Tokai Carbon Co., Ltd.

Japan

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Date
2024 February 1
2024 (YTD) 1
2023 1
2022 3
2021 3
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IPC Class
C08K 3/04 - Carbon 3
C09C 1/48 - Carbon black 3
C09C 1/56 - Treatment of carbon black 3
C08L 21/00 - Compositions of unspecified rubbers 2
C09C 1/50 - Furnace black 2
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Status
Pending 5
Registered / In Force 17
Found results for  patents

1.

POLYCRYSTALLINE SiC COMPACT AND METHOD FOR MANUFACTURING THE SAME

      
Application Number 18269616
Status Pending
Filing Date 2022-09-26
First Publication Date 2024-02-15
Owner TOKAI CARBON CO., LTD. (Japan)
Inventor
  • Harada, Yohei
  • Oishi, Junya

Abstract

Provided are a polycrystalline SiC compact capable of achieving uniform plasma etching when used as electrodes and a method for manufacturing the same. A polycrystalline SiC compact has a major surface in which Wa (0 to 10 mm) is 0.00 to 0.05 m or less, Wa (10 to 20 mm) is 0.13 μm or less, and Wa (20 to 30 mm) is 0.20 μm or less.

IPC Classes  ?

  • H01J 37/32 - Gas-filled discharge tubes
  • B24B 7/22 - Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain

2.

CARBON BLACK AND METHOD FOR PRODUCING CARBON BLACK

      
Application Number 17907765
Status Pending
Filing Date 2021-08-13
First Publication Date 2023-10-12
Owner TOKAI CARBON CO., LTD. (Japan)
Inventor
  • Sakakibara, Akihiro
  • Kubota, Yuki
  • Osamura, Keisuke

Abstract

A carbon black wherein a nitrogen adsorption specific surface area (N2SA) is 25 to 60 m2/g, a DBP absorption number is 90 to 180 cm3/100 g, a ratio of the nitrogen adsorption specific surface area (N2SA) to an iodine adsorption number (IA) (N2SA/IA) is 1.10×103 to 1.50×103 m2/g, a hydrogen content by NMR is 150 to 250 /g, and ΔD is 260 to 290 cm−1.

IPC Classes  ?

3.

POLYCRYSTALLINE SIC ARTICLE AND METHOD FOR MANUFACTURING SAME

      
Application Number 17762559
Status Pending
Filing Date 2020-09-25
First Publication Date 2022-10-27
Owner TOKAI CARBON CO., LTD. (Japan)
Inventor
  • Ushijima, Yuji
  • Sugihara, Takaomi
  • Okuyama, Seiichi

Abstract

Provided is a polycrystalline SiC molded body wherein the resistivity is not more than 0.050 Ωcm and, when the diffraction peak strength in a diffraction angle 2θ range of 33-34° in an X-ray diffraction pattern is regarded as “A” and the diffraction peak strength of the SiC(111) plane in the X-ray diffraction pattern is regarded as “B”, then the ratio (A/B) is not more than 0.018.

IPC Classes  ?

  • H01L 29/04 - Semiconductor bodies characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes
  • H01L 29/16 - Semiconductor bodies characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System in uncombined form
  • H01L 21/02 - Manufacture or treatment of semiconductor devices or of parts thereof
  • C23C 16/32 - Carbides

4.

POLYCRYSTALLINE SIC ARTICLE

      
Application Number 17762776
Status Pending
Filing Date 2020-09-25
First Publication Date 2022-10-27
Owner TOKAI CARBON CO., LTD. (Japan)
Inventor
  • Ushijima, Yuji
  • Sugihara, Takaomi
  • Okuyama, Seiichi

Abstract

Provided is a polycrystalline SiC molded body wherein the resistivity is not more than 0.050 Ωcm and, when the peak strength in a wave number range of 760-780 cm−1 in a Raman spectrum is regarded as “A” and the peak strength in a wave number range of 790-800 cm−1 in the Raman spectrum is regarded as “B”, then the peak ratio (A/B) is not more than 0.100.

IPC Classes  ?

  • C30B 29/36 - Carbides
  • C30B 28/14 - Production of homogeneous polycrystalline material with defined structure directly from the gas state by chemical reaction of reactive gases
  • C30B 33/06 - Joining of crystals

5.

CARBON BLACK, METHOD FOR PRODUCING CARBON BLACK, AND RUBBER COMPOSITION

      
Application Number 17602551
Status Pending
Filing Date 2020-03-26
First Publication Date 2022-06-23
Owner TOKAI CARBON CO., LTD. (Japan)
Inventor
  • Kurisu, Kengo
  • Takahashi, Takuya
  • Akiyama, Yuki

Abstract

A carbon black is disclosed which can exert excellent abrasion resistance while suppressing heat generation when incorporated into a rubber composition. A carbon black in which the total number of active sites represented by a product of a full width at half maximum of a Raman scattering peak appearing in a range of 1340 to 1360 cm−1 when an excitation wavelength is 532 nm and a specific surface area when nitrogen gas is adsorbed is 3.60×104 to 8.20×104 (cm−1·m2/g), and when a nuclear magnetic resonance signal of a spin-spin relaxation process observed by a solid echo method is represented by a sum of a first signal and a second signal having a time constant larger than that of the first signal, an amount of hydrogen represented by a signal intensity per unit mass at time 0 of the first signal is 50.0 to 250.0 (/g).

IPC Classes  ?

6.

Sintered metal friction material

      
Application Number 16476652
Grant Number 11644076
Status In Force
Filing Date 2017-11-16
First Publication Date 2021-02-11
Grant Date 2023-05-09
Owner TOKAI CARBON CO., LTD. (Japan)
Inventor
  • Yasuda, Makoto
  • Kinomura, Takuya

Abstract

The present invention provides a sintered metal friction material that has excellent wear resistance, heat resistance even at high load and has a higher friction coefficient while maintaining a friction coefficient and wear resistance that are hard to decrease, and has a reduced content of copper of less than 5 mass %. There is provided a sintered metal friction material characterized in that the sintered metal friction material comprises a sintered material of a friction material composition, the friction material composition comprises matrix metals and a friction modifier, the matrix metals comprise following 20 to 40 mass % of iron powder, 20 to 40 mass % of nickel powder, 0.5 to 10 mass % of zinc powder, 0.5 to 5 mass, of tin powder, 0.5 to 4 mass % of copper powder and 0.5 to 5 mass % of sintering assist powder.

IPC Classes  ?

  • F16D 69/02 - Composition of linings
  • B22F 7/04 - Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting of composite layers with one or more layers not made from powder, e.g. made from solid metal
  • B22F 9/08 - Making metallic powder or suspensions thereof; Apparatus or devices specially adapted therefor using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying
  • B22F 9/30 - Making metallic powder or suspensions thereof; Apparatus or devices specially adapted therefor using chemical processes with decomposition of metal compounds, e.g. by pyrolysis
  • C22C 1/05 - Mixtures of metal powder with non-metallic powder
  • C22C 38/00 - Ferrous alloys, e.g. steel alloys
  • C22C 38/08 - Ferrous alloys, e.g. steel alloys containing nickel
  • C22C 38/16 - Ferrous alloys, e.g. steel alloys containing copper

7.

Carbon black, method for producing carbon black, and rubber composition

      
Application Number 15999830
Grant Number 11203691
Status In Force
Filing Date 2016-04-07
First Publication Date 2021-01-21
Grant Date 2021-12-21
Owner TOKAI CARBON CO., LTD. (Japan)
Inventor Kurisu, Kengo

Abstract

It is intended to provide a carbon black which can confer reinforcing properties and low exothermicity, which are usually incompatible, as well as excellent abrasion resistance, when mixed with a rubber component, and is suitable for tire tread rubber that is used particularly under severe driving conditions. 2.

IPC Classes  ?

8.

Negative electrode material for lithium-ion secondary battery and method for producing negative electrode material for lithium-ion secondary battery

      
Application Number 16955340
Grant Number 11646406
Status In Force
Filing Date 2018-12-19
First Publication Date 2021-01-21
Grant Date 2023-05-09
Owner TOKAI CARBON CO., LTD. (Japan)
Inventor
  • Yamazaki, Toshiki
  • Masuda, Yoshiho

Abstract

10, and a crystallite size Lc (004) within a predetermined range, and the proportion of the graphite particle spherical aggregates in which the largest flat graphite particle observed on the outermost surface has a circle equivalent diameter of 2 μm to 12 μm in graphite particle spherical aggregates having a circle equivalent diameter of 10 μm or more when observed by SEM is 80% or more.

IPC Classes  ?

  • H01M 4/133 - Electrodes based on carbonaceous material, e.g. graphite-intercalation compounds or CFx
  • H01M 4/04 - Processes of manufacture in general
  • H01M 4/1393 - Processes of manufacture of electrodes based on carbonaceous material, e.g. graphite-intercalation compounds or CFx
  • H01M 4/587 - Carbonaceous material, e.g. graphite-intercalation compounds or CFx for inserting or intercalating light metals
  • H01M 10/0525 - Rocking-chair batteries, i.e. batteries with lithium insertion or intercalation in both electrodes; Lithium-ion batteries
  • H01M 4/02 - Electrodes composed of, or comprising, active material

9.

Method for producing oxidized carbon black aqueous dispersion, and method for producing oxidized carbon black aqueous dispersion for inkjet ink

      
Application Number 15547244
Grant Number 10927262
Status In Force
Filing Date 2016-01-20
First Publication Date 2018-01-25
Grant Date 2021-02-23
Owner TOKAI CARBON CO., LTD. (Japan)
Inventor
  • Sakoda, Takuya
  • Sato, Yoshihiro

Abstract

Provided is a method for easily producing an oxidized carbon black aqueous dispersion that can highly remove multivalent metal ions and exhibit excellent dispersion stability. A method for producing an oxidized carbon black aqueous dispersion by successively performing on an aqueous slurry of oxidized carbon black having one or more anionic functional groups on a surface thereof a neutralization step of mixing an alkali metal hydroxide and performing heating/neutralization in the presence of one or more selected from a water-soluble chelating agent and a salt thereof or after mixing an alkali metal hydroxide and performing heating/neutralization, mixing one or more selected from a water-soluble chelating agent and a salt thereof and a separation and removal step of separating and removing a multivalent metal ion chelate complex from a mixed solution obtained at the neutralization step using a separation membrane.

IPC Classes  ?

  • C09C 1/56 - Treatment of carbon black
  • B41J 2/01 - Ink jet
  • C09D 11/324 - Pigment inks containing carbon black
  • B41M 5/00 - Duplicating or marking methods; Sheet materials for use therein
  • C09D 17/00 - Pigment pastes, e.g. for mixing in paints

10.

Carbon black, method for producing carbon black, and rubber composition

      
Application Number 14906324
Grant Number 09914835
Status In Force
Filing Date 2013-07-24
First Publication Date 2016-06-23
Grant Date 2018-03-13
Owner TOKAI CARBON CO., LTD. (Japan)
Inventor
  • Tsuruta, Masashi
  • Akahane, Takeshi
  • Uchiyama, Hiroki

Abstract

Carbon black is used as a component of a rubber composition, ensures that the resulting rubber exhibits improved processability, is reinforced in an improved manner, and exhibits low heat buildup, and may suitably be used for a rubber member (e.g., tire tread) and the like for which high abrasion resistance is required. The carbon black includes primary particles having an average particle size of 15 to 35 nm, and forms aggregates having a Stokes mode diameter measured using a centrifugal sedimentation method of 140 to 180 nm, and having a spherical shape when observed using a transmission electron microscope.

IPC Classes  ?

  • C09C 1/48 - Carbon black
  • C08K 3/04 - Carbon
  • B60C 1/00 - Tyres characterised by the chemical composition or the physical arrangement or mixture of the composition
  • B01J 8/18 - Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles
  • B01J 8/24 - Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles according to "fluidised-bed" technique

11.

Process for manufacturing graphite powder for lithium secondary battery negative electrode material

      
Application Number 14438097
Grant Number 10308511
Status In Force
Filing Date 2013-07-23
First Publication Date 2015-09-10
Grant Date 2019-06-04
Owner TOKAI CARBON CO., LTD. (Japan)
Inventor
  • Yamamoto, Kazuhiro
  • Komoriya, Mayuri
  • Yamaki, Motohiro
  • Fukugawa, Tomohito
  • Kuroyanagi, Akihiro

Abstract

A method for easily producing a graphite powder for use as a lithium secondary battery negative electrode material with small specific surface area while reducing energy consumption, and achieving high graphitization efficiency, includes melt-mixing a coke powder and a carbon precursor binder so that an amount of fixed carbon included in the carbon precursor binder is 5 to 15 parts by mass based on 100 parts by mass of the coke powder, to prepare a mixture, and pressing the mixture to prepare a compact, the coke powder being obtained by heating a green coke powder at 600 to 1450° C. in a non-oxidizing atmosphere, the green coke powder having a cumulative particle size at 50% in a volumetric cumulative particle size distribution of 5 to 50 μm; heating the compact in a non-oxidizing atmosphere to effect carbonization and graphitization to obtain a graphitized compact; and grinding the graphitized compact.

IPC Classes  ?

  • C01B 35/00 - Boron; Compounds thereof
  • C01B 31/04 - Graphite
  • H01M 4/587 - Carbonaceous material, e.g. graphite-intercalation compounds or CFx for inserting or intercalating light metals
  • C04B 35/52 - Shaped ceramic products characterised by their composition; Ceramic compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxides based on carbon, e.g. graphite
  • C04B 35/532 - Shaped ceramic products characterised by their composition; Ceramic compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxides based on carbon, e.g. graphite obtained from carbonaceous particles with or without other non-organic components containing a carbonisable binder
  • H01M 10/0525 - Rocking-chair batteries, i.e. batteries with lithium insertion or intercalation in both electrodes; Lithium-ion batteries
  • C01B 32/05 - Preparation or purification of carbon not covered by groups , , ,
  • C01B 32/20 - Graphite
  • H01M 10/052 - Li-accumulators
  • H01M 4/02 - Electrodes composed of, or comprising, active material

12.

SiC formed body and method for producing SiC formed body

      
Application Number 14418765
Grant Number 09975779
Status In Force
Filing Date 2012-09-13
First Publication Date 2015-06-04
Grant Date 2018-05-22
Owner TOKAI CARBON CO., LTD. (Japan)
Inventor
  • Sugihara, Takaomi
  • Asakura, Masaaki
  • Tokunaga, Takeshi
  • Sadaki, Tetsuya

Abstract

A CVD-SiC formed body has low light transmittance and high resistivity, and may suitably be used as a member for an etcher that is used for a semiconductor production process, for example. The SiC formed body is formed using a CVD method, and includes 1 to 30 mass ppm of boron atoms, and more than 100 mass ppm and 1000 mass ppm or less of nitrogen atoms. The SiC formed body preferably has a resistivity of more than 10 Ω·cm and 100,000 Ω·cm or less, and a light transmittance at a wavelength of 950 nm of 0 to 1%.

IPC Classes  ?

  • C04B 35/565 - Shaped ceramic products characterised by their composition; Ceramic compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxides based on carbides based on silicon carbide
  • C23C 16/01 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (CVD) processes on temporary substrates, e.g. on substrates subsequently removed by etching
  • C23C 16/32 - Carbides
  • C01B 31/36 - Carbides of silicon or boron
  • C01B 32/956 - Silicon carbide

13.

Method for producing aqueous dispersion of surface-treated carbon black particles and aqueous dispersion of surface-treated carbon black particles

      
Application Number 13982444
Grant Number 08709147
Status In Force
Filing Date 2012-03-09
First Publication Date 2014-01-02
Grant Date 2014-04-29
Owner Tokai Carbon Co., Ltd. (Japan)
Inventor
  • Sekiyama, Makoto
  • Saitoh, Tetsuya
  • Kirino, Tomoaki

Abstract

3/100 g or more, neutralizing 5% or more and less than 50% of the acidic hydroxyl groups with a polyvalent cation, and neutralizing the remainder of the acidic hydroxyl groups with a monovalent cation.

IPC Classes  ?

14.

Carbon black, method for producing carbon black, and rubber composition

      
Application Number 13576449
Grant Number 09145482
Status In Force
Filing Date 2011-02-01
First Publication Date 2013-01-31
Grant Date 2015-09-29
Owner TOKAI CARBON CO., LTD. (Japan)
Inventor
  • Harada, Ryusuke
  • Akahane, Takeshi

Abstract

Carbon black includes primary particles having an average particle size of 15 to 40 nm, microprotrusions having an average length of 2 to 10 nm being formed on a surface of the primary particles. A method for producing carbon black includes introducing an oxygen-containing gas and fuel into a fuel combustion zone, mixing and combusting the oxygen-containing gas and the fuel to produce a high-temperature combusted gas stream, introducing a raw material hydrocarbon in a first stage of a raw material introduction zone and introducing the raw material hydrocarbon and an oxygen-containing gas in a second stage of the raw material introduction zone while introducing the high-temperature combusted gas stream into the raw material introduction zone to produce a carbon black-containing gas which is introduced into a reaction termination zone while spraying a coolant.

IPC Classes  ?

15.

Preparation method for aqueous polyurethane resin-pigment dispersion, aqueous polyurethane resin-pigment dispersion, and ink composition

      
Application Number 13390445
Grant Number 08497317
Status In Force
Filing Date 2010-09-01
First Publication Date 2012-07-26
Grant Date 2013-07-30
Owner Tokai Carbon Co., Ltd. (Japan)
Inventor
  • Sekiyama, Makoto
  • Tanaka, Shigehiro

Abstract

A method of producing a polyurethane resin-bonded pigment aqueous dispersion includes causing (I) a pigment having a surface acidic group to come in contact with (II) a basic compound having two or more amino groups selected from a primary amino group and a secondary amino group in its molecule in an aqueous medium so that the pigment has an unreacted surface amino group, and causing the pigment to come in contact and react with (III) a polyurethane resin having an isocyanate end group. A polyurethane resin-bonded pigment aqueous dispersion produced by the method exhibits excellent image density, dispersibility, and storage stability.

IPC Classes  ?

  • C08G 18/08 - Processes
  • C08L 75/00 - Compositions of polyureas or polyurethanes; Compositions of derivatives of such polymers
  • C08K 5/01 - Hydrocarbons
  • C08L 53/00 - Compositions of block copolymers containing at least one sequence of a polymer obtained by reactions only involving carbon-to-carbon unsaturated bonds; Compositions of derivatives of such polymers

16.

Process for producing dispersion of surface-treated carbon black powder, and process for producing surface-treated carbon black powder

      
Application Number 13384532
Grant Number 08728432
Status In Force
Filing Date 2010-07-09
First Publication Date 2012-07-05
Grant Date 2014-05-20
Owner Tokai Carbon Co., Ltd. (Japan)
Inventor
  • Arai, Hironori
  • Maeda, Masanobu

Abstract

A method of producing a surface-treated carbon black powder dispersion includes subjecting carbon black fine particles having a volume average particle size of 100 nm to 20 μm to wet granulation and drying by heating to obtain granulated carbon black having a hardness of 12 cN or less and a pH of less than 7, grinding the granulated carbon black to obtain a ground product having a volume average particle size of 20 nm to 20 μm, and subjecting the ground product to wet oxidization in an aqueous medium. The resulting surface-treated carbon black powder dispersion exhibits excellent print density, print quality, discharge stability, and storage stability when used as an inkjet printer aqueous black ink.

IPC Classes  ?

17.

Negative electrode material for lithium ion secondary battery and method for producing the same

      
Application Number 12311675
Grant Number 08153303
Status In Force
Filing Date 2007-11-08
First Publication Date 2010-01-28
Grant Date 2012-04-10
Owner Tokai Carbon Co., Ltd. (Japan)
Inventor Ishii, Kenta

Abstract

A negative electrode material for lithium ion secondary batteries includes core-shell composite particles prepared by covering the surface of a graphite powder with an amorphous carbon powder via a carbide of binder pitch, the graphite powder having an average particle diameter of 5 to 30 μm and an average lattice spacing d(002) of less than 0.3360 nm, and the amorphous carbon powder having an average particle diameter of 0.05 to 2 μm and an average lattice spacing d(002) of 0.3360 nm or more. A method to produce the negative electrode material includes mixing a graphite powder with pitch having a softening point of 70 to 250° C., adding an amorphous carbon powder to the resulting product, kneading the mixture while applying a mechanical impact to soften the pitch and carbonizing the pitch by heat treatment of the mixture at 750 to 2250° C. in a non-oxidizing atmosphere.

IPC Classes  ?

  • H01M 4/38 - Selection of substances as active materials, active masses, active liquids of elements or alloys

18.

Semiconductor processing

      
Application Number 12384015
Grant Number 09490157
Status In Force
Filing Date 2009-03-31
First Publication Date 2009-08-06
Grant Date 2016-11-08
Owner TOKAI CARBON CO., LTD. (Japan)
Inventor
  • Goela, Jitendra S.
  • Pickering, Michael A.
  • Fahey, James T.
  • Strickland, Melinda S.

Abstract

Semiconductor processing and equipment are disclosed. The semiconductor equipment and processing provide semiconductor wafers with reduced defects.

IPC Classes  ?

  • B24B 37/04 - Lapping machines or devices; Accessories designed for working plane surfaces
  • H01L 21/687 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
  • C23C 16/34 - Nitrides
  • C23C 16/458 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (CVD) processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
  • C30B 25/12 - Substrate holders or susceptors
  • H01L 21/673 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components using specially adapted carriers

19.

Semiconductor processing

      
Application Number 11607632
Grant Number 07589025
Status In Force
Filing Date 2006-12-01
First Publication Date 2007-06-07
Grant Date 2009-09-15
Owner TOKAI CARBON CO., LTD. (Japan)
Inventor
  • Goela, Jitendra S.
  • Brese, Nathaniel E.
  • Pickering, Michael A.

Abstract

Methods are disclosed for providing reduced particle generating silicon carbide. The silicon carbide articles may be used as component parts in apparatus used to process semiconductor wafers. The reduced particle generation during semiconductor processing reduces contamination on semiconductor wafers thus increasing their yield.

IPC Classes  ?

  • H01L 21/4763 - Deposition of non-insulating-, e.g. conductive-, resistive-, layers on insulating layers; After-treatment of these layers

20.

Semiconductor processing

      
Application Number 11544223
Grant Number 07722441
Status In Force
Filing Date 2006-10-06
First Publication Date 2007-04-19
Grant Date 2010-05-25
Owner TOKAI CARBON CO., LTD. (Japan)
Inventor
  • Goela, Jitendra S.
  • Pickering, Michael A.
  • Fahey, James T.
  • Strickland, Melinda S.

Abstract

Semiconductor processing and equipment are disclosed. The semiconductor equipment and processing provide semiconductor wafers with reduced defects.

IPC Classes  ?

  • B24B 1/00 - Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes

21.

Low resistivity silicon carbide

      
Application Number 10872746
Grant Number 07927915
Status In Force
Filing Date 2004-06-21
First Publication Date 2004-11-18
Grant Date 2011-04-19
Owner TOKAI CARBON CO., LTD. (Japan)
Inventor
  • Goela, Jitendra S.
  • Pickering, Michael A.

Abstract

An opaque, low resistivity silicon carbide and a method of making the opaque, low resistivity silicon carbide. The opaque, low resistivity silicon carbide is doped with a sufficient amount of nitrogen to provide the desired properties of the silicon carbide. The opaque, low resistivity silicon carbide is a free-standing bulk material that may be machined to form furniture used for holding semi-conductor wafers during processing of the wafers. The opaque, low resistivity silicon carbide is opaque at wavelengths of light where semi-conductor wafers are processed. Such opaqueness provides for improved semi-conductor wafer manufacturing. Edge rings fashioned from the opaque, low resistivity silicon carbide can be employed in RTP chambers.

IPC Classes  ?

  • H01L 21/00 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

22.

Opaque low resistivity silicon carbide

      
Application Number 10000975
Grant Number 08202621
Status In Force
Filing Date 2001-10-24
First Publication Date 2003-03-27
Grant Date 2012-06-19
Owner TOKAI CARBON CO., LTD. (Japan)
Inventor
  • Pickering, Michael A.
  • Goela, Jitendra S.

Abstract

An opaque, low resistivity silicon carbide and a method of making the opaque, low resistivity silicon carbide. The opaque, low resistivity silicon carbide is a free-standing bulk material that may be machined to form furniture used for holding semi-conductor wafers during processing of the wafers. The opaque, low resistivity silicon carbide is opaque at wavelengths of light where semi-conductor wafers are processed. Such opaqueness provides for improved semi-conductor wafer manufacturing. Edge rings fashioned from the opaque, low resistivity silicon carbide can be employed in RTP chambers.

IPC Classes  ?

  • B32B 9/04 - Layered products essentially comprising a particular substance not covered by groups comprising such substance as the main or only constituent of a layer, next to another layer of a specific substance