A processing system that irradiates an object with processing light through an irradiation optical system to process the object is provided with: an irradiation device having at least an ultimate optical element in the irradiation optical system; a movement device for moving the irradiation device; a first measurement device for measuring a position of the object, the first measurement device being disposed on the irradiation device; a second measurement device for measuring the position of the object through the ultimate optical element; and a third measurement device for irradiating the irradiation device with measurement light from a position distanced from the irradiation device, and detecting the measurement light to measure the position of the irradiation device.
A processing apparatus (1) has: a light irradiation apparatus (11) configured to irradiate a coat (SF) formed on a base member (S) with a processing light (EL); and a controlling apparatus (18) configured to control the light irradiation apparatus. The processing apparatus is configured to change a thickness of at least a part of the coat by irradiating the coat with the processing light so that the base member is not exposed from the coat.
A processing apparatus (1) has: a light irradiation apparatus (11) that irradiates a surface of an object (S, SF) with a processing light (EL); and a measurement apparatus (71i, 71j) that measures a position of an irradiation area (EA), which is formed on the surface of the object by the light irradiation apparatus, relative to the object.
A processing apparatus (1) has: a light irradiation apparatus (11) that irradiates a surface of an object (S, SF) with a processing light (EL); and a measurement apparatus (71i, 71j) that measures a position of an irradiation area (EA), which is formed on the surface of the object by the light irradiation apparatus, relative to the object.
A processing apparatus (1) has: a light irradiation apparatus (11) that irradiates a surface of an object (S, SF) with a processing light (EL); and a partition member (132) that surrounds a space including an optical path between the surface of the object and an optical member (1123) that is disposed at the most object side in an optical system (112) of the light irradiation apparatus that allows the processing light to pass therethrough.
B23K 26/142 - Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor for the removal of by-products
6.
PROCESSING APPARATUS, AND MANUFACTURING METHOD OF MOVABLE BODY
This processing device (1) comprises a light irradiation device (11) that irradiates a surface of an object (S, SF) with a plurality of processing light beams (EL), and a first changing device (1121, 12) that changes a relative positional relationship among respective light focus positions (FP) of the plurality of processing light beams in a direction intersecting with the surface of the object, wherein, by irradiating the surface of the object with the processing light beams, the thickness in a portion of the object is changed.
This processing device (1) comprises a light irradiation device (11) that irradiates a surface of an object (S, SF) with a plurality of processing light beams (EL), and a first changing device (41e) that changes the distribution of intensity of the plurality of processing light beams from the light irradiation device at the surface of the object, wherein, by irradiating the surface of the object with the plurality of processing light beams, the thickness in a portion of the object is changed.
A processing apparatus (1) has: a light irradiation apparatus (11) that irradiates a surface of an object (S, SF) with a processing light (EL); a first position change apparatus (12, 15, 1122) that changes a position of at least one of the object and an irradiation area (EA) that is formed on the surface of the object by the light irradiation apparatus; and a control apparatus (18) that controls the first position change apparatus to form a structure for reducing a frictional resistance of the surface of the object to a fluid by irradiating the surface of the object with the processing light while changing the position of at least one of the irradiation area and the object to change a thickness of a part of the object.
An optical assembly for a system for inspecting or measuring of an object is provided that is configured to move as a unit with a system, as the system is pointed at a target, and eliminates the need for a large scanning (pointing) mirror that is moveable relative to other parts of the system. The optical assembly comprises catadioptric optics configured to fold the optical path of the pointing beam and measurement beam that are being directed through the outlet of the system, to compress the size of the optical assembly.
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