
|
|
G/S
|
Replacement components for semiconductor manufacturing machines; Replacement components for semic... |
|
2020
|
G/S
|
Measurement apparatus and instruments for use in semiconductor manufacturing, semiconductor subst... |
|
|
Invention
|
Mid-ring erosion compensation in substrate processing systems.
A substrate processing system inc... |
|
2019
|
Invention
|
Connector backshell |
