|
2023
|
Invention
|
Vibrating body and substrate processing apparatus. A vibrating body according to an embodiment is... |
|
|
Invention
|
Cleaning apparatus.
According to one embodiment of the present disclosure, a cleaning apparatus ... |
|
|
Invention
|
Substrate processing device. Provided is a substrate processing device that makes it possible to ... |
|
|
Invention
|
Substrate treatment apparatus and method for treating substrate.
According to one embodiment a s... |
|
|
Invention
|
Cleaning apparatus for wafer storage container.
According to an embodiment of the present disclo... |
|
|
Invention
|
Substrate processing apparatus.
According to one embodiment, a substrate processing apparatus in... |
|
|
Invention
|
Film formation apparatus.
A film formation apparatus includes: a chamber which an interior there... |
|
|
Invention
|
Electromagnetic wave attenuator, electronic device, film formation apparatus, and film formation ... |
|
|
Invention
|
Processing liquid supply device, substrate processing apparatus, and method for inspecting proces... |
|
|
Invention
|
Substrate processing apparatus and substrate processing method.
According to one embodiment, a s... |
|
|
Invention
|
Processing liquid supply device, substrate processing apparatus, and processing liquid supply met... |
|
|
Invention
|
Substrate processing apparatus and substrate processing method.
The substrate processing apparat... |
|
2022
|
Invention
|
Substrate transfer device and substrate transfer method. Provided are a substrate transfer device... |
|
|
Invention
|
Substrate transport carriage. Provided is a substrate transport carriage capable of transporting ... |
|
|
Invention
|
Substrate processing apparatus and substrate processing method. The present invention provides a ... |
|
|
Invention
|
Maintenance method and heat treatment apparatus.
Provided is a maintenance method of a heat trea... |
|
|
Invention
|
Supply tank, supply device and supply system.
According to one embodiment, provided is a supply ... |
|
|
Invention
|
Supply device and supply system.
A supply device includes a collect tank which collects a proces... |
|
|
Invention
|
Film formation apparatus.
According to one embodiment, a film formation apparatus that suppresse... |
|
|
Invention
|
Substrate treatment device.
A substrate treatment device includes a placement platform rotating ... |
|
|
Invention
|
Substrate drying apparatus and substrate processing apparatus.
A substrate drying apparatus and ... |
|
|
Invention
|
Substrate treatment device.
A substrate treatment device according to an embodiment includes a p... |
|
|
Invention
|
Heat treatment device.
According to an embodiment of the present disclosure, a heat treatment de... |
|
2021
|
Invention
|
Film formation apparatus and film formation method.
According to an embodiment, a film formation... |
|
|
Invention
|
Film deposition device and film deposition method. Provided are a film deposition device and a fi... |
|
|
Invention
|
Substrate carrying apparatus.
A substrate carrying apparatus that can reduce attachment of dust ... |
|
|
Invention
|
Film formation apparatus. A film deposition apparatus reduces hillock formation while yielding un... |
|
|
Invention
|
Substrate processing apparatus.
A substrate processing apparatus according to an embodiment of t... |
|
|
Invention
|
Substrate processing apparatus and substrate processing method.
A substrate processing apparatus... |
|
|
Invention
|
Substrate treatment method and substrate treatment apparatus.
According to one embodiment, a sub... |
|
|
Invention
|
Cooling device, substrate treatment device, cooling method, and substrate treatment method. Accor... |
|
|
Invention
|
Substrate treatment device.
According to one embodiment, a substrate treatment device includes a... |
|
|
Invention
|
Tablet printing apparatus and tablet printing method.
A tablet printing apparatus 1 according to... |
|
|
Invention
|
Substrate treatment device.
According to one embodiment, q substrate treatment device includes a... |
|
|
Invention
|
Substrate treatment device. According to one embodiment, a substrate treatment device includes a ... |
|
|
Invention
|
Film formation apparatus and moisture removal method thereof.
According to one embodiment, a fil... |
|
2020
|
Invention
|
Substrate processing apparatus and substrate processing method. According to one embodiment, a su... |
|
|
Invention
|
Tablet printing apparatus, tablet printing method, tablet manufacturing apparatus, and tablet man... |
|
|
Invention
|
Solution application apparatus and a tablet printing apparatus.
An excellent quality application... |
|
|
Invention
|
Plasma processing apparatus. According to one embodiment, a plasma processing apparatus includes ... |
|
|
Invention
|
Film forming apparatus, method for manufacturing film-formed product, and method for manufacturin... |
|
|
Invention
|
Substrate treatment device and substrate treatment method. A substrate treatment device according... |
|
|
Invention
|
Organic film forming apparatus. According to one embodiment, an organic film forming apparatus in... |
|
|
Invention
|
Film-forming apparatus. Provided is a film-forming apparatus that is capable of forming a flat fi... |
|
|
Invention
|
Film formation apparatus and film formation method. According to one embodiment, film formation a... |
|
|
Invention
|
Tablet printing apparatus and heat dissipation method thereof. According to one embodiment, a tab... |
|
2019
|
Invention
|
Electromagnetic wave attenuator and electronic device. According to one embodiment, an electromag... |
