|
2022
|
Invention
|
Method for joining a first part to a second part made of silicon. The invention relates to a meth... |
|
|
Invention
|
Method for controlling a microelectromechanical system. The invention relates to a method for con... |
|
|
Invention
|
Microelectromechanical system for moving a mechanical part in two opposite directions. The invent... |
|
|
Invention
|
Electromechanical microsystem for moving a mechanical part in two opposite directions. The invent... |
|
2020
|
Invention
|
Mems sensor for sensing deformation by breaking contact between two electrodes. The present inven... |
|
2017
|
Invention
|
Strain sensor with measurement discrimination according to the deformation direction. A deformati... |
|
|
Invention
|
Strain sensor with measurement discrimination according to the deformation direction. A passive s... |
|
2015
|
Invention
|
Method for counting events occurring during a duration t and associated mechanical event counters... |
|
|
Invention
|
Method for counting events occurring during a period t and associated mechanical event counters. ... |
|
2014
|
Invention
|
Amplified passive and reversible micro-sensor of deformations. The disclosed micro-sensor include... |
|
|
Invention
|
Amplified passive and reversible micro-sensor of deformations. The invention relates to a micro-s... |
|
2013
|
Invention
|
Actuation device with a drive element actuated by crawling. An actuation device (1) which include... |
|
|
Invention
|
Passive indexing of a movable element having teeth. i+4) of the movable element (1), and which is... |
|
|
Invention
|
Passive indexing of a movable element having teeth. The invention relates to a device including: ... |
|
2012
|
Invention
|
Passive, reversible deformation sensor. 3) for distinguishing between at least two different thre... |
|
|
Invention
|
Passive, reversible deformation sensor. The present invention relates to the field of microsensor... |
|
2006
|
Invention
|
Method and device for moving an element to be driven using an actuating element formed by etching... |
|
2005
|
Invention
|
Drive device, particularly for a clockwork mechanism. A drive device formed by etching a wafer. T... |
|
|
Invention
|
Drive device, particularly for a clockwork mechanism. The invention relates to a drive device (10... |
