Systems and methods are described for transferring gas from an ablation cell to an inductively coupled plasma, analysis system via. a gas exchange membrane transfer line to exchange gas introduced to the ablation cell with a sweep gas. A system embodiment includes, but is not limited to, a laser ablation cell configured to generate a sample transfer stream through laser ablation of a sample and introduction of a carrier gas to flow the ablated sample from the laser ablation cell; an inductively-coupled plasma analysis device configured to measure one or more analytes in the sample transfer stream; and a gas exchange membrane transfer line fluidically coupled between the laser ablation cell and the inductively-coupled plasma analysis device, the gas exchange membrane transfer line configured, to replace gas in the sample transfer stream with sweep gas via gas exchange across a membrane of the gas exchange membrane transfer line.
H01J 49/04 - Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
Systems and methods are described for controlling flow of a purge gas introduced to an ablation cell between samples to remove atmospheric gas. A system embodiment includes, but is not limited, to, a. spray chamber including a spray chamber body, a. transfer gas inlet configured to receive gas from a laser ablation sample cell, a first outlet line configured to transfer gas from the spray chamber to an inductively-coupled plasma torch, and a second outlet line coupled, to the spray chamber body, the second gas outlet having a larger internal cross- sectional area, than an internal cross-sectional area of the first outlet line; and a valve fluidically coupled to the second outlet line, the valve configured to transition between at least an open configuration configured to permit transfer gas through the second outlet line and a closed configuration configured to prevent transfer of gas through the second outlet line.
H01J 49/04 - Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
Systems and methods for safe collection and transportation of fluid samples for analysis are described. A system embodiment includes, but is not limited to, a housing defining an interior region to introduce a fluid sample to a sample vessel; a support platform to hold the sample vessel and laterally position the sample vessel to a plurality of locations within the interior region; an uncapper configured to automatically remove a cap of the sample vessel from a base of the sample vessel prior to introduction of the fluid sample to the base and to automatically replace the cap to the vessel base subsequent to introduction of the fluid sample to the base; and. a. fluid sample probe configured to fluidically couple with a. fluid sample source and to dispense fluid from the fluid sample source into the vessel base.
Valve assemblies are described that provide magnetic coupling between a valve actuator and a valve body housing the valve rotor and stator. A valve assembly embodiment, includes, but is not limited to, a valve body, the valve body including at least one magnet, and a rotor and a stator configured to define a plurality of fluid flow passageways; a valve actuator configured to drive the rotor via a drive shaft: and an actuator mount coupled to the valve actuator and configured, to magnetically couple with the at least one magnet of the valve body to magnetically couple the valve body and the valve actuator.
Systems and methods are described for determining whether liquid remains on a wafer surface following a scanning operation. A system embodiment includes, but is not limited to, a first system configured for positioning adjacent a transfer line coupled with a scanning nozzle to dispense fluid onto a wafer surface and. to recover the fluid from the wafer surface, the first system configured to detect a gas/liquid transition of the fluid and determine a volume of liquid sample dispensed; a second system configured for positioning adjacent a second line downstream from the scanning nozzle, the second system configured to detect a gas/liquid transition of fluid flowing through the second line and determine a volume of liquid sample recovered from the wafer surface; and a controller configured to generate an alert if the volume of liquid sample recovered is not within a threshold amount compared to the volume of liquid sample dispensed.
H01J 49/04 - Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
Systems and methods for automated cap removal with an autosampler system are described. In an aspect, an autosampler system includes, but is not limited to, a sample rack; a sample vessel stabilizer configured to transition the sample rack between a load/ unload state and a lock state: an uncapper supported by a first z-axis support: and a sample probe supported by a second z-axis support, wherein the uncapper is configured to remove a cap from a sample vessel held by the sample rack when the sample rack is in the lock state, and wherein the uncapper is configured to change the position of the removed cap to permit access to an interior of the sample vessel by the sample probe without removing the sample vessel from the sample rack.
An inductively coupled plasma (TCP) torch is described that includes an injector protector to shield an injector end. A system embodiment includes, but is not limited to, a tabular sample injector configured to receive an aerosolized sample in an interior defined by walls of the tubular sample injector; an injector protector surrounding at least a portion of the tabular sample injector; an inner tube surrounding at least a portion of the injector protector to form a first annular space between the inner tube and the injector protector, the inner tube defining at least one inlet port for introduction of an auxiliary gas into the first annular space; and an outer tube surrounding at least a portion of the inner tube to form a second annular space, the outer tube defining at least one inlet port for introduction of a cooling gas into the second annular space.
An inductively coupled plasma (ICP) torch is described that includes a tapered outer end. A system embodiment includes, but is not limited to, a tubular sample injector configured to receive an aerosolized sample in an interior defined by walls of the tubular sample injector; an inner tube surrounding at least a portion of the tubular sample injector to form a first annular space between the inner tube and the walls of the tubular sample injector, the inner tube defining at least one inlet port for introduction of an auxiliary gas into the first annular space; and an outer tube surrounding at least a. portion of the inner tube to form a. second annular space, the outer tube defining at least one inlet port for introduction of a cooling gas into the second, annular space, the outer tube having a flared region at an outlet of the outer tube.
Systems and methods are described for introducing one or more fluid streams from a nozzle having one or more shaped channels to one or more material surfaces and removing the fluid streams for scanning for chemical species of interest. A nozzle embodiment includes, but is not limited to, a nozzle body configured to couple to a positionable nozzle arm support for positioning the nozzle with respect to a material surface, the nozzle body defining at least one fluid port to receive a fluid; and a nozzle hood coupled to the nozzle body, the nozzle hood defining an elongated shaped channel having a first fluid channel and a second fluid channel extending from the at least one fluid port, the first fluid channel and the second fluid channel configured to direct fluid along the material surface within at least a portion of each of the fluid channels.
Systems and methods are described for integrated sample container cover removal and sample probe positioning. In an example implementation, an autosampler system includes, but is not limited to, a z-axis support rotatable about a z-axis of an autosampler deck; a sample probe support structure coupled to the z-axis support, the sample probe support structure configured to hold a sample probe to withdraw a fluid-containing sample held within a sample container supported by the autosampler deck; and a sample cap remover coupled to the z-axis support in an orientation that is rotationally offset from the z-axis support with respect to the sample probe support structure, the sample cap remover configured to lift a cap from the sample container to provide access to an interior of the sample container by the sample probe supported by the sample probe support structure.
Systems and methods are described for providing a representative, homogeneous, and planarized target for solid sample laser ablation, A method embodiment includes, but is not limited to, removing portions of a solid sample with an abrasive sampling system, the abrasive sampling system including at least one of a plurality of abrasive particles configured to hold tire portions of the solid sample on an abrasive substrate between the abrasive particles or a texturized surface configured to hold the portions of the solid sample on the texturized surface; transferring the abrasive sampling system holding the portions of the solid sample to a laser ablation system; and ablating the portions of the solid sample held by the abrasive sampling system with the laser ablation system.
G01N 21/71 - Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
G01N 21/31 - Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
G01N 27/68 - Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electric discharges, e.g. emission of cathode using electric discharge to ionise a gas
H01J 49/26 - Mass spectrometers or separator tubes
12.
SYSTEMS AND METHODS FOR SECURING FABRIC, PAPER, AND FILM SAMPLES FOR ANALYSIS BY LASER ABLATION
Systems and methods are described for securing fabric, paper, and film samples for analysis by laser ablation, A method embodiment includes, but is not limited to, securing a thin, solid sample with a sample holder system, the sample holder system configured to hold the thin, solid sample in a taut configuration between a piston and a sample holder base; transferring the sample holder system to a laser ablation system; and ablating at least a portion of the thin, solid sample in the taut configuration with the laser ablation system to provide an ablated sample.
G01N 21/71 - Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
G01N 21/31 - Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
G01N 27/68 - Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electric discharges, e.g. emission of cathode using electric discharge to ionise a gas
H01J 49/26 - Mass spectrometers or separator tubes
13.
SYSTEMS FOR INTEGRATED DECOMPOSITION AND SCANNING OF A SEMICONDUCTING WAFER
Systems and methods are described for integrated decomposition and scanning of a material, such as a semiconducting wafer, a scanning nozzle includes, but is not limited to, a nozzle body defining one or more nozzle ports to receive fluid for introduction to the surface of the material and to recover fluid from the surface of the material, and a nozzle hood extending from the nozzle body, the nozzle hood defining an inner channel longitudinally disposed along the nozzle body, the nozzle hood further defining one or more outer channels longitudinally disposed along the nozzle body, the inner channel fluidically coupled with the one or more outer channels via one or more gaps defined by the nozzle hood.
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
H01L 21/66 - Testing or measuring during manufacture or treatment
H01J 49/00 - Particle spectrometers or separator tubes
G01N 33/00 - Investigating or analysing materials by specific methods not covered by groups
14.
AUTOSAMPLER RAIL SYSTEM WITH MAGNETIC COUPLING FOR LINEAR MOTION
Systems and methods are described for preventing the release of metal particles from an autosampler that could otherwise be detected within a sample during sample analysis. In an example implementation, an autosampler systems includes, but is not limited to, a sample probe support structure; a z-axis support; an outer shuttle coupled with an outer surface of the z-axis support; and an inner shuttle linearly moveable within an interior volume of the z-axis support, the inner shuttle magnetically coupled with the outer shuttle to translate linear motion of the inner shuttle to the outer shuttle.
System s and methods for controlled, inline introduction of chemical agents to an inline fluid sample are described. A method embodiment includes, but is not limited to, receiving a fluid sample with a valve; receiving a chemical agent with the valve; introducing the fluid sample and the chemical agent inline via a mixing port of the valve to produce a mixed sample; transferring the mixed sample to a second valve; directing the mixed sample to a sample holding loop fluidically coupled with the second valve; holding the mixed sample within the sample holding loop for a holding period of time to permit a reaction between the fluid sample and the chemical agent; and directing the mixed sample from the sample holding loop to an analytic Instrument following expiration of the holding period of tune.
G01N 27/62 - Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electric discharges, e.g. emission of cathode
G01N 27/623 - Ion mobility spectrometry combined with mass spectrometry
G01N 1/10 - Devices for withdrawing samples in the liquid or fluent state
G01N 1/14 - Suction devices, e.g. pumps; Ejector devices
G01N 1/00 - Sampling; Preparing specimens for investigation
16.
AUTOMATED SYSTEM FOR ONLINE DETECTION OF ORGANIC MOLECULAR IMPURITIES IN SEMICONDUCTOR GRADE CHEMICALS
An embodiment of an analysis system can include an initial multi-port valve, at least one intermediate multi -port valve, a further multi -port valve, and a time-of-flight mass spectrometer (TOF-MS). The initial multi-port valve can be configured to receive a sample. The at least one intermediate multi -port valve can be fluidly connected to the initial multi-port valve and configured to receive the sample from the initial multi-port valve. A given intermediate multi-port valve can have an ion -exchange column associated therewith. The given intermediate multi-port valve can be configured selectably to one of direct the sample through the ion-exchange column associated therewith (in a speciation mode) or bypass the ion-exchange column (in an infusion mode). The further multi-port valve can be fluidly connected with the at least one intermediate multi-port valve and configured to receive the sample from therefrom. The time-of-flight mass spectrometer (TOF-MS) can be fluidly connected to the further multi-port valve.
A sample introduction system is described that provides temperature-controlled handling and transfer of a sample from an autosampler, through a transfer line, to a heated environment proximate an analytical device. A system embodiment includes, but is not limited to, an autosampler including a temperature-controlled deck to support one or more sample containers; a heating unit including one or more heating elements to one or more fluids to be introduced to a sample removed from the one or more sample containers; a transfer line fluidically coupled with the autosampler and including a heating element configured to transfer heat to fluid flowing through the transfer line; and a sample handling system fluidically coupled with the transfer line and configured to fluidically couple with an analysis device, the sample handling system including a housing and a heating element configured to control a temperature of an environment defined by the housing.
G01N 23/2209 - Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups , or by measuring secondary emission from the material using wavelength dispersive spectroscopy [WDS]
G01N 23/2273 - Measuring photoelectron spectra, e.g. electron spectroscopy for chemical analysis [ESCA] or X-ray photoelectron spectroscopy [XPS]
A sample analysis system is available that can include a remote sampling system, at least one analyzer, and a controller. The remote sampling system can include a plurality of sample sources for providing a corresponding sample therefrom; and a plurality of sample collection devices selectively coupled to any of the plurality of sample sources for receiving at least one of the samples therefrom. The at least one analyzer can be coupled to the plurality of the sample collection devices for receiving at least one of the samples therefrom. The controller can be coupled with the remote sampling system and the at least one analyzer, the controller configured to control which of the sample sources is actively coupled to a given sample collection device at given time.
H01J 49/04 - Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
An analysis system includes a degassing cell, at least one first valve, and at least one second valve. The at least one first valve is fluidly coupled with a top of the degassing cell, the at least one first valve configured selectably connect the degassing cell to a displacement gas flow and to a vacuum source. The at least one second valve is fluidly connected with a lateral side of the degassing cell and separately fluidly connected with a bottom of the degassing cell. The at least one second valve is selectably coupled with any of a source of a sample-carrying fluid, a transfer line configured to deliver a sample to an analysis device, or a waste output.
Systems and methods are described for isolating a sample at a valve prior to introduction to an analysis system, such as sample analysis via ICP-MS. A system embodiment can include, but is not limited to, a valve system including a first valve in fluid communication with a sample reservoir and a second valve configured to permit and block access of a vacuum source to the first valve; a sensor system configured to detect presence or absence of a fluid at the first valve: and a controller configured to control operation of the second valve to block access of the vacuum source to the first valve upon detection of the fluid at the first valve to isolate the fluid within the sample reservoir.
H01J 49/04 - Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
H01J 49/06 - Electron- or ion-optical arrangements
H01J 49/16 - Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
21.
HUMIDIFICATION OF LASER ABLATED SAMPLE FOR ANALYSIS
Humidification systems and methods to introduce water vapor to a laser-ablated sample prior to introduction to an ICP torch are described. A system embodiment includes, but is not limited to, a water vapor generator configured to control production of a water vapor stream and to transfer the water vapor stream to at least one of a sample chamber of a laser ablation device or a mixing chamber in fluid communication with the laser ablation device, wherein the mixing chamber is configured to receive a laser-ablated sample from the laser ablation device and direct the laser-ablated sample to an inductively coupled plasma torch.
G01N 21/71 - Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
H01J 49/04 - Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
22.
SAMPLE TRANSFER LINE HEATING SYSTEM AND METHODS OF SAMPLE TRANSFER
Systems and methods are described for heating sample transfer lines between a source of a sample and a detection system to detect analytes of interest in the sample, where the sample is maintained in a heated state to maintain dissolved analytes of interest in solution.
G01N 21/31 - Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
G01N 21/71 - Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
G01N 35/00 - Automatic analysis not limited to methods or materials provided for in any single one of groups ; Handling materials therefor
G01N 21/74 - Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited using flameless atomising, e.g. graphite furnaces
23.
INTERCHANGEABLE, VISUALLY MARKED SAMPLE INTRODUCTION SYSTEM MOUNTING STRUCTURE AND COMPONENTS FOR INDUCTIVELY COUPLED PLASMA SYSTEMS
A system can include an exchangeable mounting structure having a visual marking or coloring and at least one physically associated sample introduction system component having an indicating mark or color matching the visual marking or coloring of the exchangeable mounting structure. The visual marking or colored corresponds to a sample analysis configuration for analyzing a particular sample type at an analytical instrument.
G01N 21/71 - Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
Systems and methods are described to determine whether a sample transmitted through a transfer line from a remote sampling system contains a suitable sample to analyze by an analysis system. A system embodiment includes, but is not limited to, a sample receiving line configured to receive a liquid segment a first detector configured to detect the liquid segment at a first location in the sample receiving line; a second detector configured to detect the liquid segment at a second location in the sample receiving line downstream from the first location; and a controller configured to register a continuous liquid segment in the sample receiving line when the first detector and the second detector match detection states prior to the controller registering a change of state of the first detector.
This disclosure is directed to a system and method relevant to sampling halosilanes or other water-reactive samples. In embodiments, a system for hydrolyzing samples includes a container with a receiving liquid (e.g., an HF solution) contained therein and an actuator coupled with the container. The actuator can be configured to rotate the container, thereby inducing a vortex in the receiving liquid. The system further includes a sample tube configured to direct a halosilane sample into the vortexed receiving liquid. The sample tube can be oriented to release the sample in a flow direction of the vortexed receiving liquid.
A system can include a valve assembly including a first valve and a second valve in fluid communication with the first valve. The valve assembly can be configured to deliver one or more of a sample, a chemical (e.g., an acid, a base, an organic chemical, etc.), and a standard via flow of a working fluid facilitated by one or more syringe pumps. Further, the one or more of the sample, the chemical, and the standard can maintain a physical separation from the one or more syringe pumps during delivery of the one or more of the sample, the chemical, and the standard.
G01N 1/38 - Diluting, dispersing or mixing samples
G01N 27/64 - Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electric discharges, e.g. emission of cathode using wave or particle radiation to ionise a gas, e.g. in an ionisation chamber
H01J 49/04 - Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
H01J 49/26 - Mass spectrometers or separator tubes
27.
SYSTEM FOR COLLECTING LIQUID SAMPLES FROM A DISTANCE
A system includes an analysis system at a first location and one or more remote sampling systems at a second location remote from the first location. A sampling system can be configured to receive a remote liquid sample. The system also includes a sample transfer line configured to transport gas from the second location to the first location. The sample transfer line is configured to selectively couple with a remote sampling system for supplying a continuous liquid sample segment to the sample transfer line. The system can further include a sample receiving line at the first location. The sample receiving line is configured to selectively couple with the sample transfer line and the analysis system to receive the continuous liquid sample segment and supply the sample to an analysis device.
G01N 1/10 - Devices for withdrawing samples in the liquid or fluent state
G01N 21/31 - Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
A demountable plasma torch assembly suitable for use in ICP spectrometry comprises a first tube having an inner diameter and a second tube disposed concentrically within the first tube, wherein the second tube has an outer diameter that is less than the inner diameter of the first tube. The first and second tubes are supported by a torch body. The torch body includes a first bore configured to receive an end of the first tube, a second bore configured to receive an end of the second tube, and a manifold disposed between the first bore and the second bore to receive a gas for injection between the first tube and the second tube. The manifold has an outer diameter at least substantially equal to the inner diameter of the first tube and an inner diameter at least substantially equal to the outer diameter of the second tube.
patents
