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B81B 1/00
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Devices without movable or flexible elements, e.g. microcapillary devices |
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B81B 3/00
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Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes |
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B81B 5/00
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Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements |
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B81B 7/00
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Microstructural systems |
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B81B 7/02
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Microstructural systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems (MEMS) |
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B81B 7/04
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Networks or arrays of similar microstructural devices |
