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2022
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Invention
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Substrate processing apparatus and substrate processing method. The present invention provides a ... |
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Invention
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Maintenance method and heat treatment apparatus.
Provided is a maintenance method of a heat trea... |
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Invention
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Supply tank, supply device and supply system.
According to one embodiment, provided is a supply ... |
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Invention
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Supply device and supply system.
A supply device includes a collect tank which collects a proces... |
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Invention
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Film formation apparatus.
According to one embodiment, a film formation apparatus that suppresse... |
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Invention
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Substrate treatment device.
A substrate treatment device includes a placement platform rotating ... |
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Invention
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Substrate drying apparatus and substrate processing apparatus.
A substrate drying apparatus and ... |
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Invention
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Substrate treatment device.
A substrate treatment device according to an embodiment includes a p... |
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Invention
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Heat treatment device.
According to an embodiment of the present disclosure, a heat treatment de... |
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2021
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Invention
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Film deposition device and film deposition method. Provided are a film deposition device and a fi... |
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Invention
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Substrate carrying apparatus.
A substrate carrying apparatus that can reduce attachment of dust ... |
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Invention
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Film formation apparatus.
A film deposition apparatus reduces hillock formation while yielding u... |
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Invention
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Substrate processing apparatus.
A substrate processing apparatus according to an embodiment of t... |
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Invention
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Substrate processing apparatus and substrate processing method.
A substrate processing apparatus... |
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Invention
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Substrate treatment method and substrate treatment apparatus.
According to one embodiment, a sub... |
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Invention
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Cooling device, substrate treatment device, cooling method, and substrate treatment method.
Acco... |
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Invention
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Substrate treatment device.
According to one embodiment, a substrate treatment device includes a... |
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Invention
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Tablet printing apparatus and tablet printing method.
A tablet printing apparatus 1 according to... |
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Invention
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Electromagnetic wave attenuator, electronic device, film formation apparatus, and film formation ... |
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Invention
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Substrate treatment device.
According to one embodiment, q substrate treatment device includes a... |
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Invention
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Film formation apparatus and moisture removal method thereof.
According to one embodiment, a fil... |
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2020
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Invention
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Substrate processing apparatus and substrate processing method. According to one embodiment, a su... |
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Invention
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Tablet printing apparatus, tablet printing method, tablet manufacturing apparatus, and tablet man... |
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Invention
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Solution application apparatus and a tablet printing apparatus.
An excellent quality application... |
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Invention
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Plasma processing apparatus. According to one embodiment, a plasma processing apparatus includes ... |
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Invention
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Film forming apparatus, method for manufacturing film-formed product, and method for manufacturin... |
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Invention
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Substrate treatment device and substrate treatment method. A substrate treatment device according... |
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Invention
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Organic film forming apparatus.
According to one embodiment, an organic film forming apparatus i... |
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Invention
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Film-forming apparatus. Provided is a film-forming apparatus that is capable of forming a flat fi... |
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Invention
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Film formation apparatus and film formation method. According to one embodiment, film formation a... |
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Invention
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Tablet printing apparatus and tablet printing method.
According to one embodiment, a tablet prin... |
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Invention
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Tablet printing apparatus and heat dissipation method thereof. According to one embodiment, a tab... |
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2019
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Invention
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Substrate processing apparatus.
A substrate processing apparatus includes: a removing part confi... |
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Invention
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Reflective mask cleaning apparatus and reflective mask cleaning method. A reflective mask cleanin... |
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Invention
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Heater pipe gas leak detecting device and heater pipe gas leak detecting method. A gas leak detec... |
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Invention
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Film formation apparatus. According to one embodiment, a film formation apparatus includes a cham... |
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Invention
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Tablet printing device and tablet printing method. The tablet printing device 1A according to the... |
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Invention
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Electromagnetic wave attenuator and electronic device. According to one embodiment, an electromag... |
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Invention
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Tablet printing device and tablet printing method. A tablet printing device 1 according to an emb... |
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Invention
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Tablet printing apparatus and tablet printing method. According to one embodiment, a tablet print... |
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2018
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Invention
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Organic film formation device. This organic film formation device according to one embodiment is ... |
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Invention
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Film formation apparatus. A film formation apparatus includes a film formation unit which include... |
