Goods & Services

(1) Computer software and hardware for use in sensing, monitoring, and analyzing various solid, liquid and gaseous contaminants; software and hardware for counting contaminant particles; software and hardware for monitoring polishing and planarization slurries; software and hardware for continuous monitoring of hydrogen peroxide concentrations; cleanliness testing stations comprised in part of computer hardware, computer software, or computer peripherals. (1) Installation, maintenance and repair services, namely, installation, maintenance and repair of computer hardware for: sensing, monitoring, and analyzing various solid, liquid and gaseous contaminants. (2) Education and training services, namely, offering training programs and seminars tailored to the operation, maintenance, repair and calibration of systems for: sensing, monitoring, and analyzing various solid, liquid and gaseous contaminants. (3) Installation, maintenance and repair services, namely, installation, maintenance and repair of computer software for: sensing, monitoring, and analyzing various solid, liquid and gaseous contaminants; sensing, monitoring, and analyzing hydrogen peroxide concentrations; counting contaminant particles; monitoring polishing and planarization slurries; and cleanliness testing; development of computer programs for manufacturing process characterization and design relating to contaminants, cleanliness, and hydrogen peroxide concentrations; development of computer programs for trouble shooting of manufacturing processes relating to contaminants, cleanliness, and hydrogen peroxide concentrations; development of computer programs for design of product validity procedures, testing methods and techniques related to contaminants, cleanliness, and hydrogen peroxide concentrations; development of computer programs for manufacturing site surveys related to contaminants, cleanliness, and hydrogen peroxide concentrations; development of computer programs for on-site testing for contaminants, cleanliness, and hydrogen peroxide concentrations; development of computer programs for microcontamination testing services; development of computer programs for laboratory testing for contaminants, cleanliness and hydrogen peroxide concentrations; sensing, monitoring, and analyzing hydrogen peroxide concentrations; counting contaminant particles; monitoring polishing and planarization slurries; and cleanliness testing; sensing, monitoring, and analyzing hydrogen peroxide concentrations; counting contaminant particles; monitoring polishing and planarization slurries; and cleanliness testing.

Goods & Services

(1) Particle detectors for detecting airborne particles; biological detectors for detecting airborne biological organisms; instrumentation, namely, particle detectors for detecting, counting, sizing and combinations of detecting, counting, and sizing of contaminant particles and biological organisms, namely airborne autofluorescent particles and inert particles; real-time particle monitors for airborne contaminants and biologics, namely real-time inert particle monitors and real-time biological monitors; biofluorescent particle (BFP) detection systems measuring auto-fluorescent units (AFU).